SECTION 6 Troubleshooting
ESP 400C and 600C Plasma Power Sources
6-43
6.7 Wiring Diagrams – Drawing 5 – Part 2 400V 50H
z
(P/N 35879)
TB1-18 BRN
TS6
1
2
C2
C3
C4
C5
C6
C7
C8
C9
C10
C11
C12
D1
D2
D3
D4
D5
D6
R
4
R
5
R
6
R
7
R
8
R
9
1 2
1 2
TS5-1 WHT
TS1-2 WHT
TS5
TS4
C13
C14
C1
5
C16
C17
C1
8
1
2
3
1
2
3
1
2
3
3
2
1
3
2
1
3
2
1
RED
RED
RED
RED
RED
RED
C1
C1
TS5-1 WHT
TS1-2 WHT
TS5-2 WHT
1 2 3
4 5 6
7 8 9
1 2 3
4 5 6
7 8 9
1 2 3
4 5 6
7 8 9
1 2 3
4 5 6
7 8 9
A B
A B
A B
A B
C54
C53
K3
K6
K6
K7
T1
-A
X
1
B
LK
C2
5-
2 G
R
Y
T
B
1-
18
B
R
N
T
B
9-
16 WH
T
C26
-1
O
R
N
K
3-
9
YEL
TB
8-
9 GR
Y
TB
8-
10
BR
N
PC
B
1 P3
-2
B
L
U
T
B
9-
22
B
L
K
T
B
7-
8
R
E
D
T
B
8-
18 V
IO
T
B
8-
1 B
L
U
T
B
8-
2
W
H
T
T
B
7-
8
R
E
D
TB
9-
22
BLK
T1
-A
X
2
RE
D
C
25-
1
O
R
N
TB
8-
19
BLU
TB
9-
16
W
H
T
K7
-6
Y
E
L
TB
9-
22
BLK
K3
K5
K6
K7
TB8
K3-A BLU
K6-6 VIO
TB9-17 WHT
T2-X4 RED
T2-X3 YEL
TB1-5 BLU
TB1-4 ORN
K6-7 BRN
K6-1 GRY
TB1-9 RED
TB1-7 BLK
PCB1 P4-5 YEL
PCB1 P4-4 VIO
PCB1 P2-2 ORN
PCB1 P2-3 BLK
K5-B WHT
K5-A BLU
20
19
18
17
16
15
14
13
12
11
10
9
8
7
6
5
4
3
2
1
JUMPER
TB8
VIEW J-J
VIEW F-F
(WITHOUT BUS BARS)
Note: From ESP-400C/600C//400V,50 Hz
Drawing No. 0558002859, sheet 5 of 5
OR
Содержание 0558001729
Страница 1: ...F 15 657 Jun 2005 Installation Operation and Maintenance for the ESP 400C Plasma Power Source...
Страница 6: ...ESP 400C Plasma Power Source Table of Contents iv This page intentionally left blank...
Страница 62: ...SECTION 6 Troubleshooting ESP 400C and 600C Plasma Power Sources 6 24 Schematic Diagram Drawing 3...
Страница 63: ...SECTION 6 Troubleshooting ESP 400C and 600C Plasma Power Sources 6 25 Schematic Diagram Drawing 4...
Страница 64: ...SECTION 6 Troubleshooting ESP 400C and 600C Plasma Power Sources 6 26 Schematic Diagram Drawing 5 Part1...
Страница 65: ...SECTION 6 Troubleshooting ESP 400C and 600C Plasma Power Sources 6 27 Schematic Diagram Drawing 5 Part2...
Страница 100: ...SECTION 6 Troubleshooting ESP 400C and 600C Plasma Power Sources 6 62 6 11 IGBT Driver Board PCB2 3 P N 38030 Drawing 2...
Страница 106: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 6 7 5 Right Side View 11 1 7 8 9 8 7 6 10 2 3 4 5 10 12...
Страница 108: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 8 7 6 Left Side View 1 3 4 5 6 5 8 7 9 10 11 x4...
Страница 110: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 10 7 7 Top View...
Страница 112: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 12 7 8 Back Inside View 2 1 4 2 3...
Страница 114: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 14 7 9 Middle Cross Section 5 2 3 4 3 2 F8 F9 1...
Страница 118: ...SECTION 7 Replacement Parts ESP 400C Plasma Power Source 7 18 This page intentionally left blank...