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Installation

33

GA 05.141/6.02 - 07/2003

Fig. 24  Connection elements, installing the splinter guard and fixing the intake flange for the MAG W 3200 CT with VG 350 JIS flange

Forevacuum flange

Purge gas
valve

Purge gas in

Intake flange

DRIVE/BEARING
connection

Pk
connection

TMS
connection

Heater

Cooling water
connection

10 bolts M12 x 40

Installation torque per bolt: 45

+5

Nm

Bolt quality:12.9 according to DIN 898 with coating

0,2% yield strength > 1080 N/mm

2

Max. pump torque 65 kNm

MAG W 3200 CT with VG 350 JIS

420 mm

318 mm

17.5 mm

40 mm

1 Housing
2 Splinter guard
3 Ring

Содержание 400000V0001

Страница 1: ...CT MAG W 1500 C CT MAG W 2200 C MAG W 2800 C CT MAG W 3200 CT Turbomolecular Pump with Magnetic Bearing MAG DRIVE digital Electronic Frequency Converter Operating Instructions Vacuum Solutions Applic...

Страница 2: ...59 4 3 5 Menu Set Pump 61 4 3 6 Menu Set TMS 61 4 3 7 Menu Set Purge Vent 61 4 3 8 Total view of the menu 62 4 4 Temperature Management System 64 4 5 Power control system PCS 65 5 Maintenance 66 5 1 C...

Страница 3: ...Description 3 GA 05 141 6 02 07 2003 MAG W 1500 C MAG 1500 CT MAG W 1500 CT MAG W 2200 C MAG W 2800 CT MAG W 3200 CT Fig 1 MAG turbopumps MAG W 830 C MAG W 1300 C...

Страница 4: ...ump temperature They are prepared for use in medium to harsh corrosive applications The pumps are available with 2 different rotors MAG version Turbo pump MAG W version Turbo pump stages and an active...

Страница 5: ...ely cause the pump to seize These deposits can also react with moisture and generate corrosive gases e g HCl This can beco me very critical when the pump is exposed to air Depo sits can be avoided in...

Страница 6: ...i gital frequency converter It also handles the automatic monitoring of these systems The pump is equipped with a data storage device which stores the important operating parameters during the complet...

Страница 7: ...GA 05 141 6 02 07 2003 Description 7 Fig 3 Section of a MAG Wide range rotor Standard rotor...

Страница 8: ...Line supply cable with EURO connector approx 3 m 2 spare fuses for the TMS miniature fuses 5 x 20 mm F4A according to IEC 127 2 1 and 2 fuse hol ders 6 3 x 30 mm Connector for control plug X14 pins 47...

Страница 9: ...ption 9 Fig 4 Front panel X14 Connection control plug X19 Mains connection X20 Connection magnetic bearing pump motor memory chip X21 Connection TMS purge gas valve X22 Network connection optional Fig...

Страница 10: ...fitting for tube mm 6 6 Cooling water temperature C 10 to 30 F 50 to 86 Weight approx kg 32 High vacuum connection flange DN 160 ISO F 200 ISO F 250 ISO F Max high vacuum flange temperature for conti...

Страница 11: ...gelok elbow for tube OD mm 6 4 1 4 Cooling water temperature C 10 to 30 F 50 to 86 Base flange temperature C 20 to 90 F 68 to 194 Weight approx kg 32 High vacuum connection flange DN 200 ISO F 200 ISO...

Страница 12: ...4 1 4 6 4 1 4 6 4 1 4 with stainless steel hose nipples for tube ID 1 2 1 2 Cooling water temperature C 10 to 30 F 50 to 86 Base flange temperature C 20 to 80 F 68 to 176 Weight kg 48 48 64 65 66 High...

Страница 13: ...dance with EN 61010 Weight 10 kg 0 500 1000 1500 2000 2500 3000 3500 1 00E 04 1 00E 03 1 00E 02 1 00E 01 Inlet pressure mbar Pumping speed l s MAG W 3200 DN 320 MAG W 830 DN 160 MAG W 1300 1500 DN 250...

Страница 14: ...O F 40 KF VCR nut 1 4 yes Swagelock 1 4 tube yes no 400026V0001 MAG W 1500 CT 200 ISO F 40 KF VCR nut 1 4 yes Swagelock 1 4 tube yes yes 400026V0002 MAG W 1500 CT 250 ISO F 40 KF VCR nut 1 4 yes Swage...

Страница 15: ...07 901 Seal Kit DN 320 standard on request Seal Kit DN 350 JIS standard on request MAG DRIVEdigital converter 400035V0001 Plug in control 121 36 Connecting cables converter pump see Fig 7 19 installa...

Страница 16: ...m bended 225 straight straight 400036V0002 20 m bended 225 straight straight 400036V0003 23 m bended 225 straight straight 400036V0012 30 m bended 225 straight straight 400036V0011 Cable TMS only for...

Страница 17: ...122 4 198 3 3 Each Fuse 4 A Fig 9 Standard fixing of the MAG DRIVEdigital START STOP Com Status Main X7 Fuses TMS MAG D RIVE Each Fuse 4 A 19 installation frame 4 x M3 screws straight plugs bended plu...

Страница 18: ...7 8 3 85 243 M8 G x F 3 6 0 B C E 1 1 F Fig 10 MAG W 830 C and MAG W 1300 C Dimensions in mm MAG W 830 C MAG W 1300 C Inlet flange A B C D E F G Forevacuum connection MAG W 830 C 160 ISO F 225 200 151...

Страница 19: ...2 07 2003 6 0 9 32 3 7 0 159 1 5 0 1 1 260 1 5 3 0 3 6 0 3 0 12x A B 16 C 175 164 5 200 231 279 296 307 262 DN 40 KF Fig 11 MAG 1500 C Dimensions in mm MAG W 1500 C Inlet flange A B C 200 ISO F 285 26...

Страница 20: ...5 107 11 29 76 H 84 118 262 1 5 0 159 182 60 9 32 3 7 0 3 0 105 6 0 243 116 5 26 M8 15 mm deep Heatband 285 1 1 B G E 3 6 0 E Dx DN 40 KF C Inlet flange A B C D E G H 200 ISO F 285 260 213 12 30 15 3...

Страница 21: ...3 85 5 78 23 B 164 6 317 A 4 5 199 DN 40 8 39 36 5 R155 R 1 1 7 R 1 2 0 3 6 C 1 2 x 3 0 3 6 0 1 5 3 0 1 1 3 D 25 Fig 13 MAG W 2200 C Dimensions in mm MAG W 2200 C Inlet flange A B C D 200 ISO F 285 39...

Страница 22: ...3 6 0 B 1 5 3 0 E D DN 40 F G H 199 C B A 369 176 353 84 196 5 Fig 14 MAG 2800 CT and MAG 3200 CT Dimensions in mm MAG W 2800 CT MAG W 3200 CT Inlet flange A B C D E F G H 250 ISO F 335 310 261 11 3 2...

Страница 23: ...isplayed at the fre quency converter see Sectiont 4 3 2 Only the Leybold service can change the rotor Please keep this Operating Instruction for future reference 2 Installation 2 1 General safety info...

Страница 24: ...below the pump while connecting or remo ving the MAG The MAG is shipped in a sealed PE bag with desiccant Do not open the sealed package until immediately befo re installing Do not remove the covers...

Страница 25: ...ion PK connection Cooling water connection Correct Wrong 35 mm 17 mm 8 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to DIN 898 with coating 0 2 yield strength 1080 N...

Страница 26: ...ter connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to DIN 898 with coating 0 2 yield strength 1080 N mm2 Max pump torque 40 kNm MAG W 1300 C DN 200 260 m...

Страница 27: ...tion Cooling water connection Correct Wrong DN 200 260 mm DN 250 310 mm DN 200 213 mm DN 250 261 mm 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to DIN 898 with c...

Страница 28: ...Heater Cooling water connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to DIN 898 with coating 0 2 yield strength 1080 N mm2 Max pump torque 40 kNm MAG W 15...

Страница 29: ...lt 25 5 Nm Bolt quality 10 9 according to DIN 898 with coating 0 2 yield strength 900 N mm2 Max pump torque 40 kNm MAG W 1500 CT with CF and JIS intake flange Correct Wrong Caution Install the splinte...

Страница 30: ...urge gas in Intake flange DRIVE BEARING connection PK connection Cooling water connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to DIN 898 with coating 0 2...

Страница 31: ...Purge gas valve Purge gas in Intake flange DRIVE BEARING connection Pk connection TMS connection Heater Cooling water connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12...

Страница 32: ...ange Purge gas valve Purge gas in Intake flange DRIVE BEARING connection Pk connection TMS connection Heater Cooling water connection 10 bolts M12 x 40 Installation torque per bolt 45 5 Nm Bolt qualit...

Страница 33: ...nge Purge gas valve Purge gas in Intake flange DRIVE BEARING connection Pk connection TMS connection Heater Cooling water connection 10 bolts M12 x 40 Installation torque per bolt 45 5 Nm Bolt quality...

Страница 34: ...mp must be securely attached If the pump should suddenly seize inadequate attachment could cause the pump to break away or allow internal pump parts to be dis charged Never operate the pump in bench t...

Страница 35: ...arthquake protection fix the pump as shown in Fig 16 to 24 Depending on the chamber s weight and fixing use the boreholes in the pump s bottom in additi on The standard fixing for the converter is sho...

Страница 36: ...ommended to protect the MAG from shock venting in case of uncontrolled shut down of the backing pump This valve must be able to close fast enough to avoid pressure increase in the MAG In case of an oi...

Страница 37: ...oling water Cooling water out in 1 4 6 4 mm MAG W 1500 2800 3200 Do not mix up the inlet and the outlet MAG W 2200 C Stainless steel hose nipples 1 2 John Guest fitting for hoses 6 mm outer dia MAG W...

Страница 38: ...300 250 200 150 120 100 50 0 l h Operation window 0 1 2 3 4 5 bar 400 350 300 250 200 150 100 50 0 l h MAG W 1500 2800 3200 CT Bypass operation All pumps Cooling Flow Temperature Flow Differential pre...

Страница 39: ...ectrical conductivity 500 S cm pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Further information on request Connect the cooling water to the connect...

Страница 40: ...nd dust from entering the motor and bearing area Refer to Figure 31 for details on the design and function of the purge gas and vent valve assembly Attach the purge gas hose to the nipple and secure w...

Страница 41: ...ound the choke when the pump is to be vented Choke capillary Purge gas valve shown open Sintered metal filter Pressure regulator Purge gas e g N 2 Ar or dry air Forevacuum port LEDs light when the val...

Страница 42: ...n connection X24 using the DRIVE BEA RING cable Installation 42 GA 05 141 6 02 07 2003 2 8 Installing the MAG DRIVEdigital The converter can be installed in a 19 cabinet It is 1 2 of 19 wide and has 3...

Страница 43: ...used and the connecting cable must be pro tected against line supply voltage through double or rein forced insulation such that no hazardous contact line supply voltage can be applied to pins 47 and...

Страница 44: ...S DRIVE BEARING X24 X23 X30 X19 X14 X20 X21 MAINS Control plug DRIVE BEARING X24 X23 Pumps with TMS Pumps without TMS X19 X14 X20 X21 MAINS Control plug X19 X14 X20 X21 MAINS Control plug DRIVE BEARIN...

Страница 45: ...Analog output Analog output The converter has an analog output which provides an analog signal 0 10 V with a 10 bit resolution The ana log output function can be alternatively used to output motor cu...

Страница 46: ...X14 38 Function analog input 2 Analog input 2 Frequency setpoint X14 16 Analog input 1 Analog input 1 X14 32 33 Analog ground X14 35 X14 19 X14 2 Actual frequency Normal operation Start command appli...

Страница 47: ...hold Threshold Motor or bearing temperature Motor current Act frequency Function signal relay Function analog output Analog output Analog ground Scale No cooling water No purge gas TMS temp o k Relay...

Страница 48: ...s has neither an influence on the pump nor on the process Warning Monitor the purge gas supply continuously Insufficient purge gas flow can result in Process gases entering the motor and bearing area...

Страница 49: ...eration 49 GA 05 141 6 02 07 2003 103 Forevacuum pressure mbar 102 101 100 10 1 10 2 10 3 Fig 40 Curve for safe venting of the MAG pressure rise as a function of venting time 0 10 20 30 40 50 60 Time...

Страница 50: ...come to a standstill Close the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump The backing pump may be switched off once the MAG has stopped If th...

Страница 51: ...ot connected Start Stop via the operator control panel Jumper X14 11 X14 10 Start Stop via control input X14 12 0 1 P12 0 1 2 S R Q Q 1 s 0 1 2 1 1 START REMOTE 15 V X14 11 X14 12 X14 10 P36 1 X14 48...

Страница 52: ...diplayed until the frequency setpoint has been rea ched Then Normal Operation 1 0 A 600 Hz is displayed Switching off The MAG DRIVEdigital controls the venting automatically provided purge gas is conn...

Страница 53: ...parameter value or proceeds to the next option Lowers a parameter value or returns to the previous option Selects the programming menu from the operating display Switches back to the last main menu Se...

Страница 54: ...cy setpoint Overload The speed is continuously monitored and controlled If the speed even at maximum current cannot be held at the setpoint as a result of external influences e g excessive gas intake...

Страница 55: ...time START command Mains ok Frequency P 25 x P24 Mains failure Mains failure Frequency P25 x P24 Frequency P25 x P24 Mains failure STOP command If a failure occurs the pump is decelerated Frequency 5...

Страница 56: ...placement in the actual value r magnetic bearing axis Z12 Power Power consumption of the drive actual value W r Analog Input 1 Analog Input Channel 1 0 100 0 actual value r Input range 0 10 V Displ 0...

Страница 57: ...e pump actual value r 99999999999 Pump Ser No Serial No of the pump actual value r 99999999999 Pump Name Pump name type actual value r MAG W 1500 CT Pump Op Hours Operation hours of the pump actual va...

Страница 58: ...saving 20 failure events 0 19 in chrono logical order Index 0 represents the most recent and index 19 the oldest failure event Operating the Up Down keys lets you step through the index range 0 19 Ope...

Страница 59: ...Analog Out Signal choice Analog Out 0 10 V Setting of the selected parameters 0 1023 125 r w on for the analog output Definition UAna_out ParaCurrent ParaMax Value Scale factor 10 V For more informat...

Страница 60: ...8 Start Command Start command is applied 9 Power supply OK Power supply OK 10 Mains down Power supply breakdown Table B Parameters for the analog output Typical parameter numbers Parameter Descriptio...

Страница 61: ...item Description Adjustable value option Ac cess min max stan Unit value value dard Purge Vent The operator can select one purge OFF r w on of the beside standing purge ON options for purge and vent...

Страница 62: ...W Rev 6 55 35 Enter Conv Op Hours 167772 16 Enter Pump Cat No 99999999999 Enter Pump Serial No 99999999999 Enter Conv SR SW Rev 6 55 35 Conv AMB Data R 1 01 Enter Pump Name MAG W 1500 CT Enter Conv AM...

Страница 63: ...e failure has been removed only possible if the user is in the operating display Increases a parameter value or proceeds to the next option Lowers a parameter value or returns to the previous option S...

Страница 64: ...equest Leybold For the setting refer to 4 3 6 Operating menu Set TMS Heat up The setpoint temperature will be reached within 30 to 60 minutes depending on cooling and environmental condi tions For tem...

Страница 65: ...ode Heater ON Cooling ON Warning Signal TMS OK TTMS TA Fig 46 Typical function diagram TMS for the MAG DRIVEdigital 4 5 Power control system PCS only for MAG W 1500 2200 2800 3200 For safety reasons m...

Страница 66: ...p will have a full run down on the touch down bearing Only the Leybold service can change the touch down bearings 5 4 Cleaning the frequency converter internally Depending on the installation site the...

Страница 67: ...ance 67 GA 05 141 6 02 07 2003 Fig 47 Sealing the MAG tightly ring nut 2x aluminum cover plastic adhesive film washer 6x screw 6x nut 4x plastic cap plastic adhesive film dry cartridge Cap screw with...

Страница 68: ...ection flange as necessary for good adhesion of tape Place the dry cartridge into the forevacuum port Don t use loose crystals Firmly seal all ports with plastic adhesive film Cover the forevacuum con...

Страница 69: ...07 2003 Fig 48 Sealing the MAG tightly with the metal seal kit bolts collar flange retaining ring blank flange Centering ring with O ring desiccant clamping ring blank flange screw cap with O ring po...

Страница 70: ...a rack max ambient temperature 45 C Apply cooling water according to specificati ons Check cooling water tubes for deposits See also Section 2 6 Apply cooling water according to specificati ons Check...

Страница 71: ...i on Contact Leybold service Reduce backing pressure Additionally check process gas flow Set parameter Normal Operation to default 95 Refer also to Section 4 3 5 Reconnect converter to the mains Switc...

Страница 72: ...cooling water according to specifications Check cooling water tubes for deposits See also Section 2 6 Contact Leybold service Apply cooling water according to specifications Check cooling water tubes...

Страница 73: ...heck the chamber pressure during the operation Refer to Section 3 1 for correct venting of the pump Contact Leybold service Reduce backing pressure Check if the rotor rotates freely Contact Leybold se...

Страница 74: ...of failure Motor Temp Contact Leybold service if the resistance of the sensor is less than 1 62 k Contact Leybold service Acknowledge failure message If failure per sists contact Leybold service Conta...

Страница 75: ...cted to the pump The resistance is typically between 70 and 75 Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values now Contact Leybold service Check t...

Страница 76: ...Temp open Sensor loop is interrupted Cooling Temp open Sensor loop is interrupted AMB Not Initial Converter can not identify the pump SPI Com Fail Communication problem bet ween main controller and m...

Страница 77: ...can be heard Foreline pressure drops while the valve is closed Set purge flow according to specification Open and close purge gas and venting valve via control plug X14 LED on the valve must light up...

Страница 78: ...ibed in the EMC Guidelines will be attained Designation Turbomolecular pump Models MAG W 830 MAG W 1300 C MAG W 1500 C T MAG W 2200 C MAG W 2800 C T MAG W 3200 CT Part numbers 400000Vxxxx 400003Vxxxx...

Страница 79: ...allation into an end product The test results are not applicable to every instal led state in every end product This declaration does not the refore guarantee the EMC characteristics of the end produc...

Страница 80: ...moun ted assembled state An EMC check must thus be made for the finished product final unit machine or plant by the manu facturer of the finished unit machine or plant We herewith declare sole respons...

Страница 81: ...93 Semi S2 0200 used standards SEMI S2 0200 UL 3111 UL 3101 EU Low Voltage Directive EU Machinery Directive EU EMC Directive The components are in compliance to the tested stan dards NRTL Report No U...

Страница 82: ...ctive yes no other harmful substances yes no Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances Please list all substances gases and by prod...

Страница 83: ...r Turbopump Serial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced Yes No If yes replacement pump P N replacement pump S N Date Installed Date Removed Date...

Страница 84: ...ons Conv SR 3 02 18 and Conv AMB 1 01 02 GA 05 141 3 02 English July 2000 MAG 1500 C CT MAG W 1500 C CT MAG W 1900 C MAG W 2800 CT MAG W 3200 CT MAG DRIVEdigital GA 05 141 4 02 English November 2000 O...

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