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FC-4400 F & I Guide

ii

0101-9030-0, Rev. D

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Содержание Temescal FC-4400

Страница 1: ...INSTALLATION GUIDE FOR FC 4400 EVAPORATION SYSTEMS Temescal a division of Ferrotec USA Corporation 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096 0101 9030 0 Revision...

Страница 2: ...beam power supply Corrections provided by Temescal Field Service and Temescal Engineering June 2010 LW C Added Figure 2 3 and updated Figure 3 2 Deleted former Figures 3 7 3 9 and 3 11 Corrections pr...

Страница 3: ...rounding Requirements 2 4 2 2 Vacuum Cubicle Grounding for Simba 2 Power Supply 2 5 2 3 Low Z Grounding Requirements on Systems with a CV 6SLX or CV 12SLX Power Supply 2 6 3 1 Elevation View of Vacuum...

Страница 4: ...FC 4400 F I Guide ii 0101 9030 0 Rev D This page intentionally left blank for pagination purposes...

Страница 5: ...local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components 6 Before servicing any high voltage component switch...

Страница 6: ...acuum system and the high voltage power supply Screens protecting extra high voltage conductors should be removed only if appropriate action has been taken to ensure that extra high voltage conductors...

Страница 7: ...etc 2 Do not expose the vent and purge valves to excessive pressures The nitrogen line regulator is factory set at 15 psi and must not be adjusted above 20 psi 3 Prevent oil grease water sweat etc fro...

Страница 8: ...Safety Data Sheet s covering the evaporant s in question c Certain powders titanium for instance can cause flash fires when exposed to oxygen or other oxidizers Therefore when opening the chamber door...

Страница 9: ...n this manual YES NO If YES typographical or technical please cite the pages ____________________________________________________________________ 4 How important was this F I Guide in preparing for yo...

Страница 10: ...FC 4400 F I Guide viii 0101 9030 0 Rev D This page has been intentionally left blank for pagination purposes...

Страница 11: ...tion 3 Unpacking and Installation 1 1 2 In This Section This remainder of this section contains 1 2 Temescal Contact Information 1 3 General Safety Information 1 4 Site Preparation Checklist 1 2 Temes...

Страница 12: ...ND WARNINGS AND COMPLY WITH THEIR GUIDELINES 1 4 Site Preparation Checklist The customer is responsible for providing properly rated power water air and gases services to their appropriate termination...

Страница 13: ...acuum Cubicle 100 psig 6 89 bar maximum inlet pressure 50 psig 3 45 bar minimum delta pressure 50 70 F 10 21 C maximum inlet temperature Filtered to 50 microns Flow Rate Requirements Chamber walls and...

Страница 14: ...RF as well as DC For illustrations and additional details see section 2 4 Main System Drop 1 208 VAC 60 Hz 3 phase 4 wire 150 A or 400 VAC 50 Hz 3 phase 4 wire 90 A HV Power Supply Drop 2 Select one...

Страница 15: ...itioning Capable of 5 kW cooling 2 2 Water Both cold and hot water must be filtered to 50 microns In addition the water supplied to the system must have a ph level of between 6 0 and 8 0 To prevent ha...

Страница 16: ...ystem features built in regulation to reduce this pressure as required 2 3 2 Pneumatic Air oil free for activation of valves 90 to 120 psig 6 21 to 8 27 bar 2 3 3 Helium One bottle 99 999 pure For add...

Страница 17: ...that value pouring salt water or copper sulfate down the sides of the rods may lower the resistance to the required level To ensure a low impedance path to ground the rods must be connected to each ot...

Страница 18: ...FC 4400 Facility and Installation Guide Section 2 Facility Requirements FC 4400 F I Guide 2 4 0101 9030 0 Rev D Figure 2 1 Facility and System Grounding Requirements...

Страница 19: ...al grounding point as indicated in Figure 2 2 Alternatively a short length of copper strap can be used to connect grounding lug on the gun interface to the grounding bracket on the Simba 2 power modul...

Страница 20: ...d the surface on which it is mounted usually the upper surface of the source tray must be clean and free of evaporated material The mounting surface must be made of nonmagnetic material The source mus...

Страница 21: ...it is unpacked to make sure that no damage has occurred in transit First check the materials received against the packing list to be certain that all elements are accounted for Then check each compon...

Страница 22: ...rs with their tools will be required to install the system 1 Mechanical technicians or movers will remove any bracing and shipping hardware 2 Movers will place the vacuum cubicle in its permanent posi...

Страница 23: ...least 12 inches 305 mm above any obstructions The recommended distance from the floor to the bottom of the box is 32 inches 815 mm On systems supplied with 208 V ac power the power distribution box wi...

Страница 24: ...necting the flexible hose to the mechanical pump 2 Release the bolts that hold the mechanical pump to the system frame during shipment allowing the pump to rest on the floor 3 Retighten the clamps on...

Страница 25: ...stem the Temescal service representative will be responsible for recharging and decontaminating the Helium lines and the cryopumps Thereafter the customer will be responsible for maintaining the integ...

Страница 26: ...cables and lines per code However all electrical connections between the power distribution box and the vacuum cubicle the operator station the mechanical pump s and the power supplies shall be made b...

Страница 27: ...ing of customer supplied cables and plumbing lines Figure 3 6 Routing of lines supplying helium to cryopump compressors Figures 3 7 through 3 12 Routing of electrical and data cables between major sys...

Страница 28: ...d Installation Guide Section 3 Unpacking and Installation FC 4400 F I Guide 3 8 0101 8604 0 Rev D Figure 3 2 System Plan View Showing Dimensions of Main System Components System Shown with Optional Si...

Страница 29: ...Section 3 Unpacking and Installation FC 4400 Facility and Installation Guide 0101 9030 0 Rev D 3 9 FC 4400 F I Guide Figure 3 3 Utility Connection Points on Rear of Vacuum Cubicle...

Страница 30: ...FC 4400 Facility and Installation Guide Section 3 Unpacking and Installation FC 4400 F I Guide 3 10 0101 8604 0 Rev D Figure 3 4 Routing of Customer Supplied Service Lines in 208 V Installations...

Страница 31: ...Section 3 Unpacking and Installation FC 4400 Facility and Installation Guide 0101 9030 0 Rev D 3 11 FC 4400 F I Guide Figure 3 5 Routing of Customer Supplied Service Lines in 400 V Installations...

Страница 32: ...acking and Installation FC 4400 F I Guide 3 12 0101 8604 0 Rev D Figure 3 6 Routing of Temescal Supplied Helium Lines to Cryopump Compressors Figure 3 7 Routing of Control Data Cables on Simba 2 Power...

Страница 33: ...Section 3 Unpacking and Installation FC 4400 Facility and Installation Guide 0101 9030 0 Rev D 3 13 FC 4400 F I Guide Figure 3 7 Routing of Control Data Cables on Simba 2 Powered Systems...

Страница 34: ...FC 4400 Facility and Installation Guide Section 3 Unpacking and Installation FC 4400 F I Guide 3 14 0101 8604 0 Rev D Figure 3 8 Routing of Electrical Power Cables on Simba 2 Powered Systems...

Страница 35: ...on 3 Unpacking and Installation FC 4400 Facility and Installation Guide 0101 9030 0 Rev D 3 15 FC 4400 F I Guide Figure 3 9 Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Su...

Страница 36: ...and Installation Guide Section 3 Unpacking and Installation FC 4400 F I Guide 3 16 0101 8604 0 Rev D Figure 3 10 Routing of Power and Control Data Cables on Systems With Either the CV 6SLX or the CV 1...

Страница 37: ...d Installation FC 4400 Facility and Installation Guide 0101 9030 0 Rev D 3 17 FC 4400 F I Guide Figure 3 11 Routing of EMO Cables and Copper Grounding Straps on Systems With Either the CV 6SLX or the...

Страница 38: ...FC 4400 Facility and Installation Guide Section 3 Unpacking and Installation FC 4400 F I Guide 3 18 0101 8604 0 Rev D...

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