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B064-04-880 Issue F

Page 10

© Edwards Limited 2008. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

Figure 4 - Typical performance curves

1. Pumping speed (l.s

-1

) against inlet pressure (mbar/Pa) for nitrogen

2. Throughput (mbar.ls

-1

) against inlet pressure (mbar/Pa) for nitrogen

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Содержание 30B5M

Страница 1: ... 07 400 415 V 50 60 Hz 3 phase B064 07 415 440 V 50 60 Hz 3 phase B064 07 440 460 V 50 60 Hz 3 phase B064 07 460 480 V 50 60 Hz 3 phase B064 07 480 Control Configured 30B5M Vapour Booster Pumps 200 V 50 60 Hz 3 phase B064 08 200 220 V 50 60 Hz 3 phase B064 08 220 380 V 50 60 Hz 3 phase B064 08 380 400 V 50 60 Hz 3 phase B064 08 400 415 V 50 60 Hz 3 phase B064 08 415 440 V 50 60 Hz 3 phase B064 08 ...

Страница 2: ... B064 07 380 B064 08 400 B064 08 415 B064 08 440 B064 08 460 B064 08 480 to which this declaration relates is in conformity with the following standard s or other normative document s EN1012 2 1996 A1 2009 Compressors and Vacuum Pumps Safety Requirements Vacuum Pumps EN60204 1 2006 Safety of Machinery Electrical Equipment of Machines A1 2009 General Requirements and fulfils all the relevant provis...

Страница 3: ...ntent Declaration 部件名称 Part name 危险物质 Hazardous Substances 铅 Lead Pb 汞 Mercury Hg 镉 Cadmium Cd 六价铬 Hexavalent Chromium Cr VI 多溴联苯 Polybrominated biphenyls PBB 多溴二苯醚 Polybrominated diphenyl ethers PBDE 铸铝 Cast Aluminium X O O O O O 铜管管件 Brass pipe Fittings X O O O O O 铜接头 Brass Connectors X O O O O O O 表示该有害物质在该部件的所有均质材料中的含量低于 GB T 26572 标准规定的限量要求 O Indicates that the hazardous substance contained ...

Страница 4: ...This page intentionally blank ...

Страница 5: ...e pump 12 3 4 Vacuum connections 13 3 4 1 System design 13 3 4 2 Connect the pump inlet to the vacuum system 13 3 4 3 Connect the pump outlet to the backing pipeline 13 3 5 Leak test the system 14 3 6 Connect the cooling water supply 14 3 7 Electrical installation 14 3 7 1 Introduction 14 3 7 2 Connect the electrical supply to the pump 15 3 7 3 Connect the backing pressure interlock 15 3 7 4 Therm...

Страница 6: ...le the pump 29 5 6 2 Clean the pump 30 5 6 3 Reassemble the pump 30 5 7 Replace a heater 31 5 8 Fault finding 32 6 Storage and disposal 33 6 1 Storage 33 6 2 Disposal 33 7 Service and spares 35 7 1 Introduction 35 7 2 Service 35 7 3 Spares 35 8 Engineering diagrams 37 Appendix A1 Annual Overhaul 39 A1 1 Introduction 39 A1 2 Pump Cleaning 39 A1 2 1 Boiler cleaning 39 A1 2 2 Jet stack and baffle cle...

Страница 7: ...mance curves 10 5 Interior of the control box unconfigured pumps 17 6 Interior of the control box control configured pumps 18 7 Typical pumping system 23 8 Adjust the boiler protection thermal snap switches 25 9 Circuit diagram for control configured pumps 37 10 Circuit diagram for unconfigured pumps 38 A1 Sectional view of 30B5 42 Tables Table Page 1 Checklist of components 11 2 Vapour pump fluid...

Страница 8: ...This page has been intentionally left blank B064 04 880 Issue F Page iv Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 9: ...UTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process In accordance with the recommendations of IEC 1010 the following warning symbols may appear on the pump or its accessories The units used throughout this man...

Страница 10: ...ically next to the jet stage cone 32 The backing condenser has a flange to connect the backing pump The pump is cooled by water which flows through copper cooling coils 31 wound around the jet stages ejector stages and the backing condenser Heaters 14 around the boiler at the base of the pump heat the pump fluid 15 to generate the required vapour There are 18 heaters in the pump rated the same for...

Страница 11: ...ited 2008 All rights reserved Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited Introduction B064 04 880 Issue F Figure 1 Part sectional view of the 30B5M pump Fluid vapour Fluid vapour Air gas ...

Страница 12: ...snap switches will reset automatically when the pump cools down The operating temperatures of the cooling fail thermal snap switches are preset for use with AP201 pump fluid If you want to use other fluid types in the pump contact your supplier or Edwards for advice 1 4 2 Boiler protection thermal snap switches Refer to Figure 1 The pump has two boiler protection thermal snap switches 12 One snap ...

Страница 13: ...pends on the ambient humidity and temperature and the length of time that the pump is switched off In addition to the recommendations made in later sections of this manual you can overcome the effect of high ambient humidity if you Configure the electrical installation of the pump for soft start operation when the pump is operated with typically 20 to 25 of the nominal electrical supply voltage In...

Страница 14: ...ll rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Introduction Figure 2 Control box controls and lamp 1 Power Enable switch 2 Power Enable lamp 3 Heater Power switch 4 Electrical supply isolator 5 Emergency stop switch ...

Страница 15: ...10 1 mbar 10 Pa 12 g h 1 Critical backing pressure 5 3 to 6 mbar 5 3 x 102 to 6 x 102 Pa Maximum system pressure 1 3 bar absolute 1 3 x 105 Pa Warm up time to maximum performance at full heat input 60 min Minimum backing pump displacement for maximum throughput 290 m3 h 1 Recommended backing pump Edwards E1M275 Dimensions See Figure 3 Mass 620 kg Inlet flange 737 mm diameter with 12 equally spaced...

Страница 16: ...x 105 Pa Cooling water connections 1 inch BSP Heater rating 1 25 kW Nominal heater power 18 heaters 22 5 kW Electrical supply 200 220 380 400 415 440 460 or 480 V Over current protection settings on full heat 200 V 50 60 Hz 73 A 220 V 50 60 Hz 66 A 380 V 50 60 Hz 38 A 400 V 50 60 Hz 36 A 415 V 50 60 Hz 35 A 440 V 50 60 Hz 33 A 460 V 50 60 Hz 32 A 480 V 50 60 Hz 30 A Maximum cooling fail thermal sn...

Страница 17: ... Edwards Limited 2008 All rights reserved Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited Technical data B064 04 880 Issue F Figure 3 Dimensions mm ...

Страница 18: ...ts reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 4 Typical performance curves 1 Pumping speed l s 1 against inlet pressure mbar Pa for nitrogen 2 Throughput mbar ls 1 against inlet pressure mbar Pa for nitrogen ...

Страница 19: ...ither fully assembled in a single package or unassembled in two packages On receipt remove all packing materials and protective covers and check the equipment If the equipment is damaged notify your supplier and the carrier in writing within three days state the Item Number of the pump together with your order number and your supplier s invoice number Retain all packing materials for inspection Do...

Страница 20: ...emble the other components as described below 1 Refer to Figure 1 Lift the jet stage cone 32 over the pump then lower the vapour tube 6 and jet assembly 3 through the inlet flange 1 2 Connect the vapour tube 6 to the top of the T tube 3 Lower the jet stage cone 32 onto the pump then connect the bottom flange of the jet stage cone 32 to the T tube 4 Fit the braces which support the jet stage cone 3...

Страница 21: ...ration and to prevent loading of coupling joints If you use flexible pipelines you must ensure that you use pipelines which have a maximum pressure rating which is greater than the highest pressure that can be generated in your system We recommend that you use Edwards flexible pipelines You must be able to isolate the 30B5M pump inlet and outlet from the atmosphere and from your vacuum system You ...

Страница 22: ...t meet the specification in Section 2 We recommend that the cooling water supply is filtered and that you incorporate a flow indicator into the supply system 3 7 Electrical installation 3 7 1 Introduction Note Where necessary refer to the circuit diagrams for the pumps shown in Figure 9 and 10 Two versions of the 30B5M pump are available On the control configured pump the control box is fully conf...

Страница 23: ...then drill a hole suitable for your cable or conduit gland in the gland plate 4 Fit your gland to the gland plate 1 then refit the gland plate to the control box 5 Loosen the gland then pass your electrical supply cable through the gland and into the control box 6 Refer to Figure 5 On an unconfigured 30B5M connect the phase wires in the electrical supply cable to terminals 1 to 3 and terminals 4 t...

Страница 24: ...ches After you have connected the thermal snap switches and the backing pressure interlock if used close and lock the front door of the control box 3 8 Fill the pump with fluid 3 8 1 Safety of vapour pump fluids Vapour pump fluids are not dangerous when used in a pump that is operated correctly But if the pump is operated incorrectly and is allowed to get to very high temperatures the pump fluid c...

Страница 25: ...rior of the control box unconfigured pumps 7 Conduit to frame earth ground stud 8 Conduit to boiler protection thermal snap switches 9 Conduit to cooling fail thermal snap switches 10 Terminal block TS01 1 Electrical supply gland plate 2 Earth ground block 3 Chassis earth ground stud 4 Terminal block TS02 5 Conduits to terminal box 6 Conduits to terminal box ...

Страница 26: ...to boiler protection thermal snap switches 10 Conduit to cooling fail thermal snap switches 11 Terminal block TS01 12 Relay RL1 13 Plug PL1 14 Transformer TFMR1 15 Fuses F1 to F3 1 Electrical supply gland plate 2 Earth ground block 3 Chassis earth ground stud 4 Electrical supply isolator circuit breaker 5 Contactors K1 and K2 6 Conduits to terminal box 7 Conduits to terminal box 8 Conduit to frame...

Страница 27: ...irst aid may be required Polyphenyl ether 5 ring Santovac 5 590 460 in helium Phenol benzene phenolic materials Phenolic materials are poisonous and caustic by ingestion and skin contact Major a lost time accident can occur Paraffinic fluids ester fluids Apiezon A B C AP201 and AP301 305 300 in air Decomposed hydrocarbons Fire Note AP201 has a low auto ignition temperature Major a lost time accide...

Страница 28: ...3 Use a funnel to pour the correct quantity of fluid into the pump through the fluid return pipe the correct quantity of fluid is given in Section 2 4 Allow the fluid to drain into the pump for five minutes 5 Use the dipstick to check the level of fluid When you remove the dipstick residual fluid from the sides of the fluid return tube will be on the dipstick Make sure that you do not confuse the ...

Страница 29: ...t and backing pressures are allowed to rise above their critical values 4 2 Check the insulation resistance of the heaters If the pump heaters have absorbed moisture while the pump was switched off the insulation resistance of the heaters may be too low Use the following procedure to measure the insulation resistance of the heaters before you switch the pump on If you have an RCCB in your electric...

Страница 30: ...ve 3 and the vacuum system air admittance valve 4 Close any other openings to atmospheric pressure 2 Switch on the cooling water supply to the 30B5M pump 3 Switch on the holding pump 11 if fitted then switch on the backing pump 8 4 Open the holding valve 12 if fitted then open the backing valve 7 5 On unconfigured pumps when the backing pressure reaches 10 mbar 1 x 103 Pa or lower switch on the el...

Страница 31: ...ration B064 04 880 Issue F Figure 7 Typical pumping system 8 Backing pump 9 Backing pump isolation valve 10 Flexible pipeline 11 Holding pump 12 Holding valve 13 30B5M pump 1 Vacuum system 2 Vacuum system pressure gauge 3 Isolation valve 4 Air admittance valve 5 Roughing valve 6 Backing pressure gauge 7 Backing valve ...

Страница 32: ...screw 2 clockwise until the snap switch just trips open the pump will then automatically shut down 4 Turn the set screw anticlockwise again by of turn 270º one complete anticlockwise revolution of the screw in the direction of the arrow 4 is equivalent to an increase in the operating temperature of approximately 40 ºC 5 When you have set the snap switch tighten the locking screw 3 6 Refit the boil...

Страница 33: ...er switch Figure 2 item 3 to the required position 4 7 Readmission of air to your vacuum system WARNING Do not admit air into the pump through the dipstick assembly or any other port until the pump has cooled to room temperature AP201 fluid has a low auto ignition temperature and could catch fire if air is admitted Also if the pump is hot expansion of the admitted air may cause hot pump fluid to b...

Страница 34: ...t you maintain the pump boiler temperature at a temperature between 20 and 30 ºC above ambient temperature Ensure that the boiler does not get too hot if it does the pump fluid may vaporise and contaminate the vacuum system The following method of shut down ensures that the 30B5M pump is left evacuated and prevents absorption of air by the pump fluid When you subsequently start up evacuate the sys...

Страница 35: ...s and O rings The pump may have overheated if it was misused if it malfunctioned or if it was in a fire Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request contact your supplier or Edwards Do not use abrasive or reactive chemical substances to clean the pump Do not use solvents to clean O rings 5 2 Maintenance plan The plan shown in Table 3 lists...

Страница 36: ...cribed in Section 3 5 4 Clean the fluid return pipes and boiler 5 4 1 Introduction When you clean the pump choose the cleaning solution to suit the type of pump fluid that has been used After you have cleaned the pump or any components wash the components again with acetone to remove all traces of the cleaning solution Bake to 77 ºC to remove the acetone alternatively pass warm air over the pump o...

Страница 37: ...system inspect the condition of the pump fluid Use the following procedure 1 Switch off the pump allow the pump to cool for at least four hours then open it to atmosphere 2 If the pump is cold switch on the pump heaters for a maximum of two minutes to warm the pump fluid Do not vaporise the pump fluid 3 Isolate the pump from the electrical supply and disconnect it from your vacuum system 4 Open th...

Страница 38: ... and reassemble the pump as described below When you reassemble the pump Inspect all O rings and seals for damage or deterioration and replace them if they are defective Check that all sealing faces are free from scratches and other damage Refinish surfaces that are scratched 1 Refit the two T tubes to the pump Do not fully tighten the bolts which secure the T tubes 2 Refit the first ejector stage...

Страница 39: ...the pump Remove one of the boiler side covers Figure 1 item 16 4 Remove the thermal insulation at each end of the boiler 5 Remove the heater terminals and the faulty heater s 6 Fit the new heater s 7 Lightly coat the threads of the heater terminals with a high temperature anti seize compound then refit the heater terminals 8 Refit the thermal insulation to each end of the boiler 9 Refit the boiler...

Страница 40: ...any leak found Is the backing pump performance poor Check that the backing pump is suitable to back the 30B5M Check that the pump operates correctly if necessary rectify any defect found Has the pump fluid undergone thermal breakdown Inspect the pump fluid If necessary clean the pump and refill the pump with fluid There are inlet pressure surges Is the heater input correct Check that the electrica...

Страница 41: ... the pump with fluid 4 Place protective covers over the inlet and outlet flanges and the cooling water connection points 5 Where possible store the pump in cool dry conditions until it is required for use When required prepare and install the pump as described in Section 3 6 2 Disposal Dispose of the 30B5M pump and any components removed from it safely in accordance with all local and national saf...

Страница 42: ...B064 04 880 Issue F Page 34 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 43: ...rvice Centres Each Service Centre offers a wide range of options including equipment econtamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide Edwards engineers to support on site maintenance service or repair of your equipment For more inform...

Страница 44: ...B064 04 880 Issue F Page 36 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 45: ...dwards logo are trademarks of Edwards Limited Engineering diagrams B064 04 880 Issue F 8 Engineering diagrams The circuit diagrams for the control configured and unconfigured 30B5M pumps are shown in Figure 9 and 10 Figure 9 Circuit diagram for control configured pumps ...

Страница 46: ...B064 04 880 Issue F Page 38 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Engineering diagrams Figure 10 Circuit diagram for unconfigured pumps ...

Страница 47: ...Starting from the drain port the spade should be used to drag out progressive sections of the boiler sludge until the boiler base is clear A1 2 2 Jet stack and baffle clean Chemical pumping processes can cause the build up of a residue on the hot running jet stack The jet gaps of the vertical jet stack are all under 1 mm and may become partially blocked by this residue This will significantly affe...

Страница 48: ... solvent appears obstructed use a flexible rod to clear the obstruction A1 3 Gasket and O ring renewal Refer to Figure A1 Where pump or vacuum system joints have been broken new O rings must be fitted These are A1 4 Interior re assembly 1 Before re assembly clean the boiler to ensure that no flush through residue remains 2 Refer to Figure A1 Screw the tie rod 7 into the lower vapour tube 8 of the ...

Страница 49: ...perature can cause deterioration It is recommended that the heater links be inspected on regular intervals If any sign of deterioration or damage is found the links must be replaced Access to the neutral end is gained by removing the radiation shields at the drain port of the boiler and the end boiler lagging Notes 1 Heater connection strip short B064 06 147 2 Heater connection strip long B064 06 ...

Страница 50: ...B064 04 880 Issue F Page 42 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Appendix A1 Figure A1 Sectional view of 30B5 ...

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