3Flex Service Manual
Vacuum Subsystem
Aug 2013
2-13
Vacuum Subsystem
The vacuum sybsystem includes a turbo (high vacuum) pump, roughing/backing pump (located
externally), and the plumbing required to connect them to the analysis and gas inlet subsystems. This
includes a pneumatic valve connecting the gas inlet manifold to the vacuum system.
The turbo pump is mounted inside the instrument cabinet just below the upper cabinet base plate. It is
connected to the vacuum gauge, and gas inlet manifold with 1/2-in. tubing. A fan provides cooling air
across the turbo and vents out the back panel.
Right-click on the
Vacuum
icon (on instrument schematic) to view details of the turbo pump (you
must be in Service Test mode). For example, if you suspect the vacuum is not as good as it should be,
information in this dialog could help you to determine if it is the pump or not. The pump reading
should be 1498 to 1500 rps.
Turbo pump
Gas Inlets
Six more
inlets added
here when
Chemi option
is installed.
Vacuum gauge
