ferrotec Temescal CV-6SLX, Руководство пользователя

Страница: 14 / 92

1.3 Filament Power Supply Description and Specifications Section 1: Introduction to the CV-6SLX
CV-6SLX User Manual 0101-8242-0, Rev. C 1-2
HVPS Specifications
Dimensions
8.75 in. H × 19 in. W × 23 in. D
Weight: 61 lbs.
Input Power
208-V Model CV-6SLX
208 V ac +10% /–5%, 50/60 Hz, 27 A, 60 Hz
3-phase delta (4-wire)
400-V Model CV-6SLX
400 V ac +10% /–5%, 50/60 Hz, 15 A, 50 Hz
3-phase wye (5-wire, with neutral)
NOTE
Current capacities listed above are for the facility breaker supplying power to the HVPS
and include the AC power required for the FPS, whose power cable should always be
connected to the HVPS rear panel, not to a separate power drop.
High Voltage Output
6 kW at 10 kV max.
Fully adjustable 0–10 kV
Regulated to within ±5%
Beam Current
Fully adjustable, 0–600 mA dc
Regulated to within ±5%
Environmental Requirements
Must be free of corrosive vapors
Ambient temperature: 104° F (40° C) maximum
Humidity: 10%–90%, noncondensing
1.3 Filament Power Supply Description and Specifications
Figure 1-2 shows the filament power supply, a stand-alone assembly that must be installed near
the vacuum chamber.
Figure 1-2 Filament Power Supply Front Panel