Inficon CP300C9, Руководство по эксплуатации, Страница: 6 / 22

6
IG9972BEN (2017-09) Plug-In Boards.om
3 Technical Data
Number of measurement circuits 1 each
Gauges TPR018, IKR085 (both ITER)
Display range (signal output)
1)
Pirani
Cold cathode mbar
mbar 5×10
-4
… 1000
5×10
-9
… 1×10
-2
Measurement range
1)
Pirani
Cold cathode mbar
mbar 1×10
-2
… 100
1×10
-8
… 5×10
-3
Cable length
Pirani, max.
Cold cathode, max. m
m 100
60
2)
… 100
Power supply cold cathode gauges
Operating voltage
Measurement current kV
µA 3.3
≤ 600
Signal output
Measured value, analog
Error message
Current, max.
Output resistance V
V
mA
Ω
0 … +10
>11.5
2
400
Reaction time (10  90%) for sudden
pressure step
Pirani
<10
-3
 10
3
mbar
ms
<50
Cold cathode
10
-9
⇔
10
-6
mbar
ms
<100
Connection, equipment side
Pirani gauge
Cold cathode gauge
Signal output female
female
female Amphenol C91E, 6-pin
SHV coaxial
ø2 mm
Weight kg ≈
0.21
1)
N
2
-equivalent
2)
when using the lower measurement range limit (
→
 9)
3.1 Pirani / Cold Cathode
Measurement Board
CP300C9