Operation
4-6
P/N 8040375G001
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
7. Press Next. The display reads OFF FULL COORDINATION.
8. Press 1 to turn Full Rough Coordination feature ON. Press 0 to turn
it OFF.
Power Fail Coordination Functionality
NOTE: This feature only exists in some custom Network Terminals and
may not be available in the Network Terminal you are operating. The
feature is only supported by the On-Board Fast Regen Implant Module.
The Power Fail Coordination feature optimizes recovery time for implant
modules by allowing all of the cryopumps sharing a common roughing
manifold to rough out to base pressure together. The feature will only work
when both Full Rough Coordination and Power Fail Coordination are
turned ON. If either of these features are turned OFF, the cryopumps will
sequentially rough out to base pressure.
Turning ON the Power Fail Coordination Feature
1. Press SERVICE, then press 9 9. The display shows the serial
number and software version.
2. Press the Next key until the PASSWORD? prompt is displayed.
3. Enter the password and press Enter.
4. Press the Next key until OFF PWR FAIL COORDINATION is dis-
played.
5. Press 1 to turn the Power Fail Coordination ON. Press 0 to turn the
Power Fail Coordination OFF.
Regeneration Groups
A Regeneration Group is any group of Cryopumps that you want to
regenerate together. These Cryopumps may or may not be in the same
roughing map. Refer to Setting up Regeneration Groups with the
Network Terminal and Starting a Group Regeneration From the
Network Terminal within this section for more information.
A multi-pump On-Board System can have up to five Regeneration Groups.
When the regeneration is started, the Network Terminal will coordinate the
use of the roughing manifold for each Regeneration Group and Roughing
Map.
There is a special requirement for FastRegen. This requirement is that a
Cryopump in the FastRegen process must have use of the roughing valve at
specific times. Because of this requirement, if there is more than one
