Keithley 9139B-PCA, Инструкция по эксплуатации

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Model 9139B Probe Card Adapter Instructions Section 3: Installation
9139B-901-01 Rev. A / January 2019 3-9
7. Install the vacuum supply hose. Route the vacuum supply hose from the vacuum source through
the "VACUUM IN" grommet on the vacuum control box.
8. Connect the vacuum control box end of the hose to check valve PF-5 (see the previous figure).
Make sure the vacuum supply is at least 50.80 cm (20 in.) Hg.
9. Vent the vacuum control box to atmosphere (no connection required).
10. Connect the PCA safety interlock cable to the prober top plate and the PCA.
11. Connect the device under test (DUT) cables between the probe card assembly and the matrix pin
cards of the parametric test system.
Route the cables to avoid sources of electromagnetic fields, vibration, or any other mechanical
disturbance.
12. Confirm that moving parts of the prober do not contact the cables.
Information about the location of connections within your system is in the configuration drawings
for your system. The user's manuals for the system contain additional information, if required.
To install the probe card:
1. Turn the vacuum control box valve to the load/operate position.
2. Line up probe card pin 1 with the pin 1 indicator on the retainer cap (see the following figure).
Figure 12: Probe card and probe card retainer
3. Insert the probe card into probe card retainer cap.
Two alignment pins and holes are provided along the perimeter of the probe card. These holes and
pins allow proper orientation of the probe card during installation.