10 - 41
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
10.4.30 Status General
Command
= SG <Command ID><Option>
Command ID
= <Byte> See Description in
.
Option
= <Byte> |< Integer > | <32 Bit Word> | <48 Bit Word>
Response
= <Byte>… <Byte> | <Integer>…<Integer
Table 10-12 Status general commands
SG
Comm
and ID
Description
Option
Number
of bytes
in the
response
Data Returned
Notes
0
(0x00)
N/A
1
(0x01)
Active process
4
<Integer>
2
(0x02)
Active layer(s)
1 to 7
<Byte>[<Byte>]
[<Byte>]…[<Byte>]
First byte is number of
active layers. The
following bytes are
which layer(s) is (are)
active
3
(0x03)
Output status
5
<Byte><Byte><Byte>
<Byte><Byte> Each bit
represents an output,
bit set means output
active.
MSB of first byte is
output 1.MSB of the
fifth byte is output 33.
4
(0x04)
Input status
4
<Byte><Byte><Byte>
<Byte> Each bit
represents an input. Bit
set means input active.
MSB of first byte is
input 1. MSB of the
fourth byte is input 25.
5
(0x05)
Logic statement
status
13
<Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte> Each bit
represents a logic
statement, bit set
means logic statement
is true.
MSB of first byte is logic
statement 1.MSB of the
thirteenth byte is logic
statement 97.
Содержание IC6
Страница 1: ...O P E R A T I N G M A N U A L IC6 Thin Film Deposition Controller IPN 074 505 P1E Cover Page ...
Страница 2: ......
Страница 8: ......
Страница 20: ...TOC 12 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 42: ...1 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 134: ...6 6 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 148: ...8 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 170: ...9 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 236: ...11 2 IPN 074 505 P1E IC6 Operating Manual Figure 11 1 The essential advantage of multi point deposition sensing ...
Страница 268: ...13 2 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 312: ...15 40 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 338: ...A 10 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 342: ...1 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...