4
CHEMLOCK FILTER MANIFOLD
Installation and Use Manual | Entegris, Inc.
MOUNTING PROCEDURE
—
1. Orient the manifold with the Entegris logo facing
upward as shown in Figures 2a, 2b, and 2c.
2. Mount the manifold using the four holes at the
corners of each chassis. Figure 3a, 3b, and 3c
provide mounting hole locations and dimensions.
Figure 3a. Mounting hole dimensions for 2-Up configuration.
Figure 3b. Mounting hole dimensions for 4-Up configuration.
Figure 3c. Mounting hole dimensions for 6-Up configuration.
3. The four mounting holes are predrilled for 3/8”
diameter socket head cap screws. The holes are
recessed for the cap screw to sit below the top
surface and allow clearance for the Chemlock
torque wrench.
NOTE: Use a 5/16” Allen wrench to install the 3/8” screw.
4. If mounting the manifold on a Chemlock filter
manifold rack system, see Figure 4a. The system
pivots to allow easy installation and access to the
plumbing, Figure 4b.
Figure 4a. Manifold mounting rack system for 6-Up manifold.
Figure 4b. Manifold rack system pivot feature allows easy access.
5. If using a rail or frame mount, the minimum
clearance between the inner face of the rails to
allow access for plumbing installation is 29.2 cm
(11.5”).
317.5 mm (12.5”)
127.0 mm
(5.0”)
317.5 mm (12.5”)
177.8 mm
(7.0”)
127.0 mm
(5.0”)
317.5 mm (12.5”)
482.6 mm
(19.0”)
177.8 mm
(7.0”)