GA 05.145/3.02 - 02/2001
Description
The pump connection cable is fixed and ready to
connect to the TURBO.DRIVE S frequency converter.
1.2 Standard equipment
The components of the pump are given in the ordering
matrix in Chapter 1.3.1 for each catalog number.
The pumps are shipped sealed in a PE bag with a desic-
cant to absorb moisture.The maximum useful life of the
desiccant is one year.
The forevacuum flange is blank-flanged with centering
ring with FPM sealing ring and a clamping yoke.
The high-vacuum connection elements and the splinter
guard are not part of the standard equipment.
A suitable DC coupling for the power supply is included:
In the case of pumps with integrated frequency conver-
ter it is supplied with the pump, in the case of pumps with
a separate frequency converter it is supplied with the fre-
quency converter.
————————————
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150
°
C (302
°
F)
3
1.1 Design
The pumps comprise essentially the pump housing, a
multi-stage rotor with the stator group, and the drive.
The first section of the rotor is a turbomolecular pump
rotor while the second tile represents a Holweck stage.
The Holweck pumping stage increases the permissible
forevacuum pressure level markedly when compared
with the classic turbomolecular pump.
The rotor shaft runs in two ceramic ball bearings, lubri-
cated with grease.
The pump is driven by a split-cage DC motor. In this
motor the rotor and stator windings are separated by a
vacuum-tight can. Consequently the rotor runs inside
the vacuum while the stator is outside the vacuum. This
eliminates any need of vacuum feedthroughs.
The pump is equipped with a temperature sensor and a
resistor code.
Water cooling or an air cooling fan is available as optio-
nal equipment.
The intake flange should be fitted with a wire mesh splin-
ter guard to protect the pump against mechanical dama-
ge caused by foreign objects.
A plastic vacuum hose can be fitted directly to the fore-
vacuum flange using a new high-vacuum tight port
fitting, or a DN 16 KF flange is available.
Fig. 1 Section through a TURBOVAC TW 70 H
High-vacuum flange
Rotor turbo stage
Stator
Bearing
Rotor Holweck stage
Motor
Bearing
Forevacuum connection
