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A540-55-880

Issue D

Instruction Manual

iXL600 and iXL1000 Dry Pump Systems

Description

Item Number

iXL600 200-460 V 50/60 Hz

A541-33-010

iXL600N 200-460 V 50/60 Hz

A541-34-010

iXL1000 200-460 V 50/60 Hz

A541-53-020

iXL1000N 200-460 V 50/60 Hz

A541-54-020

Original Instructions

Содержание iXL1000

Страница 1: ...l iXL600 and iXL1000 Dry Pump Systems Description Item Number iXL600 200 460 V 50 60 Hz A541 33 010 iXL600N 200 460 V 50 60 Hz A541 34 010 iXL1000 200 460 V 50 60 Hz A541 53 020 iXL1000N 200 460 V 50 60 Hz A541 54 020 Original Instructions ...

Страница 2: ...ial Location Immunity Class A Emissions UL61010 1 2nd Edition Electrical Equipment for Measurement Control and Laboratory use Part 1 General requirements CAN CSA C22 2 Safety Requirements for Electrical Equipment for Measurement No 61010 1 04 Control and Laboratory use Part 1 General Requirements SEMI S2 0709 Environmental Health and Safety Guideline for Semiconductor Manufacturing Equipment EN505...

Страница 3: ...O O 机台接口 Tool Interface X O O O O O O 表示该有害物质在该部件的所有均质材料中的含量低于 GB T 26572 标准规定的限量要求 O Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB T 26572 X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB T26572 标准规定的限量要求 X Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is abo...

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Страница 5: ...19 3 5 1 Flammable pyrophoric materials 20 3 5 2 Gas purges 20 3 6 Leak test the system 20 3 7 Electrical supply 21 3 7 1 Mains supply cable connection 22 3 7 2 Electrical connector locking mechanism 24 3 8 Connect an additional RF earth ground optional 26 3 9 Connect to the emergency stop circuit 26 3 9 1 Semi S2 requirements 26 3 10 Connect and set up the cooling water 27 3 11 Accessories 27 3 1...

Страница 6: ...embly 45 7 3 7 Earth leakage circuit breaker 45 7 3 8 Seismic restraint brackets 45 7 3 9 Photohelic gauge chimney 45 7 3 10 Nitrogen flow switch assembly 46 7 3 11 Interface modules 46 Appendix A1 Pump display terminal 49 A1 1 LEDs 49 A1 2 Pump start stop and control 49 A1 3 Warning Alarm display and acknowledgement 50 A1 4 Menus 50 A1 4 1 Normal menu 50 A1 4 2 Status menu 51 A1 4 3 SETUP menu 51...

Страница 7: ...r locking mechanism 25 15 RF Earth connection 26 16 Nitrogen flow meter 28 17 Accessories 47 A1 Pump display terminal 49 Tables Table Page 1 Technical data 7 2 Technical data 7 3 Performance data 8 4 Loading data refer to Figure 6 9 5 Nitrogen purge data 10 6 Electrical ratings 10 7 General electrical data 10 8 Electrical connections 11 9 Water cooling system data 12 10 Tracer gas test parameters ...

Страница 8: ... 54 A11 SELECT LINE Normal display selection menu 54 A12 UNITS Units to display 54 A13 Warnings 55 A14 Alarms 57 A15 Hexadecimal to digital conversion 59 A16 Inverter alarm codes 60 A17 Inverter warnings codes 60 Associated publications Publication title Publication number Vacuum Pump and Vacuum System Safety P400 40 100 Semiconductor Pumping Application Guide P411 00 090 Trademark Credits Han is ...

Страница 9: ...ns these instructions must be obeyed The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and or process The units throughout this manual conform to the SI international system of units of measurement The following warning labels are on the pump WARNING Warnings are given w...

Страница 10: ... potentially flammable gases Edwards can offer advice and assistance in matching the pump to the application If using the iXL600 N or iXL1000 N system on an application for which it is not intended the warranty may be invalidated Figure 1 Applications 1 3 The iXL600 and iXL1000 Systems The iXL600 and iXL1000 are combination dry pump and booster systems The systems are for use on light duty applica...

Страница 11: ...EMS button 7 Power LED green 2 Running LED green 8 Warning LED amber 3 Start button 9 Alarm LED red 4 Stop button 10 Green Mode LED green 5 Local control button 11 PDT Pump Display Terminal 6 Local control LED green connection Item Control connector identification 1 Front panel control 2 Levelling feet 4 off 3 Castors 4 off 4 Seismic bracket 4 off if fitted Note Diagram shows side fitting location...

Страница 12: ...ing and Alarm LED changes colour according to system status either green or red 8 Accessory interface 9 MicroTIM in control LED green 10 EMS interface 11 Micro TIM connection if fitted 12 Electrical supply connection 13 Electrical connector locking mechanism 14 Nitrogen purge connection if fitted 15 Cooling water supply connection 16 Protective earth ground M5 stud 17 Exhaust gas outlet connection...

Страница 13: ...em control requests from the others are denied The PDT indicates what is in control LEDs provided on the rear panel front panel or PDT illuminate to indicate in control Note The pump as supplied can only be controlled using the front panel The PDT System Controller and the MicroTim are all accessories Refer to Section 7 3 1 5 Green Mode The Green Mode function reduces utility consumption of the sy...

Страница 15: ...bolted Exhaust gas outlet Extraction port diameter Units mm kg dB A mm s kg force kg force mm iXL1000 iXL600 N 695 x 280 x 650 167 55 2 20 4 ISO100 NW25 50 Table 2 Technical data Item Description Rating Units Operating conditions Intended use Indoor Ambient temperature range Operating 5 to 40 C Storage 45 to 55 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 re...

Страница 16: ...ts Factory test limits Typical peak pumping speed Ultimate Ultimate Maximum continuous inlet pressure The maximum pressure at which the pump will operate without generating warnings or alarms Units m3 h mbar mbar mbar iXL600 600 0 001 0 005 1000 iXL600N 10 slm purge For iXL600N and iXL1000N with no purge use values for iXL600 and iXL1000 600 0 002 0 008 1000 iXL1000 930 0 001 0 005 1000 iXL1000N 1...

Страница 17: ...d Technical data A540 55 880 Issue D 2 3 Loading data Figure 6 Centre of gravity and levelling foot loads Table 4 Loading data refer to Figure 6 Pump Dimension to centre of gravity Load at levelling foot position A B C D E 1 2 3 4 Units mm mm mm mm mm kg kg kg kg iXL1000 iXL600 N 600 326 91 186 335 37 44 46 38 ...

Страница 18: ...stem full load power continuous 2 4 kW System peak current 200 V 18 A rms System peak current 400 V 11 A rms Full load current rating 200 230 V supply 22 A rms Full load current rating 380 460 V supply 14 A rms Recommended branch circuit fuse UL 200 230 V supply 25 A Recommended branch circuit fuse UL 380 460 V supply 15 A Recommended mains cable size or corresponding AWG size 6 10 mm2 AWG Table 7...

Страница 19: ... connections Description Mating Connector description external supply rating Internal supply rating Mains connection Refer to installation section for wiring diagram Weidmuller Axial screw connector Insert type HDC S4 BAS p n 1789980000 Hood type HDC 16D TOLU 1PG21G p n 1652680000 Alternative Harting Axial screw connector Insert type Han 40A Axial module p n 09140022701 x 2 off used with p n 09140...

Страница 20: ...on 24 V d c 0 75 A 24 V d c 0 2 A The System interface the EMS interface and the Accessory interface have a combined current rating of 0 75 A This supply will be disconnected in the event of an emergency stop Table 9 Water cooling system data Description Rating Units Typical heat load at ultimate 1100 W 88 Maximum supply pressure 6 9 barg 100 psig Maximum allowable system differential pressure 5 5...

Страница 21: ...oling water flow under adverse operating conditions Hardness 100 ppm of CaCO3 100 mg of CaCO3 per litre Resistivity 1k ρ 1000k ohm cm Materials in contact with cooling water Stainless steel PVDF Nitrile PTFE and fluoroelastomer Water inlet connection 3 8 inch male quick connector Water outlet connection 3 8 inch female quick connector Water consumption varies with pump operating temperature and wa...

Страница 22: ... Units Extraction flow rate From port on top of enclosure 180 180 m3 h Volume of enclosure 0 11 0 11 m3 Free volume of enclosure 0 069 0 068 m3 Air changes per minute 43 5 44 3 per min Table 12 Worst case test results Process Gas Maximum Gas Flow slm TLV LEL ppm 25 TLV LEL ppm SF6 Release rate slm Max SF6 Detected outside enclosure ERC ppm Pass Fail Where Pass indicates acceptable enclosure satisf...

Страница 23: ...nnot be operated accidentally Electrical nitrogen and water supplies are all potentially hazardous energy sources Before carrying out any maintenance the supply of these sources should be locked and tagged out The pump system includes provision for ventilation extraction and secondary containment of oil and water leaks Any unintended overflows or spills must be removed immediately to avoid risk of...

Страница 24: ... emergency stop button refer to Figure 2 item 1 If not use a disconnect box refer to Section 7 3 3 1 1 Seismic brackets fitting If securing the system in place to prevent inadvertent movement for example during an earthquake take note of the following The seismic brackets Figure 3 item 4 are designed to withstand a level 4 earthquake in a ground floor installation The system can be secured to the ...

Страница 25: ...ds Limited 2015 All rights reserved Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited Installation A540 55 880 Issue D Figure 7 Seismic bracket front and side attachments with dimensions ...

Страница 26: ...acuum exhaust pipelines to prevent the transmission of stress to pipeline coupling joints Incorporate a pressure gauge in the inlet pipeline to determine that the dry pumping system operates correctly Ensure that the dry pumping system inlet can be isolated from the atmosphere and from the vacuum system if pumping or producing corrosive chemicals The pump is fitted with an integral exhaust check v...

Страница 27: ...accessory Refer to Section 2 7 for extraction rates required and to Section 7 3 for the required exhaust extraction cover kit Refer to Figure 3 item 7 for location of the extraction port 3 5 Connect the nitrogen supply CAUTION Ensure that the nitrogen supply conforms to the requirements given in the Technical Data Section If it doesn t the gas pipelines may become blocked or the system may be dama...

Страница 28: ...Do not allow air to enter the equipment Ensure that the system is leak tight Ensure that gases in the pump do not enter the flammable range This may be achieved by diluting gases in the pump by supplying sufficient inert gas purge For example dilution with nitrogen to below one quarter LEL lower explosive limit or if that is not practical to below 60 LOC limiting oxidant concentration The gas modu...

Страница 29: ...be connected to a suitably fused and protected electrical supply and a suitable earth ground point WARNING This equipment is suitable for Installation Category II as defined in IEC 60664 1 The dry pumping system must be connected to an isolator that disconnects all current carrying conductors and can be locked out in the off position LOTO The isolator must be in close proximity to the equipment wi...

Страница 30: ...ions When making the electrical supply cable ensure that the earth ground conductor is longer than the phase conductors This will ensure that if the cable is accidentally dragged and the strain relief bush on the electrical supply connector mating half fails the earth ground conductor will be the last conductor to be pulled from the connector If further information on connecting the electrical sup...

Страница 31: ... as shown in Figure 11 to a torque of 1 1 Nm Keep the cable in position while applying the recommended tightening torque Figure 10 Mains input supply connector 7 Fit the earth ground wire to the Protective Earth connection on the connector block as shown in Figure 10 using the following procedure Prepare the end of the 6 mm2 earth wire to a strip length of 10 mm and twist the strands Insert the wi...

Страница 32: ...g mechanism Figure 4 item 13 that requires the use of a suitable screwdriver to release The pumping system is supplied with a protective cover Figure 14 item 4 fitted and the locking mechanism item 1 may be applied Follow the following instructions to fit the electrical supply cable Slacken off the locking screws item 2 by a few turns to loosen the locking mechanism if necessary Move the locking m...

Страница 33: ...on Pump bulkhead Figure 14 Electrical connector locking mechanism Pin identification Pin A1 Phase 1 Pin A2 Phase 2 Pin B1 Phase 3 Pin B2 Not connected Pin PE Protective Earth Item Control connector identification 1 Electrical connector locking mechanism 2 Locking screws 3 Lever 4 Protective cover Locking mechanism in locked position Locking mechanism in unlocked position ...

Страница 34: ...circuit that can be connected to the customer control equipment In this case the emergency stop control should be compliant with IEC 60947 5 1 a red self latching mushroom push button on a yellow background If operating the pumping system without connecting it to the customer control equipment fit the external EMS link plug supplied to the EMS connection on the rear of the system Figure 4 item 10 ...

Страница 35: ... Inspect the water hoses pipelines and connections and check that there are no leaks Turn off the water supply while completing the remainder of the installation procedure 3 11 Accessories The accessories available for use with the system are described in Section 7 3 Refer to the individual accessories manuals for information about installation 3 12 Commission the system 1 Switch on the external e...

Страница 36: ...low is 10 slm for iXL600N iXL1000N and iXL600N iXL1000N MFT variants factory default setting The centre of the ball should be aligned to the appropriate marking on the flow tube If NOT then proceed as follows Insert the screw driver into hole 1 and adjust variable restrictor until the flow tube indicates the required flow rate If a different nitrogen flow rate is required please contact Edwards fo...

Страница 37: ... illuminate and a message will be shown on the Pump Display Terminal if fitted and will be sent to any interfacing system connected to the pumping system Ensure that the installation is configured so that it remains safe if there is a failure of the nitrogen supply to the pumping system If an alarm condition is detected and the pumping system is not configured to run til crash refer to Section 4 4...

Страница 39: ... the system with any enclosure panels removed or damaged and do not touch any parts of the pump s when the system is on Surfaces of the pump s are very hot and can cause injury to people In accordance with Semi S2 hot surface warning labels are applied to the panels where appropriate because testing has shown that accessible temperatures can exceed 65 C in small areas at worst case pressure condit...

Страница 40: ...nt connection is used and the message PDT1 IN CONTROL will be displayed if the rear connection is used Press START button Press ENTER The system will start and the Running LEDs will be illuminated Note For a list of PDT accessories refer to Section 7 3 4 1 3 MicroTIM operation If the system is to be operated by the customer control equipment using a MicroTIM ensure that no other devices have contr...

Страница 41: ...ut down immediately stops the pump without gas purge 4 3 2 Front panel control operation Press and hold the stop button Figure 2 item 4 for 5 seconds to stop the pump in Auto shut down mode recommended refer to Section 4 3 1 above Repeat within 10 seconds to stop the pump in Fast shut down mode The running LED Figure 2 item 2 flashes whilst the pump is slowing down and will then turn off when the ...

Страница 42: ...ut alarms and automatic shut down conditions If the system has an unplanned shut down ensure that the cause of the shut down is identified and rectified before restarting If a PDT is connected to the pump note and record any warning or alarm codes that are displayed see Appendix A2 to assist with identifying the root cause of the shut down or alarm If in any doubt contact an Edwards Service Engine...

Страница 43: ...t may display ALARM 186 01 DP INV 0040 000 EMS The Running LED will go off The Alarm LED illuminates 4 7 Restart the pump after an emergency stop or automatic shut down Note If the system has automatically shut down because of high pump power check that the pump is free to rotate before restarting the system Contact Edwards If the emergency stop switch on the front panel was used to shut down the ...

Страница 45: ...after maintenance and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system WARNING Obey the safety instructions in this Section and take note of appropriate precautions Failure to observe these instructions may result in injury to people and damage to equipment WARNING Electrical nitrogen and water supplies are all potentially hazardo...

Страница 46: ...equest The system requires little user maintenance Pump protection sensors fitted to the system do not require routine maintenance The maintenance operations that can be carried out by the customer are described in the following sections other maintenance must be carried out by Edwards service centres refer to Section 7 The frequency of maintenance operations depends on the process Adjust the freq...

Страница 47: ...from the factory extraction system 6 If necessary disconnect any accessories from the system 7 Adjust the levelling feet so that the system rests on the castors 8 Move the system to the maintenance location After maintenance is complete re install the system as described in Section 3 5 3 Draining the cooling water 1 Relocate the system for maintenance as stated in Section 5 2 2 Connect a regulated...

Страница 48: ...s bringing services to the pump are in good condition and ensure that all connections are secure The following maintenance can also be carried out on the system Contact Edwards for details and training Inspect the connections pipelines cables and fittings inside the pump enclosure refer to Section 5 5 Inspect and clean exhaust pipe elbow and check valve Note The system is supplied with either a tr...

Страница 49: ...wards Service Centres Each Service Centre offers a wide range of options including disposal Refer to Section 7 2 for more information Pump system materials suitable for recycling include cast iron steel PTFE stainless steel brass aluminium zinc alloy nickel mild steel ABS polyamide Take particular care with the following Fluoroelastomers which may have decomposed as the result of being subjected t...

Страница 51: ...ng state for each part required 1 Model and Item Number of the equipment 2 Serial number 3 Item Number and description of part 7 2 Service Edwards products are supported by a world wide network of Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has be...

Страница 52: ... accessories including a gate valve abatement and water flow sensor plus up to two supported active accessories two thermocouples and the pump status output The Passive Accessory Module PAM allows up to 3 accessories to be connected to the accessory module interface An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m away from the dry pump system 7 3 3 Pump Display Te...

Страница 53: ...stallations requiring seismic restraints 7 3 9 Photohelic gauge chimney Monitors flow of extracted air from pump enclosure to satisfy SEMI S2 requirements If flow drops below set level disconnect box stops pump Table 19 PDT extension cable PDT extension cable Item number 3 m D37370591 5 m D37370592 10 m D37370595 15 m D37370596 25 m D37370597 Table 20 Water flow monitor assembly Item Item number W...

Страница 54: ...232 Micro TIM s which are serial interface devices 7 3 11 2 EMS modules Tool specific emergency stop interfaces Table 24 Nitrogen switch assembly Item Item number Nitrogen flow switch assembly A50797000 Table 25 MicroTIM modules MicroTIMs Item number SPI D37360310 MCM D37360320 TEL D37360330 Semi E73 D37360340 LAM Alliance D37360350 C3 D37360360 Hitachi D37360370 Config Storage D37360390 eTIM D373...

Страница 55: ...les Provides pump serial to pump LON 2 SIM ports Figure 17 Accessories Table 27 iGateway modules Item Item number iGateway Module D37376500 1 Disconnect box 2 Earth leakage circuit breaker 3 Extraction port chimney 4 Accessory module 5 PDT1 6 PDT2 7 iGateway module 8 Nitrogen flow switch assembly 9 Water flow control valve 10 Water flow monitor assembly 11 MicroTIM 12 Photohelic switch ...

Страница 57: ...ressing ENTER when it goes continuous until the warning clears Alarm Red illuminates to indicate that a pump alarm is present It flashes when a new alarm occurs until it is acknowledged by pressing ENTER when it goes continuous until the alarm clears A1 2 Pump start stop and control To Start or Stop the pump the PDT must be in control indicated by the Local Control LED being illuminated To take or...

Страница 58: ...ewed in the Status menu see below Some Alarms such as 1 01 STOP ACTIVATED remain present until the pump is manually started from the PDT or front panel controls Once all warning alarm conditions have gone away then the corresponding LED is extinguished To avoid a build up of out of date Warnings they are automatically acknowledged after 36 hours A1 4 Menus There are three menu buttons Normal Statu...

Страница 59: ... N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1 1A Booster current MB CURRENT 1 1A Green Mode state Green Mode STATE Off Dry Pump temperature DP TEMP 100C Booster Temperature MB TEMP 100C Booster MB End Cover temperature MB E C TEMP 100C N2 Flow Rate N2 FLOW 44 slm Dry Pump Power DP POWER 1 1 kW Booster Power MB POWER 1 1 kW Dry Pump speed in percent DP SPEED 100 Dry Pump s...

Страница 60: ...erter fault information is displayed in the following format DP Inv Fault nn A aaaa W wwww where nn is the number aaaa is the alarm code and wwww is the warning code Refer to Section A2 3 for more information about inverter warnings and alarms A1 4 6 SOFTWARE VERSION Display menu Under the Setup menu Scroll through the software version loaded in the processors by pressing up down keys Press CANCEL...

Страница 61: ...ms press CANCEL to exit back to the IP Configuration menu Table A8 FIT ACCESSORY menu Gate Valve Water Sensor Analogue water flow Active Gauge Exh Gas Temp Exhaust Gas Temperature Table A9 IP Configuration menu Host_Name display only DHCP Enable Enabled Disabled Press the up down keys to select Enabled or Disabled and press ENTER to accept or CANCEL to exit back to the IP Configuration menu IP Add...

Страница 62: ...ressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to the Display Attributes menu In each option scroll through the units available by pressing up down keys Press ENTER to select the displayed units or CANCEL to exit back to the UNITS menu Note The configuration options for the PDT are stored in the PDT itself and are not associated with the pump that the PDT is connected t...

Страница 63: ...e causes and actions that should be taken Table A13 Warnings Warning Message on PDT Action Message on PDT Possible Cause Action Warning 1 01 Power interrupt Check pwr supply There has been a brownout of the electrical supply to the pump lasting more than 1 second Check the electrical supply Warning 31 13 Gas missing See manual The gas module is not communicating with the pump controller Contact Ed...

Страница 64: ...eck that cooling water is connected switched on and is to specification given in Section 2 6 Warning 62 13 Sensor missing The booster end cover temperature sensor may have become disconnected or failed Check that the sensor is fitted and is correctly connected Warning 71 13 AC Sup Missing See manual The pump controller cannot communicate with the accessory module Check that the accessory module is...

Страница 65: ...an alarm message to be displayed Refer to Appendix A1 3 for more information on how alarms are handled by the PDT Table A14 lists the alarm messages that might be displayed on the PDT with possible causes and actions that should be taken Table A14 Alarms Warning Message on PDT Action Message on PDT Possible Cause Action Alarm 1 01 Stop Activated The emergency stop has been activated There is a fau...

Страница 66: ...ault history Alarm 176 13 No MB Inv Comms See manual The pump controller cannot communicate with the booster inverter during start up checks Check the wiring between the pump controller and the booster inverter Alarm 184 10 Dry Pump Stopped See manual The dry pump speed is very low The rotor might be locked Cycle the power to the pump and attempt to re start If this fails contact Edwards Alarm 186...

Страница 67: ...l digits from 0 to F To determine the cause of a warning or alarm first decode each hexadecimal number 0 indicates that there is no alert for that bit Normally only codes of 1 2 4 or 8 will be displayed for each bit but if two or more events occur in the same bit then these will be added together For example 5 1 4 so if code 5 is displayed it means that alerts 1 AND 4 are active B 1 2 8 so if code...

Страница 68: ...k power connections to pump and fuses in supply Warning should appear first and then pump trips after 10 minutes 4 EMS EMS has been activated Check EMS button at front and EMS plug in the back of pump controller 2 DESAT_FAULT Internal fault contact Edwards 1 UNDERT Inverter is too cold See warning register to determine source of problem 4 8 OVERT Motor Drive system over temperature refer to warnin...

Страница 69: ...above upper limit Motor temperature sensor open circuit check water supply 1 MISSING_PHASE The loss of one of the three input phases has been detected check mains supply to drive or blown fuses 7 8 UTCREG Upper controller temperature regulator active current limit reduced check cooling 4 UTSREG Upper heat sink temperature regulator active current limit reduced check cooling 2 UTMREG Upper motor te...

Страница 70: ...valves remain in the state that they were in prior to the communication failure and outputs to the MicroTIM are unaffected It is important to note however that control might be released from the device that was in control for example PDT and that stop requests will be ignored from all devices apart from the front panel controls To stop a system that has suffered a communication failure either use ...

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