A732-01-880 Issue D
Page 14
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Installation
Support the vacuum pipeline to prevent loading of the coupling joints. If necessary, incorporate flexible
bellows in the system pipelines to reduce the transmission of vibration and to prevent loading of the coupling
joints.
If the booster and its backing pump are operated with the exhaust line blocked, a pressure of 5.5 bar(a) may
be generated in the exhaust pipework. Foreline pressure may reach 1.45 bar(a). Connect the pump using
appropriate pipework and fittings.
Incorporate an inlet isolation valve in the pipeline from the vacuum system to the booster pump and to the
primary pump. These will enable the vacuum system to be isolated from the pump when it is switched off
and prevent the suck-back of process gases and debris into the vacuum system.
Ensure that the sealing surfaces are clean and scratch-free.
Edwards recommends using an exhaust extraction system suitable for use with all process gases being pumped. Ensure
that the exhaust extraction system cannot become blocked or obstructed when the pump is operating.
3.7
Leak test the system
Leak test the system and seal any leaks found after installing the XDS pump.
