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®
, the Entegris Rings Design
®
, and other product names are trademarks of Entegris, Inc. as listed
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©2022 Entegris, Inc.
|
All rights reserved.
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Printed in the USA
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4411-12261ENT-1022
129 Concord Road
Billerica, MA 01821
USA
Tel
+1
952 556 4181
Fax
+1
952 556 8022
Toll Free
800 394 4083
Corporate Headquarters
Customer Service
LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit
link in the footer. Entegris does not warrant any
failure in the case of customers using unapproved foreign components.
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Installation and Use Manual | Entegris, Inc.
h. Repeat the cycle as follows: one turn fitting 1,
one turn fitting 2, one turn fitting 3, one turn
fitting 4, one turn fitting 5, and one turn fitting 6.
Repeat until all the fittings are appropriately
installed.
Figure 13. PrimeLock fitting installation example.
i. Use the corresponding PrimeLock wrench
(PWR-KIT), tighten the fittings until the
PrimeLock connection verification rings are
engaged. The manifold to plumbing ports are
¾” PrimeLock and the plumbing to machine
ports are 1¼” PrimeLock connections.
j. Repeat the plumbing installation steps for the
remaining plumbing assemblies.
k. After all plumbing is installed, proceed to bowl
and filter installation.
BOWL AND FILTER INSTALLATION
—
To ensure a leak-free seal, it is vital you follow the
instructions from the Chemlock housing installation
manual to properly finish this installation.
Congratulations on successfully installing the Chemlock
filter manifold. Contact Entegris if you have questions.
1
2
3
6
5
4