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FPG8601™/VLPC™ OPERATION AND MAINTENANCE MANUAL

© 2007 DH Instruments, a Fluke Company

Page 18

2.8

COMPLETE DIFFERENTIAL PRESSURE EQUATION

The combination of all corrections along with the simplified pressure equation yields the complete differential
pressure equation for the FPG. An exploded view of all FPG calculations is detailed in Section 11.3.

Δ

P = K

cal.

. ( N +

δ

N

1

+

δ

N

2

+

δ

N

3

) / [A

eff.

(20°C) . [ 1+ (

α

p

+

α

c

) . (

θ

- 20 ) ]]

In gauge measurement mode, this differential pressure is equal to the gauge pressure of the FPG.
In absolute mode, the residual vacuum pressure measured by the vacuum reference sensor is applied to
the calculated differential pressure to obtain the absolute pressure of the FPG.

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Содержание FPG8601

Страница 1: ...2007 DH Instruments a Fluke Company FPG8601 VLPC Operation and Maintenance Manual...

Страница 2: ...sincere efforts to ensure the accuracy and quality of its published materials however no warranty expressed or implied is provided DH Instruments disclaims any responsibility or liability for any dir...

Страница 3: ...NT AND REAR PANELS 5 1 4 1 TERMINAL FRONT AND REAR PANELS 5 1 4 1 1 FPG TERMINAL FRONT PANEL 5 1 4 1 2 FPG TERMINAL REAR PANEL 6 1 4 2 FPG PLATFORM FRONT VIEW 7 1 4 3 FPG PLATFORM BACK VIEW 8 1 4 3 1...

Страница 4: ...AS 34 4 12 2 PURGING THE TEST PORT 35 5 SYSTEM OPERATION 37 5 1 OVERVIEW 37 5 2 ZEROING THE FPG 37 5 2 1 ZERO CONDITION 37 5 2 2 STABILITY TEST 38 5 2 3 STORE ZERO DATA 38 5 3 INTERNAL CALIBRATION 38...

Страница 5: ...2 3 RANGE TAB 95 6 8 2 4 TOLERANCE TAB 96 6 8 2 5 READ TAB 97 6 8 2 6 REMOTE COMMAND EDITOR 99 6 9 UNITS 102 6 9 1 USER DEFINED UNITS 102 6 9 2 ABSOLUTE MODE GAUGE MODE 103 6 9 2 1 GAUGE MODE 103 6 9...

Страница 6: ...8 5 5 REATTACH THE PRTS TO THE FPG 130 8 6 PREPARING FOR STORAGE SHIPMENT 130 8 6 1 FPG8601 130 8 6 2 VLPC 130 8 6 3 3 DUT MANIFOLD 131 9 DATA FILES 133 9 1 OVERVIEW 133 9 2 POINT LOG DATA FILE DAT 1...

Страница 7: ...imits Mass Options 80 Table 25 Internal Limits Purge Options 81 Table 26 Internal Limits VLPC Options 82 Table 27 DUT Selection I O Setup Options 83 Table 28 Test Sequence Editor Toolbar Options 84 Ta...

Страница 8: ...39 Figure 15 FPG Tools Factory Mode 46 Figure 16 Status Bar 47 Figure 17 Run Display 47 Figure 18 Tare Display 49 Figure 19 Plot Data 50 Figure 20 Custom Plot Properties 51 Figure 21 Logged Points Dis...

Страница 9: ...cial Character Panel 99 Figure 54 Initialization Commands Editor Panel 100 Figure 55 Read Commands Editor Panel 101 Figure 56 RS232 Settings Panel 101 Figure 57 User Defined Unit Setup 102 Figure 58 R...

Страница 10: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page X N NO OT TE ES S...

Страница 11: ...ples Section 8 provides maintenance and calibration information Use the information in Section 10 to troubleshoot unexpected system behavior based on the symptoms of that behavior Certain words and ex...

Страница 12: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page XII N NO OT TE ES S...

Страница 13: ...n in both gauge and absolute modes Many features are included to enhance the fundamental precision and stability of pressure measurements as well as simplifying use and reducing the operator influence...

Страница 14: ...61 lb FPG Terminal 1 4 kg 3 lb Dimensions FPG Platform 53 4 cm H x 35 8 cm W x 35 5 cm D 21 in H x 14 1 in W x 14 in D FPG Terminal 12 cm H x 15 cm W x 20 cm D 4 7 in H x 5 9 in W x 7 9 in D Micropro...

Страница 15: ...3 1 4 PRESSURE MEASUREMENT Resolution 1 10 mPa Precision Reproducability 2 20 mPa Uncertainty 3 Absolute 25 mPa 0 003 of reading Standard Measurement Gauge and absolute differential 20 mPa 0 003 of re...

Страница 16: ...x 50 5 cm D 12 in H x 21 in W x 19 9 in D Microprocessor Motorola 68302 16 MHz Communication Ports RS232 IEEE 488 2 COM1 FPG COM2 Not Used Not used Control Specifications 0 02 Pa 30 ppm of range selec...

Страница 17: ...AND VLPC FRONT AND REAR PANELS 1 4 1 TERMINAL FRONT AND REAR PANELS 1 4 1 1 FPG TERMINAL FRONT PANEL The front panel assembly provides a 2 x 20 vacuum fluorescent display and a 4 x 4 membrane keypad...

Страница 18: ...Page 6 1 4 1 2 FPG TERMINAL REAR PANEL The rear panel assembly provides the communications connection to the FPG platform and the power connection module 1 Power Switch 2 Fuse 3 Power Receptacle 4 Con...

Страница 19: ...m sensor It also provides the electrical connection to the mounting post PRTs and vacuum sensor reading 1 Upper Mounting Post 2 TEST KF 16 3 Mounting Post PRT Connector 4 TEST KF 16 5 Lower Mounting P...

Страница 20: ...FPG Terminal remote communication connections and supply pressure connection ports 1 COM2 RS232 VLPC 2 COM1 RS232 Remote Host Communication 3 IEEE 488 Not Used 4 Absolute Mode Lubrication Pressure Vac...

Страница 21: ...Pressure fittings are internally secured to prevent loosening when making and breaking connections 1 IEEE 488 Connector Not Available 2 Fan 3 Power Switch 4 Label Product 5 Pressure Connection Drive...

Страница 22: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 10 N NO OT TE ES S...

Страница 23: ...efore a high precision low range vacuum reference sensor is used to measure the residual vacuum pressure This pressure is applied to the FPG differential pressure to obtain the final system absolute p...

Страница 24: ...high pressure Phi and low pressure Pref connections at the two extremities of the piston cylinder The high pressure port is the measurement port of the FPG The low pressure port is considered the ref...

Страница 25: ...determined to cause the buoyancy corrected output of the load cell to be equivalent to this true mass value Sensors internal to the FPG measure pressure temperature and humidity around the load cell t...

Страница 26: ...of the lubrication pressure on the FPG is maintained at a minimum The FPG is intended to be used in ambient conditions which means that the gas present in the upper and lower measurement chambers is...

Страница 27: ...nt at the time the calibration was performed are also quantified by this value The calibration factor is expressed in Newtons Count 1 count 1 mg N Number of counts output by the load cell representing...

Страница 28: ...1 N2 and N3 FPG Tools displays these corrections real time on the Diagnostics Display windows see Section 6 3 7 Figure 8 displays each of these quantities This figure shows the forces on the system bo...

Страница 29: ...nt Therefore N3 0 for absolute mode In gauge mode the reference pressure is atmosphere Buoyancy effects due to changes in atmosphere can have a measurable effect on the output of the FPG Like the othe...

Страница 30: ...lete differential pressure equation for the FPG An exploded view of all FPG calculations is detailed in Section 11 3 P Kcal N N1 N2 N3 Aeff 20 C 1 p c 20 In gauge measurement mode this differential pr...

Страница 31: ...r In gauge mode subtle changes in ATM may affect the control of the VLPC Shutting doors turning on air conditioning etc may cause momentary fluctuations in the controlled pressure Absolute mode is not...

Страница 32: ...the VLPC to provide stable pressures the inlet pressure to the flow controllers must be stable After passing through a 0 5 micron filter the VLPC supply is regulated down to 200 kPa gauge by a large...

Страница 33: ...e pressure is generated by the flow of lubricating gas from the upper chamber through the range restriction selected GAUGE RANGES RANGE LOWEST PRESSURE PA LOWEST CONTROLLABLE PA RANGE MAXIMUM PA R2 R3...

Страница 34: ...e Status values in Section 6 3 7 Provided this is not the case a Ready condition from a VLPC perspective is obtained while controlling when the FPG pressure is within the hold limit specified by the H...

Страница 35: ...select Control Panel Choose the Add Remove Programs option and press the Install button Follow the prompts of this dialog to install FPG Tools A new program group with a shortcut to this manual and FP...

Страница 36: ...e correction In some cases this information is pre installed Use Config DUT Editor to set up any DUTs that will be used with the system This is an optional task that can be skipped DUTs can be setup a...

Страница 37: ...Place the FPG terminal on the table to the right of the FPG Add distilled water to the FPG bubbler system See Section 8 2 Connect the FPG terminal to the FPG terminal port on the rear panel of the FP...

Страница 38: ...ntamination Cup the exposed piston cylinder assembly with one hand and turn the piston cylinder and lower section of the bullet case upside down supporting the piston cylinder with the cupped hand Sli...

Страница 39: ...ed tubing Connect valve driver 10 to the bypass valve with the supplied tubing Connect valve driver 11 to the vacuum control reference valve with the supplied tubing Connect the open end of the refere...

Страница 40: ...lute mode requires two vacuum pumps for reference pressure and control pressure Attach a KF25 tee to the D16b vacuum pump s inlet port Attach a 1 000 mm KF25 bellows tube to the vertical port on the K...

Страница 41: ...port on the back of the VLPC Attach the 700 kPa 100 psi regulated pressure to the Supply port on the back of the VLPC Do this by using 1 4 in PFA tubing that has been teed off from the output of the...

Страница 42: ...T attach the connection to the test low port of the FPG Doing so will ensure that both the FPG and the DUT will see any changes in ambient pressure It is recommended that a valve be placed joining the...

Страница 43: ...to going to absolute mode Using the vacuum sensor in this mode is optional If there is no need to monitor the reference pressure ignore steps related to the vacuum reference sensor If the vacuum refer...

Страница 44: ...up the manifold can be used in gauge absolute and absolute differential mode with up to 3 DUTs without having to adjust plumbing The manifold must be turned on in FPG Tools by using tools on the Confi...

Страница 45: ...t valve to the vent nut on the turbo pump Connect the power cable connector for the vent valve to the P1 vent connection on the turbo pump Turn the pump on The power light should turn on but the pump...

Страница 46: ...p to release any pressure trapped between the regulator and the bottle Remove line from the bottle Change the bottle to the new gas Reattach the supply fitting onto the supply port of the FPG Make sur...

Страница 47: ...formed every time a new DUT is used and compressed air is not the FPG lubricating gas The following procedure will purge any air that is trapped in the test port and introduce the new supply gas Set a...

Страница 48: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 36 N NO OT TE ES S...

Страница 49: ...lt into the FPG to allow fully automated zeroing To zero the FPG press the Zero System toolbar option see Section 6 6 4 FPG Tools will first set a zero condition in the FPG wait for stability then act...

Страница 50: ...ration see Section 6 4 2 For best results use the Config System Setup Run internal calibration after each system zero option to couple zeroing and internal calibrations see Section 6 6 2 1 An internal...

Страница 51: ...The individual calibration mass values obtained in the previous steps are averaged together to get a final calibration mass value 5 3 2 ACTIVATING NEW CALIBRATION The averaged calibration mass is used...

Страница 52: ...equal to the calibration mass is applied Original K_Cal The active calibration factor determined from the last internal calibration or entered in the FPG Calibration Setup Calculated K_Cal The calibr...

Страница 53: ...manifold bypass valve is open and both the manifold and FPG are in the same state Failure to do so may overpressure DUTs connected to the manifold and or damage the manifold vacuum pump Whenever a me...

Страница 54: ...FPG is also in absolute mode If this is the case a message displays to allow the manifold to remain isolated or to be exposed to the FPG The manifold is not automatically exposed to the FPG after abo...

Страница 55: ...e is closed This is not the zero condition of the FPG therefore the pressure will not be zero The lubrication flow through the active range restriction of the VLPC will induce a pressure in the upper...

Страница 56: ...se parts and prevent the FPG from functioning properly If at any time the pressure in the reference or test ports of the FPG exceeds the lubrication pressure the lubricating flow will move in reverse...

Страница 57: ...dy when there are no out of range errors in the system status and the FPG pressure is within the stability setting or hold limit based on whether or not the VLPC is actively controlling All display wi...

Страница 58: ...t a plot from the menu to refresh the Plot Display see Section 6 3 4 Tools The Remote Communications function auxiliary to the FPG System is available in this menu The feature is useful in troubleshoo...

Страница 59: ...alibration setting pressure dwell and averaging In the case that a re zero criterion is exceeded a special required target will display in this field see Section 6 6 4 This means the FPG must be re ze...

Страница 60: ...the current operational state these tags are listed below a The FPG is in absolute measurement mode ad The FPG is in absolute differential measurement mode g The FPG is in gauge measurement mode t A...

Страница 61: ...llow this procedure may result in invalid pressure data Figure 18 Tare Display Table 6 Tare Display Labels LABEL DESCRIPTION Tare Mode This is the pressure measurement mode that was in effect when the...

Страница 62: ...s are used an All Plots option is available to view data from all active DUTs This option only displays data from one test cycle at a time As a result a multiple cycle test sequence will only display...

Страница 63: ...plot Press the button next to the drop down list to change the text to associated with Y Axis Data 6 3 4 2 STRIP CHARTS The FPG pressure and pressure rate can be updated on strip charts Strip charts...

Страница 64: ...all test point information is logged to the data file in the same basic format as the data display Refer to the calculation section of this manual for more information on the data logged on this grid...

Страница 65: ...prior to reaching stability or the VLPC is not actively controlling the field displays N A FPG Pressure The calculated FPG pressure in the pressure units listed in the Pressure Units column For averag...

Страница 66: ...lay see Section 6 3 3 This value can change if the system is re zeroed between points Lube Pressure Instantaneous or averaged lubrication pressure in kPa Lube 0 Pressure The lubrication pressure when...

Страница 67: ...ure range All pressure range values are listed in the current pressure display unit as the approximate lowest controllable point for that range to the range full scale value Click the button that repr...

Страница 68: ...re a sequence of text tags to indicate the current operational state these tags are listed below a The FPG is in absolute measurement mode ad The FPG is in absolute differential measurement mode g The...

Страница 69: ...ce vacuum is activated The output of the transducer during this transition displays in this field Do not confuse this pressure with the vacuum reference pressure read by the vacuum reference sensor P...

Страница 70: ...able limit or the rate of change of any temperature indicator exceeds the re zero limit The system should always be re zeroed if this occurs t At least one active DUT is out of tolerance relative to t...

Страница 71: ...essure schematic Based on the state of the valves on the manifold display the colors of the connecting tubes will change to reflect the current pressure Table 11 lists the colors and their corresponde...

Страница 72: ...e the pump over time Turn On Off Ion Gauge Turns on or off the ion gauge The manifold vacuum should be on and spinning at approximately 63 krpm before attempting to turn the pump on The ion gauge must...

Страница 73: ...equence control to the beginning of the most recent pressure target If immediately pressed again execution resumes with the target pressure of the previous test point Points are stepped back all the w...

Страница 74: ...t available in the Run Monitor run mode see Section 6 5 2 In this case if data is present in the data grid the Plots menu option should be used to generate new data plots Only one plot will display at...

Страница 75: ...cant see Section 2 7 During normal operation atmosphere is refreshed when gauge mode is set and at intervals based on the ATM Lube Switch Delay see Section 6 6 4 1 which is typically set to about 15 m...

Страница 76: ...eature is enabled only when potentially long program functions are in progress This includes zeroing changing measurement mode running an internal calibration purging and reading atmosphere When this...

Страница 77: ...also be changed while in a run mode It is possible to create and use a new DUT or disable an active DUT without ever exiting a run mode Run modes themselves can be selected at any time without aborti...

Страница 78: ...mode Use this run mode to monitor the FPG like a standalone instrument when data acquisition is not necessary Of the three run modes Run Monitor most closely resembles a simple instrument interface U...

Страница 79: ...t hold limits are used whenever the VLPC pressure range is changed in the middle of the test sequence If the test point specifies a tare the system is automatically tared in the same fashion as the Ze...

Страница 80: ...when a data acquisition run mode is active Stability Setting current range entry field A rate of change of pressure per second limit used to determine a ready condition when automatic VLPC pressure c...

Страница 81: ...coefficient after an internal calibration is performed see Section 11 3 5 4 Vacuum Reference Adder Pa entry field The pressure adder in Pascal to apply to the output of the vacuum reference device Th...

Страница 82: ...The output of the vacuum reference sensor is not useful in gauge mode because ATM is significantly greater than the full scale value of the sensor Therefore all vacuum reference pressure options have...

Страница 83: ...e driver 12 on the FPG base see Section 11 1 prior to zeroing and when in gauge mode The concept of this option is to allow the vacuum reference sensor to remain isolated from atmosphere when it is no...

Страница 84: ...tab is used to set user preferences affecting the Data File dat which records the data from a test run see Section 9 The purpose of the Data File tab fields and settings as well as instructions on how...

Страница 85: ...ne of the following invalid characters as part of the field or If so the directory name will contain all text up to the first occurrence of the character 6 6 3 FPG CALIBRATION SETUP FPG specific calib...

Страница 86: ...ue is used by default when the Internal Limits Use area based on measurement mode see Section 6 6 4 1 option is not selected Absolute Area m numeric entry field Experimentally determined effective are...

Страница 87: ...together Sound limits are important to ensure that correction values associated with a change in conditions remain small 6 6 4 1 SETUP The setup tab allows adjustment of diagnostics level setup param...

Страница 88: ...s Assigning the coefficients for gases other than the test gas will causes significant errors in the determination of the thermal transpiration correction ATM Lube Switch delay time scroll bar selecti...

Страница 89: ...ure numeric entry field When setting gauge or absolute measurement mode this value represents the maximum deviation from the target lubrication pressure value If FPG Tools is not able to achieve this...

Страница 90: ...nter the maximum rate of change of either the mounting post or lubricating volume temperature Large temperature rates of change indicate unstable conditions that will effect the overall stability of t...

Страница 91: ...ed make sure the bubbling system contains water and that all pressure connections are secure and correct Maximum RH value numeric entry field The maximum operating humidity Using the FPG under high hu...

Страница 92: ...gs for three consecutive readings Maximum deviation in calibration factor numeric entry field The maximum change in the calibration factor between internal calibrations An error message displays when...

Страница 93: ...long enough to allow the FPG regulators to re fill the volume the purging process will take longer than necessary or may not obtain proper humidity conditions Maximum RH change between purging cycles...

Страница 94: ...be 1 1 This allows a 10 overshoot of the active VLPC range When the pressure limit is exceeded VLPPS Tools automatically vents all system pressure and connects the test and reference ports of the VLP...

Страница 95: ...on of a data file Press the backspace key to remove an individual DUT Type Figure 40 DUT Selection I O Setup Table 27 DUT Selection I O Setup Options LABEL DESCRIPTION DUT Type drop down list box A li...

Страница 96: ...hen the test is run 6 7 1 TOOLBAR All fields above the display tab on the Test Sequence Editor are considered part of the toolbar The toolbar not only identifies which test is active but also provides...

Страница 97: ...s prior to removing the Test Sequence Open Select toolbar button Displays the Test Sequence Selector loaded with a sorted list of the tests The selected test will display in the Test Sequence Editor S...

Страница 98: ...int to remove it from the list Range Change changes the cursor into a range selection icon that can be dropped on any test point A range change occurs before the point so the icon will appear above th...

Страница 99: ...nt sequence Entering a value in this field has no affect until Auto Fill is pressed Step Value numeric entry field Defines the increment used by Auto Fill to determine test points between the starting...

Страница 100: ...int option is not active when this choice is selected All points Automatically inserts a tare at every test point in the test point table When new points are added they automatically receive a tare wh...

Страница 101: ...their Ready Not Ready indication Stability Setting VLPC range entry field A rate of change of pressure per second limit used to determine a ready condition when automatic VLPC pressure control is not...

Страница 102: ...x Check this option to run a pressure cycle at the beginning of a test sequence Minimum Set Pressure numeric entry field Enter the minimum cycle pressure in the units specified by the Test Point Type...

Страница 103: ...DUT Definitions Table 34 Figure 46 DUT Definition Editor Toolbar Table 34 DUT Definition Editor Toolbar Features FEATURE DESCRIPTION DUT record label required text entry field This field is analogous...

Страница 104: ...that column For example clicking the Model column header automatically re sorts the DUTs based on model If a DUT is being edited the Editing ID number will most likely change with each new sort The re...

Страница 105: ...itions Individual DUT Definitions are intended to define a specific individual DUT They include a unique DUT serial number and identification value This type of DUT Definition does not require new ent...

Страница 106: ...data directory for data files created when this DUT is run Profile Type DUT Definitions do not include a device ID 6 8 2 2 CORRECTION TAB The Correction DUT Definition tab is provided to accommodate D...

Страница 107: ...um Pressure value is zero If a non zero value is entered there will be a discrepancy between the actual full scale error and the DUTFS value determined by FPG Tools If true full scale error is desired...

Страница 108: ...see Section 6 9 6 8 2 4 TOLERANCE TAB The DUT Definition Tolerance tab is used to provide a specification for the DUT The DUT specification is used in calculating DUT errors and in determining if the...

Страница 109: ...ressure Unit DUT tolerance is specified as the value of the fixed pressure value entered in the DUT pressure range unit from the DUT Definition Range tab Output Unit DUT tolerance is specified as the...

Страница 110: ...put Type in this tab is RS232 or IEEE 488 Initialization Commands conditional drop down list action button These are the commands needed to initialize a DUT whose Output Type is RS232 or IEEE 488 Clic...

Страница 111: ...iter and a number of characters to strip may be required For example if a remote device returns Range 1 4 34 volts NR 4 431 psi the number of characters in the volts output can change making it imposs...

Страница 112: ...by FPG Tools Therefore there is no requirement to specify read information Figure 54 Initialization Commands Editor Panel 6 8 2 6 5 Read Commands Read commands are used to obtain an output from a remo...

Страница 113: ...e computer RS232 port must be specified and the settings of the port must be adjusted to the settings of the remote instrument FPG Tools provides setup features to facilitate this step Refer to the in...

Страница 114: ...date The FPG pressure as well as any DUT pressure will display in the selected unit FPG Tools automatically converts any DUT s pressure output unit to the selected unit Pressure data logged in data fi...

Страница 115: ...ement mode is always used regardless of the valve state 6 9 2 1 GAUGE MODE Gauge mode operation requires a lubrication pressure of roughly 135 kPa and a reference port pressure equivalent to ATM FPG T...

Страница 116: ...Purge the lubrication volume to reach the proper humidity value It is possible to always purge after measurement mode changes by using the Config System Setup Auto purge lubrication volume option see...

Страница 117: ...reply to the command will appear in the reply box Figure 58 Remote Communications 6 12 INTERNATIONAL ISSUES FPG Tools is designed to support the comma and the decimal point as the decimal separator T...

Страница 118: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 106 N NO OT TE ES S...

Страница 119: ...piston cylinder mounting post exceeds the pressure in the lubricating volume The most common symptom of a dirty piston is noisy readings when the system is properly lubricated with gas pressure and a...

Страница 120: ...NTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 108 1 Upper mounting post 4 Gimbal ring 2 Piston retaining nut 5 Cylinder 3 Indexing block with 3 mm indexing pin 6 Piston Figure 59 FPG8601 Pi...

Страница 121: ...se zero shifts Do not break the valve fittings or operate the valve without establishing vacuum first Remove the vacuum isolation valve valve 9 on the bottom of the lower mounting post and remove the...

Страница 122: ...NEVER touch the lapped surfaces polished appearance of the piston or cylinder with your bare hands Body oils and acids can permanently etch the surfaces Remove one of the piston retaining nuts Figure...

Страница 123: ...ision parts with a gap as small as one micron a special tool and procedure is required to remove one from the other without risk of the piston cocking in the cylinder and binding as it leaves the cyli...

Страница 124: ...clean lint free towels on a flat surface Discard misted lint free towels Transfer the piston to the two clean lint free towels Using gloves fold two new lint free towels three times over Buff the pis...

Страница 125: ...ut back into the cylinder before the piston cylinder can be reinstalled in the FPG Platform Figure 62 Alignment of the FPG piston in the cylinder The piston must be installed in the cylinder with the...

Страница 126: ...ace the silicon O ring carrier assembly on the upper portion of the cylinder lip up The silicon O ring is orange and more soft than the Viton O ring do not confuse the two Place the Viton O ring carri...

Страница 127: ...to center it The piston centering may also be lost if the lubricating gas flow is interrupted The symptom of this condition is noisy output of the pressure even when the pressure is stable in particu...

Страница 128: ...The movement is very limited Do not force the piston up Once the piston is up let it drop down abruptly METHOD 3 PULL DOWN AND RELEASE Hold the piston retaining nuts Gently pull the piston down compr...

Страница 129: ...t the FPG has an isolation valve connected to the test port on the upper left side of the mounting post Using FPG Tools create a DUT that is the reference piston gauge and activate it see Section 5 5...

Страница 130: ...PG Terminal Then enter the mass load in the terminal to get the fully compensated pressure If FPG Tools is using the PG7000 remotely Open the isolation valve between the FPG and the PG Close the FPG b...

Страница 131: ...FECTIVE AREA Determine the difference in pressure between the piston gauge and the FPG PG FPG Convert the difference to mPa Perform a standard linear regression on the pressure difference mPa relative...

Страница 132: ...619 138 28 13 3 7 5 7 490637 7 490486 151 20 37 5 7 5 7 490636 7 490475 161 21 27 4 7 5 7 490637 7 4905 137 18 51 7 10 0 9 987499 9 987282 217 22 34 3 10 0 9 987499 9 987288 211 21 40 4 10 0 9 9875 9...

Страница 133: ...e sensor is directly transferred to the zero offset of the FPG Therefore it is recommended that the zero of the sensor be checked prior to a series of calibrations in absolute mode An isolation valve...

Страница 134: ...re on the low pressure port of the FPG This critical device must be re zeroed at consistent intervals to maintain accuracy in absolute mode This process describes warm up time set up and testing the z...

Страница 135: ...ly exposed to atmosphere while powered on Attach the loopback connector to port P1 on the back of the V70 controller If the loopback connector is not attached to P1 on the controller the turbo pump wi...

Страница 136: ...vacuum Continue pumping for at least 8 hours Log the vacuum reference sensor output The value can be written by hand or the Run Run w Point Log option can be used to log the data Once the value is re...

Страница 137: ...utton on the functions toolbar see section 5 9 Watch the status bar in FPG Tools for an indication that the shutdown process is complete In this state the lubricating volume of the FPG is at atmospher...

Страница 138: ...on Mass Drive Assembly The heat sink is removed in Figure 65 for clarity It is not necessary to remove the heat sink to perform this procedure 8 4 4 DETERMINE THE TRUE MASS VALUE OF THE INTERNAL CALIB...

Страница 139: ...s 8 4 6 REATTACH THE LOAD CELL COVER Remove the cap from the load cell cover Form the large o ring into the O ring groove of the load cell plate Note that sometimes the o ring will come out of the gro...

Страница 140: ...not used for FPG pressure determination Therefore this sensor is not directly calibrated 8 5 1 REMOVE THE PRTS Make sure that the FPG is vented in gauge mode Then turn the power off Detach the PRT ca...

Страница 141: ...ain by following the steps outlined in Section 8 5 4 Meas Measured 4 Wire resistance of the mounting post PRT The PRT calibration cable should be connected to a calibrated DMM to measure this value T...

Страница 142: ...ing post PRT 8 6 PREPARING FOR STORAGE SHIPMENT This section describes the steps and recommended sequence for shutting the down the FPG8601 system and packaging it for long term storage and or shipmen...

Страница 143: ...ifold test lines from the FPG Disconnect the DUTs from the manifold plaform Disconnect vacuum pump from underside of the manifold and cover the connection with a protective cap Lower DUT jack stands R...

Страница 144: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 132 N NO OT TE ES S...

Страница 145: ...system setup see Section 6 6 2 3 when a DUT is active When a DUT is not active the default directory is the root directory selection The default dat file name follows the format yyddd_aa dat where yy...

Страница 146: ...However the load cell output value N represents the zero offset of the load cell that was removed by taring For automated tests this offset can be used to make corrections on the FPG pressure If the s...

Страница 147: ...bar function Temperature is displaying an inaccurate value PRT disconnected Make sure the PRT cable is connected to the PRT connector on the front of the FPG and that the PRT s are securely connected...

Страница 148: ...or output command is incorrect for the DUT Use the Remote Communications option to view the actual output of the DUT Then edit the DUT Leading characters to strip and Command fields to properly accom...

Страница 149: ...lled using the valve control toolbar see Section 6 4 3 This section is provided to define the function of each of the valves Manually adjusting the states of individual valves requires a thorough unde...

Страница 150: ...he LNI Regulator to vacuum for absolute mode operation This regulator is adjusted to maintain a 40 kPa pressure relative to the pressure on it s reference port Therefore in absolute mode the lubricati...

Страница 151: ...a given pressure unit by the Multiply by factor expresses the pressure in Pa Table 51 Unit Conversion Factors TO CONVERT FROM PA TO MULTIPLY BY mPa Milli Pascal 1000 Pa Pascal 1 0 Mbar Millibar 1 0 E...

Страница 152: ...ation correction is applied when specified by the user See Section 11 3 4 11 3 2 DIFFERENTIAL PRESSURES Differential pressures Phi Pref at the FPG reference level are defined following 20 1 20 3 2 1 A...

Страница 153: ...Note that calculation of Xhi and Xref require iteration since both are a function of the DUT corrected pressure The procedure for Xhi for example is to use the uncorrected pressure PA in the first ca...

Страница 154: ...N cnt Calibration coefficient of load cell depends on calibration conditions Kd cnt Pa Drag coefficient quantifying the effect of change in differential lubrication pressure across piston Kd 0 mcal kg...

Страница 155: ...test ports at FPG reference level in gauge mode C C 1 Linear thermal expansion coefficient of cylinder P C 1 Linear thermal expansion coefficient of piston N1 cnt Correction to N resulting from change...

Страница 156: ...ools PC software is a sample calculation spreadsheet FPGCalcs xls This spreadsheet includes pressure calculations in gauge absolute and absolute differential measurement modes Use the spreadsheet to b...

Страница 157: ...11 APPENDIX Page 145 2007 DH Instruments a Fluke Company 11 3 5 2 ABSOLUTE PRESSURE...

Страница 158: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 146 11 3 5 3 ABSOLUTE DIFFERENTIAL PRESSURE...

Страница 159: ...EN 61000 4 6 Electromagnetic Compatibility EMC Immunity to Conducted Disturbances Induced by Radio Frequency Fields EN 61000 4 8 Electromagnetic Compatibility EMC Power Frequency Magnetic Field Immun...

Страница 160: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 148 11 5 1 SYSTEM LEVEL GROUNDING...

Страница 161: ...11 APPENDIX Page 149 2007 DH Instruments a Fluke Company 11 5 2 FPG GROUND DIAGRAM...

Страница 162: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 150 11 5 3 VLPC POWER DIAGRAM...

Страница 163: ...of the possibility thereof and regardless of whether such products are used individually or as components in other products Items returned to DHI under warranty claim but determined to not have a def...

Страница 164: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 152 N NO OT TE ES S...

Страница 165: ...unit of measure inches of mercury InWa Pressure unit of measure inches of water kcm 2 Pressure unit of measure kilogram per centimeter square Line Pressure Pressure relative to which the differential...

Страница 166: ...FPG8601 VLPC OPERATION AND MAINTENANCE MANUAL 2007 DH Instruments a Fluke Company Page 154 N NO OT TE ES S...

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