Edwards EXT255H Series, Инструкция по эксплуатации

Страница: 18 / 44

B722-20-880 Issue D
Page 12 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Inlet-flange DN100ISO-K/
DN100ISO-K
DN100CF
Outlet-flange DN25NW DN25NW
Vent-port 1/8 inch BSP 1/8 inch BSP
Interstage-port - DN25NW
Purge-flange DN10NW
*
DN10NW
*
Inlet pumping speed
N
2
† ‡
220 l s
-1
220 l s
-1
Pb <5 mbar (500 Pa) Qi <70 sccm
(1.17 mbar l s
-1
, 117 Pa l s
-1
)
He
† ‡
230 l s
-1
230 l s
-1
Pb <1 mbar (100 Pa) Qi = 0 sccm
H
2
† ‡
180 l s
-1
180 l s
-1
Pb <0.5 mbar (50 Pa) Qi = 0 sccm
Inlet compression ratio
N
2
† ‡
> 1 x 10
8
> 1 x 10
8
Pb <5 mbar (500 Pa)
He
† ‡
4 x 10
5
3 x 10
5
Pb <2 mbar (200 Pa)
H
2
† ‡
1 x 10
4
1 x 10
4
Pb <1 x 10
-2
mbar (1 Pa)
Interstage pumping speed
‡
N
2
†
- 10 l s
-1
Pb = 5 mbar (500 Pa)
Qi = 240 sccm (4 mbar l s
-1
)
(400 Pa l s
-1
) Qp = 0 sccm
Ultimate pressure with rotary
vane backing pump
**
DN100ISOK inlet flange < 5 x 10
-9
mbar
< 5 x 10
-7
Pa
< 5 x 10
-9
mbar
< 5 x 10
-7
Pa
DN100CF inlet flange < 5 x 10
-10
mbar
< 5 x 10
-8
Pa
Ultimate pressure with
diaphragm backing pump
††
DN100ISOK inlet flange < 5 x 10
-8
mbar
< 5 x 10
-6
Pa
< 5 x 10
-8
mbar
< 5 x 10
-6
Pa
DN100CF inlet flange < 5 x 10
-9
mbar
< 5 x 10
-7
Pa
Maximum backing pressure
‡‡
N
2
12 mbar (1200 Pa) 12 mbar (1200 Pa)
He 9 mbar (900 Pa) 9 mbar (900 Pa)
H
2
2.5 mbar (250 Pa) 2.5 mbar (250 Pa)
Table 2 - EXT255H 24 V / EXT255Hi 24 V technical data (continued)
Parameter EXT255H 24V EXT255Hi 24V Notes