entegris AERONEX EGPS12H Скачать руководство пользователя | Manualshive

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AERONEX® H SERIES

GAS PURIFICATION SYSTEM

Continuous ultrapure H

2

gas at a low cost of ownership

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Содержание AERONEX EGPS12H

Страница 1: ...AERONEX H SERIES GAS PURIFICATION SYSTEM Continuous ultrapure H2 gas at a low cost of ownership ...

Страница 2: ...to a process tool Applications Photolithography Metallorganic Chemical Vapor Deposition MOVCD Atomic Layer Deposition ALD Low Temperature Epitaxy LTE Other applications that require ultrapure hydrogen gas Features and Benefits Power failure will not damage the purification system Complete automatic operation saves time increases reliability Purifies to sub ppb part per billion and ppt part per tri...

Страница 3: ...entation Diagram Models PGPS4H EGPS4H EGPS8H Process in R1 V2A V2B Purifier A Purifier B Moisture Sensor Process in Process out Purifier A Purifier B Regen vent Rotameter Optional Moisture Sensor Regen input V8 optional V1B V2B V1A R1 PT2 PT1 V2A V7A V7B V5 V6 V3B V4B V3A V4A Model EGPS12H ...

Страница 4: ...rm In the event of a minor alarm in the system not requiring an EMO shutdown the system will send a signal to an external sensing device that alerts the facility of the alarm Yes Yes Yes Yes Visual alarm In the event of an alarm a detailed description of the alarm will be displayed in red on systems that include a touch screen In the event of an alarm on a system with LEDs a red LED indicator will...

Страница 5: ...rocess gas output Mechanical connection 1 4 face seal 1 4 tube stub 1 2 tube stub 3 4 tube stub Ventilation Mechanical connection N A 4 duct Exhaust flow N A 50 CFM 100 CFM 65 CFM Power requirements Mechanical connection Standard terminal Power requirements 200 240 VAC Power consumption 50W at idle and process mode 300W during regen 50W at idle and process mode 800W during regen 50W at idle and pr...

Страница 6: ...vent Exhausts regen gas 6 Process gas input Inlet gas not purified 7 Process gas output Outlet gas purified Panel Information This equipment is not enclosed It is the user s responsibility to ensure that it is installed in compliance with local safety requirements for gas equipment The PGPS4 is designed using SEMI S2 guidelines for gas equip ment enclosures Because it is a subsystem it must be cer...

Страница 7: ...ace Allows for remote alarm input and output with female 15 pin DB connector 7 Regen gas vent Exhausts regen gas 8 Exhaust vent Allows ventilation 9 Process gas input Inlet gas not purified 10 Process gas output Outlet gas purified 11 Reference Atmospheric reference for the internal enclosure flow sensor 12 Instrument air Supplies gas to the air operated control valves 13 A C power input Power con...

Страница 8: ...When activated power is removed from the cabinet The system shuts down Front panel and controller remain powered 5 Remote alarm interface Allows for remote alarm input and output with female 15 pin DB connector 6 Instrument air Supplies gas to the air operated control valves 7 Regen gas vent Exhaust regen gas 8 Exhaust vent Allows ventilation 9 Process gas input Inlet gas not purified 10 Circuit b...

Страница 9: ... Fire sensor located below cover 10 Exhaust vent Allows ventilation 11 Process gas output Outlet gas purified 12 Gas monitor located below cover 13 Regen gas vent Exhausts regen gas 14 Instrument air Supplies gas to the air operated control valves 15 Reference Atmospheric reference for the internal enclosure flow sensor 16 Circuit breaker Provides additional electrical protection to the system and...

Страница 10: ...up to 300 SLM up to 1000 SLM PGPS4H EGPS4H EGPS8H EGPS12H PGPS4HA EGPS4HA EGPS8HA EGPS12HA PGPS4HAT EGPS4HAT EGPS8HAT EGPS12HAT PGPS4HM EGPS4HT EGPS8HM EGPS12HM PGPS4HMT EGPS8HMT EGPS12HMT PGPS4HT EGPS8HT EGPS12HT Automatic Manual Part Bypass Bypass Moisture Number Manifold Manifold Indicator PGPS4H PGPS4HA Yes PGPS4HAT Yes Yes PGPS4HM Yes PGPS4HMT Yes Yes PGPS4HT Yes EGPS4H EGPS4HA Yes EGPS4HAT Y...

Страница 11: ...onal U S Patent 6 361 696 2004 2006 Entegris Inc All rights reserved Printed in USA 4507 2676ENT 1206 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select Regional Customer Service Centers for the center nearest you Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions ...

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