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Transpector MPH

Gas Analysis System

PN 074-555-P1C

Cover Page

Содержание Transpector MPH

Страница 1: ...Transpector MPH O P E R A T I N G M A N U A L Gas Analysis System PN 074 555 P1C Cover Page ...

Страница 2: ...ins embedded software protected under the following copyrights Copyright INFICON Inc Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product improve...

Страница 3: ...Declaration Of Conformity Page 1 ...

Страница 4: ...ch written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE ...

Страница 5: ...ector MPH Gas Analysis System 1 4 1 6 General Description of the Transpector MPH Gas Analysis System 1 5 1 7 Specifications for the Transpector MPH Gas Analysis System 1 5 1 8 Supplied Items 1 5 1 9 Physical Requirements 1 6 1 9 1 Physical Dimensions 1 6 1 9 2 Weight 1 6 1 9 3 Mounting Requirements 1 7 1 9 4 Ventilation Requirements 1 7 1 9 5 Maintenance Access 1 7 1 10 Electrical Power Requiremen...

Страница 6: ... 17 3 Connecting the Pirani Interlock Cable 1 18 1 18 Installing the HPR Calibration Reference Optional 1 19 1 18 1 Installing the Calibration Reference on to the Extension Flange 1 20 1 18 2 Installing the Extension Flange Sensor and Electronics Module 1 22 1 18 3 Connecting the HPR Valve Control Cable 1 22 1 19 Input Output I O 1 23 1 19 1 Two Digital Inputs 1 23 1 19 2 One Status Relay Output 1...

Страница 7: ...tria Coated Iridium Filaments 3 5 3 3 1 2 Tungsten Filaments 3 5 3 4 The Quadrupole Mass Filter 3 6 3 4 1 Scanning Characteristics 3 8 3 4 2 The Zero Blast 3 9 3 5 The Ion Detector 3 10 3 5 1 The Faraday Cup Detector 3 10 3 5 2 The Electron Multiplier EM Detector 3 11 3 5 3 The Continuous Dynode Electron Multiplier Faraday Cup Detector 3 12 Chapter 4 Applications Guide 4 1 How to Interpret the Res...

Страница 8: ...bGuard 5 10 5 5 2 Standalone Transpector Web UI Operation 5 11 5 5 2 1 Data Acquisition 5 11 5 5 2 1 1 Editable Parameters 5 11 5 5 2 1 2 How To Change Scan Parameters 5 12 5 5 2 2 Leak Checking 5 14 5 5 2 2 1 Leak Check Components 5 15 5 5 2 2 2 Using the Leak Check Mode 5 17 5 5 2 3 Tune Mode 5 17 5 5 2 3 1 Tune Mode Components 5 18 5 5 2 3 2 Default Tune Mode Parameters 5 21 5 5 2 3 3 Tuning Tr...

Страница 9: ... Part Numbers 6 3 6 5 Repair Procedures 6 4 6 5 1 Tools Required 6 4 6 5 1 1 Tools for Replacing the Filament Kit 6 4 6 5 1 2 Tools for Replacing the Ion Source 6 4 6 5 1 3 Tools for Replacing the Electron Multiplier 6 4 6 5 2 How to Determine if a Filament Kit Replacement is Required 6 5 6 5 3 Filament Kit Replacement 6 6 6 5 4 Ion Source Removal 6 9 6 5 5 Electron Multiplier Replacement 6 11 6 6...

Страница 10: ... Parts 10 2 10 3 3 Spare Transpector MPH Electronics Boxes 10 3 10 3 4 Spare Transpector MPH Sensors 10 3 Chapter 11 Specifications 11 1 Introduction 11 1 11 2 Sensor Length Vacuum Side 11 1 11 3 Mass Range 11 1 11 4 Detector Type 11 1 11 5 Resolution 11 2 11 6 Temperature Coefficient 11 2 11 7 Sensitivity 11 2 11 8 Minimum Detectable Partial Pressure 11 2 11 9 Zero Blast Interference at Mass 2 11...

Страница 11: ...troduction 12 1 12 1 1 Ship Kit 12 1 12 1 2 Electronics Module 12 2 12 1 3 Power Supply 12 2 12 1 4 Sensor 12 2 12 1 5 Extension Kit 12 3 12 1 6 Software 12 4 12 1 7 Heating Jacket System Optional 12 4 12 1 8 Calibration Reference Optional 12 4 12 1 9 Interlock Kit Optional 12 4 12 1 10 Angle Valve Optional 12 5 Index ...

Страница 12: ...either a member of the FabGuard suite of programs or the Transpector Web UI onboard web server This chapter provides an overview of the Transpector MPH Gas Analysis System Topics include the purpose of Transpector MPH its specifications a list of supplied items installation instructions and customer support contact information Software information can be found either in the FabGuard Explorer opera...

Страница 13: ... following Caution and Warning paragraphs are used to alert the reader of actions which may cause either damage to the instrument or bodily injury CAUTION This is an example of a Caution paragraph It cautions against actions which may cause an instrument malfunction or the loss of data WARNING This is an example of a General Warning paragraph It warns against actions which may cause bodily injury ...

Страница 14: ...ady attempted the exact wording of any error messages 1 3 1 Returning Your Transpector MPH to INFICON Do not return any component of Transpector MPH to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization RMA number Transpector MPH will not be serviced without an RMA number Prior to being given an RMA number a Declaration Of Contamination DOC...

Страница 15: ...Analysis System identifies and performs a quantitative analysis of residual gas species present inside a vacuum system The sensor a quadrupole mass spectrometer analyzes gases by ionizing some of the gas molecules separating the ions by their mass to charge ratio measuring the quantity of ions at each mass The ions exit the quadrupole at their specific mass to charge ratio and generate a signal at...

Страница 16: ...cal feedthrough flange which is bolted to the vacuum space where the gas analysis measurements are made Electronics Module The electronics module controls the sensor and communicates to the operating computer The electronics module and sensor are sold in sets The electronics module attaches to and is supported by the sensor Software The software controls the electronics module and displays the dat...

Страница 17: ...ure 1 1 shows the overall physical dimensions for Transpector MPH Figure 1 1 Physical dimensions 1 9 2 Weight The Transpector MPH electronics module weighs 1 53 kg 3 lb 6 oz The Transpector MPH systems total weight depends on which sensors are used Transpector MPH A B C MPH100F MPH200F MPH300F 143 mm 5 63 in 50 mm 1 98 in 365 7 mm 14 40 in MPH100M MPH200M MPH300M 199 mm 7 83 in 50 mm 1 98 in 421 6...

Страница 18: ...pace around the Transpector MPH electronics module must be maintained for proper ventilation 1 9 5 Maintenance Access Easy access to Transpector MPH should be maintained for installation and maintenance activities 1 10 Electrical Power Requirements Transpector MPH must be connected to a source of power as specified in the following sections 1 10 1 Required Supply Voltage 20 to 30 V dc 24 V dc typi...

Страница 19: ...mum altitude range of 2000 m 6561 ft 1 13 3 Pollution Degree Pollution Degree 2 per EN61010 1 1 13 4 Operating Temperature Transpector MPH is designed to operate within a temperature range of 5 C to 50 C 41 F to 122 F 1 13 5 Humidity Transpector MPH is designed to operate in an environment with up to 98 relative humidity 1 14 Computer System Requirements Refer to the FabGuard Explorer Operating Ma...

Страница 20: ...was purchased with Transpector MPH see section 1 17 Installing the Pirani Interlock Optional on page 1 16 for installation instructions If the optional HPR Calibration Reference was purchased with Transpector MPH see section 1 18 Installing the HPR Calibration Reference Optional on page 1 19 for installation instructions 1 16 1 Sensor Installation CAUTION Do not touch any surface on the vacuum sid...

Страница 21: ...ks follow proper operating procedures These flanges are sealed with a metal gasket and can be heated for bakeout to temperatures of up to 300 C For bakeout temperatures when a sensor is installed see Table 1 1 on page 1 13 1 16 1 1 1 Assembling ConFlat Flanges To assemble a pair of ConFlat flanges 1 Wipe the sealing areas of the flanges with a laboratory towel using a clean solvent such as water f...

Страница 22: ...n finger tightened and the flange faces are parallel tighten the bolts gradually and evenly in a star pattern until the flange faces are brought into even contact with each other 1 16 1 2 Attaching the Sensor to the Vacuum Chamber The sensor may be mounted in any position when attaching it to the vacuum vessel or chamber CAUTION Avoid mounting the sensor near any magnetic fields greater than two g...

Страница 23: ...umber for the 203 2 mm 8 in long extension tube kit is 961 206 G2 CAUTION The silver plated bolts used for mounting the sensor to the vacuum system must be oriented such that the bolt heads are on the same side of the sensor as the electronics box Otherwise there may be interference between the black INFICON Transpector mounting nut and sensor mounting hardware 249 1 mm 193 mm 198 9 mm 143 mm MPH1...

Страница 24: ...result in permanent damage to the detector WARNING During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket may be extremely hot These surfaces may exceed 100 C at the maximum ambient operating temperature 50 C which will cause burns if touched directly without using the proper personal protection equipment Table 1 1 Sensor maximum bakeout tem...

Страница 25: ...ensor mounting connector assembly includes a mounting nut and an O ring When the mounting nut is tightened the O ring compresses making a tight fit on the sensor housing For proper installation place the nut over the end of the sensor and roll the O ring back to the groove on the sensor 2 Note the recessed area on the sensor feedthrough and the ground tab on Transpector MPH electronics module Matc...

Страница 26: ...et port 1 16 4 Connecting the 24 V dc Power Supply 1 Connect the 24 V dc power supply cable to the 24V connector on the Transpector MPH electronics module by sliding back the latch installing the cable and then releasing the latch NOTE The latch locks the connector to the electronics module and must be slid back to detach the cable from the Transpector MPH electronics module 2 Plug the AC line cor...

Страница 27: ...the following parts to all standard Transpector MPH shipped items see Figure 1 7 1 Special extension flange with a 4 VCR fitting and installed sensor 2 INFICON PSG500 Pirani Gauge 3 4 VCR male to male right angle connection 4 VCR gaskets 5 Interlock cable 6 Washer 7 Nut plate 8 Silver coated stainless steel bolt 9 Copper gasket CF40 Figure 1 7 Pirani interlock parts 1 2 3 4 5 6 7 8 9 ...

Страница 28: ... connection to the other side of the 4 VCR male to male right angle adapter 4 Ensure that the Pirani is aligned parallel with the extension tube with the connection end pointed towards the electronics module 5 The resulting assembly will look like Figure 1 8 Figure 1 8 Connecting the Pirani to the flange 1 17 2 Installing the Extension Flange and Sensor onto the Vacuum System Installation instruct...

Страница 29: ...e The Pirani gauge is fully powered by the Transpector MPH Auxilliary I O connection Install the RJ 45 connection of the interlock cable into the gauge and connect the 15 pin D Sub connection to the Auxilliary I O port of Transpector MPH See Figure 1 9 Figure 1 9 Assembled interlock ...

Страница 30: ...nce for adjusting the EM voltage a reference for tracking the performance of the RGA A Transpector MPH with the HPR calibration reference adds the following parts to the standard Transpector MPH shipped items see Figure 1 10 1 Special extension flange with a 4 VCR fitting and installed sensor 2 Calibration reference 3 VCR gaskets 4 HPR valve control cable and solenoid 5 Calibration reference mount...

Страница 31: ...f the calibration reference to the 4 VCR female connection of the extension flange See Figure 1 11 3 Tighten the connection following standard VCR gasket protocols finger tighten the connection then tighten it 1 8 to 1 4 turn by wrenches Figure 1 11 HPR VCR connection 4 Screw the 1 4 in and 1 8 in gas line connections into the solenoid See Figure 1 12 Figure 1 12 Gas connections 1 4 in Connection ...

Страница 32: ...n hose into the 1 8 in gas connection of the HPR valve See Figure 1 13 Figure 1 13 Valve gas connection 7 Insert the end of the calibration reference into the circular hole of the mounting bracket See Figure 1 14 Figure 1 14 Calibration reference bracket connection 8 Connect the compressed air required for valve operation into the 1 4 in connection of the solenoid ...

Страница 33: ... and sensor are installed as usual except one of the bolts that connect the sensor to the extension flange must go through the HPR mounting bracket Refer to Hardware Installation section 1 16 on page 1 9 1 18 3 Connecting the HPR Valve Control Cable The HPR solenoid is powered by the Transpector MPH Auxilliary I O connection Connect the 15 Pin D Sub connection to the Aux I O port of the Transpecto...

Страница 34: ...ee Table 1 2 CAUTION Controlling emission through the digital inputs bypasses all software or hardware interlocks When using digital inputs for controlling Transpector MPH emission develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector MPH 1 19 2 One Status Relay Output One status relay output is active closed when the emission is ...

Страница 35: ...1 24 Transpector MPH Operating Manual Figure 1 16 Pinout connectors ...

Страница 36: ...ation See Figure 1 17 NOTE For all other heater installations discard this kit 1 Install the Manifold Heater over the tube extension and align the snaps with the tapped hole in the sensor flange 2 Align the Internal Heater Bracket so the large hole fits over the snap on the heating jacket and capture the bracket in the Manifold Heater by securing the snaps 3 Using a 7 mm combination wrench attach ...

Страница 37: ...e 1 17 Heater jacket mount kit installation Internal Heater Bracket provided in kit 961 433 G1 Snap in Manifold Heater Manifold Heater 961 416 P1 provided in kit 961 029 Transpector MPH Hex head fastener provided in kit 961 433 G1 Sensor Flange ...

Страница 38: ...d uses IP addresses to locate and identify sensors on a network 2 2 General Networking Information This section will discuss some of the general networking variables that can affect the connection of Transpector MPH 2 2 1 IP Addresses IP addresses can be set either manually or automatically Static manual IP addresses are set by the user and are manually changeable by the user Dynamic automatic IP ...

Страница 39: ...ically reconnect to the Transpector MPH sensor because it does not know the newly assigned IP address This will lead to loss of communication and loss of data Static IP addresses do not change unless the IP address is manually changed Static IP addresses help protect Transpector MPH from losing communication and data Transpector MPH uses IPv4 IP addresses IPv4 IP addresses consist of 32 bits that ...

Страница 40: ...eans that the two devices are on different subnets 2 3 Transpector MPH IP Address By default Transpector MPH ships with an IP address of 192 168 1 100 with a subnet mask of 255 255 0 0 NOTE When connecting Transpector MPH to an existing local network there must be a static IP address for each Transpector MPH being installed Contact the network administrator for IP address assignments 2 3 1 Changin...

Страница 41: ...s not need to be installed to work Upon double clicking the IMSSU will display as shown in Figure 2 1 Figure 2 1 INFICON Mass Spectrometer Search Utility When the IMSSU first opens nothing will be displayed The IMSSU detects all Transpector MPH installed on the network regardless of IP address The IMSSU will start automatically or it can be manually started by clicking Search Clears List The IMSSU...

Страница 42: ... 3 IMSSU TCP IP Properties window The TCP IP Properties window will display Transpector MPH MAC Address the current Transpector MPH IP address a Change To text box to enter the new Transpector MPH IP address a selection of either DHCP On or DHCP Off To change the IP address type the new IP address in the Change To box and click Apply Transpector MPH will automatically reboot and will return online...

Страница 43: ... executed within 60 seconds of turning the Find Device On Show Settings Click Show Settings to open a display on the right side of the IMSSU that will display multiple settings of Transpector MPH This is an excellent tool for troubleshooting The following settings are displayed Serial Number Gateway IP Address DHCP Status MAC Address Description Subnet Mask Name Description Structure Version Name ...

Страница 44: ...low these instructions 2 3 1 2 1 Windows 7 Instructions NOTE Changing the IP address of the host computer requires administrator rights You will need to use an administrator account to change the IP address 1 Click Start to display the Start menu then click Control Panel Start is located on the taskbar on the Windows 7 desktop See Figure 2 4 Figure 2 4 Start menu 2 In the Network and Internet grou...

Страница 45: ...ndow click Change adapter settings Figure 2 6 Change adapter settings 4 If the host computer is connected to Transpector MPH through the Ethernet port of the computer right click Local Area Connection and select Properties See Figure 2 7 Figure 2 7 Changing adapter settings ...

Страница 46: ...anual 5 Select Internet Protocol Version 4 TCP IPv4 then click Properties See Figure 2 8 Figure 2 8 TCP IPv4 6 In the TCP IPv4 properties menu select Use the following IP address See Figure 2 9 Figure 2 9 Use the following IP address ...

Страница 47: ...8 In Subnet mask type 255 255 0 0 9 Click OK Figure 2 10 Changing the computer IP address 10 The IP address will now be set to the manual IP address chosen in step 7 Exit all of the menus and then connect to Transpector MPH 11 To change the IP address back to its default settings follow steps 1 through 6 and return the IPv4 properties to their original settings ...

Страница 48: ... 1 Click Start to display the Start menu then click Control Panel Start is located on the taskbar on the Windows XP desktop See Figure 2 11 Figure 2 11 XP Start Menu 2 On the Control Panel click Network and Internet Connections See Figure 2 12 Figure 2 12 XP Control Panel ...

Страница 49: ...nections See Figure 2 13 Figure 2 13 Network and Internet Connections 4 Double click the Local Area Connection icon See Figure 2 14 NOTE The icon may have a number after it if more than one connection has been installed Make sure to choose the correct Local Area Connection Figure 2 14 Network Connections ...

Страница 50: ... 2 15 Local Area Connection Status 6 Select Internet Protocol TCP IP then click Properties Figure 2 16 Local Area Connection Properties 7 Select Use the Following IP Address and enter in the desired IP address Then click OK The IP address will update Figure 2 17 TCP IP Properties ...

Страница 51: ...of Transpector MPH is 192 168 x x The IP address of the host computer used to control Transpector MPH must have a subnet mask of 255 255 0 0 and a network prefix of 192 168 x x If this is not the case change the computer IP address to match the network prefix of Transpector MPH For example giving the computer an IP address of 192 168 1 101 will allow Transpector MPH to communicate directly with th...

Страница 52: ...ted to a single host computer and not to an existing local area network a private local network must be created Transpector MPH will have to be installed on either a router or Ethernet switch The router or switch is then connected to the host computer through the LAN port of the router switch 2 4 2 2 Installing Multiple Transpector MPH on an Existing Local Network If multiple Transpector MPH senso...

Страница 53: ...high vacuum environment correlates to pressures below 6 7 x 10 2 Pascals or approximately 5 x 10 4 Torr approx 6 7 x 10 4 mbar By attaching the sensor to a small vacuum system with a suitable controlled leak or other gas inlet device Transpector MPH Gas Analysis System can measure gases or volatile materials at pressures higher than those at which the sensor itself can operate The Transpector MPH ...

Страница 54: ... of the ions is long enough to pass through the quadrupole without collisions 3 3 The Ion Source The ion source of Transpector MPH is optimized for detecting residual gases in a vacuum system The sensor has an open construction that facilitates the flow of gas species into the ionization region Figure 3 2 on page 3 3 shows the open ion source in more detail Inside the ion source a large current is...

Страница 55: ...3 3 Transpector MPH Operating Manual Figure 3 2 Sensor s ion source Electron Repeller Filament Cathode Anode with Cage Focus Lens Source Exit Lens ...

Страница 56: ...in the cage on the anode are pulled away by the potential on the focus lens and formed into a beam The focus lens is sometimes called an extractor since it extracts the ions from the region in which they are created The focus lens also serves to focus the ion beam into the hole in the source exit lens To attract positive ions the focus lens is biased negatively with respect to the anode The potent...

Страница 57: ...dium filaments do not withstand exposure to halogens Upon exposure to halogens the yttria coating will form yttria oxyhalides which will chip off of the filament and cause direct exposure of the iridium core shortening the lifetime of the filament Use tungsten filaments when an application includes exposure to halogens fluorine chlorine bromine or iodine 3 3 1 2 Tungsten Filaments Tungsten filamen...

Страница 58: ...through the center deflecting all larger and smaller masses hence the term mass filter The mass filter consists of four parallel rods or poles in a square array The rods and the insulators in which they are mounted form an extremely precise mechanical assembly The distance between the center of the square array and the closest rod surface is known as the quadrupole radius with the symbol r0 If the...

Страница 59: ...mass ions toward the negative poles opposing the focusing effects of the RF field Eventually these high mass ions strike the negative rods and are neutralized By a suitable choice of DC to RF ratio the mass filter can be made to discriminate against both high and low mass ions to the desired degree The kinetic energy directed along the Z axis of the mass filter usually called the ion energy is pri...

Страница 60: ...filter for a mixed beam of ions rejecting those of both high and low mass while passing those of an intermediate mass The selectivity of the mass filter is expressed in terms of resolution R which is numerically given by the ratio of the center mass M to the width M both in AMU of the pass band Since the number of the ions passed by the filter falls off gradually as the edge of the pass band is ap...

Страница 61: ...urrent is called the zero blast See Figure 3 4 on page 3 9 The zero blast present in all quadrupole based sensors can interfere with the observation of masses 1 and 2 when significant quantities of higher mass ions are present In some instruments the magnitude of the zero blast is concealed by preventing the voltages from reaching zero With Transpector MPH the zero blast only produces parts per mi...

Страница 62: ...is typically a metal plate or a cup shaped electrode on which the ion beam impinges Ions strike the detector and are neutralized thus drawing a current from the circuitry connected to the electrode Usually the current flow that results is exactly equal to the incident ion current In Transpector MPH instruments the Faraday Cup is at ground potential The minimum sensitivity for a 100 amu Transpector...

Страница 63: ...t is that as many as a million electrons or more can be produced by each incident ion The current from a Faraday detector is positive for positive ions An EM detector current is negative The ratio of the electron output current to the incident ion current is known as EM gain The gain primarily depends on the EM type the voltage applied to the EM input the voltage applied across the EM the conditio...

Страница 64: ... not degrade when exposed to air In order to prolong its useful life a copper beryllium dynode multiplier must be stored under vacuum exposure to air for more than a brief period can result in a significant decrease in the maximum available gain The CDEM has some disadvantages The maximum operating temperature for the CDEM is 150 C It can still be baked out at 300 C provided that the high voltage ...

Страница 65: ...n as follows Ensure diffusion pumped vacuum systems are properly trapped to reduce oil back streaming Ensure turbomolecular pumped systems are interlocked to eliminate mechanical pump oil back streaming through a nonspinning turbo pump Electron Multiplier gain reduction from these kinds of problems can range from 50 to more than 90 The initial gain of the EM is generally high enough to accommodate...

Страница 66: ... partial pressures and relative concentrations For a discussion of how Transpector MPH produces measurements refer to Chapter 3 How The Instrument Works 4 1 1 Qualitative Interpretation of Mass Spectra The basic graphical output of a Transpector MPH is the mass spectrum A mass spectrum is a plot of ion intensity as a function of ion mass to charge ratio Each chemical substance has a characteristic...

Страница 67: ... 4 1 The bottom graph is a trend analysis showing the most important masses versus time The top graph shows the data taken during the scan and shows the air spectra over a six decade y axis The prominent peaks for air are mass 28 from Nitrogen mass 32 from Oxygen mass 40 from Argon and mass 18 from water vapor Table 4 1 Electron impact ionization processes XYZ e XYZ 2e 1 XYZ2 3e 2 XY Z 2e 3 XY Z 2...

Страница 68: ...lectron energy There are some situations when it is difficult to determine whether the ion is singly or multiply charged When a molecule is composed of two atoms of the same element Transpector MPH has difficulty distinguishing between the singly charged one atom fragment ion and the doubly charged two atom molecular ion which will both have the same mass to charge ratio Refer to Figure 4 1 the pe...

Страница 69: ...he mass 35 isotope of chlorine 35 Cl is the same as the probability of ionizing the mass 37 isotope 37Cl Thus the peak height ratio of mass 35 to 37 from HCl will be 3 07 to 1 75 4 24 6 For a listing of the isotopic ratios for the lighter elements see Table 4 2 For a complete listing of the natural abundances for the isotopes of all the elements see the Handbook of Chemistry and Physics from CRC P...

Страница 70: ...al i e the minimum electron energy required to produce a specific ion for Ar is 15 7 eV The number of argon ions produced rises steeply with energy until a maximum is reached at about 55 eV As the electron energy rises above this level the rate of Ar production slowly decreases 34 4 18 36 0 016 Cl 35 75 4 37 24 6 Ar 36 0 337 38 0 063 40 99 600 Table 4 2 Isotope ratios continued Isotope Ratios Elem...

Страница 71: ...of substances is much more difficult Table 4 3 is intended as a spectrum interpretation guide which may be of use when first examining an unknown spectrum The guide lists the masses of peaks possible ion identities for each of these masses and common sources for each of these ions NOTE This list is not all inclusive Table 4 3 Spectrum Interpretation Guide Spectrum Interpretation Guide AMU Chemical...

Страница 72: ... ethanol F or isopropyl alcohol 30 C2H6 NO ethane P nitric oxide 31 P CH2OH oxygen methanol F 32 O2 S oxygen sulfur methanol P 33 HS hydrogen sulfide F 34 H2S 34S O2 hydrogen sulfide P sulfur isotope oxygen isotope 35 Cl chlorine isotope See Note 2 36 HCl 36 Ar C3 hydrochloric acid argon isotope hydrocarbons 37 37 Cl C3H chlorine isotope See Note 2 hydrocarbons 38 37HCl C3H2 hydrochloric acid or S...

Страница 73: ...asuring the ion current at mass b 1 The partial pressure of substance a is symbolized by PPa while Kab is the proportionality constant for the peak at mass b from substance a and Iab is the ion current at mass b from substance a 43 C3H7 CH3CO Note 1 acetone F or methyl ethyl ketone F 44 CO2 C3H8 carbon dioxide See Note 3 45 CH3CH2O ethanol F or Isopropyl alcohol F 46 CH3CH2OH ethanol P 47 C35 Cl S...

Страница 74: ...for all masses from substance a to the total ion current from nitrogen both measured at the same true partial pressure Both fragmentation factors and ionization probabilities depend strongly on the energy of the ionizing electrons If the correct values of these factors are not known for the exact conditions of the particular analyzer being used they can be approximated using published values for o...

Страница 75: ...4 0 45 65 0 05 86 0 13 benzene C6H6 82 0 10 trichlorethylene C2HCl3 78 0 53 83 0 10 95 0 22 51 0 11 130 0 22 52 0 11 methane CH4 132 0 21 50 0 10 16 0 46 97 0 14 15 0 40 60 0 13 carbon dioxide CO2 14 0 07 44 0 70 13 0 04 water H2O 28 0 11 18 0 75 16 0 06 methanol CH3OH 17 0 19 12 0 01 31 0 43 1 0 05 32 0 23 16 0 02 carbon monoxide CO 29 0 18 28 0 91 28 0 03 xenon Xe 12 0 05 132 0 26 16 0 03 neon N...

Страница 76: ... the gauge reading to the known true pressure is the relative ionization probability To determine the true pressure use a gauge which is gas species independent for example a capacitance manometer or a gauge with a known sensitivity factor for example a spinning rotor gauge Table 4 5 Ionization Probabilities for some Common Substances Substance Formula Relative Ionization Gauge Sensitivity Substan...

Страница 77: ...ectron Multiplier G measured at mass 28 for nitrogen is the Electron Multiplier output current divided by the Faraday mode output current under otherwise identical conditions The multiplier gain is a strong function of the high voltage applied The sensitivity of the instrument S is the ratio of Faraday mode ion current for a given pressure of pure nitrogen measured at mass 28 and is typically expr...

Страница 78: ...tive ion gauge sensitivity as shown in dimensionless TFb transmission factor the fraction of total ions at mass b which pass through the mass filter relative to ions with a mass of 28 AMU nominally TFM 28 M dimensionless DFab detection factor for mass b ions from substance a relative to nitrogen at 28 AMU assumed to be 1 00 for Faraday detectors but varies for Electron Multiplier detectors dimensi...

Страница 79: ... detected gas composition First the analyzer itself is a source of gas molecules because of outgassing from its surfaces Usually the outgassing levels can be reduced by baking the analyzer in vacuum and by using the Degas function wherein the ion source surfaces are bombarded by high energy electrons When operating in the ultra high vacuum UHV region it is best to bake the sensor overnight at the ...

Страница 80: ...carbons perfluorotributylamine or perfluorokerosene for extended periods of time it is not uncommon for a strong F peak at 19 AMU to remain even after the fluorine containing substance has been removed When operating in the UHV region EID ESD of H C O and CO and other ions is not uncommon The clue to diagnosing this problem is that the observed fragmentation patterns do not match known gas phase p...

Страница 81: ...he total ion current contributed by ions of the chosen mass Only peaks contributing at least one percent to the total ion current are included in the list The sum of the factors for all the peaks in a mass spectrum cannot exceed 1 00 The sum can be less than 1 00 if only some of the peaks are listed either there are many peaks or some of the ions produced lie outside the mass range of the particul...

Страница 82: ...ng Transpector Web UI 5 1 1 What is Transpector Web UI Transpector Web UI displays data in a spectrum window can perform leak checking when the computer that controls Transpector MPH is located away from Transpector MPH provides a diagnostic window that displays instrument status and errors Transpector Web UI should be used in parallel with a program from the FabGuard Suite NOTE Transpector Web UI...

Страница 83: ...EM Android Apple browsers will not work with the Transpector Web UI A third party browser must be installed Transpector Web UI has not been optimized for use on Android Smart Phones and iPhones Check http www inficon com for updates Table 5 1 Minimum computer requirements Parameters Transpector Web UI Requirements Processor Pentium 4 1 8 GHz or greater RAM 1 GB or greater Resolution 1024 x 768 16 ...

Страница 84: ...or Web UI will then run on the remote desktop computer 5 3 1 Connecting to Transpector Web UI with Default Factory IP address The default web address for Transpector MPH is 192 168 1 100 To connect to Transpector Web UI type 192 168 1 100 into the browser address box then press Enter See Figure 5 1 Figure 5 1 Navigating to Transpector Web UI NOTE The device running the browser must also be configu...

Страница 85: ...If Transpector Web UI STATUS webpage still does not display verify that the IP address was not changed from the factory default IP address If the IP address has been changed follow the instructions in section 5 3 2 If the IP address was not changed from the factory default make sure there are no other devices connected to Transpector Web UI ...

Страница 86: ...ality is split between several different windows To navigate from window to window click on the button of the desired window The buttons are displayed in Figure 5 3 Figure 5 3 Transpector Web UI window selection buttons The first window displayed by Transpector Web UI is STATUS In the following sections the different windows are identified and described For information on using the different windo...

Страница 87: ...Transpector MPH is using MASS RANGE The mass range of the connected Transpector MPH 100 200 or 300 AMU DETECTOR TYPE The detector type of the connected Transpector MPH either FC or CDEM EMISSION STATUS The status of the emission of the Transpector MPH sensor either ON of OFF EM STATUS The status of the Electron Multiplier if equipped of the Transpector MPH sensor either ON or OFF FILAMENT NUMBER T...

Страница 88: ... of Transpector Web UI For instructions on using the MONITOR window see section 5 5 2 1 Data Acquisition on page 5 11 Figure 5 5 MONITOR window 5 4 3 LEAKCHECK The LEAKCHECK window see Figure 5 6 is used for leak checking with Transpector MPH See section 5 5 2 2 Leak Checking on page 5 14 Figure 5 6 LEAKCHECK window ...

Страница 89: ...spector MPH Operating Manual 5 4 4 DIAGNOSTICS The DIAGNOSTICS window see Figure 5 7 includes System Status and other diagnostic tools useful when contacting INFICON for assistance Figure 5 7 DIAGNOSTICS window ...

Страница 90: ...tuning Transpector MPH For tuning instructions see section 5 5 2 3 Tune Mode on page 5 17 Figure 5 8 TUNE window 5 4 6 HELP Click HELP to display the Transpector Web UI Operating Manual in a separate browser tab 5 4 7 PRINT Click PRINT to display a printing dialog box that allows for printing the displayed window ...

Страница 91: ... Transpector Web UI to access the Transpector MPH sensor This parameter has three options Never Sensor Cannot Be Independently Operated FabGuard will never give control of the Transpector MPH sensor to Transpector Web UI This is the Default setting inside of FabGuard If Stopped Only if the Chamber is Stopped FabGuard will give control of the Transpector MPH sensor only if the chamber on which the ...

Страница 92: ...r MPH has editable scan parameters that affect how data is acquired The editable parameters are Emission On Off Turns the filament in the Transpector MPH ion source on or off Emission must be ON to collect data EM On Off Turns the EM detector if equipped on or off Turning on the EM will improve the signal to noise ratio of Transpector MPH and allow for smaller level signals to be seen above the no...

Страница 93: ...ic Displays the data either in a linear or logarithmic scale Since Transpector MPH has such a large Dynamic Range log scale is often helpful for seeing low level contaminants 5 5 2 1 2 How To Change Scan Parameters On the right side of the MONITOR window is a group for controlling EMISSION and EM See Figure 5 9 In this group are editable boxes that change the scan parameters described in section 5...

Страница 94: ... scan parameters can be changed but will not affect the data collection until SET is clicked Click SET to restart data acquisition using the changed parameters To change Min Max AMU values highlight the current value in the appropriate box and type in the Min or Max AMU value that is desired Click SET to start collecting data in the new mass range Dwell and ppAMU are changed by a drop down list wh...

Страница 95: ...ring the LEAKCHECK window Transpector MPH will start collecting data using the default parameters as shown in Table 5 3 The Transpector Web UI LEAKCHECK window utilizes Transpector MPH signal levels to generate alarm statuses When the LEAKCHECK window is first entered Transpector Web UI auto generates alarm levels based on the current Mass signal NOTE Emission must be turned on to perform a leak c...

Страница 96: ... to automatically generate alarm levels based on recent data acquired To manually set alarm levels highlight the alarm level of interest type the desired alarm level then click SET 2 Transpector MPH Scan Parameters Transpector MPH can use any mass for leak detection To change the mass highlight the mass shown in the MASS box type the new desired mass then click SET The DWELL time that is used for ...

Страница 97: ...n the signal in amps of the specified mass If the signal exceeds warning or alarm levels the color of the bar will change See Figure 5 13 Figure 5 13 Thermometer bar levels 4 EMISSION and EM Control These work the same as EMISSION and EM in the MONITOR window section 5 5 2 1 1 Editable Parameters on page 5 11 Click EMISSION or EM to turn on or off the emission or EM 5 Mass Trend Graph The mass tre...

Страница 98: ...nt alarm AUTO SET implies that the signals generated by Transpector MPH are normal and displays green for alarm status 7 Spray leak check gas around the area of interest and monitor for changes in the Mass Trend Graph 8 Continue spraying the leak check gas until the Thermometer Bar indicates an alarm status with a change in color NOTE An audible alarm will be heard if Google Chrome is the browser ...

Страница 99: ...and discuss their functionality Figure 5 14 Tune Mode components 1 CHANGE TUNE MASSES Click CHANGE TUNE MASSES to change the masses used for Transpector MPH tuning The Tune Table Editor will display which allows for editing the tune masses See Figure 5 15 Figure 5 15 Tune table 2 SCAN MASS The SCAN MASS drop down is used to select the mass to be tuned 1 2 3 4 5 6 7 8 9 10 11 13 8 11 12 ...

Страница 100: ...k the equivalent of ten clicks of the single button NOTE The POSITION buttons move the peak in the direction of the arrows i e the button will move the peak left 9 WIDTH buttons The WIDTH buttons increase or decrease the width of the peak to achieve target 10 R The single button or will finely change the peak width The double button or is a change equivalent to ten clicks of the single button NOTE...

Страница 101: ...ized in the factory for each individual Transpector MPH to produce optimum tune quality Do not alter this setting unless directed by INFICON FOCUS Voltage Changes the voltage of the focus plates which generate an ion beam from the ion source This has been optimized in the factory for each individual Transpector MPH to produce optimum tune quality Do not alter this setting unless directed by INFICO...

Страница 102: ...e Mode Parameters When first entering the TUNE window Transpector Web UI is set with the default parameters displayed in Table 5 4 Table 5 4 Default Tune Mode parameters Parameter Value Dwell 32 ms ppAMU 25 Electron Energy 70 eV Scan Mass 1 AMU Scan Width 2 AMU ...

Страница 103: ...follows 1 Click CHANGE TUNE MASSES A tune table will display see Figure 5 15 To remove masses from the tune table click the mass to remove then click REMOVE CAUTION Do not remove masses 1 2 or 4 Removing the low tune masses can significantly alter the higher mass tuning To add masses to the tune table type the mass into the box next to ADD then click ADD The default Tune masses are displayed in Ta...

Страница 104: ...the 10 R box An ideal 10 R is 0 90 0 05 8 While adjusting the width of the peak the peak position can change a bit Repeat steps 6 and 7 until the peak position is accurate and the 10 R is 0 90 0 05 9 Repeat Steps 3 8 for each Tune Mass Then repeat Steps 3 8 for each tune mass again to make sure that tuning of higher masses have not shifted lower masses 10 Once Transpector MPH is tuned click SUBMIT...

Страница 105: ...ick STATUS to display the STATUS window 2 In the SETTINGS group delete the current IP ADDRESS See Figure 5 16 3 Type the new IP ADDRESS 4 Click SET 5 A notification is displayed see Figure 5 17 Click OK 6 Transpector MPH will reboot automatically and will use the new IP ADDRESS Figure 5 16 IP address Figure 5 17 Rebooting Transpector MPH ...

Страница 106: ...eter Search Utility to Change the IP Address on page 2 4 6 To return to Transpector Web UI the new IP address must be entered in the address bar of the browser CAUTION If you do not have the IMSSU installed on your computer you will not be able to determine the new IP address of Transpector MPH 5 5 2 4 3 Changing the Port Number of Transpector MPH Transpector MPH is set with a default port number ...

Страница 107: ...to which it is connected 5 5 2 4 5 Changing the Gateway of Transpector MPH Transpector MPH is set with a default gateway of 0 0 0 0 If the network on which Transpector MPH is connected requires a gateway 1 Connect Transpector MPH to a computer with a gateway of 0 0 0 0 2 Enter Transpector Web UI 3 Enter the STATUS window 4 Delete the gateway in the GATEWAY box and type the new gateway 5 Click SET ...

Страница 108: ...s range A quick qualitative analysis can then be performed to determine what is present inside of the system For deeper analysis use FabGuard software 5 6 1 2 Leak Checking Transpector Web UI is useful as a leak checking tool Upon first entering the MONITOR window peaks at 28 nitrogen 32 oxygen and 44 carbon dioxide indicate the presence of a leak If the leak is not an air leak different masses ca...

Страница 109: ...s also allows for differentiating between different Transpector MPH when more than one is present on the network 1 Open Transpector Web UI 2 Highlight the webpage address in the browser right click then click Copy See Figure 5 18 NOTE There can be more than one shortcut per sensor For example a shorted can be created to display the MONITOR window and a different shortcut to display the LEAK CHECK ...

Страница 110: ...ranspector MPH Operating Manual 4 In the Create Shortcut window paste the webpage address of Transpector Web UI See Figure 5 20 Figure 5 20 Paste webpage address 5 Click NEXT See Figure 5 21 Figure 5 21 Next ...

Страница 111: ...ted on the desktop with the name given to it in step 5 See Figure 5 24 Figure 5 24 Shortcut icon CAUTION If the IP address of Transpector MPH is changed the shortcuts will not work 5 6 3 Creating Bookmarks In addition to creating shortcuts on the computer desktop bookmarks can also be generated inside of the internet browser To set a bookmark press Ctrl d when at the intended webpage address The b...

Страница 112: ...check the following 1 Is anyone else using Transpector Web UI Transpector Web UI will block any incoming requests when it is actively being used 2 Is the web address IP address of Transpector MPH correct If the IP address was recently changed make sure that the browser is directed to the correct address 3 Does Transpector MPH have 24 V dc power supplied to it If yes try resetting the power 4 Is th...

Страница 113: ... 3 6 2 Safety Considerations If Transpector MPH is used in a manner not specified by INFICON protection provided by the equipment may be impaired 6 2 1 Toxic Material The Transpector MPH sensor does not contain any toxic material However if the Transpector MPH sensor is used in an application wherein toxic material is used or generated residue of the toxic material will likely be present on the su...

Страница 114: ...ock If the Transpector MPH electronics module is operated while open hazardous electrical voltages may be present Such operation should not be attempted except by qualified service personnel 6 3 General Instructions For All Repair Procedures CAUTION Perform any servicing in a clean well illuminated area Wear clean nylon lint free lab gloves or finger cots Do not touch the vacuum side of the sensor...

Страница 115: ...t Replacement on page 6 6 and also in section 6 5 4 Ion Source Removal on page 6 9 If the procedures explained above do not solve the problem contact INFICON Refer to section 1 3 How To Contact Customer Support on page 1 3 CAUTION When heating the sensor above 200 C the electronics module and the signal contact must be removed from the sensor 6 4 2 Spare Heating Jacket Part Numbers INFICON offers ...

Страница 116: ...6 in Flat Blade Screwdriver 6 5 1 2 Tools for Replacing the Ion Source 1 16 in Flat Blade Screwdriver 2 Phillips Head Screwdriver Precision Pliers 6 5 1 3 Tools for Replacing the Electron Multiplier 1 16 in Flat Blade Screwdriver Phillips Head Screwdriver 1 5 mm x 50 mm Hex Driver 2 0 mm x 75 mm Hex Driver Precision Pliers Non Metallic Tweezers ...

Страница 117: ...nt may be impacted by previous use of Transpector MPH 1 Measure the resistance of each filament This can be accomplished while the sensor is under vacuum by measuring the resistance between pins 3 and 10 for filament 1 and pins 4 and 10 for filament 2 see Figure 6 1 on page 6 5 A failed filament will measure open while an intact filament will measure 0 8 Figure 6 1 Sensor pinout Table 6 2 Pin assi...

Страница 118: ... with the exception of the measurements between each filament pin and the filament common pin if the filaments have not failed 6 5 3 Filament Kit Replacement A filament replacement kit can be purchased from INFICON This kit contains a new filament assembly mounted on a shipping fixture and a small Allen wrench Perform the following steps to replace the filament NOTE Refer to section 6 5 1 1 Tools ...

Страница 119: ...e pliers use the flat blade screwdriver to loosen the clamps holding the filament leads B Gently pull the leads away from the filament assembly Figure 6 3 Remove the leads 3 Carefully pull the filament assembly from the ion source Figure 6 4 Remove the filament assembly B ...

Страница 120: ...t on the ion source standoffs CAUTION The new filament assembly must be carefully placed onto the ion source Excessive horizontal movement will cause the damage to the anode 5 Replace the three washers and locknuts and ensure that the anode C aligns with the mating bore D Figure 6 5 Align anode to mating bore C D ...

Страница 121: ...mately 0 8 at the feedthrough 6 5 4 Ion Source Removal Proceed as follows to remove the ion source NOTE See section 6 5 1 2 Tools for Replacing the Ion Source on page 6 4 before continuing 1 While holding the clamps with pliers use the flat blade screwdriver to loosen the clamps holding the filament leads A and ion source leads B one is hidden in the figure There are a total of six leads that need...

Страница 122: ...e three screws Figure 6 7 Remove screws holding ion source 4 Lift the ion source off the quadrupole assembly 5 Install the new ion source by reversing the above steps 6 Using an ohmmeter check that both filaments are not shorted to ground or to any of the lenses that the filament leads show a filament resistance of approximately 0 8 at the feedthrough between each filament pin and the filament com...

Страница 123: ...ng the clamps with the pliers use the flat blade screwdriver to loosen the clamps holding the filament leads A and ion source leads B one is hidden in the figure There are a total of six leads that need to be loosened Using the 1 5 mm x 50 mm hex driver unscrew the screws C holding the two RF leads Make sure to remove the lock washers as well Figure 6 8 Detach leads 2 Gently pull the electrical le...

Страница 124: ...l 3 Using the 2 0 mm x 75 mm hex driver unscrew the three screws D one is hidden in the figure holding the sensor assembly to the feedthrough Gently remove the sensor assembly from the feedthrough Figure 6 9 Removing the sensor assembly D ...

Страница 125: ...er remove the three gold screws E one is hidden in the figure holding the EM assembly inside of the sensor assembly Figure 6 10 Removing the screws holding the EM 5 Gripping the bottom of the EM assembly gently remove the EM from the sensor assembly Figure 6 11 EM detector E ...

Страница 126: ...oved in step 6 onto the new Electron Multiplier assembly 8 Install the new Electron Multiplier assembly into the sensor can 9 When installing the sensor back into the feedthrough ensure that the two pins on the bottom of the detector align with the two pins shown in Figure 6 13 Figure 6 13 Pin location 10 Reverse steps 1 4 to reassemble the Transpector MPH sensor Detector Pins ...

Страница 127: ...depending on the mass range of Transpector MPH The factory tune masses and width standards are displayed in Table 6 3 The gases that are used for factory tuning of these masses are hydrogen mass 1 and 2 helium mass 4 nitrogen mass 28 krypton mass 86 xenon mass 134 FC5311 mass 293 Table 6 3 Factory tune settings 100 AMU 200 AMU 300 AMU Mass 10 R Mass 10 R Mass 10 R 1 0 5 0 10 1 0 5 0 10 1 0 5 0 10 ...

Страница 128: ... to section 6 6 1 2 3 Selecting Masses for Tuning with a User Supplied Test Mix on page 6 17 To tune using process gases continue to section 6 6 1 2 4 Selecting Masses for Tuning with Process Gases on page 6 17 To tune with background gases continue to section 6 6 1 2 5 Tuning with Background Gases on page 6 18 6 6 1 2 1 Selecting Masses for Tuning with a CPM Test Mixture Calibration Reference The...

Страница 129: ...r MPH to be tuned The factory tune masses can be found in section 6 6 1 1 on page 6 15 6 6 1 2 4 Selecting Masses for Tuning with Process Gases In general Transpector MPH tuning requires access to a low mass a mid mass and a high mass Do not tune mass 1 or 2 if hydrogen is not present in the process but do not delete them from the tune table Preferably mass 4 should be tuned especially if Transpec...

Страница 130: ...If Transpector MPH is only used for leak checking mass 4 is the only mass to tune To tune mass 4 find a way to introduce helium into the vacuum chamber The following procedure may be used if test mix or helium is not available 1 Default all tune parameters 2 Delete all masses except 1 2 and 4 3 Add mass 28 or 40 and tune 4 Delete mass 4 5 Tune highest mass available in the system in some cases thi...

Страница 131: ... SYMPTOM CAUSE REMEDY Power LED does not turn on 24 V external power supply Check input AC line voltage to external power supply Check 24 V input verify input between 20 30 V Replace power supply Electronics failure Return to INFICON for repair No communi cation to HOST computer Sensor IP address not compatible with network Refer to Chapter 2 Connecting Transpector MPH Transpector communications p...

Страница 132: ...onics module is pushed all the way on sensor ANODE error Defective sensor anode shorted Check sensor with OHM meter for shorts See sensor pin out diagram Fix or replace sensor Electronics failure Return to INFICON for repair RF error Defective sensor RF leads open RF DC card fault Fix or replace sensor Electronics failure Return to INFICON for repair Electron Multiplier error Defective sensor EM s...

Страница 133: ...EM voltage Electronics failure Return to INFICON for repair Mass Filter Error Bad tune file Retune RGA Contaminated quadrupole Return to INFICON for repair Ion Source Error Incorrect Ion source settings Load original configuration file Ion source contaminated Replace Ion source Detector Error EM voltage set too high Reduce EM voltage Detector not working correctly Replace EM detector DSP Communica...

Страница 134: ...lament shorted Verify that filament is not shorted to ground Focus Error Unable to start or maintain Focus voltage Reset electronics box Return electronics box to INFICON for repair No spectra Emission is OFF Turn Emission ON EM is ON when operating Turn EM OFF Contaminated sensor Degas or service sensor Replace sensor Electronics failure Return to INFICON for repair Pressure too low for FC Use EM...

Страница 135: ...n current Improper calibration Ensure that the total pressure gauge used for sensitivity calibration was properly calibrated Electronics failure Return to INFICON for repair EM has low gain Bake out sensor Replace sensor Poor peak shape Sensor contaminated Degas sensor Bake out sensor Service sensor System pressure too high Verify pressure less than 5E 4 Torr for Transpector MPH Mass calibration r...

Страница 136: ...dress conflict between Transpector MPH and another network device Refer to Chapter 2 Connecting Transpector MPH for more information on communications problems High noise level System grounding Verify that vacuum system is grounded Electronics failure Return to INFICON for repair Transpector MPHelectronics box not mounted properly on sensor Push Transpector MPH electronics box all the way on to th...

Страница 137: ...ssure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A User s Guide to Vacuum Technology J F O Hanlon John Wiley and Sons 1989 The latter book also contains a wealth of information on related topics including gas flow pressure gauges pumps materials and the design of vacuum systems ...

Страница 138: ...a vacuum apparatus when no gases are being deliberately introduced Bakeout A bakeout is the process of heating a vacuum chamber above the ambient temperature in order to accelerate the desorption of species such as water vapor and hydrocarbons which are adsorbed onto the inner surfaces of the vacuum chamber Center Voltage The center voltage is the DC potential to which the quadrupole rod RF and di...

Страница 139: ...otential times the electron charge Electron Multiplier An electron multiplier is a in situ amplifier which is used to increase the sensitivity of a mass spectrometer When a high voltage is applied to an electron multiplier positive ions are accelerated into the multiplier causing the release of a large number of electrons per incident ion at the output Emission Current The emission current is the ...

Страница 140: ...ier The gain of an electron multiplier is the ratio of incident ion current to electron current output The gain of the multiplier is a strong function of the bias potential applied across it Ion An ion is a molecule or atom which has either lost or added one or more electrons Those molecules which have lost electrons are positive ions Those molecules which have added electrons are negative ions Io...

Страница 141: ...al relationship between an ion current and the total or partial pressure giving rise to that current A mass spectrometer is said to have good linearity when the ion current is proportional to the pressure over a specified pressure range within a specified tolerance Typically but not always the ion current will be linear with pressure at the low end of an instrument s pressure range At some pressur...

Страница 142: ...n element which have the same number of neutrons For example 99 985 of all naturally occurring hydrogen atoms have no neutrons giving an atomic mass of approximately 1 while 0 015 have one neutron giving an atomic mass of approximately 2 There is a third isotope of hydrogen which contains two neutrons giving an atomic mass of 3 but this isotope is unstable with such a short radioactive half life t...

Страница 143: ...sed to determine the quantities and chemical nature of gases present in a vacuum system The instrument is typically a mass spectrometer equipped with an open ion source Resolution Resolution is the ability of a mass filter to select between nearby masses It is typically measured as the mass of the peak divided by the width of a given mass peak at 10 or 50 of the peak maximum intensity Secondary El...

Страница 144: ...o of ion current detected at the exit end of the mass filter set to transmit a given mass to the current of ions of the same mass entering the filter from the ion source Typically the transmission factor for nitrogen ions at 28 AMU is set equal to 1 The transmission factor at other masses is given relative to that for nitrogen Viscous Flow Viscous flow is that motion of gas molecules wherein the c...

Страница 145: ... 15 ft 600 1429 P1 Power Supply Extension Cable 9 m 30 ft 961 417 G1 4 Port Ethernet Router w Push Button Wi Fi 961 418 G1 8 Port Ethernet Switch 961 702 G1 Sensor Hardware Kit 914 024 G1 Angle Valve Kit Manual includes heater 914 026 G1 Angle Valve Kit Air Operated 24 V dc includes heater 914 410 P1 Spare Angle Valve Manual 914 220 G1 Spare Angle Valve Electropneumatic 961 029 G1 MPH Heater Kit 1...

Страница 146: ...s bolts 924 200 G1 Transpector MPH HPR Interlock Extension Tube Kit Including nuts bolts 600 1190 P8 Communications Cable Ethernet 7 m 600 1190 P15 Communications Cable Ethernet 15 m 961 021 G1 Power Supply Kit 80 250 V ac 1 2 m 4 ft US Plug 961 021 G2 Power Supply Kit 80 250 V ac 1 2 m 4 ft US Plug 4 57 m 15 ft Extension 961 021 G3 Power Supply Kit 80 250 V ac 4 ft 1 2 m US Plug 9 14 m 30 ft Exte...

Страница 147: ...r Filaments 961 H1MAS Transpector MPH 100 AMU EM FC MPH100M Y2O3 Ir Filaments 961 H1FBS Transpector MPH 100 AMU FC MPH100F Tungsten Filaments 961 H1MBS Transpector MPH 100 AMU EM FC MPH100M Tungsten Filaments 961 H2FAS Transpector MPH 200 AMU FC MPH200F Y2O3 Ir Filaments 961 H2MAS Transpector MPH 200 AMU EM FC MPH200M Y2O3 Ir Filaments 961 H2FBS Transpector MPH 200 AMU FC MPH200F Tungsten Filament...

Страница 148: ... minute warm up period at constant STP unless specified 11 2 Sensor Length Vacuum Side 11 3 Mass Range 11 4 Detector Type MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 143 mm 193 mm 143 mm 193 mm 143 mm 193 mm 5 63 in 7 82 in 5 63 in 7 82 in 5 63 in 7 82 in MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 1 to 100 AMU 1 to 200 AMU 1 to 300 AMU MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M Farad...

Страница 149: ...For FC Only Less than 1 of peak height per C Amps Torr mbar Pa MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M FC 6x10 4 4 5x10 4 4 5x10 6 6x10 4 4 5x10 4 4 5x10 6 5x10 4 3 8x10 4 3 7x10 6 5x10 4 3 8x10 4 3 7x10 6 4x10 4 3x10 5 3x10 6 4x10 4 3x10 5 3x10 6 Torr mbar Pa MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M FC 3x10 13 4x10 13 4x10 11 N A 4x10 13 5 3x10 13 5 3x10 11 N A 5x10 13 6 7x10 13 6 ...

Страница 150: ...M 5x10 4 6 7x10 4 6 7x10 2 Degrees C MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M FC 200 C 200 C 200 C 200 C 200 C 200 C EM N A 150 C N A 150 C N A 150 C Degrees C with electronics removed MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 300 C MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 5 to 50 C ambient MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 20 30 V dc 24 V dc Typical Latching 4 pi...

Страница 151: ...s Green MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M Standard Cat5e Ethernet Cable Connection MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 1 relay 24 V at 0 5 amps MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M 1 Analog Input 2 Digital Inputs H100F H100M H200F H200M H300F H300M 1 for power status 1 for emission status ...

Страница 152: ...n Electronics Module Power Supply See section 12 1 3 on page 12 2 Software optional See section 12 1 6 on page 12 4 A Computer Cable See section 12 1 7 Heating Jacket System Optional on page 12 4 12 1 1 Ship Kit Table 12 1 Ship kit Part Number Description 961 020 G1 Ship Kit includes 600 1198 P8 7 m Ethernet Cable 961 702 G1 Mounting Hardware 961 022 G1 O ring and Mounting Nut 961 370 P1 O ring Re...

Страница 153: ...S Plug with 4 5 m 15 ft Extension 961 021 G3 Power Supply Kit 85 250 V ac 1 2 m 4 ft US Plug with 9 m 30 ft Extension 961 021 G4 Power Supply Kit 85 250 V ac 1 2 m 4 ft European Plug 961 021 G5 Power Supply Kit 85 250 V ac 1 2 m 4 ft Euro Plug with 4 5 m 15 ft Extension 961 021 G6 Power Supply Kit 85 250 V ac 1 2 m 4 ft Euro Plug w 9 m 30 ft Extension Table 12 4 Sensor one of the following Part Nu...

Страница 154: ...PR Tungsten Filaments 961 H1PBP Transpector MPH100 Interlock Tungsten Filaments 961 H2FBP Transpector MPH200F Tungsten Filaments 961 H2MBP Transpector MPH200M Tungsten Filaments 961 H2HBP Transpector MPH200 HPR Tungsten Filaments 961 H2PBP Transpector MPH200 Interlock Tungsten Filaments 961 H3FBP Transpector MPH300F Tungsten Filaments 961 H3MBP Transpector MPH300M Tungsten Filaments 961 H3HBP Tran...

Страница 155: ...ingle Sensor Version CD 921 039 G2 FabGuard Explorer Multi Sensor Version CD Table 12 7 Heating jacket system optional one of the following optional Part Number Description 961 029 G1 Transpector MPH Heater Kit 120 V ac 961 029 G2 Transpector MPH Heater Kit 230 V ac Table 12 8 Calibration reference optional one of the following optional Part Number Description 923 713 G1 Argon Only Reference 923 7...

Страница 156: ...12 5 Transpector MPH Operating Manual 12 1 10 Angle Valve Optional Table 12 10 Angle valve optional optional Part Number Description 914 024 G1 Angle Valve Kit Manual includes Heater ...

Страница 157: ...tion Of Contamination 1 3 detection factor 4 12 4 13 9 2 detector 3 1 9 2 detector type 11 1 doubly charged ion 9 2 E electron energy 3 4 9 2 electron multiplier 9 2 electron stimulated desorption 4 15 electronics enclosure 11 4 electronics module 1 5 12 2 physical dimensions 1 6 EM gain 3 11 emission current 3 4 9 2 emission error 7 2 emult error 7 2 energy of the bombarding electrons 4 5 exit ap...

Страница 158: ...rifluoride 3 13 noise level 7 6 O open ion source 9 5 outgassing 4 14 9 5 overvoltage category 1 8 P parent ion 9 5 partial pressure 4 13 4 16 9 6 analyzer 4 8 pass band width 3 8 peak height 4 8 peak shape poor 7 5 perimeter for maintenance access 1 7 pole zero 3 7 9 6 pollution degree 1 8 power input 11 3 supply 1 15 12 2 pressure maximum 11 2 pumping 4 14 Q quadrupole 9 6 exit aperture 3 10 exi...

Страница 159: ... 7 3 max operating 11 3 operating 11 3 operating range 1 8 total pressure 9 6 total pressure plate 9 7 transition flow 9 7 transmission factor 4 12 4 13 9 7 tuned 4 16 tungsten hexafluoride 3 13 U ultrahigh vacuum 4 14 user configured switches 11 4 V vacuum region 4 14 vacuum system 4 14 ventilation requirements 1 7 viscous flow 9 7 W weight 1 6 Z zero blast 9 7 ...

Страница 160: ...al www inficon com reachus inficon com Due to our continuing program of product improvements specifications are subject to change without notice All trademarks are the property of their respective owners PN 074 555 P1C 2016 INFICON ...

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