EBARA EV-S20, Инструкция по эксплуатации, Страница: 113 / 113

P.94
10.4 Troubleshooting (4) Option
Display Symptom Check Item Corrective Action
ALARM:
WATER LEAKAGE Water leakage Tube fittings are loosened. Re-tighten.
Instrument failure Replace instrument.
ALARM :
BACK PRESS.HIGH Exhaust pressure
rises. Exhaust valve is closed. Check exhaust pipe.
Accumulation of
by-products in pipes. Check exhaust pipe.
Instruments failure Replace instruments.
WARN:
PRESS.HIGH ##.# Exhaust pressure
rises. Exhaust valve is closed. Check exhaust pipe.
Accumulation of
by-products in pipes. Check exhaust pipe.
Instruments failure Replace instruments.
ALARM:
EMERGENCY STOP Emergency Stop
switch Stop by emergency Stop
button. Check that pump can be
operated and turn the
button head to release
lock.
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
ALARM signal still remains, the ALARM display will appear again even after you have reset.
PM10U
EBARA
CORPORATION