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7 Removal and Transportation
WARNING
When a pump exhausts highly toxic gases such as arsenic and
mercury compounds, contact EBARA Corporation before you return
the pump.
CAUTION
In the interest of safety during the transportation, disassembly and
cleaning of the pump, take note of the gases that it has pumped.
[NOTE]
In the U.S., Department of Transportation regulations may apply to
the shipment of your pump. See Appendix 5.
To disconnect and transport the pump, proceed as follows.
Stop the pump and replace all gases inside the pump by purging them with N
2
gas.
Switch off the power supply to the pump; remove the power and signal wires.
After fully closing the N
2
regulator and removing the N
2
pipe, seal off the N
2
purge port with a
sealing flange.
Remove the cooling water pipes.
Remove the vacuum and exhaust pipes and completely seal off the suction and exhaust
ports of the pump with a blind flange or similar seal. Seal off other process gas connection
points, such as the differential port, with a blind flange.
Tape the LCD controller, face down, to the pump‘s top cover.
Wrap the pump in a vinyl sheet.
Use the eyebolts provided on the pump for slinging the pump to load and unload. Fasten
eyebolts completely; turn in until flush with the seating surface. For sling, use a wire with a
length so that the slinging angle (that is, the angled subtended by the two wires) is 60° or
less.
[NOTE]:
A07V has only one eyebolt.
DANGER
Do not enter the zone underneath the suspended pump.
WARNING
Only qualified personnel should lift the pump.
Ensure that the wire rope and crane used for lifting the pump are in
proper order and match the weight of the pump.
To prevent unequal weight distribution, suspend the pump with
symmetrically centered slinging angle.
CAUTION
To avoid oil leaks when lifting or transporting the pump, do not keep
it more than 10° off the horizontal longer than five minutes.
EBARA
Corporation
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