Installation
27
300324726_002_C0 - 10/2016 - © Leybold
The turbomolecular pump runs low in vibration and noise. No vibrations or
resonances from outside equipment may be allowed to be transferred to the
turbomolecular pump.
The turbomolecular pump is sensitive to low-frequency vibrations.
The flange material to which the pump is bolted, must have at operating tem-
perature a minimum strength specification of 150 N/mm
2
.
If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Leybold Application Support.
The standard pump fixing is sufficient for earthquake protection. If required fix
the system to the bottom or to the walls. Depending on the chamber’s
weight and fixing use the boreholes in the pump’s bottom in addition.
In case of an earthquake (strong vibrations) the pump switches off automati-
cally.
We recommend installing an isolation valve between the pump and the
chamber. The valve should be closed during wet cleans of the chamber and
in case of pump failures which will lead to a pump shut down. The valve
should normally be closed with power off.
Vibration influence
Earthquake protection
Isolation valve
Richtig
Falsch
Fig. 3.2 Fixing to the system
Correct
Wrong
