HELIX CTI-CRYOGENICS CRYO-TORR 100 Скачать руководство пользователя | Manualshive

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Содержание CTI-CRYOGENICS CRYO-TORR 100

Страница 1: ...USED WITH 8300 OR SC AIR COMPRESSOR Installation Operation and Servicing Instructions MB040240 Rev A 9 91 Revised September 1991 Copyright 1991 Helix Technology Corporation Printed in U S A 3750 _ __...

Страница 2: ...S A Telephone 408 727 8077 Telecopier Fax 408 988 6630 EUROPE Germany en CRYOGENICS GmbH Haasstrasse 15 D 61oo Darmstadt Germany Tel 49 6151 86377 Fax 49 6151 891635 ii EI lloo CTI CRYOGENICS SA 4 ru...

Страница 3: ...nol install a hot filament Iype vacuum gauge on the cryopump side of the roughing valve it could be an ignition source of flammable gases in the pump 3 Cryopumping oxygen ozone requires special preca...

Страница 4: ...oils in roughing pumps I AWARNING EXPLOSION OCCURING FROM OZONE IN THE PUMP COULD CAUSE SEVERE INJURY OZONE CAN BE PRESENT AS A BY PRODUCT OF I OXYGEN PROCESSES IF OZONE IS PRESENT SPECIAL PRECAUTION...

Страница 5: ...Quick Installation and Startup 4 Installation 5 Operation 6 Regeneration 7 Maintenance Procedures Appendices A Troubleshooting Procedures B Illustrated Parts Breakdown C Accessories List for Cryo Tor...

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Страница 7: ...ressorpowered by 8002 Controller 4 4 B 1 Exploded view ofCryo Torr 100 Cryopump B 3 B 2 Exploded view ofCryo Torr 7 Cryopump B 5 B 3 Exploded view ofCryo Torr 8 Cryopump B 7 B 4 Exploded view ofCryo T...

Страница 8: ...G 8001 CONTROLLER COLD HEAD POWER CABLE AND SERVICING INSTRUCTIONS CONTROLLER COMPRESSOR POWER CABLE QI c B YOGENICS _ _ _J c_ _Q 9 y___c_q _ Q _ T 9 8300 COMPRESSOR COMPRESSOR LOW VOLTAGE CONTROL CAB...

Страница 9: ...a complete indexed system notebook The Cryo Torr High Vacuum Pump System shown in Figure 1 1 provides fast clean pumping ofall gases in the 10 3 to 10 10 torr range It operates on the principle that g...

Страница 10: ...iNOER ORIVE UNIT ACCESSORY PORT CONNECTION 15K CONOENSING ANO CRYO ADSORBING ARRAY 1 CfI CRYCXJENICS HELIX TECHNOLOGY CORPORATION GAS fLOW FROM USER S VACUUM SYSTEM INTO INLET OF CRYOPUMP MQUNTING flA...

Страница 11: ...SPEEDS LITER SECOND CRYOPUMP WATER AIR HYDROGEN ARGON CT IOO 1 000 350 4S0 285 CT 7 3 600 1 000 1 000 S50 CT S 4 000 1 500 2 500 1 200 CT SF 4 000 1 500 2 200 1 200 CROSSOVER MAXIMUM GAS BURST CRYOPU...

Страница 12: ...CT 7 75 0 95 CT 8 700 8 9 Interface connections CT 8F 700 8 9 Helium supply and reJum piping 10 ft 3 m each with 1 2 inch self sealing couplings Longer lengths elbows and tees available Cold head pow...

Страница 13: ...m inJmm cr 100 MET SEAL 12 9 328 9 4 240 6 152 3 9 99 10 256 ISO 12 8 323 9 3 235 5 12 130 3 9 99 10 256 cr 7 ISO 13 25 337 9 229 9 5 130 7 9 200 11 8 300 ANSI 13 25 337 9 229 11 279 7 9 200 12 6 320...

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Страница 15: ...procedures in the cryopump manual M8040240 2 2 The Cryopump 2 1 2 1 On receipt remove the cryopump from its shipping carton and inspect the cryopump for evidcnce of damage Report any damage to the shi...

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Страница 17: ...er or cryopump to its power source until all connections have been made between the components of the high vacuum system 2 The switch es on the front of the controller or compressor must be in the OFF...

Страница 18: ...8300 COMPRESSOR SC COMPRESSOR ELECTRICAL CONNECTION OF ELECTRICAL CONNECTION OF COMPRESSOR CONTROLLER AND COMPRESSOR AND CRYOPUMP CRYOPUMP CONNECT COLD HEAD CABLE CONNECT COMPRESSOR POWER FROM COMPRES...

Страница 19: ...NECTOR I gCLE O llLY gg f 6 SOR COMPRESSOR _f i J C IBLE POWER CABLE CARTRIDGE MAY BE REMOTELY LOCATED CONTROLLER SIDE MOUNTED OPTIONAL ROUGHING VALVE PURGE VALVE CRYOGENICS HELIX TECHNOLOGY CORPORATI...

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Страница 21: ...f 0 Figure 3 2 page 3 3 and proceed as follows 1 Remove the protectivecover from the main flange ofthe cryopump 2 Clean all sealing surfaces and install the O ring or metal seal gasketas appropriate 3...

Страница 22: ...e making the componentinterconnections I Remove all dust plugs and caps from the supply and return lines compressor and cryopwnp Check all fittings 2 Connect the helium gas return line from the com pr...

Страница 23: ...as charge pressure ofa multiple 2 cryopump CT lOO and 8300 Compressor installation using interconnecting lines totaling more than 10 feet on either the supply or return side proceed as follows 1 Conne...

Страница 24: ...AD HELIUM TEE COLD HEAD POWER CABLE COMPRESSOR CONTROL CABLE COMPRESSOR POWER CABLE ELECTRICAL CABLE ROUGHING SYSTEM HELIUM LINE RETURN LINE eTi CRYOGENICS _ HELIX TECHNOLOGY CORPORATION CRYOPUMP CT I...

Страница 25: ...ween regeneration and the compressor pressure reading These recorded values are useful for future performancereference 5 2 Rough Pumping Preliminary Vacuum Pumping It is not necessary to rough pump th...

Страница 26: ...ch bottom out temperature 5 Record the time that was required to reach 20K in your log also record the compressor return gas pressure at 20K This value can be useful for future evaluation ofcryopump p...

Страница 27: ...than air oxygen levels should be prepared for oxygen service per the manufacturer s recommendations including use of oxygen service lubricating oils in roughing pumps 5 3 eTl CRYOGENICS HE L1X TE CHNO...

Страница 28: ...chamber you should stop roughing at as high a pressure as possible The optimum crossover pressure for a vacuum chamber should cause a very slight rise in temperature with a rapid recovery Increase th...

Страница 29: ...At this point it can be held under positive pressure and rough pumped prior to startup 5 5 5 6 eTi CRYOGENICS HELIX TECHNOLOGY CORPORATION 5 11 Cryopump Storage If the cryopump is stored while still...

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Страница 31: ...efer to Section 5 6 page 5 3 6 1 6 2 When to Regenerate The need to regenerate the Cryo Torr high vacuum pump as a result of saturation is a function of the cryopump capacity and the process gas throu...

Страница 32: ...y purge gas through the vacuum vessel purge fitting at approximately 150 1 66 C and at a flow rate of 1 2 cfin Allow the purge gas to vent through the poppet relief valve 6 2 eTl CRYOGENICS 4 Halt the...

Страница 33: ...Manual 7 2 Unscheduled Maintenance There are several maintenance items that may arise on an unplanned basis These items generally do not occur frequently but when they do some specialized procedures a...

Страница 34: ...ray that is not severely contaminated a Wash each item in strong soap or detergent solution and hot water b Rinse the items in clean hot water c Air or oven dry at 150 F 66 C maximum r 7 2 eTl CRYOGEN...

Страница 35: ...elium stops flowing c Loosely connect the charge line to the helium pressure regulator d Purge the charge line again as in step a for 30 seconds and tighten the charge line flare fining onto the heliu...

Страница 36: ...and helium gas supply lines 7 4 ai CRYOGENICS _ HELIX TECHNOLOGY CORPORATION 5 Reduce the pressure in the cold head to a level of 45 psig by using the maintenance manifold 6 Allow the second stage of...

Страница 37: ...ryopump before decontaminating the compressor The maintenance manifold and flex lines will be connected to the supply and return fittings on the compressor 7 5 7 6 CRYOGENICS HELIX TECHNOLOGY CORPORAT...

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Страница 39: ...king below the Hi Vac valve should be performed with the cryopurnp shut off and at room temperature Leak checking while the cryopump is operating may mask leaks that are present due to the ability of...

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Страница 41: ...ing valve purge valve or other accessory 1 Decrease in cryopump cold head performance 2 High partial pressure of non condensables helium hydrogen or neon within the cryopump 3 Excessive thermal load o...

Страница 42: ...complete regenemtion 4 Regenerate the cryopump may not have fully cleaned the adsorbing array High mteofrise 5 Compressor problems 5 Refer to compressor trouble shooting procedures in Table A l ofcomp...

Страница 43: ...B Illustrated Parts Breakdown FJGJ RENO DESCRIPTION PAGE NO B 1 Exploded view ofCryo Torr 100 Cryopump B 3 B 2 Exploded view ofCryo Torr 7 Cryopump B 5 B 3 Exploded view ofCryo Torr 8 Cryopump B 7 B...

Страница 44: ...Type SSTL 6 7 9 Washer Flat SSTL 6 7 10 8080006K004 80K Radiation Shield I II Screw Flat Head SSTL 11440 x 3 8 Lg 3 12 8080006K003 15K Cryo Adsorbing Array 2 12A Temperature Sensor I 13 Vacuum Vessel...

Страница 45: ...INDIUM INDIUM INDIUM 12 12 _ 7 r IO 5 en CRYOGENICS HELIX TECHNOLOGY CORPORATION 16 23 20 Figure B 1 Exploded view of Cryo Torr 100 Cryopump B 3...

Страница 46: ...I Screw Flat Head Brass 2 56 x 1 8 Lg 12 8080250K045 Pressure Relief Valve 13 8080250K004 Accessory Port Cover 14 Cap Screw Hexagon Socket Type SSTL 32 x 1 2 Lg 8 15 O Ring 2 20 Viton Parker 77 545 2...

Страница 47: ...17 16 en CRYOGENICS HELIX TECHNOLOGY CORPORATION Figure B 2 Exploded view of Cryo Torr 7 Cryopump B 5...

Страница 48: ...or Pressure Gauge I II 8080250K009 Diode Temperature Sensor I 12 8044043G002 Regeneration Purge Fitting I 13 Cap Screw Hexagon Socket Type SSTL 2 56 x 1 2 Lg 2 14 Lockwasher Split SSTL 2 2 15 8080002K...

Страница 49: ...4 7 ND UM CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 20 4 3 2 Figure B 3 Exploded view of Cryo Torr 8 Cryopump B 7...

Страница 50: ...V747 7S 2 IS7 Viton I Cylinder Refrigerator I a Ring 2 140 Buna N Parker N674 70 I Cap Screw Hexagon Socket Type SSTL 10 32 x I Lg 8 Lockwasher Split Type SSTL 10 8 Cap Screw Hexagon Socket Type SSTL...

Страница 51: ...13 12 15 Y 1 I 10 eTl CRYOGENICS HELIX TECHNOLOGY CORPORATION 6 7 27 i I 23 t 18 r I I I I 20 I r 26 It 9 25 r r 3 24 l J 4 2 Figure B 4 Exploded view of Cryo Torr SF Cryopump B 9 B 1O...

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Страница 53: ...or 208V SO Hz with Dual Set Points 804400 G001 Automatic Regeneration Controller lISV 60 Hz 8044001G002 Automatic Regeneration Controller 208 230V 60 Hz 80802S0K003 Maintenance Manifold 80802S0K020 Po...

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Страница 55: ...e cold station in degrees Kelvin The hydrogen vapor pressure gauge should not be used to measure temperatures higher than 26K 26 24 22 20 K 18 12 TEMPERATURE VS HYDROGEN VAPOR PRESSURE 10L L__k L__L L...

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