INVUE CR288 CONCENTRATION MONITOR
11
Installation and Use Manual | Entegris, Inc.
Figure 15. Adjusting the TCC (requires Technical Support).
CALCULATE THE TCC USING EXCEL
®
—
COLLECT DATA
Using the software collect fluid temperature and IoR
data that are representative of the process being
measured. Examples include:
• 3 batches of chemical exchange
• 3 days for a continuous process
• 3 wafer pods
NOTE: The concentration should not change during
the collection time.
CALCULATE THE TCC
1. Highlight the
Fluid temp column data
and the
Raw Refractive Index data
columns.
2. Go to the insert tab in Excel
®
.
3. Click on
scatter graph
option.
4. Select the
scatter with only markers
option.
5. Right click
data
and select
add trend line
.
6. Click
display equation
on chart and
R
2
value
on chart.
The slope value from
y = mx + b
is the new TCC.
NOTE: TCC is always negative and generally ranges
between -4 × 10
-5
and 1.5 × 10
-4
.
Figure 16. Scatter graph from Excel.
IMPLEMENT THE CALCULATED TCC
1. Input the Fluid Temperature Compensation
Coefficient (FTCC) values into the
Sensor Info
tab.
See Figure 7. Setting Initial Parameters. CR288 now
automatically correct data for fluid temperature
changes.
2. Click
Save Memory
.
3. Perform a Re-zero. See
Re-zero
.
OPTION: RUN OR CONTINUE CALIBRATION
After Temperature Compensation, the sensor is ready
to read and collect the IoR and temperature of any
liquid. The next steps depend upon how the user
wants the data reported:
OPTION
RESULT
ACTION
Run without
further
calibration
Customer can immediately
use CR288 to report IoR
(Index of Refraction) and
Temperature (T) of any liquid.
The IoR changes as the
process chemical changes.
The user evaluates the state
of the process chemical using
the IoR data. Concentration
measurements, such as wt%
and percent concentration,
cannot be read.
No action
needed
Calibrate
CR288 to a
specific liquid
chemical
This enables the sensor to
report percent concentration
values for the specific
chemical
See
Calibrate
Sensor to
a Chemical