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LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: German tina48d1-c (2017-10)

[email protected]

t i na48e1- c

www.inficon.com

Содержание MPG400

Страница 1: ...Operating Manual tina48e1 c 2017 10 1 Inverted Magnetron Pirani Gauge MPG400 MPG401 ...

Страница 2: ...logy We reserve the right to make technical changes without prior notice All dimensions in mm The Inverted Magnetron Pirani Gauges MPG400 und MPG401 has been designed for vacuum measurement in the pressure range of 5 10 9 1000 mbar The Inverted Magnetron Pirani Gauges must not be used for measuring flammable or combustible gases which react in air The gauges can be used with an INFICON Controller ...

Страница 3: ...Another Control Device 12 4 Operation 13 4 1 Measurement Principle Measuring Behavior 13 5 Deinstallation 15 6 Maintenance 16 6 1 Adjusting the Gauge 16 6 2 Cleaning MPG400 Replacing Parts 18 6 2 1 Disassembling MPG400 18 6 2 2 Cleaning MPG400 19 6 2 3 Reassembling MPG400 20 6 3 Cleaning MPG401 Replacing Parts 21 6 3 1 Disassembling MPG401 22 6 3 2 Cleaning MPG401 23 6 3 3 Reassembling MPG401 24 6...

Страница 4: ...media Consider possible reactions e g explosion of the process media due to the heat generated by the product Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum components are con taminated Adhere to the relevant regulations and take the n...

Страница 5: ... non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the corresponding product documentation The end user assumes the responsibility in conjunction with the process media used Gauge failures due to contamination as well as expendable parts filament are not covered by the warranty 1 4 Liability and Warranty...

Страница 6: ...ication 85 kΩ referenced to supply common Status Pin 6 p 10 2 mbar Pirani only mode Low 0 V p 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 10 2 mbar Cold cathode ignited Combined Pirani cold cathode mode High 15 30 V dc Lamp High voltage on LED on Supply DANGER The gauge may only be connected to power supplies instruments or control devices that conform to the requirements of a gr...

Страница 7: ...s exposed to vacuum Vacuum connection Measuring chamber Feedthrough Internal seals MPG400 MPG401 Anode Ignition aid Pirani measuring tube Pirani filament stainless steel stainless steel ceramic FPM 75 Ag Cu soft solder Sn Ag Mo stainless steel Ni Au W Mounting orientation any Internal volume 20 cm Pressure 10 bar absolute limited to inert gases Temperatures Operation MPG400 MPG401 5 55 C 5 150 C a...

Страница 8: ...00 401 om Dimensions mm 18 DN 25 ISO KF 18 5 DN 40 ISO KF DN 40 CF F 24 92 ø 63 5 28 55 60 75 MPG400 105 32 55 60 75 15 5 ø 63 5 MPG401 Weight 351 010 700 g 351 011 720 g 351 012 980 g 351 020 730 g 351 021 750 g 351 022 1010 g ...

Страница 9: ...he event of a fault The gauge must be electrically connected to the grounded vacuum chamber The connection must conform to the requirements of protective connection according to EN 61010 CF connections fulfill this requirement For gauges with KF connections use a conductive metallic clam ping ring Caution Caution vacuum component Dirt and damages impair the function of the vacuum component When ha...

Страница 10: ...If adjustment should be possible after the gauge has been installed be sure to install it so that the HV and ATM trimmer potentiometers can be accessed with a screw driver 16 Remove the protective lid and install the product to the vacuum system When making a CF flange connection it may be advantageous to temporarily remove the magnet unit 11 or Protective lid Clamp Seal with centering ring Seal w...

Страница 11: ...fficult to separate the magnet unit and the measuring chamber 7 d Make the flange connection between the gauge and the vacuum system e Remount the magnet unit and lock it with the hexagon head screw 3 f Carefully mount the electronics unit 2 Make sure the pin of the Pirani ele ment is properly plugged into the corresponding hole of the electronics unit g Push the electronics unit up to the mechani...

Страница 12: ...o the diagram Electrical connection 8 pin FCC 68 connector Pin 1 Supply 15 30 V dc Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c Connect the sensor cable to the gauge and the controller 3 2 Electrical Connection Precondition 3 2 1 Use With an INFICON Controller 3 2 2 Use With Another Control Device ...

Страница 13: ...ut pin 6 indicates the current status of the gauge Pressure Lamp on the gauge Operating mode Pin 6 p 1 10 2 mbar Pirani only mode Low 0 V p 1 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 1 10 2 mbar Cold cathode ignited Combined Pirani cold cathode mode High 15 30 VDC As long as the cold cathode measuring circuit has not ignited the measuring value of the Pirani is output as measu...

Страница 14: ...cycles With constantly low pressures p 1 10 6 mbar the gauge can be operated for more than one year without cleaning cleaning the gauge 18 21 Contamination of the gauge generally causes a deviation of the measured values In the high pressure range 1 10 3 mbar 0 1 mbar the pressure reading is too high contamination of the Pirani element Readjustment of the Pirani measuring system 16 In the low pres...

Страница 15: ...acuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Vent the vacuum system Put the gauge out off operation and unplug the sensor cable ...

Страница 16: ...ls when working in this area The gauge is factory calibrated If used under different climatic conditions through extreme temperatures aging or contamination and after exchanging the sensor the characteristic curve can be offset and readjustment may become necessary The cold cathode measuring circuit which is dominant for low pressures 1 10 3 mbar is factory calibrated and cannot be adjusted By way...

Страница 17: ...urn the potentiometer counter clockwise by 1 3 of a turn Vent the gauge with air or nitrogen to atmospheric pressure and wait at least 10 minutes Turn the nameplate clockwise until the mechanical stop is reached Using the 1 5 mm screwdriver adjust the ATM potentiometer to 8 60 V or to 1 103 mbar Turn the nameplate back to its original position it catches ...

Страница 18: ...h AF 1 5 Allen wrench AF 3 Open end wrench 7 mm Pliers for circlip Polishing cloth 400 grain or Scotch Brite Tweezers Cleaning alcohol Mounting tool for ignition aid Ignition aid Pirani element 13 incl FPM seal 13a FPM seal 11 for anode feedthrough 6 3 2 4 1 5 7 13 13a 8 8a 9 10 11 12 10a Remove the gauge from the vacuum system 15 Unfasten the hexagon socket set screw 1 on the electronics unit 2 R...

Страница 19: ...loth rub the inside walls of the measuring chamber and the polarity insert to a bright finish The sealing surfaces must only be worked concentrically Rinse the measuring chamber and the polarity insert with cleaning alcohol Allow both to dry Remove the used ignition aid 10a with tweezers Using a polishing cloth rub the anode pin to a bright finish Do not bend the anode Do not carry out mechanical ...

Страница 20: ... aid 10a into the measuring chamber Insert the Pirani element 13 with the FPM seal 13a slid over it into the corresponding bore hole Carefully place the pressure piece 9 on the measuring chamber and tighten them with the three hexagon socket screws 8 incl lock washers 8a uniformly until the stop position is reached Position the ignition aid 10a by pushing the mounting tool over the anode pin until...

Страница 21: ...op and lock it with the hexagon socket set screw 1 Adjust the gauge 16 DANGER DANGER cleaning agents Cleaning agents can be detrimental to health and environment Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them Consider possible reactions with the product materials 7 For cleaning the measuring chamber the Pirani element must ...

Страница 22: ...nd the measuring chamber 7 Remove the circlip 5 and the polarity insert 6 from the measuring chamber Unfasten the hexagon socket set screw 9c and remove the insulator 9b without twisting it Remove the four hexagon socket screws 8 incl lock washers 8a on the back of the measuring chamber Carefully remove the following parts in this order without exerting stress on the Pirani element 13 pressure pie...

Страница 23: ... out mechanical work on the ceramic part Rinse the anode with cleaning alcohol Allow the anode to dry Insert a new ignition aid 10a into the mounting tool Carefully press the anode clean or new centered and parallel to the tool axis into the ignition aid and insert it to a depth of approx 15 mm The final positioning is established after the anode is installed Ignition aid Mounting tool Anode Slide...

Страница 24: ...er the anode pin until the mechanical stop is reached Blow the particles in the measuring chamber with dry nitrogen be careful to hold the measuring chamber with the flange pointing downwards Slide the polarity insert 6 into the measuring chamber until the mechanical stop is reached Place the circlip 5 snugly fitting on the polarity insert Visually check that the anode pin is centered over the mid...

Страница 25: ...t until the gas dis charge ignites in case of contamination with insu lation layers the cold cathode may completely fail to ignite Cleaning MPG400 18 MPG401 21 The MPG has only been activated with p 3 10 9 mbar Slightly increase the pressure Measuring signal con tinually 5 V or display 10 3 mbar although vacuum pressure is OK Pirani measurement cir cuit not adjusted e g due to severe contami natio...

Страница 26: ...ding to the spare parts list Pos Description Ordering number 12 13a 11 10a Maintenance kit consisting of 1 support ring 1 O ring FPM ø3 69 1 78 1 O ring FPM ø10 82 1 78 3 ignition aid 351 999 13 12 13a 11 10a 10 Repair kit consisting of 1 Pirani element 1 support ring 1 O ring FPM ø3 69 1 78 1 O ring FPM ø10 82 1 78 3 ignition aid 1 anode complete 351 998 10a Set of ignition aids comprising 10 ign...

Страница 27: ...onsisting of 1 Pirani element with glass feedthrough 1 screw fitting 1 copper seal 1 anode extension piece 1 anode complete 3 ignition aid 1 seal HNV 100 9 1 6 1 centering ring 351 996 10a Set of ignition aids consisting of 10 ignition aid 351 995 Mounting tool for ignition aid 351 994 Measurement system complete DN 25 ISO KF flange DN 40 ISO KF flange DN 40 CF F flange BN846472 T BN846473 T BN846...

Страница 28: ...taminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts WARNING WARNING substances detrimental to the environment Products or parts thereof mechanical and electric components operating fluids etc can be ...

Страница 29: ...errange Pa mbar torr Measuring signal U V Pressure p Meas signal U V Pressure p mbar Pressure p Torr Pressure p Pa 0 5 Sensor error 0 5 1 82 Underrange 1 82 2 0 2 6 3 2 3 8 4 4 5 0 5 6 6 2 6 8 7 4 8 0 8 6 5 0 10 9 1 0 10 8 1 0 10 7 1 0 10 6 1 0 10 5 1 0 10 4 1 0 10 3 1 0 10 2 0 1 1 0 10 100 1000 3 8 10 9 7 5 10 9 7 5 10 8 7 5 10 7 7 5 10 6 7 5 10 5 7 5 10 4 7 5 10 3 7 5 10 4 0 75 7 5 75 750 5 0 10...

Страница 30: ... 2 4 6 8 Water vapor peff mbar Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 Pressure indicated gauge calibrated for air 6 4 2 6 4 2 6 4 2 10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 Ar 10 5 8 6 4 2 10 6 8 2 4 6 8 2 4 6 2 4 6 2 4 6 10 3 8 10 2 8 10 1 8 10 3 8 10 2 8 10 1 8 peff mbar p mbar Indication range 10 6 10 1 mbar Air N2 O2 CO He B Gas Type Dependence Indication range above 10 2 mbar Indicat...

Страница 31: ... Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measurement instrument e g a quadrupole mass spectrometer ETL Certification ETL LISTED The products MPG400 and MPG401 conform to the UL Standard UL 61010 1 are certified to the CAN CSA Standard C22 2 No...

Страница 32: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina48d1 c 2017 10 reachus inficon com t i na48e1 c www inficon com ...

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