MAG integra
Turbomolecular Pumps with Magnetic Bearing and Frequency Converter
Installation & Operating Instructions 300324726_002_C0
Part Nos.
411300Vxxxx
411600Vxxxx
411700Vxxxx
412200Vxxxx
and pumps modified by Leybold
Страница 1: ...ra Turbomolecular Pumps with Magnetic Bearing and Frequency Converter Installation Operating Instructions 300324726_002_C0 Part Nos 411300Vxxxx 411600Vxxxx 411700Vxxxx 412200Vxxxx and pumps modified b...
Страница 2: ...2 Supplied equipment 12 1 3 Technical data 13 1 4 Ordering data 20 1 5 Accessories 21 2 Transport and storing 22 3 Installation 23 3 1 Conforming utilization 23 3 1 1 Non conforming utilization 23 3 2...
Страница 3: ...Interfaces 38 4 3 Switching on 39 4 4 Operation 39 4 5 Switching off 40 4 6 Venting 41 4 7 Removing the pump from the system 42 5 Maintenance 43 5 1 Cleaning 43 5 2 Changing the touch down bearings 44...
Страница 4: ...er ated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance quest...
Страница 5: ...proper flanging to the vacuum chamber Observe the informa tion in Section 3 3 7 We recommend to change the rotor after 80 000 hours of operation or 20 000 cycles at the latest Due to high speed and t...
Страница 6: ...arts inside Should even so changes be made to the pump frequency converter system then a trained electrician as specified by the standard EN 50110 1 for example must perform an electrical safety test...
Страница 7: ...ilter 4 If low concentration corrosive or reactive gases are being pumped then operate the pump with purge gas 5 Please consult us as to which types of pump are required for specific processes and app...
Страница 8: ...w about 100 mbar A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar During operation the pump can reach temperatures as high as 120 C internally...
Страница 9: ...ting of the pump 5 The interface connectors have UNC 4 40 threads Do not use connec tors with M3 treads 6 Disconnect and connect the cable connections only while the pump is turning no longer green st...
Страница 10: ...er is integrated into the pump for the MAG iP models The MAG DRIVE electronic frequency converter The MAG DRIVE iM frequency converter is connected to the mains It outputs an AC voltage synchronised t...
Страница 11: ...pacts occur during operation They are only used in case of strong shocks or faulty electronics When interrupting the power supply voltage the turbomolecular pump will operate as a generator supplying...
Страница 12: ...ibus or another optional interface see Section 4 2 an interface for the Leybold Service RS 232 and three connections for accessories e g valves 1 2 Supplied equipment The pumps are shipped sealed in a...
Страница 13: ...2 Ar mbar 4 1 4 2 5 Nominal speed 37 800 min 1 33 000 min 1 33 000 min 1 30 600 min 1 Stand by speed to be set between 13 800 min 1 230 Hz and nominal speed Ultimate pressure ISO F CF flange 10 8 mbar...
Страница 14: ...ximum 750 VA at ultimate pressure 150 VA Max load capability of the relays interface X1 optional 32 V 0 5 A for SELV or PELV power circuits only Max load for each valve output 24 VDC 0 35 A Temperatur...
Страница 15: ...400 600 800 1000 1200 1400 1600 1800 2000 l s Saugverm gen mbar 10 2 10 3 10 4 10 5 10 6 10 1 Hochvakuumdruck MAG W 1300 Argon Stickstoff Helium Wasserstoff 2200 Fig 1 3 Pumping speed curves and oper...
Страница 16: ...ruck MAG W 1600 Helium Argon Stickstoff Wasserstoff 2200 mbar 10 2 10 3 10 4 10 1 Vorvakuumdruck 10 1 100 1 10 0 1 mbar l s Durchfluss Stickstoff MAG W 1600 Argon Fig 1 4 Pumping speed curves and oper...
Страница 17: ...ruck MAG W 1700 Helium Wasserstoff Argon Stickstoff mbar 10 2 10 3 10 4 10 1 Vorvakuumdruck 10 1 100 1 10 0 1 mbar l s Durchfluss Stickstoff Argon MAG W 1700 2200 Fig 1 5 Pumping speed curves and oper...
Страница 18: ...10 3 10 4 10 5 10 6 10 1 Hochvakuumdruck MAG W 2200 Wasserstoff Stickstoff Helium Stickstoff MAG W 2200 Argon 200 400 600 800 1200 1400 1600 1800 2200 Argon Fig 1 6 Pumping speed curves and operation...
Страница 19: ...201 42 140 0 15 241 200 CF 254 285 335 472 307 307 416 32 164 0 250 ISO F 335 317 325 463 335 331 374 442 39 154 0 14 259 250 CF 305 317 330 467 335 322 432 29 173 0 9 285 250 ISO F 335 349 355 492 34...
Страница 20: ...0V0704 411600V0714 MAG W 1700 iP DN 250 ISO F 411700V0504 411700V0514 MAG W 1700 iP DN 250 CF 411700V0506 411700V0516 MAG W 1700 iPL DN 250 ISO F 411700V0704 411700V0714 MAG W 1700 iPL DN 250 CF 41170...
Страница 21: ...r DN 200 3 sets required for DN 250 4 sets Copper gasket rings for CF flange DN 200 Set of 10 pieces 839 47 DN 250 Set of 5 pieces 839 48 Set of hex screws with nuts screws and washers for CF flange D...
Страница 22: ...a sealed PE bag with desiccant Do not open the sealed package until immediately before installing Do not remove the covers and blanking flanges until you are ready to make the connections to ensure t...
Страница 23: ...ncy converter are among others Pumping of gases and vapours for which the materials of the pump are unsuitable Pumping of toxic gases Operation in connection with processes in which GaAs gallium arsen...
Страница 24: ...em or system components locks or movable pump systems for example Operation at vibration absorbers and vacuum components gate valves valves which are not capable of sustaining the specified decelerati...
Страница 25: ...nge must be solidly mounted to the vacuum chamber Observe Safety Information 0 1 6 The shipping flange and bolts may be used only for shipping purposes they are not suitable for mounting the pumps in...
Страница 26: ...frequency converter can be detached from the pump However this must only be done by an expert trained by Leybold For this consult with us Mount the turbomolecular pump as close as possible to the vac...
Страница 27: ...ce between the pumps If such a risk exists please contact Leybold Application Support The standard pump fixing is sufficient for earthquake protection If required fix the system to the bottom or to th...
Страница 28: ...t surfaces of pump housing vacuum system and centering ring must be free of grease and dry so as to ensure adequate strength in case the rotor should seize Flange mounting for CF flanges Before fittin...
Страница 29: ...m 35 mm DN 200 250 ISO F 12 bolts M10 x 50 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength 1080 N mm2 Nut ISO F flange Vacuum sealing d...
Страница 30: ...rmation 0 4 6 Fig 3 6 shows schematically the design of a pump sys tem incorporating a turbomolecular pump turbomolecular pump and a TRIVAC backing pump with integral anti suckback valve When using a...
Страница 31: ...er lines fastening torque 8 to 10 Nm Adjust the cooling water temperature so that the formation of condensate is avoided Turn off the cooling water supply before venting the turbomolecular pump and wh...
Страница 32: ...5 C Inlet pressure max 6 bar Cooling water requirement 60 l h 3 5 1 Water Quality In order to ensure long trouble free operation the cooling water must not contain any oils greases and suspended solid...
Страница 33: ...d water can be used for cooling the pump if the pH value corresponds to the range indicated above 30 C 45 40 35 30 25 20 C 20 50 100 90 70 80 60 30 40 5 10 15 20 25 Minimum coolant inlet temperature a...
Страница 34: ...vent port ensures that the pump is not vented too fast When having to decide which gases need or not need to be pumped with purge gas we are available to provide assistance Refer to Section 4 1 for su...
Страница 35: ...all cables so as to protect them from damage Plug in the mains cable Refer to Fig 3 12 for the mains plug connection In order to comply with the standard SEMI S2 install an additional mains power circ...
Страница 36: ...Just after start Start yes no no on passive passive flashes off Pump is accelerating Start yes yes no on active passive green off Pump is in the normal operating mode Stop no no yes off passive active...
Страница 37: ...nctions 8 7 6 5 4 3 2 1 9 Pin assignment of the connector 5 3 4 n c n o com 2 9 1 n c n o com Relay Normal operation standard setting While deceleration acceleration Stop 4 connected to 5 as shown pas...
Страница 38: ...midity should not exceed 10 ppm The gas must be clean In individual cases and after consultation also dry filtered oil free air or fil tered ambient air may be used filter mesh 1 m Change the filters...
Страница 39: ...een evacuated The pressure surge can press against the rotor into the limiting bearing causing accelerated wear at that bearing 4 4 Operation The magnetic bearing in the MAG are immune to wear In addi...
Страница 40: ...eing on Switch off the forevacuum pump When using oil sealed forevacuum pumps vent the turbomolecular pump before it comes to a stop refer to Section 4 6 When using TRIVAC pumps the built in anti suck...
Страница 41: ...When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure...
Страница 42: ...stop The green LED at the frequency converter must have gone out Then switch the mains power off and wait until the yellow power LED is off Then only disconnect any cable connections Drain out the co...
Страница 43: ...or at high ambient temperatures the aforementioned mainte nance work should be carried forward Please consult Leybold for recom mendations Observe Safety information 0 1 7 Depending on the degree of c...
Страница 44: ...ent is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpo...
Страница 45: ...Check the forevacuum pump and use a different forevacuum pump if necessary Seal leak install a higher capacity vacuum pump if necessary Repair the pump Install additional water cooling or reduce throu...
Страница 46: ...or replace the sensors Check for leaks Clean the pump Check the ultimate pressure of the back ing pump and install a higher capacity vacuum pump if necessary Check parameters Operator Maintenance sta...
Страница 47: ...47 300324726_002_C0 10 2016 Leybold EC Incorporation Declaration...
Страница 48: ...48 300324726_002_C0 10 2016 Leybold EC Declaration of Conformity...
Страница 49: ...nents are in compliance to the tested standards Test Report No 31480039 001 Certificate No CU 72140054 01 The T V Rheinland of North America is a Nationally Recognized Testing Laboratory NRTL for the...
Страница 50: ...reVacuum Pumps Application Process B Condition of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed a...
Страница 51: ...Notes 51 300324726_002_C0 10 2016 Leybold...
Страница 52: ...eybold com Spain Leybold Spain S A C Huelva 7 E 08940 Cornell de Llobregat Barcelona Sales T 34 93 666 43 11 F 34 93 666 43 70 sales ba leybold com Service T 34 93 666 46 11 F 34 93 685 43 70 service...
