Instrutech VGC301, Руководство пользователя

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Instruction Manual VGC301 Controller
InstruTech, Inc.
Page 31
7.6
NONLIN 6V; Non-Linear Analog Output Table - Torr
Non-Linear 0.375 to 5.659 V analog output for selected gases - Engineering units in Torr/mTorr
N
2
Ar He
O
2
CO
2
Kr Freon12 Freon22
D
2
Ne
CH
4
0 mTorr 0.3751 0.3750 0.3750 0.3750 0.3750 0.3750 0.3750 0.3750 0.3750 0.3750 0.3750
0.1 mTorr 0.3759 0.3757 0.3755 0.3760 0.3760 0.3755 0.3760 0.3760 0.3760 0.3757 0.3766
0.2 mTorr 0.3768 0.3760 0.3765 0.3770 0.3770 0.3768 0.3780 0.3780 0.3770 0.3763 0.3780
0.5 mTorr 0.3795 0.3780 0.3790 0.3800 0.3810 0.3772 0.3820 0.3810 0.3810 0.3782 0.3825
1 mTorr 0.3840 0.3810 0.3820 0.3840 0.3850 0.3790 0.3880 0.3880 0.3860 0.3810 0.3896
2 mTorr 0.3927 0.3870 0.3890 0.3920 0.3950 0.3840 0.4010 0.4000 0.3960 0.3880 0.4030
5 mTorr 0.4174 0.4030 0.4090 0.4170 0.4120 0.3950 0.4370 0.4320 0.4250 0.4050 0.4380
10 mTorr 0.4555 0.4290 0.4410 0.4530 0.4620 0.4150 0.4880 0.4800 0.4700 0.4330 0.4920
20 mTorr 0.5226 0.4770 0.4970 0.5210 0.5360 0.4510 0.5810 0.5660 0.5490 0.4840 0.5840
50 mTorr 0.6819 0.5950 0.6370 0.6790 0.7050 0.5440 0.7780 0.7640 0.7270 0.6080 0.7960
100 mTorr 0.8780 0.7450 0.8140 0.8680 0.9000 0.6680 1.0090 0.9900 0.9440 0.7680 1.0530
200 mTorr 1.1552 0.9620 1.0680 1.1410 1.1790 0.8470 1.3150 1.2910 1.2650 1.0020 1.3920
500 mTorr 1.6833 1.3860 1.5890 1.6640 1.6680 1.1940 1.8260 1.8050 1.9140 1.4690 2.0140
1 Torr 2.2168 1.8180 2.1640 2.1950 2.1720 1.5360 2.2570 2.2470 2.6030 1.9760 2.6320
2 Torr 2.8418 2.3330 2.9390 2.8140 2.6950 1.9210 2.6470 2.6660 3.5080 2.6310 3.3130
5 Torr 3.6753 3.0280 4.3870 3.6720 3.3160 2.4290 3.0290 3.0900 5.0590 3.7150
10 Torr 4.2056 3.4800 5.7000 4.2250 3.6700 2.7340 3.2040 3.3300 5.7000 4.6050 4.6990
20 Torr 4.5766 3.8010 5.7000 4.6200 3.9030 2.9660 3.3080 3.4140 5.7000 5.4060 5.1720
50 Torr 4.8464 4.0370 5.7000 4.9160 4.0710 3.0750 3.4300 3.5090 5.7000 6.1590 5.5830
100 Torr 4.9449 4.1220 5.7000 5.0260 4.1540 3.1340 3.6180 3.6600 5.7000 6.4830 5.7200
200 Torr 5.0190 4.1920 5.7000 5.1060 4.3360 3.2690 3.8270 3.8830 5.7000 6.6610 5.8600
300 Torr 5.1111 4.2830 5.7000 5.2000 4.5020 3.3840 3.9380 4.0050 5.7000 6.7260
400 Torr 5.2236 4.3860 5.7000 5.3150 4.6210 3.4660 4.0160 4.0880 5.7000 6.7670 6.1030
500 Torr 5.3294 4.4770 5.7000 5.4220 4.7080 3.5260 4.0760 4.1510 5.7000 6.8030
600 Torr 5.4194 4.5500 5.7000 5.5150 4.7750 3.5730 4.1240 4.2030 5.7000 6.8430 6.3420
700 Torr 5.4949 4.6110 5.7000 5.5920 4.8300 3.6130 4.1660 4.2470 5.7000 6.8900
760 Torr 5.5340 4.6430 5.7000 5.6330 4.8600 3.6320 4.1900 4.2710 5.7000 6.9200
800 Torr 5.5581 4.6630 5.7000 5.6580 4.8770 3.6450 4.2030 4.2860 5.7000 6.9420 6.5190
900 Torr 5.6141 4.7060 5.7000 5.7130 4.9190 3.6740 4.2370 4.3210 5.7000 7.0000
1000 Torr 5.6593 4.7450 5.7000 5.7620 4.9550 3.6900 4.2700 4.3540 5.7000 7.0560 6.6420
True Total
Pressure
Values listed under each gas type are in volts.
Note: By design, these values are identical to the outputs from Brooks Automation, Inc. / Granville-Phillips®
Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged
without affecting your process system or software.
An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.