Inficon VGC402 Скачать руководство пользователя

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+423 / 388 3111

+423 / 388 3700

LI-9496 Balzers

Liechtenstein

Tel

Fax

[email protected]

www.inficon.com

Original: tinb07

1-e (2011-07)

t i nb07e1- e

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Содержание VGC402

Страница 1: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

Страница 2: ...f Conformity tinb07e1 e 2011 07 1 VGC402 Two Channel Measurement and Control Unit VGC403 Three Channel Measurement and Control Unit para ch para ch Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 3: ... RS232C 14 4 Operation 4 1 Front panel 15 4 1 1 Display 15 4 1 2 Control buttons 15 4 2 Switching on and off 16 4 2 1 Switching on 16 4 2 2 Switching off 16 4 2 3 Waiting time 16 4 3 Operating modes 16 4 4 Measurement mode 17 4 4 1 Selection 17 4 4 2 Description 17 4 4 3 Control button functions 17 4 5 Parameter mode 19 4 5 1 Selection 19 4 5 2 Parameter groups 19 4 5 3 Basic operation 20 5 Parame...

Страница 4: ...AS 38 6 3 15 HVC 38 6 3 16 ITR 38 6 3 17 LOC 38 6 3 18 OFC 39 6 3 19 OFD 39 6 3 20 PNR 39 6 3 21 PR1 39 6 3 22 PRE 40 6 3 23 PRX 40 6 3 24 RES 40 6 3 25 SAV 40 6 3 26 SC1 41 6 3 27 SP1 41 6 3 28 SPS 41 6 3 29 TAD 42 6 3 30 TDI 42 6 3 31 TEE 42 6 3 32 TEP 42 6 3 33 TID 43 6 3 34 TIO 43 6 3 35 TKB 43 6 3 36 TLC 44 6 3 37 TRA 44 6 3 38 TRS 44 6 3 39 UNI 44 6 3 40 WDT 44 7 Maintenance and service 7 1 ...

Страница 5: ...rements The vacuum gauges must be operated in accordance with their respective operating manuals In the following the VGC402 or VGC403 Vacuum Gauge Controller will be referred to as Vacuum Gauge Control ler 1 2 1 Liability and warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties Disregard the information in this document Use the product in a...

Страница 6: ...attention to the following safety notes Fig 1 2 Do not insert objects through louvers and keep unit dry DANGER DANGER indicates an imminently hazardous situation which if not avoided will result in death or severe injury WARNING WARNING indicates a potentially hazardous situation which if not avoided could result in death or severe injury CAUTION CAUTION indicates a potentially hazardous situation...

Страница 7: ...e readily identifiable and easily reached by the user In order to disconnect the Vacuum Gauge Controller from mains you must unplug the mains cable Fig 1 3 Back side of the VGC403 A Disconnecting device WARNING Improper installation and operation data Improper installation and operation data may damage the Vacuum Gauge Controller Strictly adhere to the stipulated installation and operation data A ...

Страница 8: ...28 5 103 110 285 204 5 2 5 Temperature Storage 20 60 C Operation 5 50 C Relative humidity Max 80 bis 31 C decreasing to max 50 above 40 C Use Indoors only Altitude max 2000 m NN Pollution degree II Protection type IP20 Manually Via 4 control buttons on the front panel Remote control Via RS232C interface Voltage 90 250 VAC Frequency 50 60 Hz Power consumption VGC402 Max 45 W VGC403 Max 65 W Overvol...

Страница 9: ... resetting after switching the unit off or unplugging the sensor The supply meets the requirements of a ground protective extra low voltage SELV Measuring ranges Sensor dependent Error of measurement Gain error 0 005 FS Offset error 0 01 FS Measuring rate 50 s 1 Display rate 10 s 1 Filter time constant Slow Approx 1 0 s fg 0 16 Hz Normal nor Approx 0 3 s fg 0 53 Hz Fast Approx 0 06 s fg 2 65 Hz Un...

Страница 10: ...nel Voltage range 0 10 VDC Deviation from displayed value 50 mV Internal resistance 47 Ω Relation between voltage and pressure Sensor dependent Connection D Sub 9 pins male See Fig 3 9 14 Number 1 Voltage range 0 10 VDC Resolution 1 mV Accuracy 20 mV Internal resistance 3300 Ω Relation between voltage and pressure Programmable Connection D Sub 9 pins male See Fig 3 9 14 Default RS232C Protocol ACK...

Страница 11: ...he lower edge of the front panel 3 Stick the supplied rubber feet to the bottom of the casing Fig 3 1 Using the product as a desk top unit 4 Turn the Vacuum Gauge Controller back to normal orientation and place it on the required location 3 2 2 Control panel mounted In order to mount the unit in a control panel the following cutout is required Fig 3 2 Control panel cutout in mm 1 Insert the Vacuum...

Страница 12: ...ig 3 4 11 shows the back side of the VGC403 The connection for channel 3 Pos C is not available in the VGC402 Fig 3 4 Back side of the VGC403 A Sensor connection channel 1 B Sensor connection channel 2 C Sensor connection channel 3 D CONTROL connection E Switch for program transfer mode F RS232C connection G Mains connection disconnecting device H Mains switch I Ground screw J RELAY connection K S...

Страница 13: ...d Connect the protective ground of the pumping station with the ground screw Use a pro tective conductor 3 3 4 SENSOR The SENSOR connection is used to connect the sensors For each channel there are two connections available which are connected in parallel An 8 pin RJ45 appliance socket and a 15 pin D Sub appliance socket See Fig 3 4 11 Pos A C Pin assignment Fig 3 6 SENSOR appliance socket RJ45 Fi...

Страница 14: ...are not designed for use with the Vacuum Gauge Controller may damage the unit Operate the Vacuum Gauge Controller with proper sensors only See Chapter 2 3 1 Sen sor connections 8 CAUTION Multiple connection Only one sensor may be connected to each of the channels Otherwise the connected sen sors will be damaged Never connect more than one sensor per channel 1 GND 2 n c 3 Error break contact NC 4 S...

Страница 15: ...yed values by no more than 50 mV 3 3 7 RS232C The RS232C serial interface Fig 3 4 11 Pos F allows remote control of the unit via a computer or a ter minal See Chapter 6 Computer interface 32 In addition the interface may be used for firmware updates See Chapter 7 2 Program transfer mode 45 Pin assignment Fig 3 10 RS232C appliance socket D Sub 9 pin 1 Connect the serial interface of the computer wi...

Страница 16: ...or each of the available channels Pos D E F From the left to the right this area displays the following information 4 1 2 Control buttons CH The CH button is used to select a channel This may be necessary e g if you want to switch a particular sensor on or off or if you want to modify the sensor parameters The number of the currently selected channel is flashing for a few seconds PARA The PARA but...

Страница 17: ...urement mode The measurement mode is the standard operating mode It displays the pressure readings of the sensors In case of an error a status message is displayed instead See Chapter 4 4 Measurement mode 17 Parameter mode The parameter mode gives you access to various param eters You can check the parameter settings or modify them using the arrow buttons This allows you to config ure the Vacuum G...

Страница 18: ...urn to the measurement mode if no button is pressed for 10 seconds 4 4 3 3 Switching high vacuum circuit on The high vacuum circuit of the following sensors can be switched on manually PEG For this purpose the sensor control must be set to HAnd See Chapter 5 2 6 Sensor activation S on 25 1 Press the CH button to select the required channel 2 Keep the UP button pressed for approximately 1 second Fi...

Страница 19: ...utton to select the required channel 2 Keep the DOWN button pressed for approximately 1 second See Fig 4 5 18 The degas function of the sensor on the selected channel is switched off The DEG indicator is dark 4 4 3 7 Identifying a sensor 1 Keep the UP and DOWN buttons pressed for approximately 1 second Fig 4 6 Press the UP and DOWN buttons for 1 second The display area of the individual sensor sho...

Страница 20: ... only available in the VGC403 See Chapter 5 1 Switching function parameters PArA SP 21 Sensor parameters PArA SEn These parameters concern the sensor on the currently selected channel only There is an individual set of parameters for each channel See Chapter 5 2 Sensor parameters PArA SEn 23 General parameters PArA GEn These parameters are used for general configuration of the unit The parameters ...

Страница 21: ...the parameter group is displayed 4 Press the PARA button to select the required parameter The name and the value of the parameter are displayed 5 Use the arrow keys and the CH button if neces sary to modify the parameter value The value of the parameter is changed 6 Repeat the steps 4 and 5 to change further param eters of the same parameter group The unit returns to the measurement mode after the...

Страница 22: ...onsible for activating the assigned switching function The relay switches on as soon as the pressure falls below the lower threshold value This means that the common contact of the relay is connected to the make contact Upper threshold value SP H The upper threshold value is responsible for deacti vating the assigned switching function The relay switches off as soon as the pressure rises above the...

Страница 23: ... the lower threshold values 2 10 4 mbar if PrE is activated see Chapter 5 2 12 26 Adjustment range of the upper threshold value The upper threshold value of a switching function can be set in the following pressure ranges Tab 5 2 Adjustment range of the upper threshold values This means that the hysteresis amounts to 10 of the lower threshold value logarithmic sensors or to 1 of the full scale ran...

Страница 24: ...ilter can be set to one of the following values FASt Fast The Vacuum Gauge Controller responds quickly to signal changes This makes it rather sensitive to signal noise Fig 5 2 Measurement with filter set to FASt example nor Normal This is the default setting It offers a good com promise between the response time and the sensitivity to noise Fig 5 3 Measurement with filter set to nor example SLo Sl...

Страница 25: ... 10 bar 50 bar 5 2 4 Offset oFS When the offset correction is activated a previously specified offset value will be subtracted from each pres sure reading This allows to conveniently measure the relative pressure with respect to a reference pressure The offset correction affects the readings on the display the RS232C output the recorder output and the switch ing functions The analog outputs howeve...

Страница 26: ...he unit is switched on After a power failure the measure ment will be resumed automatically CH 1 By channel 1 The subsequent parameter t on is used to specify the switch on threshold The sensor is switched on when the pressure on channel 1 falls below the switch on threshold CH 2 By channel 2 The subsequent parameter t on is used to specify the switch on threshold The sensor is switched on when th...

Страница 27: ... the switch off threshold 5 2 10 Emission EMi This parameter defines the rules for switching the emis sion on Tab 5 5 EMi parameter values 5 2 11 Filament selection FiL This parameter defines the rules for selecting the active filament Tab 5 6 FiL parameter values 5 2 12 Pirani range extension PrE Extend the display and the setpoint adjustment range Tab 5 7 PrE parameter values Display Significanc...

Страница 28: ... The recorder output voltage is a function of the pressure on the sensor The relation between the pressure and the voltage is called the characteristic curve of the output It can be selected Modifying parameter 1 Select the Ao parameter 2 Use the CH button to assign the recorder output to a channel 3 Use the arrow buttons to select the characteristic curve of the output The value of the parameter ...

Страница 29: ...mbination CDG on channel 1 CDG on channel 2 CDG on channel 3 This characteristic curve is only useful if the sensors have different measuring ranges The total measuring range of the sensor combination is represented logarithmically in the range 0 10 V NOTE The three sensors must be sorted with regard to their measuring range FS The sort order may be increas ing or decreasing Lin n Linear represent...

Страница 30: ... group tESt is selected The PARA indicator is illuminated During normal operation During normal operation it is also possible to activate the parameter group tESt from the measurement mode 1 Press the PARA button The parameter menu is selected The PARA indicator is illuminated 2 Keep the UP and DOWN buttons pressed for approximately 5 seconds The firmware version is displayed The parameter group t...

Страница 31: ...dividual segments of the display are activated one after the other Press the UP button to start the test 5 4 10 A D converter signal Ad S Display the A D converter output signal in volts for each of the channels When applying a reference voltage to the input signal pin of the SENSOR connection this allows you to check the A D converters of the respective chan nel See Chapter 3 3 4 SENSOR 12 NOTE W...

Страница 32: ...put characters via the keyboard Each of the input characters is returned to the terminal from the Vacuum Gauge Con troller The data transfer between the two units is visible on the terminal screen only Press the PARA button to quit the test and to return to the measurement mode CAUTION Relay test In this test the relays switch irrespective of the actual pressure This may cause unintended switching...

Страница 33: ... The information is exchanged bidirectionally i e data and control com mands can be exchanged in both directions The input buffer of the Host must have a capacity of at least 75 bytes 6 2 2 Sending Host Unit Messages of the Host are composed of mnemonics and parameters Mnemonics are command abbreviations and always consist of three ASCII characters See Chapter 6 3 Mnemonics 34 The control characte...

Страница 34: ... Setting the filter S FIL 1 2 1 CR LF R ACK CR LF S ENQ R 1 2 1 CR LF Behavior in case of a syntax error S FOL 1 2 1 CR LF R NAK CR LF S ENQ R 0001 CR LF 6 2 5 Number formats The following data is always stored in the exponential for mat in the Vacuum Gauge Controller Pressure values Offset values Threshold values Output The above data is always output in the exponential for mat A five digit manti...

Страница 35: ...t correction val ues for linear sensors CDG PNR Program number Firmware version number PR1 Pressure sensor 1 Pressure read ing of sensor 1 PR2 Pressure sensor 2 Pressure read ing of sensor 2 PR3 Pressure sensor 3 Pressure read ing of sensor 3 PRE Pirani range extension PRX Pressure sensors Pressure read ings of all sensors RES Reset Reset the serial interface SAV Save parameters to EEPROM SC1 Sens...

Страница 36: ...ic LoG A 2 Logarithmic LoG 6 3 Logarithmic LoG 3 4 Logarithmic LoG 0 5 Logarithmic LoG 3 6 Logarithmic LoGC1 7 Logarithmic LoGC2 8 Logarithmic LoGC3 9 Linear Lin 10 10 Linear Lin 9 11 Linear Lin 8 12 Linear Lin 7 13 Linear Lin 6 14 Linear Lin 5 15 Linear Lin 4 16 Linear Lin 3 17 Linear Lin 2 18 Linear Lin 1 19 Linear Lin 0 20 Linear Lin 1 21 Linear Lin 2 22 Linear Lin 3 23 iM221 24 Logarithmic LoG...

Страница 37: ... Error relay allocation See Chapter 5 3 6 Error signal relay Err r 29 S ERA a CR LF R ACK CR LF S ENQ R a CR LF 6 3 9 ERR Error status S ERR CR LF R ACK CR LF S ENQ R aaaa CR LF NOTE The error status is a binary number It may be com Parameter Significance a aa Correction factor of channel 1 0 10 9 99 default 1 00 b bb Correction factor of channel 2 see above c cc Correction factor of channel 3 see...

Страница 38: ...r channel 2 see above c Emission for channel 3 see above Parameter Significance a Filter for channel 1 0 Fast 1 Medium default 2 Slow b Filter for channel 2 see above c Filter for channel 3 see above Parameter Significance a Full scale range of sensor 1 0 0 01 mbar 1 0 01 Torr 2 0 02 Torr 3 0 05 Torr 4 0 10 mbar 5 0 10 Torr 6 0 25 mbar 7 0 25 Torr 8 0 50 mbar 9 0 50 Torr 10 1 mbar 11 1 Torr 12 2 m...

Страница 39: ...ata string consists of 8 bytes hexadecimal numbers which are separated from each other by a comma See Reference 11 The data strings of the sensors are separated from each other by double space characters S ITR CR LF R ACK CR LF S ENQ R aa aa aa aa aa aa aa aa bb bb bb bb bb bb bb bb cc cc cc cc cc cc cc CR LF 6 3 17 LOC Parameter setup lock See Chapter 5 4 5 Parameter setup lock LoC 30 Parameter S...

Страница 40: ...rameter Significance a Parameter setup lock 0 Off default 1 On Parameter Significance a Offset correction of channel 1 0 Off default 1 On 2 Determine the offset value and activate offset correction function 3 Adjust the zero point of a CDGxxxD b Offset correction of channel 2 see above c Offset correction of channel 3 see above Parameter Significance a aaaaE aa Offset value of sensor 1 in current ...

Страница 41: ...ance a Range extension for Sensor 1 0 Off default 1 On b Range extension for sensor 2 see above c Range extension for sensor 3 see above Parameter Significance a Status of channel 1 0 Measurement data ok 1 Underrange 2 Overrange 3 Sensor error 4 Sensor switched off 5 No sensor 6 Identification error 7 BPG BCG HPG error b bbbbE bb Pressure reading of sensor 1 in the current unit of measurement c St...

Страница 42: ...er 5 1 Switching function parameters PArA SP 21 S SPS CR LF R ACK CR LF S ENQ R a b c d e f CR LF Parameter Significance a Save parameters 0 Save default parameters 1 Save user parameters Parameter Significance a Sensor activation 0 Manual default 1 Hot start 2 By channel 1 3 By channel 2 4 By channel 3 b Sensor deactivation 0 Manual default 1 Self control 2 By channel 1 3 By channel 2 4 By channe...

Страница 43: ...ately 5 seconds to complete the test f Status of switching function 6 see above Parameter Significance a aaaa ADC channel 1 Reading of sensor 1 in volts 0 0000 11 0000 b bbbb ADC channel 2 Reading of sensor 2 in volts 0 0000 11 0000 c cccc ADC channel 3 Reading of sensor 3 in volts 0 0000 11 0000 d dddd ADC channel 4 Identification of sensor 1 in volts 0 0000 5 0000 e eeee ADC channel 5 Identifica...

Страница 44: ...operator OR Example 0011 DOWN and UP pressed at the same time Parameter Significance a Identification of sensor 1 PSG PCG PEG MPG CDG BPG BPG402 BCG HPG noSen noid b Identification of sensor 2 see above c Identification of sensor 3 see above CAUTION Relay test In this test the relays switch irrespective of the actual pressure This may cause unintended switching of devices Unplug the RELAY connecti...

Страница 45: ...trol character ENQ starts the test The test can be stopped by pressing Ctrl C 6 3 39 UNI Unit of measurement See Chapter 5 3 1 Unit of mea surement unit 27 S UNI a CR LF R ACK CR LF S ENQ R a CR LF 6 3 40 WDT Watchdog control See Chapter 5 4 3 Watchdog control dt C 29 S WDT a CR LF R ACK CR LF S ENQ R a CR LF Parameter Significance a Torr lock 0 Off default 1 On Parameter Significance aaaa Error s...

Страница 46: ...cked zip file 1 Copy the exe or the zip file into an empty direc tory 2 Unpack the file One of the extracted files is a batch file bat 3 By default the program transfer is assumed to run via the COM1 serial interface Proceed as follows if you want to use another serial interface 3 1 Click the batch file with the right mouse but ton A menu appears 3 2 From the menu select the option Edit The batch ...

Страница 47: ...only S CAF a aaaaE aa b bbbbE bb c ccccE cc CR LF R ACK CR LF S ENQ R a aaaaE aa b bbbbE bb c ccccE cc CR LF NOTE The CAF command can also be used with other pa rameters See Chapter 7 3 4 Calibrating the unit 46 7 3 4 Calibrating the unit The Vacuum Gauge Controller can be calibrated auto matically with the interface commands CAF and CAO The following auxiliary tools are required D Sub plug 15 pin...

Страница 48: ...gh precision voltage source See Chapter 3 3 4 SENSOR 12 Pin 2 10 000 V Pin 12 GND 7 Put the D Sub plug with the voltage source con nections onto the sensor connection of the respec tive channel 8 Use the serial interface to send the command CAF a to the unit For the parameter a use 0 Channel 1 1 Channel 2 2 Channel 3 The calibration factor of the respective channel is deter mined and stored in the...

Страница 49: ...error Or The Vacuum Gauge Controller has been switched off and on without suffi cient delay Press PARA to acknowledge The Vac uum Gauge Controller will acknowledge automatically after 2 s if the watchdog control is set to auto rA Error in the main memory RAM Press PARA to acknowledge EP Error in the program memory EPROM Press PARA to acknowledge EE Error in parameter memory EEPROM Press PARA to ac...

Страница 50: ...ge Controller may only be stored in a dry room The following requirements must be met 9 3 Disposal The product must be disposed of in accordance with the relevant local regulations for the environmentally safe disposal of systems and electronic components Ambient temperature 20 60 C Humidity As low as possible Prefera bly in an air tight plastic bag with a desiccant Artisan Technology Group Qualit...

Страница 51: ... Hg psi lb in2 Pa 1 10 2 0 987 10 5 1 45 10 4 mbar 102 1 0 75 1 45 10 2 Torr 1 333 102 1 333 1 1 934 10 2 psi 6 895 103 68 95 51 71 1 1 È Æ mm m inch ft mm 1 10 3 3 937 10 2 3 281 10 3 m 1000 1 39 37 3 281 inch 25 4 2 54 10 2 1 8 333 10 2 ft 304 8 0 3048 12 1 È Æ Kelvin Celsius Fahrenheit Kelvin 1 C 273 15 F 459 67 5 9 Celsius K 273 15 1 F 5 9 17 78 Fahrenheit K 9 5 459 67 C 17 78 9 5 1 Artisan Te...

Страница 52: ...tein 7 Operating Manual Penning Gauge PEG100 tina14e1 INFICON AG LI 9496 Balzers Liechtenstein 8 Operating Manual Capacitance Diaphragm Gauge CDG025 tina01e1 INFICON AG LI 9496 Balzers Liechtenstein 9 Operating Manual Capacitance Diaphragm Gauge CDG045 CDG045 H tina07e1 INFICON AG LI 9496 Balzers Liechtenstein 10 Operating Manual Capacitance Diaphragm Gauge CDG100 tina08e1 INFICON AG LI 9496 Balze...

Страница 53: ...ation 46 A D converter test 30 42 B Back side 11 Baud rate 27 35 C Calibration 46 Calibration factor 46 Calibration offset 46 Characteristic curve of recorder output 27 Cleaning 45 Communication 32 Continuous transmission of measurements 33 35 Number formats 33 Protocol 32 Receiving 33 Sending 32 Computer interface 14 32 Resetting 40 Testing 31 44 Connections CONTROL 14 Ground 12 Mains connection ...

Страница 54: ...on 17 Switching the degas function off 18 Switching the degas function on 18 Measuring range 24 37 Mnemonics Definition 32 Overview 34 Mounting the unit in a rack 11 O Offset 24 39 Operating modes 16 Measurement mode 17 Parameter mode 19 Program transfer mode 45 P Parameter groups 19 Parameter mode 19 Basic operation 20 Parameter setup lock 30 38 Parameters General parameters 27 Sensor Parameters ...

Страница 55: ...vice 16 Sensor 17 38 Switching the emission on 26 T Technical data 7 Test parameters 29 A D converter ID 31 42 A D converter signal 30 42 Display test 30 42 EEPROM test 30 42 EPROM test 30 42 Firmware version 29 39 I O test 31 43 Keyboard test 43 Parameter setup lock 30 38 RAM test 30 44 RS232C test 31 44 Selection 29 Torr lock 30 44 Watchdog control 29 44 Threshold values 21 41 Adjustment range 2...

Страница 56: ...Products VGC402 VGC403 Vacuum Gauge Controller Part numbers 398 020 398 021 Standards Harmonized and international national standards and specifications EN 61010 1 2001 Safety requirements for electrical equipment for measurement and control use EN 61000 3 2 2006 EMC limits for harmonic current emissions EN 61000 3 3 1995 A1 2001 A2 2005 EMC limita tion of voltage changes voltage fluctuations and ...

Страница 57: ...3 388 3700 LI 9496 Balzers Liechtenstein Tel Fax reachus inficon com www inficon com Original tinb07d1 e 2011 07 t i nb07e1 e Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 58: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

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