ENTEGRIS, INC.
Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota 55318 USA
Customer Service Tel. 952-556-4181 / Customer Service Fax 952-556-8022
www.entegris.com
The materials integrity management company
Entegris
®
and Aeronex
®
are registered trademarks of Entegris, Inc.
SEMI
®
is a registered trademark of Semiconductor Equipment and Materials International.
U.S. Patent 6,361,696
©
2004–2006 Entegris, Inc. All rights reserved Printed in USA 4507-2676ENT-1206
For More Information
Please call your Regional Customer Service Center
today to learn what Entegris can do for you. Visit
www.entegris.com
and select “Regional Customer
Service Centers” for the center nearest you.
Terms and Conditions of Sale
All purchases are subject to Entegris’ “Terms
and Conditions of Sale.” To view and print
this information, visit Entegris’ website at
www.entegris.com
and select the Legal Notices
link from the footer found on the home page.