Description
Contents
Page
1
Description . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.1 Standard equipment . . . . . . . . . . . . . . . . . . . 15
1.2 Order data . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . 15
2
Connections . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.1 Operating environment . . . . . . . . . . . . . . . . . 17
2.2 Connecting the pump to
the vacuum chamber . . . . . . . . . . . . . . . . . . 17
2.3 Making the forevacuum connection . . . . . . . . 18
2.4 Connecting the cooling . . . . . . . . . . . . . . . . . 19
2.5 Connecting the purge gas and
the airing device . . . . . . . . . . . . . . . . . . . . . . 19
2.6 Connecting the
TURBOTRONIK
. . . . . . . . . . . 20
2.7 Connecting the rotor bearing monitoring unit . 20
3
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.3 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.4 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.5 Removing the pump from the system . . . . . . 22
4
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.1 Service by Leybold . . . . . . . . . . . . . . . . . . . . 23
5
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . 24
EC Manufacturer’s Declaration . . . . . . . . . . . 25
Die deutsche Gebrauchsanleitung beginnt
auf Seite 2
Conventions used in these instructions
Illustrations
The references to diagrams, e.g. (2/10), consist of the figure
number and the item number, in that order.
Warning
This indicates procedures and operations which must be strict-
ly observed to prevent hazards to persons.
Caution
This indicates procedures and operations which must be strict-
ly observed to prevent damage to or destruction of the unit.
We reserve the right to change at any time the design and data
given in these operating instructions.
The illustrations are approximate.
1 Description
The
TURBOVAC
1100 C is a turbomolecular pump fea-
turing grease-lubricated bearings. It is engineered to
pump vacuum chambers down to pressures in the high-
vacuum range.
A TURBOTRONIK
frequency converter
and a forevacuum pump are required for the operation of
the
TURBOVAC
.
These units are not suitable for operation without a fore-
vacuum pump.
The TURBOVAC 1100 C is equipped with a type Turbo
Guard 3 rotor bearing monitoring device featuring an
operating hours counter.
Compatibility with pumped media
Turbomolecular pumps are not suitable for pumping
either gases which contain dust particles or liquids.
Turbomolecular pumps without purge gas are suitable
only for moving air or inert gases. They are not suitable
for pumping reactive gases or gases which contain par-
ticles; in this case purge gas operation is required.
TURBOVAC
versions identified with a “C” in the model
number are equipped with a purge gas feature, it pro-
tects only the bearing area and the motor in the
TURBO-
VAC
.
Some media (such as aluminum trichloride) can sublime
inside the pump and form deposits. Thick deposits re-
duce the play between moving parts to the point that the
pump could seize. In some processes deposits can be
prevented by heating the pump. Please consult with us
in case such problems arise.
Corrosive gases (such as chlorine) can destroy the
rotors.
During operation the pressure inside the
TURBOVAC
is
so low that there is no danger of ignition (at pressures
below about 100 mbar, 75 Torr). A hazardous condition
will be created if flammable mixtures enter the hot pump
at pressures above 100 mbar (75 Torr). During operati-
on the pump can reach temperatures as high as 120
°
C
(248
°
F). Sparks could occur in case of damage to the
pump and these could ignite explosive mixtures.
We would be glad to consult with you as regards the
media which can safely be handled with this unit.
Warning
Never expose any parts of the body to the
vacuum.
14
GA 05.128/7 - 05/2002
