12
Chapter 1
Eon™ at a Glance
Mirage™ Air-Cooling System
The self-heating Tempe™ sensor employs a unique cooling system called the
Mirage™ Air-Cooling System that connects through the DB-9 port. The Mirage™
forces cold air through the Tempe™ crystal compartment to counterbalance heat.
How it works
In order to achieve and maintain a specific target temperature on the crystal, the
Tempe™ first heats the crystal to the temperature set in the deposition control menu
of the Eon™ GUI. If the Tempe™ exceeds the desired temperature, the Mirage™
is triggered, blasting the crystal compartment with cold air and returning the crystal
surface to the desired temperature. This type of regulated, hot-to-cold ratio control
mechanism is capable of sustaining a tolerance of +/-1° C.
Because it is triggered by a simple relay input, the Mirage™ can be used as a
cooling device in other applications.
Exhaust Port
Quietly expels
and disperses
used air.
Relay Input from Eon™
Used for controlling the Mirage™.
BNC Sensor Inputs
1/4” push-to-connect
fitting; 2 ft. (.609
mm) insulated tubing
provided.
Compressed Air Input
(requires facility air supply)
1/4” NPT female connection.
CAUTION
Only use filtered
(25 micron max) and oil-free
air (100 PSIG max - 6.9 bar).
Содержание Eon
Страница 1: ...user guide eon pc based controller for vers 3 0 10 software TM ...
Страница 6: ...72 Index Miscellaneous 6 Miscellaneous ...
Страница 71: ...Tooling Factor D Appendix 71 Appendix D Tooling Factor Crystal Source ...
Страница 76: ...Index 76 Index V Vertical Tool Bar 42 43 44 W Warranty 68 69 Z Zeroing the Sensors 43 Zero Sensor 45 46 47 ...