- 3 -
Pressure sensor head: Characteristic tables of pressure and output
0
10 20 30 40 50 60 70 80 90 101.3
Pressure (kPa)
Output (V)
0.0
1.0
2.0
3.0
4.0
5.0
●MSU-PH-EA-
□
−100
−50
50
100
150
200
0
220
Pressure (kPa)
Output (V)
3.75
0.0
1.0
2.0
3.0
4.0
5.0
●MSU-PH-ER-
□
−100 0
100 200 300 400 500 600 700 800 900 1000
Pressure (kPa)
Output (V)
4.64
0.0
1.0
2.0
3.0
4.0
5.0
●MSU-PH-EM-
□
5. Exterior view and names of parts
5.1 Exterior view of the controller
No communication/RS-232C communication specification
5
30
32
8.3
27.6
2.65
Address setting (0 to F)
Note 1
Sensor connector
RS-485 communication connector
Power, switch output connector
Power, switch output,
(RS-232C communication) connector
Sensor connector
M2.6 × 6 (Depth 6)
40
40
MSU
kPa
mL/min
L/min
1
2
3
4
SW
CH
C B
789
A
45
6
0123
DE
F
MSU
kPa
mL/min
L/min
1
2
3
4
SW
CH
RS-485 communication specification
5
30
32
8.3
27.6
2.65
Address setting (0 to F)
Note 1
Sensor connector
RS-485 communication connector
Power, switch output connector
Power, switch output,
(RS-232C communication) connector
Sensor connector
M2.6 × 6 (Depth 6)
40
40
MSU
kPa
mL/min
L/min
1
2
3
4
SW
CH
C B
789
A
45
6
0123
DE
F
MSU
kPa
mL/min
L/min
1
2
3
4
SW
CH
Note 1: The diagram shows when the address is 0.