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In this section:

Introduction

This section contains an overview of the instruments used in S540 test systems and examples of

typical connection schemes.

For more specific information about instruments used in the S540 Power Semiconductor Test System,

refer to the documentation for each specific model:

4200A-SCS Parameter Analyzer

Series 2600B System SourceMeter

Instrument

4210-CVU Capacitance-Voltage Unit Card

4220-PGU High-Voltage Pulse-Generator Unit Card

RSA306B Signal Analyzer

707B Semiconductor Switch Matrix

2657A High-Power System SourceMeter Instrument

DMM7510 7-1/2 Digit Graphical Sampling Multimeter

Refer to the documentation that is bundled with the Keithley Test Environment (KTE) software

installation. You can also visit the Keithley Instruments website at

tek.com/keithley

to search for

updated information by model number.

Example wiring diagrams for the S540 test system are shown later in this section.

Section 5

Instrument specifications and documentation

Содержание S540

Страница 1: ...Administrative Guide S540 924 01 Rev D January 2019 PS540 924 01D S540 924 01D tek com keithley S540 Power Semiconductor Test System...

Страница 2: ...Power Semiconductor Test System Administrative Guide S540...

Страница 3: ...out the prior written approval of Keithley Instruments LLC is strictly prohibited These are the original instructions in English All Keithley Instruments product names are trademarks or registered tra...

Страница 4: ...d to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exerc...

Страница 5: ...ay invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associa...

Страница 6: ...m power dissipation 2 20 Operating environment conditions 2 20 Triaxial connector handling and avoiding contamination 2 21 Lockout and tagout 2 21 Installation and connections 2 23 Position the system...

Страница 7: ...tallation 4 5 General replacement procedure 4 6 Adjustment 4 7 Restore system power 4 7 Fuses 4 8 Power distribution and emergency off 4 9 Power distribution unit connections and power distribution ba...

Страница 8: ...er Semiconductor Test System Administrative Guide Table of contents S540 high voltage low current system using an RSA306B spectrum analyzer 5 7 S540 KTE communications 5 8 S540 ACS communications diag...

Страница 9: ...com keithley Following is a list of documentation for your system including the document part numbers S540 Power Semiconductor Test System Administrative Guide S540 924 01 S540 Power Semiconductor Tes...

Страница 10: ...Model 2657A High Power System SourceMeter instrument quantity 2 Switching matrices One Model HVM1212A 12 12 high voltage switch matrix Optional capacitance voltage C V One channel of C V using one Mo...

Страница 11: ...with two Model 4210 CVU cards Optional instruments Model DMM7510 7 1 2 Digit Graphical Sampling Multimeter quantity 0 to 1 Model 4220 PGU dual channel pulse cards quantity 0 to 3 Frequency measuremen...

Страница 12: ...ort the weight of the system while moving from receiving to the final destination see Floor plan on page 2 24 for specifications Are all of the corridors and hallways large enough to allow clearance f...

Страница 13: ...cifications Is anything connected to the same power source that generates noise Is anything that requires substantial amounts of current connected to the same power source Did you prepare power outlet...

Страница 14: ...the system Series 500 systems are shipped in a wooden crate see the following figure Figure 1 S540 system cabinet in shipping crate Unpacking system components Inspect the shock sensor on the outside...

Страница 15: ...s not been tipped over see the following figure Figure 3 S540 crate tipping indicator Carefully remove all system components from the crate While unpacking make sure there is no component damage Repor...

Страница 16: ...onents 1 Remove the crate clamps from the crate using a standard screwdriver Figure 4 Removing the crate clamps 2 Open the front of the crate The front is identified by the wooden ramp support attache...

Страница 17: ...er Semiconductor Test System Administrative Guide 2 6 S540 924 01 Rev D January 2019 Figure 5 Opening the front of the crate 4 Attach the ramp using the two bolts that are attached to the bottom front...

Страница 18: ...te preparation and installation S540 924 01 Rev D January 2019 2 7 5 Remove the padding from the front of the S540 system cabinet Figure 7 Removing the padding 6 Remove the crate clamps and slide the...

Страница 19: ...ctor Test System Administrative Guide 2 8 S540 924 01 Rev D January 2019 7 Make sure that you retract the leveling feet on the bottom of the system next to the casters to put weight on the casters and...

Страница 20: ...and installation S540 924 01 Rev D January 2019 2 9 8 Remove the four bolts from the bottom of the crate that are attached to the bottom of the S540 system cabinet using a 19 mm socket head on a socke...

Страница 21: ...ve Guide 2 10 S540 924 01 Rev D January 2019 9 Save the hardware the four bolts and washers that you remove from the bottom of the crate Figure 12 System crate hardware 10 Unlock the two casters that...

Страница 22: ...ng the system down the ramp 12 Remove the tape from the packing material using scissors taking care not to scratch the S540 system cabinet Figure 15 Cutting the wrap off the system 13 Move the S540 sy...

Страница 23: ...stallation hardware USB extension cables cable support arm connectors for the keyboard and mouse and any other accessories that may have been ordered with the system for example probe card adapter cab...

Страница 24: ...ower Semiconductor Test System Administrative Guide Section 2 S540 site preparation and installation S540 924 01 Rev D January 2019 2 13 Figure 17 Typical system accessories Figure 18 Monitor arm acce...

Страница 25: ...540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide 2 14 S540 924 01 Rev D January 2019 Figure 19 Keyboard tray and arm accessory Figure 20 Cable support ar...

Страница 26: ...ter For detailed information about the 9140A PCA probe card adapter see the 9140A PCA Probe Card Adapter Instruction Manual part number 9140A 901 01 This manual is available for download at tek com ke...

Страница 27: ...aration and installation S540 Power Semiconductor Test System Administrative Guide 2 16 S540 924 01 Rev D January 2019 Example Series 500 System Installation Form Figure 21 Example Series 500 System I...

Страница 28: ...40 Power Semiconductor Test System Administrative Guide Section 2 S540 site preparation and installation S540 924 01 Rev D January 2019 2 17 Figure 22 Example Series 500 System Installation Form page...

Страница 29: ...ction 2 S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide 2 18 S540 924 01 Rev D January 2019 Figure 23 Example Series 500 System Installation Form page...

Страница 30: ...of the system The following figure and table describe these cords Figure 24 Supplied power cables Number Description 1 20 A 125 V American 2 15 A 125 V American 3 16 A 250 V Eurostyle cord If power co...

Страница 31: ...ge to individual Series 2600B and 2657A instruments but may result in test instability For instance if you continuously source more than 1 A from all the source measure units SMUs for more than 100 se...

Страница 32: ...nation can cause current leakage in the source measure signal paths to the device under test DUT which can significantly degrade the test results Do not touch any connector pins or the areas adjacent...

Страница 33: ...hat the indicator looks like when illuminated Figure 26 Indicator showing system power is still on 1 Place the breaker for the power distribution unit PDU in the OFF position The PDU is at the back of...

Страница 34: ...el type and the two casters at the front are in fixed positions To position the system cabinet 1 Carefully roll the system cabinet to its location next to the prober allowing a minimum distance of 15...

Страница 35: ...ft of the cabinet Figure 27 S540 cabinet rear doors and cable portal You can mount cable support arms on either side of the cabinet to suspend cables off the floor and prevent a tripping hazard Floor...

Страница 36: ...plus additional room for service personnel access from the front and back of the cabinet The following figures show a top view of the floor plan and the typical S540 system cabinet weight distributio...

Страница 37: ...ble See Floor plan on page 2 24 for details about designing a floor plan for the system cabinet System cabinet size and weight Size width depth height Weight Minimum configuration Maximum configuratio...

Страница 38: ...Rev D January 2019 2 27 Physically securing the system You must bolt the S540 system cabinet to the floor for safety purposes and to ensure the cabinet will not tip over The following figure shows the...

Страница 39: ...er Semiconductor Test System Administrative Guide 2 28 S540 924 01 Rev D January 2019 The following figure shows how a floor mounting bracket is installed Keithley part numbers are included for the re...

Страница 40: ...curement The S540 system can be ordered with an advanced seismic fastening option that has been tested and certified to the standards stated in IEC 61587 2 Ed 2 0 Mechanical structures for electronic...

Страница 41: ...ifting the cabinet allows the holes in the mounting brackets to line up with the holes in the lower frame of the cabinet 4 Temporarily attach the mounting brackets to each corner with the provided scr...

Страница 42: ...8 Return the cabinet to marked locations on the floor and use the leveling legs to lift the cabinet to the proper height 9 Attach the mounting brackets to the corners with the mounting hardware provid...

Страница 43: ...Network information 3 12 Introduction All of the instruments in the equipment rack are connected to one power distribution unit PDU which is in the back of the cabinet Follow the instructions in the...

Страница 44: ...door of the system cabinet to the ON position Figure 36 S540 power ON switch System startup To start up the system 1 Make sure that the power switch on the power distribution unit PDU is set to ON 2...

Страница 45: ...are completely powered up and have finished self testing before starting the system software The S540 system includes the following system software option Keithley Test Environment KTE For more inform...

Страница 46: ...aster instrument Model 2450 during this process After the initial software installation run_ic pl initializes only the TSP Link master instrument and the other TSP instruments in the system execute th...

Страница 47: ...Suite ACS software You must have administrator rights in the ACS software to shut down the S540 system 1 Double click the Shutdown icon on the computer desktop 2 In the dialog box that opens click Ye...

Страница 48: ...cy OFF button An EMERGENCY OFF EMO button is on the system cabinet front door see the following figure If you push the EMERGENCY OFF button it removes power to all of the system instruments except the...

Страница 49: ...sure that the safety interlock and safety shields and guards are properly installed and arranged as indicated will put personnel in severe danger Severe personal injury or death due to electric shock...

Страница 50: ...ont door of the S540 cabinet illuminates and the KTE software immediately notifies you of the interlock activation Figure 41 Interlock indicator Once the interlock has been activated you must clear th...

Страница 51: ...op plate and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA the interlock is tripped Figure 42 Model 174 7047 XX Safety Interlock...

Страница 52: ...S540 systems The following diagram shows the interlock connections to the optional 9140A PCA Probe Card Adapter Figure 44 9140A PCA interlock block diagram for S540 systems For additional information...

Страница 53: ...systems a common connection for the sense low terminals of the source measure units SMUs Connections from low to sense low using a 100 k resistor to enable autosensing Prober safety Hazardous voltage...

Страница 54: ...ble using RJ 45 Supplied cables One ethernet crossover cable connects the computer to the tester One 10Base T patch cable connects to your network IP address is specified by you When setting up the co...

Страница 55: ...ction is intended only for qualified service personnel as described in Safety precautions on page 1 1 Because some of these procedures may cause exposure to hazardous voltages that could result in per...

Страница 56: ...could settle on the components Use dry nitrogen gas to clean dust off the components if necessary Handle cards only by the side edges and shields Do not touch any board surfaces components or connect...

Страница 57: ...p these parts in their original containers until ready for installation or use Remove the components from their protective containers only at a properly grounded workstation Also ground yourself with...

Страница 58: ...1 Repair and replacement Keithley Instruments offers a fee based service agreement with all S540 systems Under this agreement a field service engineer will either repair or replace equipment For more...

Страница 59: ...and installation Special handling precautions should be taken for heavy instrumentation removal and installation The following topics describe these precautions Moving instruments weighing 20 pounds t...

Страница 60: ...rame with cards installed HVM1212A High Voltage Matrix The Comp 41 system computer if located near top of the system cabinet General replacement procedure Severe personal injury or death due to electr...

Страница 61: ...rtain that all tests have stopped before making contact with anything in the vicinity of the probe card adapter Also never run tests without a probe card installed For information about instrument lev...

Страница 62: ...Rev D January 2019 7 Place the system cabinet POWER switch on the front panel door in the ON position 8 Make sure the computer is turned on 9 Start the computer and the system software Fuses Refer to...

Страница 63: ...rative Guide Section 4 Maintenance S540 924 01 Rev D January 2019 4 9 Power distribution and emergency off The following figure contains a simplified example layout of various components in the S540 s...

Страница 64: ...nfiguration Always on Three groups of four switched outlets off with EMO condition Remote connection to other 42000 PDUs through a 25 pin D sub connector Properly lockout and tagout the system before...

Страница 65: ...he EMO circuit The specific configuration is marked on the PDU rear panel To PDU box DB 25 cable connector Connector providing control of the PDU box Connect the PDU box to the EMO box with the suppli...

Страница 66: ...ystem Administrative Guide 4 12 S540 924 01 Rev D January 2019 System emergency off circuit The following figure shows a simplified schematic of the 42000 PDU power distribution unit PDU emergency off...

Страница 67: ...t KIHOME ki_setup where KIHOME ki_setup is usually opt kiS530 ki_setup 4 Go to line 33 in the file and change it to setenv COMPUTERNAME q1234 where 1234 is your QMO number 5 Reboot the computer to rei...

Страница 68: ...r of usable digits The longest amount of time provides the lowest reading noise and more usable digits but has the slowest reading rate Settings between the fastest and slowest number of PLCs are a co...

Страница 69: ...s See NPLC default differences on page 4 15 for details To set a custom default system speed mode the FSE can add the following block to the top of the icconfig_ QMO ini file example SYSTEM SPEED MODE...

Страница 70: ...Diisobutyl phthalate DIBP For more detailed information see the European Union Directive To minimize environmental impact at system end of life treat the system cables and connections and all subasse...

Страница 71: ...del 4200A SCS Parameter Analyzer Series 2600B System SourceMeter Instrument 4210 CVU Capacitance Voltage Unit Card 4220 PGU High Voltage Pulse Generator Unit Card RSA306B Signal Analyzer 707B Semicond...

Страница 72: ...Switch Matrix Mainframe Model 7531 Low Current High Speed Matrix Card The 7531 matrix card is an 8 12 low current high speed Kelvin matrix with high voltage protection up to 3 kV The S540 3000 V high...

Страница 73: ...s you to do high voltage low voltage low current and capacitance tests in a single probe touch down The following figure shows the connections on the rear panel of the HVM1212A Figure 52 HVM1212A high...

Страница 74: ...own in the following diagrams may differ from your actual system The flexibility of the S540 configuration allows for various numbers and combinations of instruments Attempting to show examples of eve...

Страница 75: ...Semiconductor Test System Administrative Guide Section 5 Instrument specifications and documentation S540 924 01 Rev D January 2019 5 5 S540 3000 V high voltage system Figure 54 S540 3000 V high volt...

Страница 76: ...ns and documentation S540 Power Semiconductor Test System Administrative Guide 5 6 S540 924 01 Rev D January 2019 S540 3000 V high voltage low current system Figure 55 Matrix connections for the 3000...

Страница 77: ...inistrative Guide Section 5 Instrument specifications and documentation S540 924 01 Rev D January 2019 5 7 S540 high voltage low current system using an RSA306B spectrum analyzer Figure 56 S540 connec...

Страница 78: ...ions The S540 KTE system uses both ethernet and GPIB to communicate with and control the instruments The following diagrams show how the instruments are connected to each other and what type of commun...

Страница 79: ...n 5 Instrument specifications and documentation S540 924 01 Rev D January 2019 5 9 S540 ACS communications diagrams The following figure shows multiple 2636B source measure units However the system on...

Страница 80: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevela...

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