Inficon Fab UL6000 Fab, Руководство по эксплуатации

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INFICON Installation | 5
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NOTICE
Material damage due to excessive mains voltage
The device can be damaged if the mains voltage is too high.
► Before connecting the device, check whether the mains voltage specification on the
device matches the locally available mains voltage.
5.6 Checking the operation of the device
NOTICE
Turbo molecular pump can be damaged
The running turbo molecular pump can be damaged by jerky movements or foreign
objects.
► Avoid any jerking movements or vibrations to the device during operation and for up
to 2 minutes after switching off.
► Prevent foreign objects from entering the inlet of the device.
Do not switch on the device when the ambient temperature is less than 10 °C.
ü
A suitable blank flange is available (if not already mounted on the inlet flange).
ü
A helium calibration leak is available (optional).
1 Unpack the device, take a look at the supply and inspect for any visual
damage.
2 Check if the inlet is blind-flanged. If this is not so, flange a blank flange with an
O-ring gasket on the inlet on the upper side of the device.
3 Connect the device to the power supply.
4 Switch on the leak detector via the power supply switch.
ð
After switching on pieces of status information are shown on the touchscreen
about the speed of the turbo molecular pump, the foreline pressure, the
emission and the active cathode. The start process takes about 3 minutes
and is completed with a short acoustic signal. Now, the device is in the
"Standby" mode (ready to operate).
5 Press the STARTbutton.
ð
The inlet is evacuated and then the measuring mode for the measured leak
rate is shown.
In case a test object was connected, you would start with spraying helium on
the outside.