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Transpector MPS Operating Manual

6.4 Maintenance Procedures

This section will detail the sensor’s required routine maintenance.

6.4.1 Bakeout of Quadrupole

If the symptoms in

section 7.2, Symptom-Cause-Remedy Chart, on page 7-1

suggest that the sensor is contaminated, try first to restore normal performance by
baking the sensor under a high vacuum of at least 1 x 10

-5

Torr (1.333 x 10

-5

mbar)

[1.333 x 10

-3

Pa] for several hours or preferably overnight.

Table 6-1

represents

the maximum bakeout temperatures.

If baking the sensor doesn’t increase the sensor performance, it may be necessary
to perform the tasks described in

section 6.5.3, Filament Kit Replacement, on page

6-6

and also in

section 6.5.4, Ion Source Removal, on page 6-9

If the procedures explained above do not solve the problem, contact INFICON.
Refer to

section 1.3, How To Contact Customer Support, on page 1-3

CAUTION

When heating the sensor above 200



C, the electronics

module and the signal contact must be removed from the
sensor.

6.4.2 Spare Heating Jacket Part Numbers

INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150



Heating jacket part numbers are shown in

Table 10-1 on page 10-1

Table 6-1 Maximum bakeout temperatures

While

Operating

With

Electronics

Removed

Faraday Cup Sensors

200



300



Electron Multiplier
Faraday Cup
Combination

EM Mode

FC Mode

150



200



300



300



Содержание Transpector MPS

Страница 1: ...Transpector MPS O P E R A T I N G M A N U A L Gas Analysis System PN 074 603 P1B Cover Page ...

Страница 2: ...ins embedded software protected under the following copyrights Copyright INFICON Inc Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product improve...

Страница 3: ...Declaration Of Conformity Page 1 ...

Страница 4: ...ch written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE ...

Страница 5: ...pose of the Transpector MPS Gas Analysis System 1 4 1 6 General Description of the Transpector MPS Gas Analysis System 1 5 1 7 Specifications for the Transpector MPS Gas Analysis System 1 5 1 8 Supplied Items 1 5 1 9 Physical Requirements 1 6 1 9 1 Physical Dimensions 1 6 1 9 2 Weight 1 6 1 9 3 Mounting Requirements 1 7 1 9 4 Ventilation Requirements 1 7 1 9 5 Maintenance Access 1 7 1 10 Electrica...

Страница 6: ...18 Installing the Heater Jacket optional 1 18 Chapter 2 Connecting Transpector MPS 2 1 Introduction 2 1 2 2 General Networking Information 2 1 2 2 1 IP Addresses 2 1 2 2 2 Subnetworking 2 3 2 3 Transpector MPS IP Address 2 3 2 3 1 Changing Transpector MPS IP Address 2 3 2 3 1 1 Using the INFICON Mass Spectrometer Search Utility to Change the IP Address 2 4 2 3 1 1 1 IMSSU Capabilities 2 5 2 3 1 2 ...

Страница 7: ...ass Spectra 4 1 4 1 1 1 Ionization Process 4 2 4 1 1 2 Isotope Ratios 4 3 4 1 1 3 Electron Energy Effects 4 5 4 1 1 4 A Qualitative Interpretation Guide 4 6 4 1 2 Quantitative Interpretation of Mass Spectra Calculating Partial Pressures 4 8 4 1 3 Additional Information for Interpreting Mass Spectra 4 14 4 1 3 1 Ion Source Characteristics 4 14 4 1 3 2 Scanning Characteristics 4 15 4 1 3 3 Fragmenta...

Страница 8: ... 2 Default Tune Mode Parameters 5 20 5 5 2 3 3 Tuning Transpector MPS 5 20 5 5 2 4 Changing the Transpector MPS IP Address and Port Number 5 22 5 5 2 4 1 Manually Changing the IP address 5 22 5 5 2 4 2 Using DHCP to Allow the Network to Assign an IP address 5 23 5 5 2 4 3 Changing the Port Number of Transpector MPS 5 23 5 5 2 4 4 Changing the Subnet Mask of Transpector MPS 5 24 5 5 2 4 5 Changing ...

Страница 9: ...e Filament Kit 6 4 6 5 1 2 Tools for Replacing the Ion Source 6 4 6 5 1 3 Tools for Replacing the Electron Multiplier 6 4 6 5 2 How to Determine if a Filament Kit Replacement is Required 6 5 6 5 3 Filament Kit Replacement 6 6 6 5 4 Ion Source Removal 6 9 6 5 5 Electron Multiplier Replacement 6 11 6 6 Calibration 6 15 6 6 1 Mass Alignment 6 15 6 6 1 1 Factory Tuning 6 15 6 6 1 2 Selecting Tune Mass...

Страница 10: ...roduction 11 1 11 2 Sensor Length Vacuum Side 11 1 11 3 Mass Range 11 1 11 4 Detector Type 11 1 11 5 Resolution 11 1 11 6 Temperature Coefficient 11 2 11 7 Sensitivity 11 2 11 8 Minimum Detectable Partial Pressure 11 2 11 9 Zero Blast Interference at Mass 2 11 2 11 10 Maximum Operating Pressure 11 3 11 11 Maximum Sensor Operating Temperature 11 3 11 12 Maximum Bakeout Temperature 11 3 11 13 Operat...

Страница 11: ...S Operating Manual 12 1 2 Electronics Module 12 2 12 1 3 Power Supply 12 2 12 1 4 Sensor 12 2 12 1 5 Extension Kit 12 3 12 1 6 Software 12 3 12 1 7 Heating Jacket System Optional 12 3 12 1 8 Angle Valve Optional 12 3 Index ...

Страница 12: ...either a member of the FabGuard suite of programs or the Transpector Web UI onboard web server This chapter provides an overview of the Transpector MPS Gas Analysis System Topics include the purpose of Transpector MPS its specifications a list of supplied items installation instructions and customer support contact information Software information can be found either in the FabGuard Explorer opera...

Страница 13: ... following Caution and Warning paragraphs are used to alert the reader of actions which may cause either damage to the instrument or bodily injury CAUTION This is an example of a Caution paragraph It cautions against actions which may cause an instrument malfunction or the loss of data WARNING This is an example of a General Warning paragraph It warns against actions which may cause bodily injury ...

Страница 14: ...ady attempted the exact wording of any error messages 1 3 1 Returning Your Transpector MPS to INFICON Do not return any component of Transpector MPS to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization RMA number Transpector MPS will not be serviced without an RMA number Prior to being given an RMA number a Declaration Of Contamination DOC...

Страница 15: ...sis System identifies and performs a quantitative analysis of residual gas species present inside a vacuum system The sensor a quadrupole mass spectrometer analyzes gases by ionizing some of the gas molecules separating the ions by their mass to charge ratio measuring the quantity of ions at each mass The ions exit the quadrupole at their specific mass to charge ratio and generate a signal at the ...

Страница 16: ... feedthrough flange which is bolted to the vacuum space where the gas analysis measurements are made 2 Electronics Module The electronics module controls the sensor and communicates to the operating computer The electronics module and sensor are sold in sets The electronics module attaches to and is supported by the sensor 3 Software The software controls the electronics module and displays the da...

Страница 17: ...ions Figure 1 1 shows the overall physical dimensions for Transpector MPS Figure 1 1 Physical dimensions 1 9 2 Weight The Transpector MPS electronics module weighs 1 53 kg 3 lb 6 oz The Transpector MPS systems complete weight depends on which sensors are used Transpector MPS A B C MPS100F MPS200F 143 mm 5 63 in 50 mm 1 98 in 365 7 mm 14 40 in MPS100M MPS200M 199 mm 7 83 in 50 mm 1 98 in 421 6 mm 1...

Страница 18: ...around the Transpector MPS electronics module must be maintained for proper ventilation 1 9 5 Maintenance Access Easy access to Transpector MPS should be maintained for installation and maintenance activities 1 10 Electrical Power Requirements Transpector MPS must be connected to a source of power as specified in the following sections 1 10 1 Required Supply Voltage 20 to 30 V dc 24 V dc typical 1...

Страница 19: ...ximum altitude range of 2000 m 6561 ft 1 13 3 Pollution Degree Pollution Degree 2 per EN61010 1 1 13 4 Operating Temperature Transpector MPS is designed to operate within a temperature range of 5 C 41 F to 50 C 122 F 1 13 5 Humidity Transpector MPS is designed to operate in an environment with up to 98 relative humidity 1 14 Computer System Requirements Refer to the FabGuard Explorer Operating Man...

Страница 20: ...fore installing the sensor on your system check for any signs of loose or broken parts Do not attempt to clean the sensor in any kind of solvent Cleaning the sensor requires its disassembly If the sensor is contaminated and needs cleaning contact INFICON 1 16 1 1 ConFlat Flanges The sensor is installed on a vacuum system with a 2 75 in DN40 ConFlat flange ConFlat flanges and similar compatible typ...

Страница 21: ...and flange faces with your fingers during the installation process 2 Install the copper gasket between the two flanges See Figure 1 3 Always use a new gasket Do not attempt to use gaskets more than once Figure 1 3 Gasket and flange assembly 3 Bring the two flanges together making sure that the gasket fits in the recess in both flanges Flange faces should be parallel If the gasket is properly seate...

Страница 22: ... flange faces are brought into even contact with each other 1 16 1 2 Attaching the Sensor to the Vacuum Chamber The sensor may be mounted in any position when attaching it to the vacuum vessel or chamber CAUTION Avoid mounting the sensor near any magnetic fields greater than two gauss It is important that the connection between the sensor and the vacuum chamber does not interfere with gas exchange...

Страница 23: ...part number for the 203 2 mm 8 in long extension tube kit is 961 206 G2 CAUTION The silver plated bolts used for mounting the sensor to the vacuum system must be oriented such that the bolt heads are on the same side of the sensor as the electronics box Otherwise there may be interference between the black INFICON Transpector mounting nut and the sensor mounting hardware 249 1 mm 193 mm 193 3 mm 1...

Страница 24: ...ld result in permanent damage to the detector WARNING During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket may be extremely hot These surfaces may exceed 100 C at the maximum ambient operating temperature 50 C which will cause burns if touched directly without using the proper personal protection equipment Table 1 1 Sensor maximum bakeout ...

Страница 25: ...sor mounting connector assembly includes a mounting nut and an O ring When the mounting nut is tightened the O ring compresses making a tight fit on the sensor housing For proper installation place the nut over the end of the sensor and roll the O ring back to the groove on the sensor 2 Note the recessed area on the sensor feedthrough and the ground tab on Transpector MPS electronics module Match ...

Страница 26: ...ecting the 24 V dc Power Supply 1 Connect the 24 V dc power supply cable to the 24V connector on the Transpector MPS electronics module by sliding back the latch installing the cable and then releasing the latch NOTE The latch locks the connector to the electronics module and must be slid back to detach the cable from the Transpector MPS electronics module 2 Plug the AC line cord into the mating I...

Страница 27: ...Input 2 to Pin 15 will turn off the emission See Table 1 2 CAUTION Controlling emission through the digital inputs bypasses all software or hardware interlocks When using digital inputs for controlling Transpector MPS emission develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector MPS 1 17 2 One Status Relay Output One status relay...

Страница 28: ...1 17 Transpector MPS Operating Manual Figure 1 7 Pinout connectors ...

Страница 29: ...ntation See Figure 1 8 NOTE For all other heater installations discard this kit 1 Install the Manifold Heater over the tube extension and align the snaps with the tapped hole in the sensor flange 2 Align the Internal Heater Bracket so the large hole fits over the snap on the heating jacket and capture the bracket in the Manifold Heater by securing the snaps 3 Using a 7 mm combination wrench attach...

Страница 30: ... Figure 1 8 Heater jacket installation Internal Heater Bracket provided in kit 961 433 G1 Snap in Manifold Heater Manifold Heater 961 416 P1 provided in kit 961 029 Transpector MPS Hex head fastener provided in kit 961 433 G1 Sensor Flange ...

Страница 31: ...d uses IP addresses to locate and identify sensors on a network 2 2 General Networking Information This section will discuss some of the general networking variables that can affect the connection of Transpector MPS 2 2 1 IP Addresses IP addresses can be set either manually or automatically Static manual IP addresses are set by the user and are manually changeable by the user Dynamic automatic IP ...

Страница 32: ...ically reconnect to the Transpector MPS sensor because it does not know the newly assigned IP address This will lead to loss of communication and loss of data Static IP addresses do not change unless the IP address is manually changed Static IP addresses help protect Transpector MPS from losing communication and data Transpector MPS uses IPv4 IP addresses IPv4 IP addresses consist of 32 bits that ...

Страница 33: ...ans that the two devices are on different subnets 2 3 Transpector MPS IP Address By default Transpector MPS ships with an IP address of 192 168 1 100 with a subnet mask of 255 255 0 0 NOTE When connecting Transpector MPS to an existing local network there must be a static IP address for each Transpector MPS being installed Contact your network administrator for IP address assignments 2 3 1 Changin...

Страница 34: ...ot need to be installed to work Upon double clicking the IMSSU will display as shown in Figure 2 1 Figure 2 1 INFICON Mass Spectrometer Search Utility When the IMSSU first opens nothing will be displayed The IMSSU acts detects all Transpector MPS installed on the network regardless of IP address The IMSSU will start automatically or it can be manually started by clicking Search Clears List The IMS...

Страница 35: ...IMSSU TCP IP Properties window The TCP IP Properties window will display Transpector MPS MAC Address the current Transpector MPS IP address a Change To text box to enter the new Transpector MPS IP address a selection of either DHCP On or DHCP Off To change the IP address type in the new IP address in the Change To box and click Apply Transpector MPS will automatically reboot and will come back onl...

Страница 36: ... executed within 60 seconds of turning the Find Device On Show Settings Click Show Settings to open a display on the right side of the IMSSU that will display multiple settings of Transpector MPS This is an excellent tool for troubleshooting The following settings are displayed Serial Number Gateway IP Address DHCP Status MAC Address Description Subnet Mask Name Description Structure Version Name ...

Страница 37: ... follow these instructions 2 3 1 2 1 Windows 7 Instructions NOTE Changing the IP address of the host computer requires administrator rights An administrator account is necessary to change the IP address 1 Click Start to display the Start menu then click Control Panel Start is located on the taskbar on the Windows 7 desktop See Figure 2 4 Figure 2 4 Start menu 2 In the Network and Internet group cl...

Страница 38: ...ndow click Change adapter settings Figure 2 6 Change adapter settings 4 If the host computer is connected to Transpector MPS through the Ethernet port of the computer right click Local Area Connection and select Properties See Figure 2 7 Figure 2 7 Changing adapter settings ...

Страница 39: ...anual 5 Select Internet Protocol Version 4 TCP IPv4 then click Properties See Figure 2 8 Figure 2 8 TCP IPv4 6 In the TCP IPv4 properties menu select Use the following IP address See Figure 2 9 Figure 2 9 Use the following IP address ...

Страница 40: ...8 In Subnet mask type 255 255 0 0 9 Click OK Figure 2 10 Changing the computer IP address 10 The IP address will now be set to the manual IP address chosen in step 7 Exit all of the menus and then connect to Transpector MPS 11 To change the IP address back to its default settings follow steps 1 through 6 and return the IPv4 properties to their original settings ...

Страница 41: ... 1 Click Start to display the Start menu then click Control Panel Start is located on the taskbar on the Windows XP desktop See Figure 2 11 Figure 2 11 XP Start Menu 2 On the Control Panel click Network and Internet Connections See Figure 2 12 Figure 2 12 XP Control Panel ...

Страница 42: ...nections See Figure 2 13 Figure 2 13 Network and Internet Connections 4 Double click the Local Area Connection icon See Figure 2 14 NOTE The icon may have a number after it if more than one connection has been installed Make sure to choose the correct Local Area Connection Figure 2 14 Network Connections ...

Страница 43: ... Connection Status 6 Select Internet Protocol TCP IP then click Properties See Figure 2 16 Figure 2 16 Local Area Connection Properties 7 Select Use the Following IP Address and enter in the desired IP address Then click OK The IP address will update See Figure 2 17 Figure 2 17 TCP IP Properties ...

Страница 44: ...of Transpector MPS is 192 168 x x The IP address of the host computer used to control Transpector MPS must have a subnet mask of 255 255 0 0 and a network prefix of 192 168 x x If this is not the case change the computer IP address to match the network prefix of Transpector MPS For example giving the computer an IP address of 192 168 1 101 will allow Transpector MPS to communicate directly with th...

Страница 45: ...ted to a single host computer and not to an existing local area network a private local network must be created Transpector MPS will have to be installed on either a router or Ethernet switch The router or switch is then connected to the host computer through the LAN port of the router switch 2 4 2 2 Installing Multiple Transpector MPS on an Existing Local Network If multiple Transpector MPS senso...

Страница 46: ...A high vacuum environment correlates to pressures below 6 7 x 10 2 Pascals or approximately 5 x 10 4 Torr approx 6 7 x 10 4 mbar By attaching the sensor to a small vacuum system with a suitable controlled leak or other gas inlet device the Transpector MPS Gas Analysis System can measure gases or volatile materials at pressures higher than those at which the sensor itself can operate The Transpecto...

Страница 47: ... of the ions is long enough to pass through the quadrupole without collisions 3 3 The Ion Source The ion source of Transpector MPS is optimized for detecting residual gases in a vacuum system The sensor has an open construction that facilitates the flow of gas species into the ionization region Figure 3 2 on page 3 3 shows the open ion source in more detail Inside the ion source a large current is...

Страница 48: ...3 3 Transpector MPS Operating Manual Figure 3 2 Sensor s ion source Electron Repeller Filament Cathode Anode with Cage Focus Lens Source Exit Lens ...

Страница 49: ...de are pulled away by the potential on the focus lens and formed into a beam The focus lens is sometimes called an extractor since it extracts the ions from the region in which they are created The focus lens also serves to focus the ion beam into the hole in the source exit lens To attract positive ions the focus lens is biased negatively with respect to the anode The potential on the source exit...

Страница 50: ...y oxidized This means that the surface of the yttria coated iridium filament is inert with respect to oxygen damage For applications which will include exposure to oxygen choosing the yttria coated iridium filament is appropriate Yttria coated iridium filaments do not withstand exposure to halogens Upon exposure to halogens the yttria coating will form yttria oxyhalides which will chip off of the ...

Страница 51: ...he rods and the insulators in which they are mounted form an extremely precise mechanical assembly The distance between the center of the square array and the closest rod surface is known as the quadrupole radius with the symbol r0 If the ratio of the round rod radius to r0 is made equal to 1 148 the resulting electric field generates the maximum quadrupole field Opposite rods are electrically con...

Страница 52: ...a suitable choice of DC to RF ratio the mass filter can be made to discriminate against both high and low mass ions to the desired degree The kinetic energy directed along the Z axis of the mass filter usually called the ion energy is primarily dependent on the difference between the potential at which the ions were formed approximately the anode voltage and the pole zero The ion energy is usually...

Страница 53: ...mass filter for a mixed beam of ions rejecting those of both high and low mass while passing those of an intermediate mass The selectivity of the mass filter is expressed in terms of resolution R which is numerically given by the ratio of the center mass M to the width M both in AMU of the pass band Since the number of the ions passed by the filter falls off gradually as the edge of the pass band ...

Страница 54: ...urrent is called the zero blast See Figure 3 4 on page 3 9 The zero blast present in all quadrupole based sensors can interfere with the observation of masses 1 and 2 when significant quantities of higher mass ions are present In some instruments the magnitude of the zero blast is concealed by preventing the voltages from reaching zero With Transpector MPS the zero blast only produces parts per mi...

Страница 55: ...etector is typically a metal plate or a cup shaped electrode on which the ion beam impinges Ions strike the detector and are neutralized thus drawing a current from the circuitry connected to the electrode Usually the current flow that results is exactly equal to the incident ion current In Transpector MPS instruments the Faraday Cup is at ground potential The sensitivity for Transpector MPS instr...

Страница 56: ...he result is that as many as a million electrons or more can be produced by each incident ion The current from a Faraday detector is positive for positive ions An EM detector current is negative The ratio of the electron output current to the incident ion current is known as the EM gain The gain primarily depends on the EM type the voltage applied to the EM input the voltage applied across the EM ...

Страница 57: ... not degrade when exposed to air In order to prolong its useful life a copper beryllium dynode multiplier must be stored under vacuum exposure to air for more than a brief period can result in a significant decrease in the maximum available gain The CDEM has some disadvantages The maximum operating temperature for the CDEM is 150 C It can still be baked out at 300 C provided that the high voltage ...

Страница 58: ...n as follows Ensure diffusion pumped vacuum systems are properly trapped to reduce oil back streaming Ensure turbomolecular pumped systems are interlocked to eliminate mechanical pump oil back streaming through a nonspinning turbo pump Electron Multiplier gain reduction from these kinds of problems can range from 50 to more than 90 The initial gain of the EM is generally high enough to accommodate...

Страница 59: ... partial pressures and relative concentrations For a discussion of how Transpector MPS produces measurements refer to Chapter 3 How The Instrument Works 4 1 1 Qualitative Interpretation of Mass Spectra The basic graphical output of a Transpector MPS is the mass spectrum A mass spectrum is a plot of ion intensity as a function of ion mass to charge ratio Each chemical substance has a characteristic...

Страница 60: ... 4 1 The bottom graph is a trend analysis showing the most important masses versus time The top graph shows the data taken during the scan and shows the air spectra over a six decade y axis The prominent peaks for air are mass 28 from Nitrogen mass 32 from Oxygen mass 40 from Argon and mass 18 from water vapor Table 4 1 Electron impact ionization processes XYZ e XYZ 2e 1 XYZ2 3e 2 XY Z 2e 3 XY Z 2...

Страница 61: ...ergy There are some situations when it is difficult to determine whether the ion is singly or multiply charged When a molecule is composed of two atoms of the same element Transpector MPS has difficulty distinguishing between the singly charged one atom fragment ion and the doubly charged two atom molecular ion which will both have the same mass to charge ratio Refer to Figure 4 1 the peak at 28 A...

Страница 62: ...he mass 35 isotope of chlorine 35 Cl is the same as the probability of ionizing the mass 37 isotope 37Cl Thus the peak height ratio of mass 35 to 37 from HCl will be 3 07 to 1 75 4 24 6 For a listing of the isotopic ratios for the lighter elements see Table 4 2 For a complete listing of the natural abundances for the isotopes of all the elements see the Handbook of Chemistry and Physics from CRC P...

Страница 63: ...ons produced rises steeply with energy until a maximum is reached at about 55 eV As the electron energy rises above this level the rate of Ar production slowly decreases The appearance potential for Ar2 is 43 5 eV and the ion production rate does not maximize until the electron energy exceeds 100 eV The appearance potential for Ar3 is approximately 85 eV while the appearance potential for Ar4 is o...

Страница 64: ...sses of peaks possible ion identities for each of these masses and common sources for each of these ions NOTE This list is by no means all inclusive Table 4 3 Spectrum Interpretation Guide Spectrum Interpretation Guide AMU Chemical Symbol Sources 1 H water F or hydrogen F 2 H2 D hydrogen deuterium 2H 3 HD 3 H hydrogen deuterium tritium 3 H 4 He helium 5 No known elements 6 C Doubly Ionized 12 C Ra...

Страница 65: ...ol P 33 HS hydrogen sulfide F 34 H2S 34 S O2 hydrogen sulfide P sulfur isotope oxygen isotope 35 Cl chlorine isotope See Note 2 36 HCl 36 Ar C3 hydrochloric acid argon isotope hydrocarbons 37 37 Cl C3H chlorine isotope See Note 2 hydrocarbons 38 37HCl C3H2 hydrochloric acid or See Note 2 hydrocarbons 39 C3H3 See Note 3 hydrocarbons 40 Ar C3H4 argon See Note 1 hydrocarbons 41 C3H5 See Note 1 hydroc...

Страница 66: ... constant for the peak at mass b from substance a and Iab is the ion current at mass b from substance a The proportionality constant Kab depends on the nature of the substance being detected and on the characteristics of Transpector MPS The substance dependent part is called the material factor Mab The instrument dependent part is called the analyzer factor Ab and depends primarily on the ion mass...

Страница 67: ...on the energy of the ionizing electrons If the correct values of these factors are not known for the exact conditions of the particular analyzer being used they can be approximated using published values for other conditions with generally only a small loss in accuracy Fragmentation factors can be calculated from fragmentation patterns given in the general references cited in Chapter 8 Other valua...

Страница 68: ...2 34 40 83 Krypton Kr 60 07 20 17 84 45 65 05 86 13 Benzene C6H6 82 10 Trichlorethylene C2HCl3 78 53 83 10 95 22 51 11 130 22 52 11 Methane CH4 132 21 50 10 16 46 97 14 15 40 60 13 Carbon Dioxide CO2 14 07 44 70 13 04 Water H2O 28 11 18 75 16 06 Methanol CH3OH 17 19 12 01 31 43 1 05 32 23 16 02 Carbon Monoxide CO 29 18 28 91 28 03 Xenon Xe 12 05 132 26 16 03 Neon Ne 129 26 20 90 131 22 Ethanol C2H...

Страница 69: ... the substance of interest The ratio of the gauge reading to the known true pressure is the relative ionization probability To determine the true pressure use a gauge which is gas species independent for example a capacitance manometer or a gauge with a known sensitivity factor for example a spinning rotor gauge Table 4 5 Ionization Probabilities for some Common Substances Substance Formula Relati...

Страница 70: ...ectron Multiplier G measured at mass 28 for nitrogen is the Electron Multiplier output current divided by the Faraday mode output current under otherwise identical conditions The multiplier gain is a strong function of the high voltage applied The sensitivity of the instrument S is the ratio of Faraday mode ion current for a given pressure of pure nitrogen measured at mass 28 and is typically expr...

Страница 71: ... the same as the relative ion gauge sensitivity as shown in dimensionless TFb transmission factor the fraction of total ions at mass b which pass through the mass filter relative to ions with a mass of 28 AMU nominally TFM 28 M dimensionless DFab detection factor for mass b ions from substance a relative to nitrogen at 28 AMU assumed to be 1 00 for Faraday detectors but varies for Electron Multipl...

Страница 72: ...ificant effect on the detected gas composition First the analyzer itself is a source of gas molecules because of outgassing from its surfaces Usually the outgassing levels can be reduced by baking the analyzer in vacuum and by using the Degas function wherein the ion source surfaces are bombarded by high energy electrons When operating in the ultra high vacuum UHV region it is best to bake the sen...

Страница 73: ...substances such as sulfur hexafluoride chlorofluorocarbons perfluorotributylamine or perfluorokerosene for extended periods of time it is not uncommon for a strong F peak at 19 AMU to remain even after the fluorine containing substance has been removed When operating in the UHV region EID ESD of H C O and CO and other ions is not uncommon The clue to diagnosing this problem is that the observed fr...

Страница 74: ...ntation factor is the fraction of the total ion current contributed by ions of the chosen mass Only peaks contributing at least one percent to the total ion current are included in the list The sum of the factors for all the peaks in a mass spectrum cannot exceed 1 00 The sum can be less than 1 00 if only some of the peaks are listed either there are many peaks or some of the ions produced lie out...

Страница 75: ...ng Transpector Web UI 5 1 1 What is Transpector Web UI Transpector Web UI displays data in a spectrum window can perform leak checking when the computer that controls Transpector MPS is located away from Transpector MPS provides a diagnostic window that displays instrument status and errors Transpector Web UI should be used in parallel with a program from the FabGuard Suite NOTE Transpector Web UI...

Страница 76: ...id Apple browsers will not work with the Transpector Web UI A third party browser must be installed Transpector Web UI has not been optimized for use on Smart Phones such as Android Devices and iPhones Check http www inficon com for updates Table 5 1 Minimum computer requirements Parameters Transpector Web UI Requirements Processor Pentium 4 1 8 GHz or greater RAM 1 GB or greater Resolution 1024 x...

Страница 77: ...r Web UI will then run on the Remote Desktop computer 5 3 1 Connecting to Transpector Web UI with default Factory IP address The default web address for Transpector MPS is 192 168 1 100 To connect to Transpector Web UI type 192 168 1 100 into the browser address field then press Enter See Figure 5 1 Figure 5 1 Navigating to Transpector Web UI NOTE The device running the browser must also be config...

Страница 78: ...If Transpector Web UI STATUS webpage still does not display verify that the IP address was not changed from the factory default IP address If the IP address has been changed follow the instructions in section 5 3 2 If the IP address was not changed from the factory default make sure there are no other devices connected to Transpector Web UI ...

Страница 79: ...ality is split between several different windows To navigate from window to window click on the button of the desired window The buttons are displayed in Figure 5 3 Figure 5 3 Transpector Web UI window selection buttons The first window displayed by Transpector Web UI is STATUS In the following sections the different windows are identified and described For information on using the different windo...

Страница 80: ...d Transpector MPS is using MASS RANGE The mass range of the connected Transpector MPS 100 or 200 AMU DETECTOR TYPE The detector type of the connected Transpector MPS either FC or CDEM EMISSION STATUS The status of the emission of the Transpector MPS sensor either ON of OFF EM STATUS The status of the Electron Multiplier if equipped of the Transpector MPS sensor either ON or OFF FILAMENT NUMBER The...

Страница 81: ... instructions on using the MONITOR window see section 5 5 2 1 Data Acquisition on page 5 10 Figure 5 5 MONITOR window 5 4 3 LEAKCHECK The LEAKCHECK window see Figure 5 6 is used for leak checking with Transpector MPS For instructions on how to use the LEAKCHECK window see section 5 5 2 2 Leak Checking on page 5 13 Figure 5 6 LEAKCHECK window ...

Страница 82: ...spector MPS Operating Manual 5 4 4 DIAGNOSTICS The DIAGNOSTICS window see Figure 5 7 includes System Status and other diagnostic tools useful when contacting INFICON for assistance Figure 5 7 DIAGNOSTICS window ...

Страница 83: ...tuning Transpector MPS For tuning instructions see section 5 5 2 3 Tune Mode on page 5 16 Figure 5 8 TUNE window 5 4 6 HELP Click HELP to display the Transpector Web UI Operating Manual in a separate browser tab 5 4 7 PRINT Click PRINT to display a printing dialog box that allows for printing the displayed window ...

Страница 84: ... Transpector MPS sensor to the Web UI if the RGA is idle 5 5 2 Standalone Transpector Web UI Operation This section provides instruction for using Transpector Web UI as a standalone software program 5 5 2 1 Data Acquisition The MONITOR window is used for data acquisition NOTE Transpector Web UI does not allow for saving data or displaying the data in a Trend graph Transpector Web UI is designed fo...

Страница 85: ...s this can be as low as 0 Max The ending point of the scan in AMU The maximum point is defined by the model 100 AMU Transpector MPS can scan up to 100 AMU and 200 up to 200 AMU Dwell The amount of time that Transpector MPS averages data for each collected point Longer dwell times will decrease noise and increase scan time while shorter dwell times will be noisier and decrease scan time ppAMU This ...

Страница 86: ...igure 5 10 Emission status The Electron Multiplier is controlled the same way as the emission To turn the Electron Multiplier on or off click EM There are only two different EM states OFF Black and ON Green See Figure 5 11 Figure 5 11 Electron multiplier status Emission and EM are the only settings that when altered have an immediate impact on data collection The other scan parameters can be chang...

Страница 87: ... by showing increased levels of nitrogen oxygen and carbon dioxide Click LEAKCHECK to display the LEAKCHECK window Upon entering the LEAKCHECK window Transpector MPS will start collecting data using the default parameters as shown in Table 5 3 The Transpector Web UI LEAKCHECK window utilizes Transpector MPS signal levels to generate alarm statuses When the LEAKCHECK window is first entered Transpe...

Страница 88: ...o automatically generate alarm levels based on recent data acquired To manually set alarm levels highlight the alarm level of interest type the desired alarm level then click SET 2 Transpector MPS Scan Parameters Transpector MPS can use any mass for leak detection To change the mass highlight the mass shown in the MASS box type the new desired mass then click SET The DWELL time that is used for th...

Страница 89: ...ignal in amps of the specified mass If the signal exceeds warning or alarm levels the color of the bar will change See Figure 5 13 Figure 5 13 Thermometer bar levels 4 EMISSION and EM Control These work the same as EMISSION and EM in the MONITOR window section 5 5 2 1 1 Editable Parameters on page 5 11 Click EMISSION or EM to turn on or off the emission or EM 5 Mass Trend Graph The mass trend grap...

Страница 90: ...AUTO SET implies that the signals generated by Transpector MPS are normal and displays green for alarm status 7 Spray leak check gas around the area of interest and monitor for changes in the Mass Trend Graph 8 Continue spraying the leak check gas until the Thermometer Bar indicates an alarm status with a change in color NOTE An audible alarm will be heard if Google Chrome is the browser and sound...

Страница 91: ...and discuss their functionality Figure 5 14 Tune Mode components 1 CHANGE TUNE MASSES Click CHANGE TUNE MASSES to change the masses used for Transpector MPS tuning The Tune Table Editor will display which allows for editing the tune masses See Figure 5 15 Figure 5 15 Tune table 2 SCAN MASS The SCAN MASS drop down is used to select the mass to be tuned 1 2 3 4 5 6 7 8 9 10 11 13 8 11 12 ...

Страница 92: ...k the equivalent of ten clicks of the single button NOTE The POSITION buttons move the peak in the direction of the arrows i e the button will move the peak left 9 WIDTH buttons The WIDTH buttons increase or decrease the width of the peak to achieve target 10 R The single button or will finely change the peak width The double button or is a change equivalent to ten clicks of the single button NOTE...

Страница 93: ... factory for each individual Transpector MPS to produce optimum tune quality Do not alter this setting unless directed by INFICON FOCUS Voltage Changes the voltage of the focus plates which generate an ion beam from the ion source This has been optimized in the factory for each individual Transpector MPS to produce optimum tune quality Do not alter this setting unless directed by INFICON FILAMENT ...

Страница 94: ...eral tuning instructions see section 6 6 1 on page 6 15 These tips and instructions should be reviewed prior to doing any tuning regardless of the interface Instructions for tuning Transpector MPS using the Transpector Web UI interface are as follows 1 Click CHANGE TUNE MASSES A tune table will display see Figure 5 15 To remove masses from the tune table click the mass to remove then click REMOVE ...

Страница 95: ... a marker that shows the highest intensity point of the peak and the width at 10 Peak Height 6 Use POSITION to align the MASS TARGET to the vertical MARKER When done properly the target and marker will overlap 7 Use WIDTH to change the 10 R that is displayed in the 10 R box An ideal 10 R is 0 90 0 05 8 While adjusting the width of the peak the peak position can change a bit Repeat steps 6 and 7 un...

Страница 96: ... after the Transpector MPS has been turned off then on You may also have to change the IP address of your device e g PC depending on the newly changed Transpector MPS IP address 5 5 2 4 1 Manually Changing the IP address To manually change the IP address of Transpector MPS 1 Click STATUS to display the STATUS window 2 In the SETTINGS group delete the current IP ADDRESS See Figure 5 16 3 Type the n...

Страница 97: ...ctrometer Search Utility to Change the IP Address on page 2 4 6 To return to Transpector Web UI the new IP address must be entered in the address bar of the browser CAUTION If you do not have the IMSSU installed on your computer you will not be able to determine the new IP address of Transpector MPS 5 5 2 4 3 Changing the Port Number of Transpector MPS Transpector MPS is set with a default port nu...

Страница 98: ...to which it is connected 5 5 2 4 5 Changing the Gateway of Transpector MPS Transpector MPS is set with a default gateway of 0 0 0 0 If the network on which Transpector MPS is connected requires a gateway 1 Connect Transpector MPS to a computer with a gateway of 0 0 0 0 2 Enter Transpector Web UI 3 Enter the STATUS window 4 Delete the gateway in the GATEWAY box and type the new gateway 5 Click SET ...

Страница 99: ...or MPS will scan through the indicated mass range A quick qualitative analysis can then be performed to determine what is present inside of the system For deeper analysis use FabGuard software 5 6 1 2 Leak Checking Transpector Web UI is useful as a leak checking tool Upon first entering the MONITOR window peaks at 28 Nitrogen 32 Oxygen and 44 Carbon Dioxide indicate the presence of a leak If the l...

Страница 100: ...rtcuts also allows for differentiating between different Transpector MPS when more than one is present on the network 1 Open Transpector Web UI 2 Highlight the webpage address in the browser right click then click Copy See Figure 5 18 NOTE You can create more than one shortcut per sensor For instance you could create a shortcut to the MONITOR window and a different shortcut to the LEAK CHECK windo...

Страница 101: ...ranspector MPS Operating Manual 4 In the Create Shortcut window paste the webpage address of Transpector Web UI See Figure 5 20 Figure 5 20 Paste webpage address 5 Click NEXT See Figure 5 21 Figure 5 21 Next ...

Страница 102: ... on the desktop with the name given to it in step 5 See Figure 5 24 Figure 5 24 Shortcut icon CAUTION If you change the IP address of Transpector MPS the shortcuts will no longer work 5 6 3 Creating Bookmarks In addition to creating shortcuts on the computer Desktop bookmarks can also be generated inside of the internet browser To set a bookmark click CTRL d when at the intended webpage address Th...

Страница 103: ...d check the following 1 Is anyone else using Transpector Web UI Transpector Web UI will block any incoming requests when it is actively being used 2 Is the web address IP address of Transpector MPS correct If the IP address was recently changed make sure that the browser is directed to the correct address 3 Does Transpector MPS have 24 V power supplied to it If yes try resetting the power 4 Is the...

Страница 104: ... 3 6 2 Safety Considerations If Transpector MPS is used in a manner not specified by INFICON protection provided by the equipment may be impaired 6 2 1 Toxic Material The Transpector MPS sensor does not contain any toxic material However if the Transpector MPS sensor is used in an application wherein toxic material is used or generated residue of the toxic material will likely be present on the su...

Страница 105: ... MPS electronics module is operated while open hazardous electrical voltages may be present Such operation should not be attempted except by qualified service personnel 6 3 General Instructions For All Repair Procedures CAUTION Perform all service procedures in a clean well illuminated area Wear clean nylon lint free lab gloves or finger cots Do not touch the vacuum side of the sensor with unprote...

Страница 106: ...scribed in section 6 5 3 Filament Kit Replacement on page 6 6 and also in section 6 5 4 Ion Source Removal on page 6 9 If the procedures explained above do not solve the problem contact INFICON Refer to section 1 3 How To Contact Customer Support on page 1 3 CAUTION When heating the sensor above 200 C the electronics module and the signal contact must be removed from the sensor 6 4 2 Spare Heating...

Страница 107: ...ement 6 5 1 1 Tools for Replacing the Filament Kit 3 mm Nut Driver 1 16 in Flat Blade Screwdriver 6 5 1 2 Tools for Replacing the Ion Source 1 16 in Flat Blade Screwdriver 2 Phillips Head Screwdriver Precision Pliers 6 5 1 3 Tools for Replacing the Electron Multiplier 1 16 in Flat Blade Screwdriver Phillips Head Screwdriver 1 5 mm x 50 mm Hex Driver 2 0 mm x 75 mm Hex Driver Precision Pliers Non M...

Страница 108: ...filament may be impacted by previous use of Transpector MPS 1 Measure the resistance of each filament This can be accomplished while the sensor is under vacuum by measuring the resistance between pins 3 and 10 for filament 1 and pins 4 and 10 for filament 2 see Figure 6 1 A failed filament will measure open while an intact filament will measure 0 8 Figure 6 1 Sensor pinout Table 6 2 Pin assignment...

Страница 109: ...he exception of the measurements between each filament pin and the filament common pin if the filaments have not failed 6 5 3 Filament Kit Replacement A filament replacement kit can be purchased from INFICON This kit contains a new filament assembly mounted on a shipping fixture and a small Allen wrench Perform the following steps to replace the filament NOTE Refer to section 6 5 1 1 Tools for Rep...

Страница 110: ...e flat blade screwdriver to loosen the clamps holding the filament leads B Gently pull the leads away from the filament assembly See Figure 6 3 Figure 6 3 Remove the leads 3 Carefully pull the filament assembly from the ion source See Figure 6 4 Figure 6 4 Remove the filament assembly B ...

Страница 111: ...ntal movement will cause the damage to the anode 5 Replace the three washers and locknuts and ensure that the anode C aligns with the mating bore D See Figure 6 5 Figure 6 5 Align anode to mating bore 6 Tighten the washers A 7 Insert the filament leads back into the clamps and tighten 8 Using an ohmmeter check that the filament is not shorted to ground and that the filament shows a resistance of a...

Страница 112: ...n page 6 4 before continuing 1 While holding the clamps with the pliers use the flat blade screwdriver to loosen the clamps holding the filament leads A and ion source leads B one is hidden in the figure There are a total of six leads that need to be loosened See Figure 6 6 Figure 6 6 Detach leads 2 Pull the electrical leads away from the sensor NOTE Be careful not to bend the leads A B ...

Страница 113: ...g ion source 4 Remove the ion source by lifting it off the quadrupole assembly 5 A new ion source assembly can now be installed by reversing the above steps 6 Using an ohmmeter check that both filaments are not shorted to ground or to any of the lenses that the filament leads show a filament resistance of approximately 0 8 at the feedthrough between each filament pin and the filament common pin re...

Страница 114: ... pliers use the flat blade screwdriver to loosen the clamps holding the filament leads A and ion source leads B one is hidden in the figure There are a total of six leads that need to be loosened Using the 1 5 mm x 50 mm hex driver unscrew the screws C holding the two RF leads Make sure to remove the lock washers as well See Figure 6 8 Figure 6 8 Detach leads 2 Gently pull the electrical leads awa...

Страница 115: ...g the 2 0 mm x 75 mm hex driver unscrew the three screws D one is hidden in the figure holding the sensor assembly to the feedthrough Gently remove the sensor assembly from the feedthrough See Figure 6 9 Figure 6 9 Removing the sensor assembly D ...

Страница 116: ...ree gold screws E one is hidden in the figure holding the EM assembly inside of the sensor assembly See Figure 6 10 Figure 6 10 Removing the screws holding the EM 5 Gripping the bottom of the EM assembly gently remove the EM from the sensor assembly See Figure 6 11 Figure 6 11 EM Detector E ...

Страница 117: ...ield removed in step 6 onto the new Electron Multiplier assembly 8 Install the new Electron Multiplier assembly into the sensor can 9 When installing the sensor back into the feedthrough ensure that the two pins on the bottom of the detector align with the two pins shown in Figure 6 13 Figure 6 13 Pin location 10 Reverse steps 1 4 to reassemble the Transpector MPS sensor Detector Pins ...

Страница 118: ... the factory Transpector MPS is tuned to different masses depending on the mass range of Transpector MPS The factory tune masses and width standards are displayed in Table 6 3 The gases that are used for factory tuning of these masses are Hydrogen mass 1 and 2 Helium mass 4 Nitrogen mass 28 Krypton mass 86 Xenon mass 134 Table 6 3 Factory tune settings 100 AMU 200 AMU Mass 10 R Mass 10 R 1 0 5 0 1...

Страница 119: ...actory tune masses for the mass range of Transpector MPS to be tuned The factory tune masses can be found in section 6 6 1 1 on page 6 15 6 6 1 2 2 Selecting Masses for Tuning with Process Gases In general Transpector MPS tuning requires access to a low mass a mid mass and a high mass Do not tune mass 1 or 2 if Hydrogen is not present in the process but do not delete them from the tune table Prefe...

Страница 120: ...If Transpector MPS is only used for leak checking mass 4 is the only mass to tune To tune mass 4 find a way to introduce Helium into the vacuum chamber The following procedure may be used if test mix or helium is not available 1 Default all tune parameters 2 Delete all masses except 1 2 and 4 3 Add mass 28 or 40 and tune 4 Delete mass 4 5 Tune highest mass available in your system in some cases th...

Страница 121: ...MPTOM CAUSE REMEDY Power LED does not turn on 24 V external power supply Check input AC line voltage to external power supply Check 24 V input verify input between 20 30 V Replace power supply Electronics failure Return to INFICON for repair No communi cation to HOST computer Sensor IP address not compatible with network Refer to Chapter 2 Connecting Transpector MPS Transpector Communications port...

Страница 122: ...onics module is pushed all the way on sensor ANODE error Defective sensor anode shorted Check sensor with OHM meter for shorts See sensor pin out diagram Fix or replace sensor Electronics failure Return to INFICON for repair RF error Defective sensor RF leads open RF DC card fault Fix or replace sensor Electronics failure Return to INFICON for repair Electron Multiplier error Defective sensor EM s...

Страница 123: ...EM voltage Electronics failure Return to INFICON for repair Mass Filter Error Bad Tune file Retune RGA Contaminated Quadrupole Return to INFICON for repair Ion Source Error Incorrect Ion Source settings Load original configuration file Ion Source contaminated Replace Ion Source Detector Error EM Voltage set too high Reduce EM voltage Detector not working correctly Replace EM detector DSP Communica...

Страница 124: ...ilament shorted Verify that filament is not shorted to ground Focus Error Unable to start or maintain Focus voltage Reset Electronics box Return Electronics box to INFICON for repair No spectra Emission is OFF Turn Emission ON EM is ON when operating Turn EM OFF Contaminated sensor Degas or service sensor Replace sensor Electronics failure Return to INFICON for repair Pressure too low for FC Use E...

Страница 125: ...n current Improper calibration Ensure that the total pressure gauge used for sensitivity calibration was properly calibrated Electronics failure Return to INFICON for repair EM has low gain Bake out sensor Replace sensor Poor peak shape Sensor contaminated Degas sensor Bake out sensor Service sensor System pressure too high Verify pressure less than 5E 4 Torr for Transpector MPS Mass calibration r...

Страница 126: ...address conflict between Transpector MPS and another network device See Chapter 2 Connecting Transpector MPS for more information on communications problems High noise level System grounding Verify that vacuum system is grounded Electronics failure Return to INFICON for repair Transpector MPS electronics box not mounted properly on sensor Push Transpector MPS electronics box all the way on to the ...

Страница 127: ...ssure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A User s Guide to Vacuum Technology J F O Hanlon John Wiley and Sons 1989 The latter book also contains a wealth of information on related topics including gas flow pressure gauges pumps materials and the design of vacuum systems ...

Страница 128: ...a vacuum apparatus when no gases are being deliberately introduced Bakeout A bakeout is the process of heating a vacuum chamber above the ambient temperature in order to accelerate the desorption of species such as water vapor and hydrocarbons which are adsorbed onto the inner surfaces of the vacuum chamber Center Voltage The center voltage is the DC potential to which the quadrupole rod RF and di...

Страница 129: ...t and the anode potential times the electron charge Electron Multiplier An electron multiplier is a in situ amplifier which is used to increase the sensitivity of a mass spectrometer When a high voltage is applied to an electron multiplier positive ions are accelerated into the multiplier causing the release of a large number of electrons per incident ion at the output Emission Current The emissio...

Страница 130: ...ier The gain of an electron multiplier is the ratio of incident ion current to electron current output The gain of the multiplier is a strong function of the bias potential applied across it Ion An ion is a molecule or atom which has either lost or added one or more electrons Those molecules which have lost electrons are positive ions Those molecules which have added electrons are negative ions Io...

Страница 131: ...al relationship between an ion current and the total or partial pressure giving rise to that current A mass spectrometer is said to have good linearity when the ion current is proportional to the pressure over a specified pressure range within a specified tolerance Typically but not always the ion current will be linear with pressure at the low end of an instrument s pressure range At some pressur...

Страница 132: ...n element which have the same number of neutrons For example 99 985 of all naturally occurring hydrogen atoms have no neutrons giving an atomic mass of approximately 1 while 0 015 have one neutron giving an atomic mass of approximately 2 There is a third isotope of hydrogen which contains two neutrons giving an atomic mass of 3 but this isotope is unstable with such a short radioactive half life t...

Страница 133: ...sed to determine the quantities and chemical nature of gases present in a vacuum system The instrument is typically a mass spectrometer equipped with an open ion source Resolution Resolution is the ability of a mass filter to select between nearby masses It is typically measured as the mass of the peak divided by the width of a given mass peak at 10 or 50 of the peak maximum intensity Secondary El...

Страница 134: ...o of ion current detected at the exit end of the mass filter set to transmit a given mass to the current of ions of the same mass entering the filter from the ion source Typically the transmission factor for nitrogen ions at 28 AMU is set equal to 1 The transmission factor at other masses is given relative to that for nitrogen Viscous Flow Viscous flow is that motion of gas molecules wherein the c...

Страница 135: ...t 9 m 961 417 G1 4 Port Ethernet Router w Push Button Wi Fi 961 418 G1 8 Port Ethernet Switch 961 702 G1 Sensor Hardware Kit 914 024 G1 Angle Valve Kit Manual includes heater 914 026 G1 Angle Valve Kit Air Operated 24 V dc Includes Heater 914 410 P1 Spare Angle Valve Manual 914 220 G1 Spare Angle Valve Electropneumatic 961 029 G1 Transpector MPS Heater Kit 120 V ac 961 029 G2 Transpector MPS Heate...

Страница 136: ...3 Power Supply Kit 80 250 V ac 4 ft 1 2 m US Plug 30 ft Extension 961 021 G4 Power Supply Kit 80 250 V ac 4 ft 1 2 m European Plug 961 021 G5 Power Supply Kit 80 250 V ac 4 ft 1 2 m Euro 15 ft Extension 961 021 G6 Power Supply Kit 80 250 V ac 4 ft 1 2 m Euro 30 ft Extension 961 416 P1 Spare Transpector MPS Heating Jacket requires heater power cable 914 407 P1 Spare Valve Heating Jacket requires he...

Страница 137: ...ector MPS sensors Part Number Description 961 S1FAS Transpector MPS 100 AMU FC MPS100F Y2O3 Ir Filaments 961 S1MAS Transpector MPS 100 AMU EM FC MPS100M Y2O3 Ir Filaments 961 S2FAS Transpector MPS 200 AMU FC MPS200F Y2O3 Ir Filaments 961 S2MAS Transpector MPS 200 AMU EM FC MPS200M Y2O3 Ir Filaments ...

Страница 138: ...cations are measured after a 30 minute warm up period at constant STP unless specified 11 2 Sensor Length Vacuum Side 11 3 Mass Range 11 4 Detector Type 11 5 Resolution MPS100F MPS100M MPS200F MPS200M 5 63 in 7 82 in 5 63 in 7 82 in 143 mm 193 mm 143 mm 193 mm MPS100F MPS100M MPS200F MPS200M 1 to 100 AMU 1 to 200 AMU MPS100F MPS100M MPS200F MPS200M Faraday Cup Continuous Dynode Electron Multiplier...

Страница 139: ...irty minutes of warm up MPS100F MPS100M MPS200F MPS200M For FC Only Less than 1 of peak height per C Amps Torr mbar Pa MPS100F MPS100M MPS200F MPS200M FC 3x10 4 2 3x10 4 2 3x10 6 Torr mbar Pa MPS100F MPS100M MPS200F MPS200M FC 2 6x10 12 3 5x10 12 3 5x10 10 N A 2 6x10 12 3 5x10 12 5 5x10 10 N A EM N A 1 5x10 14 2x10 14 2x10 12 N A 1 5x10 14 2x10 14 2x10 12 ppm MPS100F MPS100M MPS200F MPS200M 100 pp...

Страница 140: ...r Pa MPS100F MPS100M MPS200F MPS200M 5x10 4 6 7x10 4 6 7x10 2 Degrees C MPS100F MPS100M MPS200F MPS200M FC 200 C 200 C 200 C 200 C EM N A 150 C N A 150 C Degrees C with electronics removed MPS100F MPS100M MPS200F MPS200M 300 C MPS100F MPS100M MPS200F MPS200M 5 to 50 C ambient MPS100F MPS100M MPS200F MPS200M 20 30 V dc 24 V dc Typical Latching 4 pin Din connector internally isolated from system gro...

Страница 141: ...11 17 Inputs 11 18 LED Indicators Green MPS100F MPS100M MPS200F MPS200M Standard Cat5e Ethernet Cable Connection MPS100F MPS100M MPS200F MPS200M 1 relay 24 V at 0 5 amps MPS100F MPS100M MPS200F MPS200M 1 Analog Input 2 Digital Inputs H100F H100M H200F H200M 1 for power status 1 for emission status ...

Страница 142: ...n Electronics Module Power Supply See section 12 1 3 on page 12 2 Software optional See section 12 1 6 on page 12 3 A Computer Cable See section 12 1 7 Heating Jacket System Optional on page 12 3 12 1 1 Ship Kit Table 12 1 Ship kit Part Number Description 961 020 G1 Ship Kit includes 600 1198 P8 7 m Ethernet Cable 961 702 G1 Mounting Hardware 961 022 G1 O ring and Mounting Nut 961 370 P1 O ring Re...

Страница 143: ...85 250 V ac 1 2 m 4 ft US Plug with 4 5 m 15 ft Extension 961 021 G3 Power Supply Kit 85 250 V ac 1 2 m 4 ft US Plug with 9 m 30 ft Extension 961 021 G4 Power Supply Kit 85 250 V ac 1 2 m 4 ft European Plug 961 021 G5 Power Supply Kit 85 250 V ac 1 2 m 4 ft Euro Plug with 4 5 m 15 ft Extension 961 021 G6 Power Supply Kit 85 250 V ac 1 2 m 4 ft Euro Plug w 9 m 30 ft Extension Table 12 4 Sensor one ...

Страница 144: ...06 G2 Transpector MPS Sensor Extension Kit Table 12 6 Software one of the following optional Part Number Description 921 039 G1 FabGuard Explorer Single Sensor Version CD 921 039 G2 FabGuard Explorer Multi Sensor Version CD Table 12 7 Heating jacket system optional one of the following optional 961 029 G1 Transpector MPS Heater Kit 120 V ac 961 029 G2 Transpector MPS Heater Kit 230 V ac Table 12 8...

Страница 145: ...aration Of Contamination 1 3 detection factor 4 12 4 13 9 2 detector 3 1 9 2 detector type 11 1 doubly charged ion 9 2 E electron energy 3 4 9 2 electron multiplier 9 2 electron stimulated desorption 4 15 electronics enclosure 11 4 electronics module 1 5 12 2 physical dimensions 1 6 EM gain 3 11 emission current 3 4 9 2 emission error 7 2 emult error 7 2 energy of the bombarding electrons 4 5 exit...

Страница 146: ... 13 noise level 7 6 O open ion source 9 5 outgassing 4 14 9 5 overvoltage category 1 8 P parent ion 9 5 partial pressure 4 13 4 16 9 6 analyzer 4 8 pass band width 3 8 peak height 4 8 peak shape poor 7 5 perimeter for maintenance access 1 7 pole zero 3 7 9 6 pollution degree 1 8 power input 11 3 supply 1 15 12 2 pressure maximum 11 2 pumping 4 14 Q quadrupole 9 6 exit aperture 3 10 exit lens 3 10 ...

Страница 147: ...max operating 11 3 operating 11 3 operating range 1 8 total pressure 9 6 total pressure plate 9 7 transition flow 9 7 transmission factor 4 12 4 13 9 7 tuned 4 16 tungsten hexafluoride 3 13 U ultrahigh vacuum 4 14 user configured switches 11 4 V vacuum region 4 14 vacuum system 4 14 ventilation requirements 1 7 viscous flow 9 7 W weight 1 6 Z zero blast 9 7 ...

Страница 148: ...al www inficon com reachus inficon com Due to our continuing program of product improvements specifications are subject to change without notice All trademarks are the property of their respective owners PN 074 603 P1B 2016 INFICON ...

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