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P.55

4.4 Safety interlock Connector (Connector EXT.IL)

Hard interlock signal is output as the final safety protection byEXT.IL connector.

Please intercept the power supply of the pump when Hard interlock signal is open.

(see 9. For SEMI S2 standard)

plug

HIROSE DF1B-2EP-2.5RC

Plug Pin

(Suitable wire size)

HIROSE DF1B2022PCB

(UL1007 AWG#20-22)

4.5 Power Supply for the Options (Connector CN-C)

This Power Supply is used for the options listed below and should not be used for other

purposes.

For example:

ADAPTER for Central Monitoring System

Interface Controller

DANGER

Power Supply for the options is kept applying voltage during the pump is

supplied the power.

WARNING

Do not use the power supply for other purposes.

PM10U

EBARA

CORPORATION

Содержание EV-S20

Страница 1: ...rstand this INSTRUCTION MANUAL thoroughly before using this equipment Be sure to keep this INSTRUCION MANUAL on hand for future reference To Facility and Tool Manufactures Be sure to distribute this I...

Страница 2: ...Minister of Economy Trade and Industry Please confirm these conditions on your own For more information please contact our sales office located near you Do not reproduce or reprint any portion of this...

Страница 3: ...chnology and nature prevent environmental pollution and improve the overall results of our environmental management activities We are aware that environmental protection and management activities are...

Страница 4: ...n pump operation safety and maintenance please do not hesitate to contact EBARA directly Refer to Global network for contact address Three terms designating the level of hazard are used in this manual...

Страница 5: ...NG Interrupt Circuit Protector CP before starting on wiring and maintenance work Do not switch on the power supply to the pump until work is completed WARNING Supply N2 gas to the exhaust piping when...

Страница 6: ...move the pump cover during operation WARNING Check Safety Interlock functions periodically every 6 months to confirm the interlocks will work correctly CAUTION Disposal of process by products shall be...

Страница 7: ...acket you use M6 16 bolts for fixing this bracket to the lower side of the pump When you use this bracket as lifting bracket you cannot use the M6 16 bolts because the M6 16 bolts reach to an internal...

Страница 8: ...e injury Allow the piping and casing to cool before servicing 2 Hazardous voltage warning Hazardous Voltage may shock burn or cause death Turn power off and lockout before servicing WARNING Hazardous...

Страница 9: ...feet fully when moving WARNING Hazardous Materials Exposure to air may cause spontaneous fire or explosion Inhalation or skin absorption will cause severe injury or death by poisoning Purge thoroughl...

Страница 10: ...viii LOCATION WARNING LABEL1 PM10U EBARA CORPORATION...

Страница 11: ...ix LOCATION WARNING LABEL2 PM10U EBARA CORPORATION...

Страница 12: ...its factory set point opening the motor starter relay s and shutting down the pump Restoration of sufficient nitrogen flow permits restarting the pump MOTOR OVERLOAD Motor thermostat protect the pump...

Страница 13: ...401 E E CP R S T B1 UL1077 A B C E MP MOTOR DRIVER LCD controller RESET U V W M E DVP414 CN_1 3 1 MP MOTOR THRMO 12V X1 CPU CPU R S T CN_8 2 1 CN_8 1 2 DVP402 User side Pump side CN_A CPU NOIZE FILTER...

Страница 14: ...M E DVP414 CN_1 3 1 MP MOTOR THRMO 12V BP MOTOR THRMO X1 CPU CPU R S T CN_8 2 1 CN_8 CN_9 1 2 1 2 DVP402 User side Pump side CN_A E BP MOTOR DRIVER CPU CPU NOIZE FILTER MP TH BP TH 1 3 1 3 RS485 comm...

Страница 15: ...nd the original period For repairs not covered under this Warranty EBARA will charge the customer for parts and labor Exclusions and Limitations This Warranty does not cover the following 1 Failure du...

Страница 16: ...xiv PM10U EBARA CORPORATION...

Страница 17: ...1 Warning 4 3 2 2 Operation Status Control 5 3 3 The way of pump moving 5 3 3 1 Preparation 5 3 3 2 Moving method 6 3 4 Release and shut off residual internal energy 7 3 4 1 Electrical Power Lockout...

Страница 18: ...1 3 How to stack pumps 34 4 1 4 Pump Fixation Option 36 4 2 Piping 41 4 2 1 Vacuum and Exhaust Piping 41 4 2 2 Cooling Water Piping 42 4 2 3 N2 Gas Piping 43 4 2 4 Ventilation Duct MODEL EV S N MODEL...

Страница 19: ...ion when momentarily power failure happens 78 7 Maintenance and Inspection 79 7 1 Internal energies 79 7 1 1 Power source 79 7 1 2 Cooling water 79 7 1 3 Nitrogen gas 79 7 2 Routine Inspection 80 7 3...

Страница 20: ...ntroduction 2 1 Introduction Check the following items on receipt of the pump package 1 Check that the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees with yo...

Страница 21: ...ubles or environmental pollution Plan the maintenance and perform it periodically to operate the unit efficiently 3 To dispose the unit follow effective laws and ordinances applicable in the area wher...

Страница 22: ...provided according to the instructions in Table 3 1 and the descriptions in Section 4 2 3 In the cases the gas concentration may become higher than the specified for safe gas exhaust introduce the ni...

Страница 23: ...operation all operating conditions are monitored including power supply cooling water flow N2 gas flow casing and motor coil temperature motor speed and electric power for motor Continuous operation i...

Страница 24: ...M setting conditions 3 2 2 Operation Status Control The sensor data are displayed on the LCD provided on the controller to facilitate operation status control and daily inspection All WARNING and ALAR...

Страница 25: ...e pump by pushing its terminal portion alternately as directed below A B If pump needs to be moved on steps or ditches spread steel plate or the like which can sustain the pump weight over the steps d...

Страница 26: ...SEMI S2 install lockable shutoff devices on electrical nitrogen and cooling water supplies These devices should be adjacent to and within sight of the pump 3 4 1 Electrical Power Lockout and Tagout Lo...

Страница 27: ...d follow facility procedures for locking this valve in the off position 2 Verify that the nitrogen pressure gauge on front panel of the pump drops to 0 MPa confirming that no pressurized gas energy is...

Страница 28: ...dimension and performance details 3 5 1 Model Description EV S 20 P Mark Description 20 1670 L min 50 5000 L min 100 10000 L min 200 20000 L min Standard Without N2 purge unit P Standard With N2 purge...

Страница 29: ...e Press Supply 0 15 0 7 MPa Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil B...

Страница 30: ...tting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Quan...

Страница 31: ...Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Q...

Страница 32: ...Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Q...

Страница 33: ...P 14 3 5 3 Outline Drawing MODEL EV S20 OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 34: ...P 15 MODEL EV S20P EV S 20N OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 35: ...P 16 MODEL EV S50 OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 36: ...P 17 MODEL EV S50P EV S50N OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 37: ...P 18 MODEL EV S100 OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 38: ...P 19 MODEL EV S100P EV S 100N OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 39: ...P 20 MODEL EV S200 OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 40: ...P 21 MODEL EV S200P EV S 200N OUTLINE DRAWING PM10U EBARA CORPORATION...

Страница 41: ...P 22 MODEL EV S20 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 42: ...P 23 MODEL EV S20P EV S 20N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 43: ...P 24 MODEL EV S50 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 44: ...P 25 MODEL EV S50P EV S50N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 45: ...P 26 MODEL EV S100 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 46: ...P 27 MODEL EV S100P EV S 100N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 47: ...P 28 MODEL EV S200 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 48: ...P 29 MODEL EV S200P EV S 200N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Страница 49: ...Pa Pumping Speed L min EV S20 EV S20P EV S20N EV S20 EV S20P EV S20N Fig 3 1 MODEL EV S20 P N Performance Curve 0 1 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L...

Страница 50: ...Pumping Speed L min EV S100 EV S100P EV S100N Fig 3 3 MODEL EV S100 P N Performance Curve 0 1 1 10 100 1000 10000 100000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L min EV S200 E...

Страница 51: ...re Gauge P Regulator N2 Gas Motor Driver 1 Motor 1 Main Pump Motor Driver 2 Control Connector Circuit Protector LCD Controller Cooling Water Flow Seneor Water FT2 FT1 Booster Pump Motor 2 Silencer The...

Страница 52: ...pump installation and disassembly for maintenance CAUTION Install pump in a location at an ambient not exceeding 30 C Particular caution is required when the pump is operated in an enclosed room CAUTI...

Страница 53: ...base shall not exceed 1mm The adjustment allowance is approximately 5 mm NOTE If the pump is not leveled shortage of the lubrication oil supply to the bearing may be caused NOTE To prevent vibrations...

Страница 54: ...6 12 bolts for fixing this bracket to the upper side of the pump In this case you cannot use the M6 16 bolts because the M6 16 bolts reach to an internal part and have a possibility to break it Using...

Страница 55: ...he accompanying drawing Anchor bolts should be fit for conditions of the floor where the pump is anchored WARNING In MODEL EV S20 type pump the bolt which is fixing the fixing bracket to a pump is M6...

Страница 56: ...P 37 EV S20 LOCATION FIXTURE PM10U EBARA CORPORATION...

Страница 57: ...P 38 EV S50 LOCATION FIXTURE PM10U EBARA CORPORATION...

Страница 58: ...P 39 EV S100 LOCATION FIXTURE PM10U EBARA CORPORATION...

Страница 59: ...P 40 EV S200 LOCATION FIXTURE PM10U EBARA CORPORATION...

Страница 60: ...lignment and leaks from the flange connections Be sure therefore to support the piping properly and not to apply undue force when aligning the flange faces It is recommended to insert flexible bellows...

Страница 61: ...ided with couplers Push in the plug till the end of socket Socket sleeve returns to front Be sure that the supply return plugs are not connected in reverse The diameters are slightly different In Out...

Страница 62: ...in accident Be sure therefore to connect correctly to avoid problems CAUTION When the cooling water supply is left on while the pump is stationary dew condensation will form on the water cooled parts...

Страница 63: ...detector should be installed in duct piping to take exhaust flow interlock A substance which does not corrode with used gas shall be used as the material of the exhaust duct In case of detecting gas l...

Страница 64: ...er supply from the pump s power pack to any other equipment as this will result in malfunctioning of the control units and in pump failure CAUTION CB is not installed in the pump unit Please install C...

Страница 65: ...g 4 3 1 Power Supply and Control Signal connects position MODEL EV S50 Fig 4 3 2 Power Supply and Control Signal connects position EXT IL LAN CN Z CN Y CN C Power supply for accessories Power supply r...

Страница 66: ...ambient air temperature of the pump CAUTION Wiring should be hard wired or using twist lock Hubbel type connector at power source side Wire the connector for the main power supply 3 phase 200V 220V an...

Страница 67: ...Please make sure to tighten the screw enough to fix the Plug contact Table 4 4 Pin Assignment of Power Supply Receptacle NO Phase A R B S C T D GND Fig 4 5 Power Supply Receptacle As seen from connect...

Страница 68: ...remote monitoring Tables 4 6 4 7 4 8 and 4 9 and Figs 4 6 and 4 7 show the pin assignment Table 4 6 Receptacle Specification Connector No Connector type CN Z 15 pin D sub miniature Female receptacle I...

Страница 69: ...2 BP START IN Run CLOSE Alternate 3 MP START STATUS OUT Run CLOSE Alternate 4 BP START STATUS OUT Run CLOSE Alternate 5 WARNING STATUS OUT WARNING OPEN Alternate 6 ALARM STATUS OUT ALARM OPEN Alterna...

Страница 70: ...WARNING STATUS 2 OUT Abnormality CLOSE Alternate 3 8 RESERVED OUT 9 SAVING ENERGY STATUS OUT SAVING ENERGY MODE CLOSE Alternate 10 RESERVED OUT 11 RESERVED OUT 12 RESERVED OUT 13 14 RESET 15 SAVING E...

Страница 71: ...ignal Output Signal 12VDC 1k Open Collector Pump side Circuit Customer s connection Dry Contact 10mA Min 100mA Max Pump side Circuit Customer s connection Open Collector 4VDC 27VDC Dry Contact 100mA M...

Страница 72: ...insert a diode 100V 1A class in order to absorb the back electromotive force due to surge currents 4 3 3 Emergency Stop Switch Box EMS Switch Box Optional This pump has optional EMS Switch Box Details...

Страница 73: ...he pump to lift the status of the ALARM 4 Example of System Flow diagram for EMO Emergency OFF This EMS switch can also work as Emergency Off EMO Hardware interlock to shut off the pump power supply w...

Страница 74: ...2 5RC Plug Pin Suitable wire size HIROSE DF1B2022PCB UL1007 AWG 20 22 4 5 Power Supply for the Options Connector CN C This Power Supply is used for the options listed below and should not be used for...

Страница 75: ...g WARNING and ALARM BZ OFF For buzzer mute in WARNING ALARM PRG For changing screen of pump status and Dip Switch selection ENTER For using at DIP switch selection LED BP RUN BP running It doesn t ope...

Страница 76: ...Pump unit No V 6 Total operation time O P E T I M E h 7 Back Pressure Optional B A C K P R E S S U R E k P a 8 Pump N2 gas flow P U M P N 2 F L O W P a m 3 s 9 Cooling water flow W A T E R F L O W L...

Страница 77: ...y will return to the motor current indication when no operation takes place after the lapse of 1 minute 7 Use the Display Select Switch to change the display The WARNINGs ALARMs that have currently be...

Страница 78: ...2 51 00 020901 12 25 26 Occurrence date History No The lower number is newer Analog value Alarm 2nd code Alarm 1st code How to read the alarm history ENTER ENTER ENTER ENTER 001MP START 070101 12 00 0...

Страница 79: ...cuit activated OH1 04 Inner communication error BP driver 02 MP s driver protective circuit activated OH2 05 Inner communication error IO 03 MP s driver protective circuit activated CPF 06 Inner commu...

Страница 80: ...E Switches the running modes NORMAL and S ENERGY Setting the rotational speed in the NORMAL mode SET NORMAL SPEED Sets the pump rotational speed in the NORMAL mode Setting the rotational speed in the...

Страница 81: ...Setting the rotational speed in the S ENERGY mode Pressing the key PRG for 3 sec or more when the status screen is displayed switches to the operational mode setting screen When the mode you want to...

Страница 82: ...ou do not need to set press PRG key to go back to the previous screen 5 3 2 Setting the DIP switch See 5 4 for details of the DIP switch SET CONTROL MODE PRG PRG ENTER ENTER ENTER NOW LOCAL MODE SET C...

Страница 83: ...ys to change the setting value Increase the setting speed by 0 1 kmin 1 Decrease the setting speed by 0 1 kmin 1 Upper limit MP BP The value lower than the set value for the rated speed Lower limit MP...

Страница 84: ...e setting speed by 0 1 Pam3 s Delay time 1 sec Decrease the setting speed by 0 1 Pam3 s Delay time 1 sec Upper limit 81 0 Pam3 s Delay time 60 sec Lower limit 0 5Pam3 s Delay time 5 sec S ENERGY SPEED...

Страница 85: ...down arrow keys to change the setting value Increase the setting speed by 0 5 kPa Decrease the setting speed by 0 5 KPa Upper limit 30 0 KPa Lower limit 5 0 KPa Use the keys and to set SET POINT BACK...

Страница 86: ...start mode Automatic Manual Table 5 5 Dip Switch B Settings No Mode Off On 1 MP Speed control Not used Used 2 BP Speed control Not used Used 3 4 5 6 Remote Interface IF Exclusive special IF No use st...

Страница 87: ...hen the former is selected the pump is started stopped in response to the external start signal When the latter is selected the pump is stopped regardless of the external signal NOTE You can change th...

Страница 88: ...external signal set dip switch B No 2 to ON DIP SW B No 6 Activate or inactive the special interface Set this to OFF to activate the interface optional Set this to ON to inactivate the interface defau...

Страница 89: ...ch numbers This sets the selected dip switch ON This sets the selected dip switch OFF ENTER Move display level Or indicate set up conditions DIP Switch A DIP Switch B indicates the dip switch number 1...

Страница 90: ...andard BP Operation in Remote Automatic Operation MP SPEED CONTROL Not used BP SPEED CONTROL Not used Remote IF Not used LCD screen initialize Carry out initialize Output the pump N2 warning Normal Op...

Страница 91: ...onnections Slowly turn the pressure adjustment knob clockwise to set the pressure gauge pressure to 0 05 MPa first Then press the red stopper to lock the knob in position WARNING Be sure to purge with...

Страница 92: ...sed on the law and the standard in the installation region 4 The LCD controller counts down 10 seconds after placing the Circuit Protector CP into the ON position NOTE The pump cannot start while the...

Страница 93: ...is entered Either press the RESET button or enter an external RESET signal from the control signal connector In the BUZZER Enabled mode using DIP switches it is possible to stop the buzzer by pressing...

Страница 94: ...nutes of stopping the process gases CAUTION Process gases will remain in the vacuum pipes and the pump even after the pump has been stopped Be sure therefore to purge for at least 1 hour after the pum...

Страница 95: ...6 When DIP switch A No 4 is placed into the ON position and this switch is changed from the LOCAL to the REMOTE setting the pump will stop regardless of the external signal input PM10U EBARA CORPORATI...

Страница 96: ...er The MP and BP will stop simultaneously The RUN lamp goes out and the display gives a power reading of 0 0kW 6 2 2 REMOTE Start Stop a START Enter the external MP start signal input from the control...

Страница 97: ...operation is continued when the supply voltage is back to normal more than 170V within 1 second Pump operation is stopped when the momentarily power failure is continued more than 1 second Then contr...

Страница 98: ...0 4 MPa Disconnection of the cooling water resulted from improper handling may cause electrification and unit damage For service and transportation unplug the cooling water connection plugs on the inl...

Страница 99: ...on oil See the section 7 4 Lubrication oil when adding the oil WARNING Switch off the power supply to the pump first and interrupt the Circuit Protector CP and lockout before you start on maintenance...

Страница 100: ...If any abnormal symptoms other than those displayed on the LCD controller appear take action in accordance with the instruction of Section 10 Troubleshooting When the BZ OFF button is pressed in the B...

Страница 101: ...into the purge port and do check Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump 1 Before you remove and wash the piping be...

Страница 102: ...e waited until the internal pump pressure returns to atmospheric normal pressure remove the plug from the oil filler inlet See Figs 7 2 3 Check the level through the window of the oil level gauge Then...

Страница 103: ...sure only to use the lubricant oils listed in specification table 3 1 CAUTION Waste oil shall be disposed of by industrial waste disposal dealer in accordance with Material Safety Data sheets appendix...

Страница 104: ...endable Spare Parts Not needed for each pump Parts Name Type Part No Oil level gauge C 5350 000 7900 Water flow sensor 10 L min C 5138 107 0001 N2 flow sensor 84 4 Pa m3 s C 5300 000 5300 T C bolt T T...

Страница 105: ...on Remarks Lubricant oil Inside of pump module See section 7 3 Refer to Appendix 1 2 for Material Safety Data Sheet Lithium battery CPU board No necessary to replace at usual maintenance Refer to App...

Страница 106: ...appropriate measurement equipment Without assurance of gas safety instruct the workers to wear proper personnel protective equipment if necessary to protect them from gas hazards The personnel protect...

Страница 107: ...ly qualified operator personnel Be sure that the wire rope and crane used for lifting the pump are in proper order and match the weight of the pump To prevent unequal weight distribution suspend the p...

Страница 108: ...ff Please select it based on the law and the standard of installation features Please intercept the power supply of the pump when EMO operates Optional EMS Switch Button can be used as EMO Button with...

Страница 109: ...sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for gas leaks after installing and maintainin...

Страница 110: ...Remote Start up conditions are not satisfied Startfail is displayed Satisfy all start up conditions Instrument failure Replace instruments BP does not start BP start signal is not entered in REMOTE or...

Страница 111: ...e or overhaul pump Cooling water flow is reduced Increase cooling water flow WARN BP MOTOR TEMP HIGH WARN MP MOTOR TEMP HIGH Booster pump BP motor coil temp rises Main pump MP motor coil temp rises Co...

Страница 112: ...act Accumulation of by products Substance plunge Replace or overhaul pump Instrument failure Replace instrument ALARM BP MOTOR STEP OUT ALARM MP MOTOR STEP OUT Booster Pump BP motor step out Main Pump...

Страница 113: ...Replace instruments WARN PRESS HIGH Exhaust pressure rises Exhaust valve is closed Check exhaust pipe Accumulation of by products in pipes Check exhaust pipe Instruments failure Replace instruments AL...

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