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Granville-Phillips Convectron 275 series, Инструкция по эксплуатации

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5   Service and Maintenance

38

Series 275 Convectron Gauge Bridge Amp PC Board

Instruction Manual - 275331

5.3.5  Baking the Vacuum Chamber with the Convectron Gauge Attached

1.

Bake the process chamber at the desired temperature for the desired time. The Convectron 
gauge tube must not exceed 150 

o

C.

2.

Allow the system to cool to ambient temperature and reconnect the cable to the Convectron 
Gauge.

Bakeout temperature of the Convectron Gauge must not exceed 150 

o

C (302 

o

F).

Содержание Convectron 275 series

Страница 1: ...Series 275 Instruction Manual Granville Phillips Convectron Vacuum Gauge Bridge Amp PC Board with Analog Output Signal Instruction manual part number 275331 Revision D November 2016...

Страница 2: ...All other trademarks and registered trademarks are the properties of their respective owners Customer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granvi...

Страница 3: ...ier PC Board 17 3 2 1 Install the Interconnect Cable 18 Chapter 4 Operation 21 4 1 Theory of Operation 21 4 1 1 General Precautions 22 4 2 Preparing for Pressure Measurement 22 4 3 Gas Type 22 4 4 Pre...

Страница 4: ...4 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Notes...

Страница 5: ...ure to comply with these requirements Read Instructions Read all safety and operating instructions before operating the product Retain Instructions Retain the Safety and Operating Instructions for fut...

Страница 6: ...fety features are maintained Do not use this product if it has unauthorized modifications Replacement Parts When replacement parts are required be certain to use the replacement parts that are specifi...

Страница 7: ...ill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device Series 275 Gauges should not be used above 1000 Torr 1333 mbar 133 kPa 19 psi true p...

Страница 8: ...Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instrum...

Страница 9: ...ty from the date of shipment for new Granville Phillips Products The MKS Instruments Inc General Terms and Conditions of Sale provides the complete and exclusive warranty for MKS Granville Phillips Di...

Страница 10: ...1 Safety Instructions 10 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Notes...

Страница 11: ...2 Kovar Kapton gold plated Tungsten and borosilicate glass Table 2 1 Specifications Function Description System Measuring range for Air or N2 See the Operation Chapter of this instruction manual for c...

Страница 12: ...NPT pipe thread 1 2 inch compression fitting 1 8 NPT pipe thread 1 2 inch tubulation 6 4 cm 2 52 in VCR type female fitting 1 4 inch VCR type female fitting standard 1 2 inch VCR type female fitting...

Страница 13: ...2 Specifications 13 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 2 4 Bridge Amplifier PC Board Figure 2 2 Bridge Amplifier PC Board...

Страница 14: ...2 Specifications 14 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Notes...

Страница 15: ...ipe wrench to further tighten the press ring You may point the electrical pins of the gauge tube anywhere you wish in a 360 horizontal circle for optimum routing of the gauge tube cable 1 8 NPT Mount...

Страница 16: ...module to the vacuum chamber 1 Attach a metal hose clamp or other metal clamp to the gauge stem 2 Install a 3 31 mm2 12 AWG or larger copper wire between the clamp and a metal ground lug bolt or stud...

Страница 17: ...ction Manual 275331 3 2 Install the Bridge Amplifier PC Board Install the bridge amplifier PC board in your existing enclosure Dimensions are given in Figure 3 3 Figure 3 2 Ground Wire Attached to the...

Страница 18: ...nect Cable 1 Connect the cable between the bridge amplifier PC board and the Convectron Gauge See Figure 3 4 2 Connect 12 Vdc power to the PCB pins 13 14 and 15 See Figure 3 4 3 Connect the analog out...

Страница 19: ...3 Installation 19 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 3 5 Convectron Gauge Bridge Amplifier Schematic...

Страница 20: ...3 Installation 20 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Notes...

Страница 21: ...ungsten The heated sensing wire loses more heat as the ambient gas pressure increases The more molecules contact the sensing wire the more power is required to keep the sensing wire at a constant temp...

Страница 22: ...your vacuum system is air or N2 If you are using other gases you must follow the instructions in Section 4 5 You are reasonably familiar with the general theory of operation of thermal conductivity ga...

Страница 23: ...r N2 air has approximately the same calibration With proper precautions the Convectron Gauge may be used for pressure measurement of certain other gases NOTE The information in this section applies on...

Страница 24: ...true pressure of 2 x 10 2 Torr for CH4 the heat loss from the sensor is the same as at a true pressure of 3 x 10 2 for N2 see Figure 4 2 The curves at higher pressure vary widely from gas to gas becau...

Страница 25: ...rom the 10 Torr N2 equivalent indicated pressure to the Helium curve and then move horizontally to the left to reveal a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indication o...

Страница 26: ...4 Operation 26 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 2 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 Torr...

Страница 27: ...4 Operation 27 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 3 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 Torr...

Страница 28: ...4 Operation 28 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 4 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 Torr...

Страница 29: ...4 Operation 29 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 5 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 mbar...

Страница 30: ...4 Operation 30 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 6 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 mbar...

Страница 31: ...gnal The analog output voltage signal provides a specific voltage at specific pressures as illustrated in Figure 4 8 Use the pin numbers 11 and 12 of the connector on the bridge amplifier PC board see...

Страница 32: ...4 Operation 32 Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual 275331 Figure 4 8 Analog Output Voltage Signal...

Страница 33: ...ility For Customer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry Creek Parkway Longmont Colorado 80503 USA Tel 303 65...

Страница 34: ...roduct has been dropped or damaged Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by Granville Phillips or that have the same characte...

Страница 35: ...repair or replace the plumbing 3 Repair the leak or replace the vacum pump 4 Repair or replace the cable Pressure reading is inaccurate 1 The bridge amp PC board is not calibrated for the process gas...

Страница 36: ...and Figure 3 5 5 3 3 Convectron Gauge Test Procedure The small diameter sensor wire inside the gauge tube can be damaged by even small voltages Do not perform electrical continuity tests with instrum...

Страница 37: ...the sensor 1 Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45 degrees Slowly fill it with solvent using a standard wash bottle with the spout inserted in t...

Страница 38: ...r with the Convectron Gauge Attached 1 Bake the process chamber at the desired temperature for the desired time The Convectron gauge tube must not exceed 150 oC 2 Allow the system to cool to ambient t...

Страница 39: ...ction manual part number 275173 Revision A August 2012...

Страница 40: ...Customer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry Creek Parkway Longmont Colorado 80503 USA Tel 303 652 4400 Fax...

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