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Instruction Manual                                                                                                                   WGM701 Wasp

 

 

InstruTech

 

Page 3 

 

Introduction / General Information 

1.1 

Description 

 

The WGM701 

Wasp™ 

vacuum gauge module combines

 

the

 

Cold Cathode

 

Inverted Magnetron technology with a 

Pirani sensor to provide reliable and continuous pressure measurements from atmosphere to high vacuum.

  

cold cathode ionization gauge measures vacuum pressure by first ionizing gas molecules inside the vacuum 
gauge and then measuring the resulting ion current.  A large potential between the sensor anode and cathode 
will cause ionization to occur.  The amount of ion current generated from the ionized gas is proportional to the 
pressure in the vacuum system and is dependent on the type of gas used.  As the pressure inside the vacuum 
system drops, the measured ion current drops.  Two ion current collector options are available.  The low current 
collector option is recommended for use in heavy gases such as argon to prevent self-sputtering while the high 
current version is recommended for gases such as N

2

 /air, etc.  The Pirani sensor measures pressure indirectly by 

sensing the loss of heat from a sensor to the surrounding gases.  The higher the pressure of the surrounding gas, 
the more heat is conducted away from the sensor.  Pirani thermal conductivity gauges maintain a sensor (usually 
a wire) at some constant temperature, and measure the current or power required to maintain that 
temperature.  

 

 

The WGM701 provides the basic signal conditioning required to turn the sensor into a complete vacuum 
pressure measurement instrument.  The built-in controller provides a log-linear analog output for the measured 
pressure.  The cold cathode sensor is automatically activated once the pressure measured by the Pirani sensor 
has indicated a low enough pressure level of 7.6 x 10

-3

 Torr.

  

Additionally, the instrument provides a sensor 

on/off status using an open collector transistor output as well as several status LEDs.  The measurement range 
for the WGM701 cold cathode Pirani combination gauge is 7.6 x 10

-10

 to 760 Torr.

 

 

1.2 

Specifications 

 

measurement range   

7.6 x 10

-10

  to  760 Torr  /  1 x 10

-9

  to  1,000 mbar  /   1 x 10

-7

  Pa to 101 kPa 

accuracy - N2 (typical) 

7.6 x 10

-9

  to 7.6 x 10

-3

 Torr:  ± 30% of reading 

7.6 x 10

-3  

 to 75 Torr:  ± 15% of reading            

75 to 760 Torr:  ± 50 % of reading 

repeatability - (typical) 

7.6 x 10

-9

  to 75 Torr:  ± 5% of reading 

materials exposed to gases 

pirani sensor: tungsten              cold cathode anode: molybdenum     
others: Ni alloy, AI

2

O

3

, stainless steel, glass 

internal gauge volume 

1.391 in3 (22.8 cm3)    

admissible pressure 

145 psi, 10 bar absolute (limited to inert gases < 50 

o

C)             

temperature 

operating:  + 5 to + 55 

 o

C          storage:   -40 to + 70 

o

humidity  (30 days a year) 

  

7.6×10-

8 … 7.6 ×10

-3 Torr  0 to 95% relative humidity, non-condensing 

7.6×10-

9 … 7.6 ×10

-3 Torr  0 to 70% relative humidity, non-condensing 

bakeout temperature (at flange) 

150 

o

C  (sensor only - electronics removed) 

weight 

0.61 lb.  (0.28 kg) with NW25 KF flange   

housing (electronics) 

aluminum extrusion 

use 

indoor only 

mounting orientation 

any 

analog output 

log-linear  0.5 to 7 Vdc, 0.5 V/decade 

Содержание Wasp WGM701

Страница 1: ...h Cold Cathode Pirani Combination Vacuum Gauge WGM701 Module The Wasp User Manual InstruTech 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc c...

Страница 2: ...ility for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech with respect to use of information circuits equipment or software described in this manual Thro...

Страница 3: ...any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech P...

Страница 4: ...Electrical Conditions 8 2 3 1 Proper Equipment Grounding 8 2 3 2 Electrical Interface and Control 8 2 4 Overpressure and use with hazardous gases 8 2 5 Gas Dependency 9 3 Installation 10 3 1 Mechanica...

Страница 5: ...vice 19 7 1 Calibration 19 7 2 Maintenance 19 7 3 Contamination 19 7 4 Removing the gauge from service 20 7 4 1 Inspecting the sensor 21 7 4 2 Replacing the ionization chamber and sensor activation ai...

Страница 6: ...WGM701 provides the basic signal conditioning required to turn the sensor into a complete vacuum pressure measurement instrument The built in controller provides a log linear analog output for the me...

Страница 7: ...pply unit must be increased proportionally to the length of the cable fuse required 1AT supply voltage ripple 1 Vp p high voltage in measuring chamber operating voltage anode 3 3 KV sensor activation...

Страница 8: ...02586 002585 Collector H High Current L Low Current Fittings Flanges C NW25KF D NW40KF F 2 3 4 in CF NW40CF Conflat Electrical Connector A 9 pin D sub male Example WGM701SHDA WGM701 with standard sens...

Страница 9: ...emoved WARNING Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repa...

Страница 10: ...t the internal power supply and other components DO NOT operate the WGM701 with the WGM701 enclosure removed Contact with exposed electrical circuits in the WGM701 could result in death or serious inj...

Страница 11: ...ding to EN 61010 VCR connections fulfill this requirement For gauges with a KF connection use a conductive metallic clamping ring WARNING In order to protect personnel from electric shock and bodily h...

Страница 12: ...wed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside t...

Страница 13: ...the gauge with port down to help minimize the effect of any particles or condensation collecting in the gauge For electrical safety purposes the housing of the gauge must be grounded to the vacuum cha...

Страница 14: ...KF flanges metal clamps must be used to ensure proper grounding WARNING The gauge may only be connected to power supplies instruments or control devices that conform to the requirements of a grounded...

Страница 15: ...D 3 Analog output Log Linear 0 5 to 7 Vdc 0 5 V decade 4 Power Input 14 5 to 30 Vdc 2 W protected against power reversal and transient over voltages 5 Not assigned 6 Do not connect 7 Analog output com...

Страница 16: ...le The two sensors are designed to operate as one combined measuring unit The optimum measuring configuration for the particular pressure range in which measurement is performed is shown below 7 6 x 1...

Страница 17: ...off EEPROM error 4 4 Gauge Adjustment The cold cathode measuring circuit which is dominant for low pressures 7 6 10 4 Torr is factory calibrated and cannot be adjusted The HV zero adjustment of the P...

Страница 18: ...If the output from the gauge corresponds to 760 Torr the ATM adjustment has been successful Otherwise repeat the adjustment procedure 4 4 2 Pirani HV zero adjustment For adjusting the zero operate the...

Страница 19: ...N2 For other gases the measurements have to be corrected Indicated pressure range from 7 6 x 10 3 to 75 Torr Pirani Mode only Gauge calibrated for air p Torr peff Torr 102 8 6 4 2 101 8 6 4 2 100 8 6...

Страница 20: ...indication is linear For gases other than air the pressure can be determined by means of the following conversion formula peff K indicated pressure where Gas type K Air N2 O2 CO 1 0 Xe 0 4 Kr 0 5 Ar...

Страница 21: ...tage is 10 Vdc when pressure is in the cold cathode measurement but the cold cathode sensor has not ignited Log Linear Analog Output N2 air only Pressure Torr Voltage 1 0E 09 1 0 1 0E 08 1 5 1 0E 07 2...

Страница 22: ...ation in the range of 7 6 x 10 5 to 7 6 x 10 3 Torr can cause severe contamination as well as reduced up time Contamination can to a certain extent be reduced by Geometric protection e g screenings el...

Страница 23: ...CAUTION Dirt and damage impair the function of the vacuum component Take appropriate measures to ensure cleanliness and prevent damage Touching the product or parts with bare hands increases the desor...

Страница 24: ...the retaining ring 1 as well as the ionization chamber 2 from the measuring chamber 3 Check the ionization chamber and the measuring chamber for contamination Ionization chamber is contaminated only...

Страница 25: ...ool We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright finish using a polishing cloth CAUTION The sealing surfaces must only be worked co...

Страница 26: ...cal stop is reached and mount the retaining ring 1 It is recommend to perform a leak test leak rate 1 10 9 mbar l s Carefully slide the measuring chamber 3 clean or new into the electronics unit 5 unt...

Страница 27: ...ics unit 5 until the mechanical stop is reached Pins aligned straight 3 5 4 Fasten the measuring chamber 3 by means of the hexagon socket set screw 4 Perform an ATM and HV adjustment of the Pirani usi...

Страница 28: ...put does not drop under below 10 V lid solid green blinking green off Gas discharge has not ignited Wait until the gas discharge has ignited 5 minutes at a pressure of 7 6 X 10 10 Torr Signal output c...

Страница 29: ...Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside...

Страница 30: ...p n 002618 100 InstruTech 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com...

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