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Read this manual before use of product

IWAKI
Pneumatic Drive Bellows Pump

FS Series

Instruction Manual

T434-1 '03/01

( )Country codes

IWAKI CO.,LTD. 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan

TEL:(81)3 3254 2935 FAX:3 3252 8892(http://www.iwakipumps.jp)

U.S.A.

: IWAKI WALCHEM Corporation

Australia

: IWAKI Pumps Australia Pty. Ltd.

Singapore : IWAKI Singapore Pte. Ltd.
Indonesia : IWAKI Singapore (Indonesia Branch)
Malaysia

: IWAKIm Sdn. Bhd.

Taiwan

: IWAKI Pumps Taiwan Co., Ltd.

Thailand

: IWAKI (Thailand) Co.,Ltd.

Hong Kong : IWAKI Pumps Co., Ltd.
China

: GFTZ IWAKI Engineering & Trading Co., Ltd.

China

: IWAKI Pumps Co., Ltd. (Beijing office)

China

: IWAKI Pumps (Shanghai) Co., Ltd.

Philippines : IWAKI Chemical Pumps Philippines, Inc.
Korea

: IWAKI Korea Co.,Ltd.

TEL : (1)508 429 1440 FAX : 508 429 1386
TEL : (61)2 9899 2411 FAX : 2 9899 2421
TEL : (65)763 2744

FAX : 763 2372

TEL : (62)21 690 6607 FAX : 21 690 6612
TEL : (60)3 7803 8807 FAX : 3 7803 4800
TEL : (886)2 8227 6900 FAX : 2 8227 6818
TEL : (66)2 320 1303

FAX : 2 322 2477

TEL : (852)2 607 1168 FAX : 2 607 1000
TEL : (86)20 8435 0603 FAX : 20 8435 9181
TEL : (86)10 6442 7713 FAX : 10 6442 7712
TEL : (86)21 6272 7502 FAX : 21 6272 6929
TEL : (63)2 888 0245

FAX : 2 843 3096

TEL : (82)2 3474 0523 FAX : 2 3474 0221

Germany

: IWAKI EUROPE GmbH

Italy

: IWAKI Italia S.R.L.

Denmark

: IWAKI Pumper A/S

Sweden

: IWAKI Sverige AB

Finland

: IWAKI Suomi Oy

Norway

: IWAKI Norge AS

France

: IWAKI France S.A.

U.K.

: IWAKI PUMPS (UK) LTD.

Switzerland : IWAKI (Schweiz) AG
Austria

: IWAKI (Austria) GmbH

Holland

: IWAKI Holland B.V.

Spain

: IWAKI Iberica Pumps, S.A.

Belgium

: IWAKI Belgium n.v.

TEL : (49)2154 9254 0 FAX : 2154 1028
TEL : (39)02 990 3931 FAX : 02 990 42888
TEL : (45)48 24 2345

FAX : 48 24 2346

TEL : (46)8 511 72900 FAX : 8 511 72922
TEL : (358)9 2742714

FAX : 9 2742715

TEL : (47)66 81 16 60

FAX : 66 81 16 61

TEL : (33)1 69 63 33 70 FAX : 1 64 49 92 73
TEL : (44)1743 231363 FAX : 1743 366507
TEL : (41)32 3235024

FAX : 32 3226084

TEL : (43)2236 33469

FAX : 2236 33469

TEL : (31)297 241121

FAX : 297 273902

TEL : (34)943 630030

FAX : 943 628799

TEL : (32)1430 7007

FAX : 1430 7008

Содержание FS-15HT1

Страница 1: ...Read this manual before use of product IWAKI Pneumatic Drive Bellows Pump FS Series Instruction Manual...

Страница 2: ...king and Inspection 7 2 Operation Principle 7 3 Identification Codes 8 4 Specifications 8 5 Outer Dimensions Mass 9 6 Names of Parts and Structure of Pump 11 7 Description on Body and Label 13 INSTALL...

Страница 3: ...carefully to prevent accidents involving your customers or other personnel and to avoid damage or loss of other assets Always follow the instructions and advice found in these sections Observe and ab...

Страница 4: ...ge hazardous liquid including but not limited to chemical liquid over the ground or floor in the plant directly Abide by local regulations when disposing of hazardous substances Do not touch Touching...

Страница 5: ...The operator must take special precautions to avoid accidents Storage limit Do not store the pump in places where an explosive atmosphere is located dust is generated or corrosive gas such as chlorin...

Страница 6: ...be handled with care Stripper solvent type liquid hydrazine or fuming sulfuric acid should be handled carefully Air exhaust port Do not narrow the air exhaust port for example by reducing the tube di...

Страница 7: ...to both the right and left air supply ports at the same time to pre vent the bellows from becoming deformed Note for electrode There is a case which electrode could not detect leakages This comes from...

Страница 8: ...dentification Codes 8 4 Specifications 8 5 Outer Dimensions Mass 9 6 Names of Parts and Structure of Pump 11 7 Description on Body and Label 13 This section deals with operating principle type and spe...

Страница 9: ...irely of fluororesin and designed for semiconductor manufac turing processes The pump unit consists of two air chambers and a pair of bellows These bellows move reciprocally in the air chambers for su...

Страница 10: ...speed with pure water at room temperature Item FS 15HT1 T2 FS 30HT1 T2 FS 60HT1 T2 General Specification Max discharge volume Note 1 15 L min 30 L min 55 L min Max stroke speed Note 2 240 spm 220 spm...

Страница 11: ...213 166 315 10 10 96 77 84 8 74 100 120 144 15 5 100 IN OUT 2 12 7 9 52 AIR SUP 2 Rc1 4 FS 15HT Mass 6 3kg Unit mm 248 272 208 390 AIR SUP 2 Rc1 4 105 93 9 100 10 115 151 10 180 100 23 OUT IN 2 19 16...

Страница 12: ...10 287 251 441 317 AIR SUP 2 Rc3 8 152 100 127 107 11 12 194 12 100 223 27 OUT IN 2 25 22 FS 60HT Mass 21 5kg Unit mm...

Страница 13: ...ft 2 SUS304 Hard chrome plated 38 Hex nut 8 Stainless steel 12 Connecting plate 2 SUS304 39 Plate washer 8 Stainless steel 13 Connecting shaft 2 SUS304 40 Conical spring washer 24 Stainless steel 14 S...

Страница 14: ...rome plated 38 Hex nut 8 Stainless steel 12 Connecting plate 2 SUS304 39 Plate washer 8 Stainless steel 13 Connecting shaft 2 SUS304 40 Conical spring washer 24 Stainless steel 14 Shaft cover 2 SUS304...

Страница 15: ...eaning the pump be careful not to wipe the labels or the pump body with solvent IN label Air port Base Fix pump Cord Cord for proximity switch and electrode to be connected to controller Name plate Di...

Страница 16: ...tion 18 2 2 Liquid Tubing 19 2 3 Air Piping 22 2 4 Wiring 28 This Installation Section must be thoroughly understood by the user before actually installing the pump Do not start your installation work...

Страница 17: ...s above max stroke speed With FD SC or FDC 1 controller the upper limit of stroke speed can be set 2 Supply air pressure must be maintained within specified pressure range In view of pressure resistan...

Страница 18: ...simultaneous pressurization of two air chambers between valve stops 10 Do not close the secondary side air valve upon stopping the pump Caution If the secondary side air valve on the liquid line is cl...

Страница 19: ...table 2 Noise from pump Noises are generated from air exhaust or the like during pump operation Apply sound damping measures as necessary The Level of sound generated by pump is shown in the table Mo...

Страница 20: ...back to the very first step 2 1 Installation 1 Pump installation position Flooded suction system Set the pump as close to the liquid supply tank as possible Caution Employ a flooded suction system fo...

Страница 21: ...ation contact Iwaki 2 To block the entrance into the bellows of solid particles such as wafer fragments or the like install a filter or strain er on the suction pipe Select a filter or strainer which...

Страница 22: ...bstance Keep the valve open when the pump is in operation Do not close the valve until the discharge pressure reaches 0 after the pump is stopped Caution Do not close the valve before stopping the pum...

Страница 23: ...fe and efficient circulation and feeding of liquid it is necessary to carry out air elimination and take proper safety measures 2 2 3 Air elimination measures When air enters the bellows and the pump...

Страница 24: ...r elimination only when H2O2 is fed 3 Another technique is to install an air detection sensor in the suction port area so that the auto valve is automatically opened by a signal sent out from the sens...

Страница 25: ...o or more electromagnetic valves the valve located farthest from the regulator may malfunction due to insufficient delivery of pressure 2 Air piping 1 When the pump is used at supply air pressure of 0...

Страница 26: ...ger Rc 1 4 or larger Rc 3 8 or larger FS 30 FS 60 Necessary effective cross sectional area 14mm2 or larger 25mm2 or larger 66mm2 or larger Model Diameter of port FS 15 Rc 1 4 or larger Rc 1 4 or large...

Страница 27: ...o controller Air exhaust Reducing valve with filter Filter Compressor air supply source Pressure gauge Air exhaust EXH Air exhaust EXH OUT IN OUT IN Quick exhaust valve Direction of air exhaust Air pi...

Страница 28: ...romagnetic valve must be installed in correct positions so that the exhaust air is released into the open air Caution Narrowing the air exhaust port may block the air exhaust out of the pump As a resu...

Страница 29: ...2 1 S22 1 Sn2 1 S Composite effective cross section area Si Effective cross sectional area of each part Effective cross sectional area of air device air pipe See the catalog issued by each manufacture...

Страница 30: ...ged Warning A standard proximity switch cannot be used when a flammable liquid such as a solvent is used An explosion proof proximity switch must be used in the case of a flammable liquid 2 Wiring for...

Страница 31: ...port electromagnetic valve or interchange the wires of proximity switches A and B 4 Wiring for alarm output 1 Connect with terminals no 3 and 4 for the use of the detection of damaged bellows Please r...

Страница 32: ...put Electro pneumatic regulator DC 0 10V output Electro pneumatic regulator GND Your device CN 3 Leak detection input GND DC 24V output Proximity switch input R GND DC 24V output Proximity switch inpu...

Страница 33: ...ntrol the resistance value to 5k or lower including the attached lead wire about 1 8m in length Any resistance larger than 5k may result in inability to stop the pump Because detection by the auto sto...

Страница 34: ...all be limited to the range covered by and described in this instruction manual Use of the pump in a different method or procedure that is not described in this instruction manual is prohibited Iwaki...

Страница 35: ...on of the pump 7 Confirm that the filter has been well dampened Caution Follow the description in the instruction manual of the filter 2 Pump Operation During the trial run of the pump flush the unit...

Страница 36: ...w rate 3 Points to Be Observed in Operation Pay attention to the following points during operation Upon detecting any abnormal condition stop the pump immediately and refer to Causes of Trouble and Tr...

Страница 37: ...mp shall be limited to the range covered by and described in this instruction manual Handling of the pump beyond the range covered by this instruction manual is prohibited Iwaki takes no responsibilit...

Страница 38: ...pe is too narrow long f Check if suction pipe is narrowed Increased discharge pressure in liquid feeling pipe q Inspect the filter and replace it a Check filter for clogging or dry up b Check if filte...

Страница 39: ...t is insufficiently clamped q Replace pump head Tight stud bolt with rated torque Keep record of tightening torque for next periodical inspection Bellows are damaged a Check if supply air pressure is...

Страница 40: ...a and confirm there is no air leakage from the pump discharge port before restarting the pump WARNING Wear protectors Make sure to wear protective gear protective goggles cap mask etc when carrying ou...

Страница 41: ...y IWAKI FS 15 30 60HT1 Nos of dwg on page 11 Parts name Time to be replaced 1 2 4 5 Pump head unit Two years of actual running time 3 Bellows 22 Lip seal Q ty 1 2 2 Nos of dwg on page 12 Parts name Ti...

Страница 42: ...8 TEL 66 2 320 1303 FAX 2 322 2477 TEL 852 2 607 1168 FAX 2 607 1000 TEL 86 20 8435 0603 FAX 20 8435 9181 TEL 86 10 6442 7713 FAX 10 6442 7712 TEL 86 21 6272 7502 FAX 21 6272 6929 TEL 63 2 888 0245 FA...

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