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Instrutech VGC301, Руководство пользователя

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Instrutech VGC301 Скачать руководство пользователя страница 42

p/n 000363-110 

 

 
 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

 

InstruTech®, Inc. 

  1475 S. Fordham St.

 

     Longmont, CO 80503 
                 USA 

 

      Phone  +1-303-651-0551 

  

 

 

 

 

 

 

 

 

        Fax  +1-303-678-1754 

  

 

 

 

 

 

 

 

    E-mail  [email protected] 

      www.instrutechinc.com 

 

Содержание VGC301

Страница 1: ... InstruTech Inc VGC301 Convection Vacuum Gauge Controller User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com ...

Страница 2: ...two digits of 10 or lower please go to http www instrutechinc com downloads archived user manuals Copyright 2012 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by Inst...

Страница 3: ... Conditions 7 2 3 1 Proper Equipment Grounding 7 2 3 2 Electrical Interface and Control 8 2 4 Overpressure and use with hazardous gases 8 2 5 Gases other than Nitrogen air 8 3 Installation 9 3 1 Mechanical Installation 9 3 2 Electrical Installation 10 3 2 1 Grounding 10 3 2 2 Electrical Connections 10 4 Setup and Operation 12 4 1 User Interface Basics 12 4 2 Programming 12 4 3 Return to Factory De...

Страница 4: ...able mbar 28 7 5 NONLIN 6V Non Linear Analog Output Equations 30 7 6 NONLIN 6V Non Linear Analog Output Table Torr 31 7 7 NONLIN 6V Non Linear Analog Output Table mbar 32 7 8 NONLIN 9V Non Linear Analog Output Equations Table 33 7 9 LINEAR 0 10 Vdc 35 8 RS485 RS232 serial communications 36 8 1 Device Specific Serial Communication Info 36 8 2 RS485 RS232 Command Protocol Summary 37 9 Service 38 9 1...

Страница 5: ... gauge and gauge cable Remote interface relay and power connectors are different Various analog output scaling provide signal compatibility with GP controller series 375 475 the original GP 1 4 DIN 275 Analog Convectron Gauge Controller as well as the Mini Convectron module 1 2 Specifications measurement range signal 1 0 x 10 4 to 1000 Torr 1 3 x 10 4 to 1333 mbar 1 3 x 10 2 Pa to 133 kPa display ...

Страница 6: ...tional PS301 Power Supply for VGC301 controller Input 100 240 Vac 50 60 Hz Output 24 Vdc Cable Length 6 ft 2 m with North American AC Plug PS301 A with Universal European AC Plug PS301 EU with UK AC Plug PS301 UK with China AC Plug P301 C with Australian AC Plug PS301 SP This variation of the PS301 power supply may be used when an AC plug that is not listed above is required The conventional IEC60...

Страница 7: ...15 m over 50 ft or custom lengths CB421 1 25F CB421 1 50F Consult Factory InstruTech CVG101 Worker Bee Convection Vacuum Gauge Sensor Combination 1 8 in NPT male 1 2 in tube use 1 8 NPT male or 1 2 O D O ring compression CVG101GA NW16KF CVG101GB NW25KF CVG101GC NW40KF CVG101GD 1 1 3 in Mini CF NW16CF Mini Conflat CVG101GE 2 3 4 in CF NW35CF Conflat CVG101GF 1 4 in Cajon 4VCR female CVG101GG 1 2 in...

Страница 8: ... enclosure removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided WARNING There are no operator serviceable parts or adjustments inside the product enclosure Refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return ...

Страница 9: ... has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation 2 3 Electrical Conditions WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies ...

Страница 10: ...a 1000 torr DO NOT exceed 35 psig 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacu...

Страница 11: ...signed for use on a bench top or it may be mounted in an instrument control panel To mount the VGC301 in a panel 1 Make a cutout in your instrument control panel as shown in the drawing above Be sure to allow clearance behind the panel for the instrument as well as connectors and cables at the rear of the instrument 2 Gently pry the front panel bezel loose and remove 3 Slide the VGC301 into the pa...

Страница 12: ...trollers from other manufacturers such as the Granville Phillips 375 controller Many of these other controllers employ the same 9 pin and 15 pin D connectors but they do not all use the same signal pinout configurations If you wish to use your existing cables be sure to check compatibility with the tables on the next page Rewire your cables as necessary Remote I O interface connector gauge relay D...

Страница 13: ...applying a continuous ground to pin 9 This will prevent any switching of the relay contactors during operation of the VGC301 Relay Connector 6 pin pluggable terminal strip Mating connector Phoenix p n1803617 or InstruTech p n 000730 pin number pin description 1 relay 1 common 2 relay 1 NC 3 relay 1 NO 4 relay 2 common 5 relay 2 NC 6 relay 2 NO Gauge cable assembly P N CB421 1 XXXF is a custom cabl...

Страница 14: ... pascals Pa you must perform SET ATM before setting the vacuum reading SET VAC See SET ATM below Failure to do so will result in improper operation of the gauge If you change units of measure or reset to factory defaults then this same procedure must be followed again if the units of measure are being set to either mbar or Pa 1 To properly set the vacuum reading zero point with the CVG101 installe...

Страница 15: ... ON or SP2 ON you must first go to SP1 OFF or SP2 OFF and increase those values to a number higher than the values of SP1 ON or SP2 ON you are trying to set SET SP1 OFF and SET SP2 OFF Factory default 200 mTORR These setpoints correspond to the pressures at which the relays will turn of de energize The relays will turn off when the pressure is above the programmed pressure value If you are unable ...

Страница 16: ...g output from 0 3751 to 5 6593 Vdc d NONLIN 9V This selection provides a non linear S Curve analog output from 0 to 9 Vdc e LINEAR This selection provides a 0 to 10 Vdc linear analog output with a useful range over 3 decades SET LINEAR Factory default 0 01 VOLTS to 10 VOLTS corresponding to 1 mTORR to 1 TORR If you have selected LINEAR in the ANALOG TYPE menu above then configure the linear analog...

Страница 17: ...ounting position as well as gas properties Generally air and N2 are considered the same with respect to thermal conductivity but even N2 and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the N2 in the gauge For most othe...

Страница 18: ... total pressure is 500 Torr the gauge will read 500 Torr Ex B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will ...

Страница 19: ...00 600 940 970 950 400 1 05 1 04 1 55 745 1 60 2 Torr 2 00 1 14 2 22 1 94 1 71 700 1 62 1 66 4 13 1 59 3 33 5 Torr 5 00 2 45 13 5 4 98 3 34 1 28 2 45 2 62 246 5 24 7 53 10 Torr 10 0 4 00 OP 10 3 4 97 1 78 2 96 3 39 OP 21 5 27 9 20 Torr 20 0 5 80 OP 22 3 6 59 2 29 3 32 3 72 OP 584 355 50 Torr 50 0 7 85 OP 77 6 8 22 2 57 3 79 4 14 OP OP 842 100 Torr 100 8 83 OP 209 9 25 2 74 4 68 4 91 OP OP OP 200 T...

Страница 20: ...1 04 1 33 mbar 1 33 0 790 1 25 1 29 1 26 0 530 1 39 1 38 2 06 0 990 2 13 2 66 mbar 2 66 1 51 2 95 2 58 2 27 0 930 2 15 2 21 5 50 2 11 4 43 6 66 mbar 6 66 3 26 17 9 6 63 4 45 1 70 3 26 3 49 327 6 98 10 0 13 3 mbar 13 3 5 33 OP 13 7 6 62 2 37 3 94 4 51 OP 28 6 37 1 26 6 mbar 26 6 7 73 OP 29 7 8 78 3 05 4 42 4 95 OP 778 473 66 6 mbar 66 6 10 4 OP 103 10 9 3 42 5 05 5 51 OP OP 1012 133 mbar 133 11 7 O...

Страница 21: ...0 last 2 digits 10 or lower ANALOG TYPE Menu Selection Log Linear 1 to 8 Vdc 1 V decade LOG 1 8 LOG Log Linear 0 to 7 Vdc 1 V decade LOG 0 7 Not Available Non Linear 0 375 to 5 659 Vdc S Curve NONLIN 6V NONLIN Non Linear 0 to 9 Vdc S Curve NONLIN 9V Not Available Linear 0 to 10 Vdc LINEAR LINEAR LOG 1 8 Log Linear Analog Output The LOG 1 8 setting selected from the ANALOG TYPE menu produces a log ...

Страница 22: ...g the LOG 0 7 output voltage into pressure values for nitrogen and various other gases NONLIN 6V Non Linear Analog Output S Curve The NONLIN 6V setting selected from the ANALOG TYPE menu produces a non linear analog output signal of 0 375 to 5 659 Vdc for 0 to 1000 Torr of N2 roughly in the shape of an S curve as shown at right Selecting the NONLIN 6V setting from the InstruTech VGC301 ANALOG TYPE...

Страница 23: ...the display menu The equations and table shown in section 7 8 contain the lookup data for converting the NONLIN 9V output voltage into pressure values for nitrogen and various other gases LINEAR 0 10 Vdc Linear Analog Output The VGC301 also provides a linear 0 10 Vdc analog output The linear output voltage can be any value between 0 01 V and 10 V corresponding to displayed pressure between 1 mTorr...

Страница 24: ... 521 5 571 8 041 7 766 7 550 50 0000 6 699 5 895 8 041 6 890 5 915 5 410 5 579 5 617 8 041 8 041 7 925 100 0000 7 000 5 946 8 041 7 320 5 966 5 438 5 670 5 691 8 041 8 041 8 041 200 0000 7 301 5 991 8 041 7 470 6 090 5 521 5 777 5 808 8 041 8 041 8 041 300 0000 7 477 6 053 8 041 7 580 6 228 5 555 5 838 5 876 8 041 8 041 8 041 400 0000 7 602 6 130 8 041 7 686 6 350 5 595 5 883 5 925 8 041 8 041 8 0...

Страница 25: ...01 Controller InstruTech Inc Page 23 LOG 1 8 Log Linear Analog Output Voltage vs Pressure Torr Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Страница 26: ...1 5 780 8 125 8 125 8 125 200 0000 7 301 6 093 8 125 7 526 6 157 5 606 5 851 5 877 8 125 8 125 8 125 300 0000 7 477 6 131 8 125 7 625 6 253 5 654 5 918 5 950 8 125 8 125 8 125 400 0000 7 602 6 178 8 125 7 705 6 353 5 679 5 962 6 000 8 125 8 125 8 125 500 0000 7 699 6 237 8 125 7 786 6 448 5 710 5 996 6 038 8 125 8 125 8 125 600 0000 7 778 6 295 8 125 7 861 6 532 5 734 6 025 6 070 8 125 8 125 8 125...

Страница 27: ...01 Controller InstruTech Inc Page 25 LOG 1 8 Log Linear Analog Output Voltage vs Pressure mbar Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Страница 28: ... 521 4 571 7 041 6 766 6 550 50 0000 5 699 4 895 7 041 5 890 4 915 4 410 4 579 4 617 7 041 7 041 6 925 100 0000 6 000 4 946 7 041 6 320 4 966 4 438 4 670 4 691 7 041 7 041 7 041 200 0000 6 301 4 991 7 041 6 470 5 090 4 521 4 777 4 808 7 041 7 041 7 041 300 0000 6 477 5 053 7 041 6 580 5 228 4 555 4 838 4 876 7 041 7 041 7 041 400 0000 6 602 5 130 7 041 6 686 5 350 4 595 4 883 4 925 7 041 7 041 7 0...

Страница 29: ...01 Controller InstruTech Inc Page 27 LOG 0 7 Log Linear Analog Output Voltage vs Pressure Torr Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Страница 30: ...4 751 4 780 7 125 7 125 7 125 200 0000 6 301 5 093 7 125 6 526 5 157 4 606 4 851 4 877 7 125 7 125 7 125 300 0000 6 477 5 131 7 125 6 625 5 253 4 654 4 918 4 950 7 125 7 125 7 125 400 0000 6 602 5 178 7 125 6 705 5 353 4 679 4 962 5 000 7 125 7 125 7 125 500 0000 6 699 5 237 7 125 6 786 5 448 4 710 4 996 5 038 7 125 7 125 7 125 600 0000 6 778 5 295 7 125 6 861 5 532 4 734 5 025 5 070 7 125 7 125 7...

Страница 31: ...01 Controller InstruTech Inc Page 29 LOG 0 7 Log Linear Analog Output Voltage vs Pressure mbar Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page ...

Страница 32: ...2 dx 3 ex 4 fx 5 a 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table Coefficients for a 0 1031 b 0 3986 c 0 02322 d 0 07438 e 0 07229 f 0 006866 For Non Linear Analog Output voltage range of 4 94 to 5 659 volts use this table Coefficients for a 100 624 b 0 37679 c 20 5623 d 0 0348656 Where y x pressure in Tor...

Страница 33: ... 9210 2 6470 2 6660 3 5080 2 6310 3 3130 5 Torr 3 6753 3 0280 4 3870 3 6720 3 3160 2 4290 3 0290 3 0900 5 0590 3 7150 10 Torr 4 2056 3 4800 5 7000 4 2250 3 6700 2 7340 3 2040 3 3300 5 7000 4 6050 4 6990 20 Torr 4 5766 3 8010 5 7000 4 6200 3 9030 2 9660 3 3080 3 4140 5 7000 5 4060 5 1720 50 Torr 4 8464 4 0370 5 7000 4 9160 4 0710 3 0750 3 4300 3 5090 5 7000 6 1590 5 5830 100 Torr 4 9449 4 1220 5 70...

Страница 34: ...18 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 6 66 mbar 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 13 3 mbar 4 2056 3 48 5 700 4 225 3 67 2 734 3 204 3 33 5 700 4 605 4 699 26 6 mbar 4 5766 3 801 5 700 4 62 3 903 2 966 3 308 3 414 5 700 5 406 5 172 66 6 mbar 4 8464 4 037 5 700 4 916 4 071 3 075 3 43 3 509 5 700 6 159 5 583 133 mbar 4 9449 4 122 5 700 5 026 4 154 3...

Страница 35: ...0E 00 K1 K1 1 428571E 04 K2 K2 2 551020E 07 K3 K3 9 110787E 11 Coefficients for voltage segment range of 1 8457 to 3 1641 volts K0 K0 2 681040E 01 K1 K1 9 758000E 04 K2 K2 5 950000E 07 K3 K3 3 750000E 10 Coefficients for voltage segment range of 3 1641 to 4 3945 volts K0 K0 1 100000E 00 K1 K1 1 675000E 03 K2 K2 1 125000E 06 K3 K3 7 414069E 21 Coefficients for voltage segment range of 4 3945 to 6 5...

Страница 36: ...54 67 V1 2 K3 454 67 V1 3 P Pressure 5 00 Torr The following pressure vs voltage table is derived from equations and coefficients listed above NONLIN 9V Non Linear Output Voltage vs Pressure in Torr units for N2 Air Pressure Torr Voltage Vdc Pressure Torr Voltage Vdc Pressure Torr Voltage Vdc 0 0000 0 0000 2 0E 01 1 3310 4 0E 02 8 2587 1 0E 04 0 0016 5 0E 01 2 2289 5 0E 02 8 4375 2 0E 04 0 0031 1 ...

Страница 37: ...ative of a typical setup where Min P 1 00E 03 Torr Min Voltage 0 01 Volts Max P 1 00 Torr Max Voltage 10 V Linear Analog Output Voltage volts Measured Displayed Pressure torr 0 01 1 00E 03 0 10 1 00E 02 1 00 1 00E 01 10 00 1 00E 00 It is recommended that the Linear output signal be setup such that the range covers at most 3 decades of pressure change For example if the minimum pressure selected is...

Страница 38: ... or the front panel push buttons 3 The parity can be changed only through the serial interface command set and the number of data bits will change according to the parity selected 4 The stop bit is always 1 5 All Responses are 13 characters long 6 xx is the address of the device 00 thru FF 7 CR is a carriage return 8 _ is a space 9 The z in the set or read trip point commands is a or The plus is t...

Страница 39: ... pressure point for relay 1 xxRLz CR eg 01RL CR eg 01RL CR xx_y yyEzyy CR eg 01_7 60E 02 CR READ TRIP POINT 2 Read the turns on below pressure point for relay 2 and read the turns off above pressure point for relay 2 xxRHz CR eg 01RH CR eg 01RH CR xx_y yyEzyy CR eg 01_7 60E 02 CR READ SW VERSION Read the revision number of the firmware xxVER CR eg 01VER CR xx_mmnnv vv eg 0105041 00 SET FACTORY DEF...

Страница 40: ...ution Display is off blank No power Check power supply power cable Readings appear very different from expected pressure The process gas is different from the gas used to calibrate the CVG101 gauge Correct readings for different gas thermal conductivity See section 5 on using the gauge with different gases CVG101 gauge has not been calibrated or has been calibrated incorrectly Check that zero and ...

Страница 41: ...of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have...

Страница 42: ...p n 000363 110 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com ...

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