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UL6000-Fab-Operating-instructions-iina75en1-04-(2109)
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Function
State:
Description
Setpoint 3
closed:
Measured leak rate exceeds the setpoint 3
open:
Measured leak rate undercuts the setpoint 3
Setpoint 4
closed:
Measured leak rate exceeds the setpoint 4
open:
Measured leak rate undercuts the setpoint 4
Purge
closed:
Purge valve open
open:
Purge valve closed
Vent
closed:
Internal vent valve open.
open:
Internal vent valve closed
Standby or evacuate
closed:
State standby or evacuate active
open:
State standby of evacuate not active, such
as when measuring
Status calibration
leak valve
closed:
Calibration leak valve is open
open:
Calibration leak valve closed
Warning
closed:
Warning
open:
No warning
ZERO active
closed:
ZERO switched on
open:
ZERO switched off
10.2.5 Setting up the I/O module protocol
To switch between ASCII and LD protocol.
ü
Supervisor rights
1
> Setup > Accessories > I/O module > I/O module protocol
2
Adjust.
3
Save
.
Содержание 550-520
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