Inficon IC6, Руководство по эксплуатации

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IC6 Operating Manual
Operate Display Description
1 Aggregate Rate
2 Layer Thickness
3 Power Level
4 State of Layer
5 State Timer
6 Layer Currently In Process
7 Layer Timer
8 Material Being Deposited
9 Source Number In Use
10 Sensor Number(s) In Use
11 Crystal Position In Use
12 Graphical Display of Rate Deviation or Power
13 Process Being Executed & Process Time
14 Run Number
15 Date and Time
16 Message Area
17 Function Key Definitions
18 Crucible Position
During the OPERATE display, the function keys below the screen function as
explained in
Table 3-1 .
Table 3-1 Operate display function keys
Key Function Description
F1 ZERO
THICKNESS Pressing F1 resets the displayed thickness of the current
layer and the sensor thickness values to zero.
F2 TOGGLE
MANUAL Press F2 to put the layer in manual control so that the power
level is controlled by the Handheld Controller (
section
3.6.6 ). When in Manual, press F2 again to remove the layer
from the Manual state and place it into the DEPOSIT state.
F3 SHOW ALL
LAYERS/
SHOW GRAPH Press F3 to toggle between showing all layers (if more are
running) or showing only one layer