Installation
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300324726_002_C0 - 10/2016 - © Leybold
3 Installation
3.1 Conforming utilization
The turbomolecular pump is intended for generating a vacuum. It is suited for
non-corrosive processes only.
The turbomolecular pump must be bolted to a rigid vacuum system and con-
nected to a suitable backing pump.
The turbomolecular pump must only be operated with correspondingly speci-
fied frequency converters, the special connecting cables and mounting bolts.
Both pump and frequency converter are intended for being operated within
closed rooms.
The use of any accessories which have not been specified by Leybold is only
allowed after approval by Leybold.
The supplied integrated MAG.DRIVE iM frequency converter will be required
for the operation of the turbomolecular pump.
3.1.1 Non-conforming utilization
Non-conforming utilizations for both pump and frequency converter are
among others:
■
Pumping of gases and vapours for which the materials of the pump are
unsuitable.
■
Pumping of toxic gases
■
Operation in connection with processes in which GaAs (gallium arsenide) is
being pumped.
■
Pumping of gas mixtures with an oxygen content of > 21%.
■
Pumping of corrosive gases
■
Pumping of dust containing gases without purge gas operation.
■
Pumping of condensable vapours without suitably controlling the tempera-
ture of the pump. Upon compression within the pump, these vapours may
condense or form deposits.
■
Pumping of dusts and solids without the use of suitable screens and filters.
■
Operation at an inadmissibly high forevacuum pressure.
■
Operation at inadmissibily high gas loads.
■
Utilization of both pump and frequency converter in explosion hazard
areas.
■
Non-compliance of the specified maintenance and servicing intervals for
both pump and frequency converter.
■
Operation of the pump and drive electronics in environments which
demand protection type IP 54 or higher and where the installation site is
over 1000 m the above sea level.
