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Edwards EXT255H Series, Инструкция по эксплуатации

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Edwards EXT255H Series Скачать руководство пользователя страница 23

© Edwards Limited 2008. All rights reserved. 

Page 17

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

B722-20-880 Issue D

Figure 5 - Typical pumping system with an EXT70Hi or EXT255Hi pump

1. Vacuum chamber 1
2. High-vacuum gauge
3. Vibration isolator
4. Inlet-screen
5. EXT pump
6. Not used
7. Vacuum gauge
8. Flexible bellows

9. Foreline trap
10. Rotary backing-pump
11. Mist filter
12. Cooling-water connectors
13. EXDC drive module
14. Air-cooler 
15. PRX10 purge restrictor 

*

16. Regulated purge gas supply 

*

17. Vent-valve
18. Alternative position for vent-valve
19. Vacuum chamber 2
20. Inlet-strainer
21. Interstage-port

*

EXT255Hi only

Содержание EXT255H Series

Страница 1: ...h an interstage port accessory fitted Refer to the text of this instruction manual for further information Description Item Number EXT70H ISO63 24 V B722 21 991 EXT70H CF63 24 V B722 22 991 EXT70H NW40 24 V B722 23 991 EXT70H ISO100 24 V B722 26 991 EXT255H ISO100 24 V B753 01 991 EXT255H CF100 24 V B753 02 991 EXT255Hi ISO100 24 V B753 03 991 EXT255H ISO100 24 V Coarse Inlet Screen B753 05 991 ...

Страница 2: ...m pump6 Safetyrequlrements Vaclumpumps EN61326 199y Etectricat equiprnent for rn asurernent conuotandlaboratoryuse Al 1998 A2 2001 Elvlc requlrements lndlstriat Location Ctass BEmissions C22 2No61010 t O Safetyrequirements for etectricatequipmertfor measurement Controtandlaboratoryuse Part1 General requlrcments Ul 61010 l 2d Edition Safetyreqdrements for electrlcatequipment for measurement contro ...

Страница 3: ... installation 15 3 3 Connect to the vacuum system 18 3 3 1 Inlet screen 18 3 3 2 Mechanical fixing 18 3 3 3 Base mounting 19 3 3 4 Inlet connection and orientation 19 3 3 5 Backing connection 20 3 3 6 Interstage connection EXT70Hi 24 V and EXT255Hi 24 V only 20 3 4 Vent valve connection and control 20 3 5 Purge gas connection EXT255H 24 V and EXT255Hi 24 V only 21 3 5 1 Connect the purge gas 21 3 ...

Страница 4: ...r 35 7 4 9 VRX vent restrictor 36 7 4 10 EXT70H ISO63 interstage port accessory kit 36 For return of equipment complete the HS Forms at the end of this manual Illustrations Figure Page 1 Maximum allowed rate of pressure rise during venting pressure against time with the pump initially at full rotational speed 3 2 EXT70H 24 V dimensions mm 7 3 EXT255H Hi 24 V dimensions mm 8 4 Typical pumping syste...

Страница 5: ...rights reserved Page iii Edwards and the Edwards logo are trademarks of Edwards Limited Contents B722 20 880 Issue D Associated publications Publication title Publication number EXDC Turbomolecular pump drive modules D396 40 880 ...

Страница 6: ...This page has been intentionally left blank B722 20 880 Issue D Page iv Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 7: ...d with your EXDC Drive Module contains details of how to set up the Module and the logic interface Important safety information in this manual is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equi...

Страница 8: ... to protect these parts from corrosion or the bearing lubricant from oxidisation An optional vent port adaptor and purge restrictor can be fitted to the purge port to control the flow rate of the purge gas and to filter the gas supply see Section 7 The EXT255Hi 24 V pump has an interstage port between the turbomolecular and drag stages If required an interstage port accessory can be fitted to an E...

Страница 9: ...nual vent valve is used it must only be opened after the EXT pump speed has fallen to 50 of full rotational speed If a TAV vent valve is used but the rate of pressure rise cannot be limited the vent valve must only be opened after the speed of the EXT pump has fallen to 50 of full rotational speed Figure 1 Maximum allowed rate of pressure rise during venting pressure against time with the pump ini...

Страница 10: ...B722 20 880 Issue D Page 4 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 11: ...2 Cooling noise and electrical data See Table 1 and 2 Dimensions See Table 2 and 3 Maximum inlet flange temperature 100 C Maximum magnetic field EXT255H Hi 3 5 mT horizontal field 7 mT vertical field Maximum magnetic field EXT70H Hi 5 mT Installation category EN61010 part 1 Category 1 Pollution degree CAN CSA UL EN61010 part 1 Altitude 2000 m Humidity 10 to 90 non condensing Electrical supply 24 V...

Страница 12: ...pumps can be used to pump oxygen in concentrations above 20 by volume 2 3 Vent gas specification and vent control data Although the pump may be vented to atmospheric air high relative humidity of the air may greatly increase the subsequent pumping time To reduce pump down times vent the pump with dry clean gases z Air z Carbon monoxide z Neon z Ethane z Methane z Nitrogen z Krypton z Argon z Propa...

Страница 13: ...rademarks of Edwards Limited Technical data B722 20 880 Issue D Figure 2 EXT70H 24 V dimensions mm 1 Vent valve 2 Electrical supply connector 3 Cooling water connectors 4 Backing port 5 Allowance for right angle cable connector 6 Position of blanked off interstage port 70H ISO63 only ...

Страница 14: ... are trademarks of Edwards Limited Technical data Figure 3 EXT255H Hi 24 V dimensions mm 1 Interstage port EXT 255Hi 24 V only 2 Vent valve 3 Purge port 4 Electrical supply connector 5 Backing port 6 Cooling water connectors 7 Allowance for right angle cable connector 8 Earth ground bonding point ...

Страница 15: ...aximum concentration of oil 0 1 parts per million Allowable purge gas flow when required 20 to 100 sccm 0 33 to 1 67 mbar l s 1 33 to 167 Pa l s 1 Recommended purge gas flow 25 sccm 0 42 mbar l s 1 42 Pa l s 1 Maximum allowable purge gas supply pressure 2 bar gauge 29 psi 3 x 105 Pa Quality Mechanically clean and optically clear with no deposits or turbidity pH value 6 0 to 8 0 Maximum calcium car...

Страница 16: ...ar 5 x 10 7 Pa 5 x 10 10 mbar 5 x 10 8 Pa 5 x 10 9 mbar 5 x 10 7 Pa with diaphragm backing pump 5 x 10 8 mbar 5 x 10 6 Pa 5 x 10 8 mbar 5 x 10 6 Pa 5 x 10 9 mbar 5 x 10 7 Pa 5 x 10 8 mbar 5 x 10 6 Pa Maximum backing pressure N2 12 mbar 1 2 x 102 Pa 12 mbar 1 2 x 102 Pa 12 mbar 1 2 x 102 Pa 12 mbar 1 2 x 102 Pa He 8 mbar 8 x 101 Pa 8 mbar 8 x 101 Pa 8 mbar 8 x 101 Pa 8 mbar 8 x 101 Pa H2 2 5 mbar 2...

Страница 17: ...odules EXDC80 24V maximum power input EXDC80 24 V 93 W Optional accessory Pumping speeds are without inlet screen or inlet strainer Inlet screens and inlet strainers reduce speed by approximately 10 for ISO63 For ISO100 this reduction is less pronounced Pb backing pressure Qi flow through the interstage port EXT70Hi only Qp flow through pump inlet Ultimate pressure 48 hours after bakeout with 2 st...

Страница 18: ...bar 500 Pa He 4 x 105 3 x 105 Pb 2 mbar 200 Pa H2 1 x 104 1 x 104 Pb 1 x 10 2 mbar 1 Pa Interstage pumping speed N2 10 l s 1 Pb 5 mbar 500 Pa Qi 240 sccm 4 mbar l s 1 400 Pa l s 1 Qp 0 sccm Ultimate pressure with rotary vane backing pump DN100ISOK inlet flange 5 x 10 9 mbar 5 x 10 7 Pa 5 x 10 9 mbar 5 x 10 7 Pa DN100CF inlet flange 5 x 10 10 mbar 5 x 10 8 Pa Ultimate pressure with diaphragm backin...

Страница 19: ...ing time to 90 speed EXDC160 24 V drive module 180 s 180 s Cooling method forced air water forced air water Ambient air temperature forced air cooling 0 35 C 0 35 C Water temperature water cooling 10 20 C 10 20 C Noise level at 1 meter 50dB A Recommended backing pump RV3 RV3 Not supplied pump supplied with port blanked Pb backing pressure Qi flow through the interstage port EXT255Hi only Qp flow t...

Страница 20: ...B722 20 880 Issue D Page 14 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 21: ...s is missing notify your supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions as described in Section 6 1 Do not discard the packing materials retain them to repack the pump when you return it for service 3 2 Typical installation A typical pumping system with an EXT255H 24V pump is shown in Figure 4 A typical pumping system with an E...

Страница 22: ...0H or EXT255H pump 1 Vacuum system 2 High vacuum gauge 3 Vibration isolator 4 Inlet screen 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 Mist filter 12 Cooling water connectors 13 EXDC drive module 14 Air cooler 15 PRX10 purge restrictor 16 Regulated purge gas supply 17 Vent valve 18 Alternative position for vent valve EXT255H only ...

Страница 23: ...m chamber 1 2 High vacuum gauge 3 Vibration isolator 4 Inlet screen 5 EXT pump 6 Not used 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 Mist filter 12 Cooling water connectors 13 EXDC drive module 14 Air cooler 15 PRX10 purge restrictor 16 Regulated purge gas supply 17 Vent valve 18 Alternative position for vent valve 19 Vacuum chamber 2 20 Inlet strainer 21 Interstag...

Страница 24: ... Figure 6 with the Edwards logo uppermost Ensure that the dimples on the rim of the screen engage in the groove in the pump flange If necessary gently bend the tags of the screen outwards to ensure a tight fit Figure 6 Correct installation of the inlet screen 3 3 2 Mechanical fixing There are two ways in which the EXT pump can be securely fixed Ideally the EXT pump should be securely fixed by its ...

Страница 25: ...cking port must point vertically downwards 20 to reduce the risk of contamination from the backing pump oil Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust free If the pump inlet is not kept clean the pump down time may be increased The inlet connection of the EXT pump is a CF flange an ISO flange or an NW flange z If the pump has a CF flange use the co...

Страница 26: ... vent valve too quickly see below z Use a TAV5 or TAV6 solenoid vent valve accessory see Section 7 in place of the manual vent valve z Use a TAV5 or TAV6 solenoid vent valve connected to a convenient flange on your vacuum system z Use an alternative valve connected to the vacuum system If using the manual vent valve the vent valve must be opened only after the EXT pump speed has fallen to 50 of fu...

Страница 27: ...bove 20 by volume 3 6 Electrical installation Always make the electrical connections to the EXT pump after the pump has been installed on your vacuum system The EXT pump should be electrically bonded to earth ground using the connection provided see Section 3 6 2 3 6 1 EXDC drive module There are two EXDC drive modules the EXDC80 24 V and the EXDC160 24V The EXDC80 24 V drive should be used in con...

Страница 28: ...cooling You must use water cooling in any of the following operating conditions z Backing pressure 10 mbar 1000 Pa and interstage flow 20 sccm 0 3 mbar l s 1 30 Pa l s 1 z Backing pressure 8 mbar 800 Pa and interstage flow 30 sccm 0 5 mbar l s 1 50 Pa l s 1 z Backing pressure 5 mbar 500 Pa and interstage flow 80 sccm 1 3 mbar l s 1 130 Pa l s 1 z Ambient temperature 35 C z When using a bakeout ban...

Страница 29: ...ary provide treatment and filtration Connect the cooling water supply to the water cooler on the pump as described below Either of the two riffled connectors on the water cooler can be used for the water supply or return connections 1 Push reinforced hose approximately 6 mm internal diameter over the ends of the riffled hose connectors on the water cooler on the pump 2 Attach the hose with strong ...

Страница 30: ...B722 20 880 Issue D Page 24 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 31: ...he EXDC will light Note The first time you pump down the system to vacuum you must re tighten the bolts which secure the inlet flange refer to Section 3 3 4 4 2 Shut down Note In an emergency only open the vent valve quickly to decelerate the pump rotor in the shortest possible time 1 Switch off the backing pump and stop the power to the EXDC drive module see EXDC instruction manual to switch off ...

Страница 32: ...s operation above this level reduces bearing operational life In the unlikely event of a failure of this control circuit the pump may overspeed If you suspect that your pump may be running at overspeed you should switch it off and consult Edwards or your supplier 4 4 Bakeout CAUTION When baking the EXT pump to above 70 C at the inlet flange the pump must be water cooled to prevent damage to the be...

Страница 33: ...owever the instruction to drain all fluids does not apply to the lubricant in the EXT pump oil reservoirs 5 3 Rotor life The life of the EXT pump rotor is typically 40 000 to 50 000 cycles of acceleration to full speed and then deceleration to a stop The pump rotor is not user serviceable We therefore recommend that you exchange your pump for a factory reconditioned replacement every 20 000 cycles...

Страница 34: ...ble 5 for the possible causes of faults and for the recommended actions to rectify faults Refer to the fault finding section of the instruction manual supplied with your EXDC Pump Drive Module for further fault finding information Table 5 Fault finding Symptom Check Action The pump does not rotate Check that the electrical supply is on If power is supplied and the pump still does not rotate then t...

Страница 35: ... high vacuum area of the system contaminated If so clean the high vacuum system Check the rest of your system for leaks and contamination If found clean the contaminated areas and repair the leaks Remove the pump from the system and test the ultimate pressure of the pump alone see Section 2 for specification If poor check the pump for contamination and if necessary return the pump as described in ...

Страница 36: ...B722 20 880 Issue D Page 30 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 37: ...un for at least eight hours every six months 6 2 Disposal Dispose of the EXT Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements Take particular care with any components which have been contaminated with dangerous process substances Take appropriate action to avoid inhalation of any particulates which may be ...

Страница 38: ...B722 20 880 Issue D Page 32 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 39: ...tions including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide Edwards engineers to support on site maintenance service or repair of your equipment For more information about service options contact your nearest Service C...

Страница 40: ...d not be used with this family of pumps It is recommended that the EXT255H Hi 24 V pumps are driven by the EXDC160 24 V module However an EXDC80 24 V may be used although this will result in significantly extended ramp times and reduced performance 7 4 3 BX bakeout band A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures It may also be used to protect th...

Страница 41: ...application 7 4 7 Vibration isolators In applications where the small amount of vibration generated by the turbomolecular pump is a problem a vibration isolator can be fitted The isolator consists of two special flanges separated by a flexible bellows and a rubber anti vibration outer collar The isolator required depends on the pump inlet flange size 7 4 8 PRX purge restrictor The PRX10 is a modif...

Страница 42: ...he pump as described in Section 3 3 4 The accessory kit consists of an O ring and a flange the flange has an inlet strainer to prevent the entry of debris into the pump To fit the accessory z Use a suitable pin spanner to remove the blanking plug from the interstage port The holes in the blanking plug are 3 2 mm in diameter and the centres of the holes are 14 mm apart z Fit the O ring supplied the...

Страница 43: ...ares EXT255Hi shown 1 Vibration isolator 2 Bakeout band 3 Inlet flange seal supplied 4 EXT255Hi pump 5 Vent port 6 VRX vent restrictor 7 Solenoid vent valve 8 DN10NW adaptor 9 Manual vent valve supplied 10 Water cooler on opposite side of the pump 11 Vent port adaptor 12 Purge restrictor 13 Air cooler 14 Inlet strainer supplied 15 Interstage port 16 Bakeout band position 17 Inlet screen supplied E...

Страница 44: ...B722 20 880 Issue D Page 38 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

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