TURBOVAC TW 70 H
Wide-Range TurbomolecularPump with Integrated or ExternalFrequency Converter
Operating Instructions
GA 05.145/3.02
Vacuum Solutions
Application Support
Service
LEYBOLD VACUUM
Страница 1: ...TURBOVAC TW 70 H Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Operating Instructions GA 05 145 3 02 Vacuum Solutions Application Support Service LEYBOLD VACUUM...
Страница 2: ...ese operating instructions The illustrations are approximations 1 Description The TURBOVAC TW 70 H is a wide range turbomolecu lar pump designed to evacuate vacuum chambers down to pressure levels in...
Страница 3: ...th the stator group and the drive The first section of the rotor is a turbomolecular pump rotor while the second tile represents a Holweck stage The Holweck pumping stage increases the permissible for...
Страница 4: ...quency converter without frequency converter 4 with mounted frequency converter TURBO DRIVE S with RS 485 interface 5 with RS 232 interface 6 with Profibus interface 7 without interface 8 Description...
Страница 5: ...pump frequency converter TD Pump cable 1 0 m long 152 47 2 5 m long 864 49 3 0 m long 864 40 5 0 m long 864 50 DC Cable 3 m 200 12 732 5 m 200 12 733 10 m 200 12 735 20 m 200 12 734 Power supply SITO...
Страница 6: ...fitting to pumps without forced cooling Flange heater only for pumps with CF flange DN 63 CF 230 V 854 04 DN 63 CF 110 V 854 07 DN 40 CF 230 V 853 97 Copper gasket rings for CF flange Set of 10 piece...
Страница 7: ...URBO DRIVE S 3 0 kg Pump with TURBO DRIVE S and air cooler 3 2 kg Pump with TURBO DRIVE S and water cooler 3 3 kg Recommended forevacuum pumps TRIVAC D 2 5 E Diaphragm pump DIVAC 0 8 T Operating speed...
Страница 8: ...ISO K flange no forced cooling DN 16 KF forevacuum connection without frequency converter 26 26 2 95 123 63 71 64 101 150 Catalog Number 800002V1234 TW 70 H with DN 63 ISO K flange air cooling DN 16 K...
Страница 9: ...111 75 105 123 156 240 Catalog Number 800002V1435 TW 70 H with DN 63 ISO K flange water cooling DN 16 KF forevacuum connection with frequency converter TURBO DRIVE S 123 DN 63 ISO K 95 148 71 64 50 5...
Страница 10: ...Type of protection IP 20 Weight approx 0 7 kg RS 232 485 interface 19 200 Baud Address for RS 485 0 15 Parity even Response delay time 2 19 ms Default 10 ms 1 4 3 Power supply SITOP Power 10 AC input...
Страница 11: ...50 100 23 23 5 34 5 18 1 63 8 DRIVE X3 24 V DC X4 RS485 X5 REMOTE X1 ERROR POWER STATUS 14 5 TURBO DRIVE S HEAT SINK HEAT SINK HEAT SINK HEAT SINK Fig 4 Dimensional drawing for the TURBO DRIVE S with...
Страница 12: ...n the pump can become so hot that there is a danger of burns up to approx 80 C 176 F Provide protection against contact with the hot components 2 1 Operating environment The maximum permissible ambien...
Страница 13: ...sonance damper is available for mounting at the high vacuum flange Detach the shipping flange from the high vacuum flange and remove the desiccant Pay attention to scrupulous cleanliness when making t...
Страница 14: ...circlip and the appropriate gasket may be used to connect the pump A collar flange is required when using ultra vacuum sea ling gaskets The order numbers for the flange components are given in the Le...
Страница 15: ...react with air or humidity Figure 13 is a schematic diagram of a pump system incorporating a turbomolecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve must...
Страница 16: ...16 GA 05 145 3 02 02 2001 C 50 40 30 20 10 0 l h 5 10 15 20 25 30 35 40 60 Fig 10 Cooling water requirements Cooling water flow Cooling water temperature Fig 9 Pump with water cooling Cooling water c...
Страница 17: ...ts 250 mg l Particle size 150 m pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Further information on request Connecting the cooling water Screw on t...
Страница 18: ...ular pump system Legend for Fig 13 1 Turbomolecular pump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 High vacuum valve 8 Valve in the roughing p...
Страница 19: ...DC cable max 5 m DC cable with shielding max 20 m Mains Power supply TURBOVAC with integrated frequency converter without forced cooling TURBOVAC with integrated frequency converter with water coolin...
Страница 20: ...of a separate frequency con verter Connect the pump to the frequency converter using a suitable connecting cable 15 way Sub D plug X3 Connect the Sub D plugs with the hexagon threaded bolts UNC 4 40x...
Страница 21: ...nverter can be mounted into a rack The bottom side of the frequency converter must be coo led sufficiently If the frequency converter is installed without the optio nal cooling fins adequate cooling m...
Страница 22: ...6 5 4 3 2 1 9 Pin assignment of the connector 12 V 10 k 5 V 10 k 10 k TURBO DRIVE S 8 7 6 Pin assignment for the Start Stop input Switching threshold for the Start Stop con trol input Low level 3 V H...
Страница 23: ...off Pump is decelerating Stop yes yes no off passive passive flashes off Just after stop pump was in the normal operating mode before that Start no no no on passive passive off off Just after start St...
Страница 24: ...Actual converter Nominal value for supply voltage 18 30 V U16 r TURBO DRIVE S 24V 5 Actual motor current 0 60 0 1A U16 r 7 Actual motor Measured coil temperature for the motor temperature 0 150 C U16...
Страница 25: ...pump s drive until reaching the normal operation level P24 P25 36 Start delay time 0 255 0 1 min 0 U16 r w Pause time after the Start command until the pump s drive is started 125 Current bearing temp...
Страница 26: ...rror codes for parameter P171 Code Type of error Description of the error 0 No error 1 Overspeed error Nominal speed of the pump P 18 has been exceeded by over 10 2 Pass through time error Max pass th...
Страница 27: ...ee Section 2 6 4 For the power supply units offered or recommended by Leybold If the contacts 7 and 8 at the REMOTE X1 connector are closed the pump starts automatically when the DC voltage is switche...
Страница 28: ...is not operating ensure that neither ambient air nor cleaning media can enter the pump If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency con ver...
Страница 29: ...use gloves a respirator and or protective clothing and work under an exhaust hood Disconnect the pump only when it has come to a full stop The green LED at the frequency converter must have gone out T...
Страница 30: ...pump is contaminated or is free of sub stances which could pose a health hazard If it is conta minated specify exactly which substances are involved You must use the form we have prepared for this pu...
Страница 31: ...4 V DC cable to the frequency converter Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error...
Страница 32: ...xchange it if required TURBO DRIVE S integrated in the pump See corrective action for error code 3 7 Inadequate cooling of the pump operation at too high loads Separate TURBO DRIVE S Improve the cooli...
Страница 33: ...otocol error Use USS protocol No RS 485 communication Connect bus as shown in Section 2 6 REMOTE connector X1 connected Connect as shown in Fig 20 wrongly Rotor out of balance Have the rotor balanced...
Страница 34: ...ery At the same time we herewith certify conformity with EEC Directive on Low Voltages 73 23 EWG When using the appropriate Leybold accessories e g connector lines valves or fans the protection level...
Страница 35: ...cable to every instal led state in every end product This declaration does not the refore guarantee the EMC characteristics of the end product We herewith declare sole responsibility for the product 1...
Страница 36: ...the finished product final unit machine or plant by the manu facturer of the finished unit machine or plant We herewith declare sole responsibility for the product 1 Product Inverter 2 Manufacturer In...
Страница 37: ...ipment and components which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and...
Страница 38: ...e 498 Bayenthal D 50968 Cologne Tel 49 221 347 0 Fax 49 221 347 1250 http www leyboldvac de e mail documentation leyboldvac de AMCL_03357_2001 PG 02 01 Printed in Germany on chlorine free bleached pap...
