Appendix B: Calibration
Series 2600B System SourceMeter® Instrument Reference Manual
B-14
2600BS-901-01 Rev. B / May 2013
Model 2634B/2635B/2636B current measurement accuracy 100 pA to 100 nA
ranges
A suitably guarded and characterized 1 G
Ω
resistance standard, such as the Keithley
Instruments Model 2600-STD-RES, is necessary for the following measurements. Step-by-step
procedures and connection diagrams for verifying the current measurement accuracy for the low
current ranges are included with the Model 2600-STD-RES. The general process entails forcing a
characterized voltage across the 1 G
Ω
resistor and comparing the Model 2634B/2635B/2636B
measured results against the standard resistance and voltage derived current.
1. Characterize the appropriate ±V source values with the DMM according to the following table.
Model 2634B/2635B/2636B Characterization of Voltage Source settings
Low Current Range
Voltage Source
Compliance
100 pA*
±90.000 mV
1.5 A
1 nA
±0.90000 V
1.5 A
10 nA
±9.0000 V
1.5 A
100 nA
±90.000 V
100 mA
* Not available on the Model 2634B.
2. Characterize the desired Model 2634B/2635B/2636B current ranges.
a. Connect guarded resistance standard.
b. Source the appropriate voltage for +/- full-scale reading.
c. Wait 30 seconds for stable measurement.
d. Capture the Model 2634B/2635B/2636B reported current measurement.
e. Verify output current accuracy for each of the currents for the 100 pA to 100 nA ranges listed in
the following table.
Model 2634B/2635B/2636B current measurement accuracy limits (100 pA to 100 nA)
Measure range
Source current
2
Current reading limits (1 year,
18 °C to 28 °C)
100 pA
1
90.000 pA
89.785 pA to 90.215 pA
1 nA
0.90000 nA
0.89841 nA to 0.90159 nA
10 nA
9.0000 nA
8.9835 nA to 9.0165 nA
100 nA
90.000 nA
89.906 nA to 90.094 nA
1. Not available on the Model 2634B.
2. As measured by precision digital multimeter. Use closest possible value, and modify reading limits
accordingly if necessary. See
Measurement limit calculations
(on page B-4).
Содержание System SourceMeter 2601B
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