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Related products

■

 High precision pressure

•  

Hysteresis: 0.3% F.S., linearity: ±0.5% F.S., resolution: 0.1% F.S., repeatability: 0.2% F.S.

■

 Improvement of temperature stability and durability

•  

Zero point fluctuation: 0.06% F.S., span fluctuation: 0.06% F.S., durability: 3 times 

longer (compared with conventional models) 

■

 Equipped with new functions

• 

Residual pressure 0 when the input signal is 0% F.S. Select pressure control pattern.

■

 Easy operation

•  

"Zero point adjustment", "span point adjustment", and "pressure control pattern" can be 
operated with two buttons.

■

 Compatibility/installation

• 

Compatible mounting with the conventional product (EV2500).

• 

Two types of connectors are available. (Straight and L type, 1 m and 3 m each)

Catalog No.CC-1174A

Electro pneumatic regulator EVR Series

FCM

 Series

Compact flow rate controller RAPIFLOW FCM Series (Standard Type)
■

 Compact/high speed/high precision

70 × 70 × 30 (H × D × W) size. 

Installable in narrow spaces or on movable parts, enabling equipment downsizing and 
weight reduction. 

■

 Compatible with various fluids 

Applicable fluids can be used with various gases such as air, nitrogen, argon, oxygen, 

methane and propane. In addition, hydrogen and helium have been added to the applicable 

product(s) fluid list. It can be used in various applications. 

■

 Capable of 0.5 sec high speed control 

■

 Equipped digital display makes control status visible at a glance

●

 Digitally displays the flow rate value in 3 digits 

●

 Error and output state (switch output ON/OFF) are displayed

Catalog No.CB-024SA

Inline clean filter FCS500/FCS1000 Series

Ideal as a final filter (for air or inert gases) for various clean applications

■

 0.01 μm high precision filtration, 99.99% removal efficiency

Hollow fiber membrane element has enabled 0.01 μm high precision filtration and 99.99% 

removal efficiency. 

■

 Long service life 

Considerably longer service life. Approximately five times longer than the flat membrane type. 

■

 Compact/lightweight/large flow rate

A three to ten times filtration area enables larger flow rate and less pressure loss than the 

flat membrane type of the same capacity. 

If the flow rate is the same, the hollow fiber membrane can be more compact and lighter. 

■

 Oil-prohibited specifications

Parts are all degreased and cleaned. The manufacturing processes from assembling to 

packaging are performed in clean room. 

■

 Easy maintenance 

As the case of resin type is transparent, it is easy to visually check for dirt of the element. 

■

 Wide range of choices

Two kinds of flow rate (500 and 1000 Series), resin and stainless steel materials, and the 

mounting options of push-in fitting and male thread piping are available.

Catalog No.CB-024SA

25

Содержание FCM-0001 AI

Страница 1: ...New Products IO Link Compatible Compact Flow Rate Controller RAPIFLOW FCM Series CC 1465A IO Link makes it possible Predictive maintenance from a flow rate controller ...

Страница 2: ...uration after maintenance obsolete Error notification Device failure and disconnection can be confirmed Connectiontofieldbus It can also be converted to Ethernet networks and connected enabling devices to be IoT ready Resin body Equipped with high speed response micro machined sensor chip Rectifying mechanism reduces pressure loss and improves reproducibility Applicable fluids flow rates AIR N2 0 ...

Страница 3: ...sure Applicable fluids Air Nitrogen Argon Oxygen Methane Propane City gas Hydrogen Helium etc Various settings are possible with key operations and configuration is possible remotely Input method switching Preset memory value input Flow rate control forced OFF state switching 4 preset memory items conventional type Increased to 8 items 4 switch output types can be configured and output simultaneou...

Страница 4: ... glass Semiconductor Purge gas flow rate control Available with a broad flow rate range Flow rate control of purge gas can be done Foodstuffs Filling and packaging Ideal for inert gas filling of food packaging etc Control of N2 gas in laser oscillator and semiconductor manufacturing equipment Available with a broad flow rate range Flow rate control of argon gas for welding is possible Suitable for...

Страница 5: ...8 UNF FCM 0001 AI 0 03 to 1 FCM 0002 AI 0 06 to 2 FCM 0005 AI 0 15 to 5 FCM 0010 AI 0 3 to 10 FCM 0020 AI 0 6 to 20 FCM 0050 AI 1 5 to 50 FCM 0100 AI Resin type only 3 to 100 Gas FCM 9500 AR Ar Argon 0 015 to 0 5 SUS Rc1 4 9 16 18 UNF FCM 0001 AR 0 03 to 1 FCM 0002 AR 0 06 to 2 FCM 0005 AR 0 15 to 5 FCM 0010 AR 0 3 to 10 FCM 0020 AR 0 6 to 20 FCM 0050 AR 1 5 to 50 Gas FCM 9500 O2 LN C1 C3 O2 Oxyge...

Страница 6: ...ccuracy Within 3 F S Repeatability Within 1 F S Temperature characteristics Within 0 2 F S C base temperature 25 C Pressure characteristics Within 1 F S per 98 kPa standard differential pressure reference Pressure Standard differential pressure 4 Refer to the separate table Working pressure differential 5 Refer to the separate table Max working pressure 5 Refer to the separate table Proof pressure...

Страница 7: ...ero leakage Slight leakage is allowed for in the specifications FCMSeries Specifications Display integrating functions Low differential pressure model Standard model Standard differential pressure working pressure differential 4 5 Pressure Flow rate range 1 9500 0001 0002 0005 0010 0020 0050 0100 Applicable fluids 2 AI Standard differential pressure kPa 50 100 100 100 100 150 200 300 Working press...

Страница 8: ... pressure differential 4 Refer to the separate table Max working pressure 4 Refer to the separate table Proof pressure 980 kPa Operating ambient temperature operating ambient humidity 0 to 50 C 90 RH or less non condensing External leakage 1 10 6 Pa m3 s helium leakage rate or less I O Input signal C IO Link Flow rate display Display method 7 segment LED 3 digit indicator accuracy control accuracy...

Страница 9: ...andard differential pressure is the differential pressure when this product is calibrated Secondary side released to atmosphere 4 Working pressure differential is the differential pressure required for normal operation of this product Note that the values depend on the flow rate range and applicable fluids The min value of the working pressure differential is the differential pressure required for...

Страница 10: ...ial pressure model Stainless steel only 0 to 0 5 L min L0001 0 to 1 L min L0002 0 to 2 L min L0005 0 to 5 L min L0010 0 to 10 L min B Applicable fluids AI Compressed air nitrogen gas AR Argon O2 Oxygen oil prohibited specifications LN City gas 13A C1 Methane CH4 C3 Propane C3H8 C Port size body material Port size body material AI AR O2 LN C1 C3 H6 Push in ø6 resin body Excluding flow rate ranges o...

Страница 11: ...2 0 to 2 L min 0005 0 to 5 L min 0010 0 to 10 L min 0020 0 to 20 L min B Applicable fluids H2 Hydrogen HE Helium C Port size Port size H2 HE 8A Rc1 4 UF 9 16 18UNF 4S 1 4 double barbed fitting 4RM 1 4 JXR male fitting D Input signal C IO Link E Display direction Blank Forward direction R Reverse direction F Cable 2 Blank None S Straight female straight male 3 m L L type female straight male 3 m M ...

Страница 12: ...3 depth 5 2 M3 depth 5 Note The cable draw direction is fixed in the orientation shown in the figure For FCM CR display direction is reversed FCM ML3 Optional FCM MS3 MM3 Optional FCM MS3 MM3 Optional 45 9 45 9 12 12 16 16 31 31 24 5 24 5 1 1 41 41 30 30 15 15 70 70 70 70 A 11 11 30 30 Seal surface 4 5 12 9 16 18UNF Effective thread depth 11 5 Mesh filter 9 16 18UNF 11 5 15 25 ø15 6 2 5 Note The c...

Страница 13: ...size 2 M3 depth 5 2 M3 depth 5 Note The cable draw direction is fixed in the orientation shown in the figure Note The cable draw direction is fixed in the orientation shown in the figure For FCM CR display direction is reversed For FCM CR display direction is reversed FCM ML3 Optional FCM ML3 Optional FCM MS3 MM3 Optional FCM MS3 MM3 Optional 45 9 45 9 12 12 16 16 31 31 24 5 24 5 1 1 41 41 30 30 1...

Страница 14: ... option M12 L type female M12 straight male Discrete model No FCM ML3 Cable option M12 one side straight female Discrete model No FCM MM3 Insulate wires so that they do not contact other wires Material Steel Weight 28 g Cable color Applications Brown L 24 DC White N C Blue L GND Black C IO Link 13 ø6 ø4 ø6 30 1 5 4 R3 4 ø3 5 4 3 5 8 R 1 75 4 6 65 3000 3000 3000 30 50 40 15 9 ...

Страница 15: ...d Terminal No Option cable color Name Brown L 24 VDC White N C Blue L GND Black C IO Link CAUTION Take care to prevent incorrect wiring Main circuit Ｌ 24 VDC Brown Blue White Brown Black N C White L GND Blue C IO Link Black FCM Device IO Link master 10 ...

Страница 16: ... when the value is within the designated flow rate range Switch output 3 integrated pulse Outputs the integrated pulse when performing integration Switch output 4 ON at set integration or higher Turns the switch ON when the value reaches the set accumulated flow NO normally open and NC normally closed output modes can be configured for each switch output Zero point adjustment F7 Adjusts the zero p...

Страница 17: ...lated flow display is indicated or will be displayed Disabled display Error output Setting details display At instantaneous flow rate display Setting mode No Setting mode No Flow rate 110 F S or more Hi Setting details Code No Setting details Used to select the digit of the values Used to reset from forced OFF when performing forced OFF control stop Shift key OFF key Used to count down values Used...

Страница 18: ...nd then turn ON the device power supply again Replace the device Error 3 The valve was not forced to the OFF state during zero adjustment Flow rate control will not stop Force the valve to OFF before operation Error 3 The flow rate exceeds the zero adjustment range Flow 10 F S Flow rate control will not stop Check that the primary pressure and supply pressure are within the rated working pressure ...

Страница 19: ...ge 0x216008 FCM 0100 C 100 L min Range Model No Instantaneous flow rate Accumulated flow Display range Display value ProcessData output value Accumulated display range Display value FCM L 9500 C 0 to 500 0 mL min 0 to 500 0 to 5000 0 to 999999 mL 0 to 999999 FCM L 0001 C 0 00 to 1 000 L min 0 to 1 00 0 to 1000 0 to 9999 99 L FCM L 0002 C 0 00 to 2 000 L min 0 to 2 00 0 to 2000 FCM L 0005 C 0 00 to...

Страница 20: ...ger16 PD PD8 PD9 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Data name Error WARNING Normal operation Switch output 3 MSB LSB Input setting 4 Accumulated auto cutoff occurring Start stop 4 3 2 1 Error code Data range True False 0 to 15 0 to 2 True False Format Boolean UInteger4 UInteger2 Boolean 1 Displays the configured flow rate for the current input setting 9999 means valve fully open Refer to th...

Страница 21: ... P2 0 1 0 P3 0 1 1 P4 1 0 0 P5 1 0 1 P6 1 1 0 P7 1 1 1 P8 Perform preset memory content settings using key operations on the device or using IO Link communication parameters 3 Set this bit to 1 True if using IO Link communication control Control will not execute if set to 0 False Note the following when using flow control forced OFF via device key input Note The start stop bit of Process Data OUT ...

Страница 22: ... systems related to this product Note that there may be hot or charged sections even after operation is stopped When inspecting or servicing the device turn OFF the energy source air supply or water supply and turn OFF power to the facility Discharge any compressed air from the system and pay attention to possible water leakage and leakage of electricity When starting or restarting a machine or de...

Страница 23: ...easures to prevent backfire and to avoid the effect of backfire on the product Internal pressure increase in the piping or fire due to burner backfire may lead to failure Check that the pressure inside the fluid supply line is within the working differential pressure range before using If the source pressure is low or the pressure at the secondary side is high the differential pressure becomes ins...

Страница 24: ...When using with frequent ON OFF operations its service life as a proportional valve may be reduced depending on the working conditions Do not install this product in movable sections or where it will be subject to vibration Vibration or impact may lead to malfunction WARNING 2 Working environment Design selection Be alert for pressure loss in the piping When piping to this product keep the differe...

Страница 25: ...tors do not rotate Never attempt to rotate them Be sure to disconnect the power supply before inserting removing M12 connectors Always hold the connector part when inserting removing M12 connectors Do not hold by the cable to pull out When fitting the M12 connector align the protrusions on the main unit connector terminal with the recesses on the cable connector terminal and insert them securely t...

Страница 26: ...the piping CAUTION 2 Piping If the piping is removed once sealant may remain on the thread part When repiping remove the remaining sealant Be sure to connect a fitting even when using the stainless steel body with the OUT side opened The port filter could come off When the resin body is used do not bend the tube near the push in fitting If stress is applied to the tube near the push in fitting ins...

Страница 27: ...is 0 Stop the product will be in the forced OFF state When switching the start flow control state from the master in this state set it to 0 stop and then set it to 1 start again This product uses a micro sensor chip and must be installed where it will not be subject to dropping impact or vibration Treat the product as a precision component during installation and transportation If a problem occurs...

Страница 28: ...pressure differential Differential pressure required for normal operation of this product Proof pressure Pressure at which the product will not be damaged Display resolution Min step at which the display changes Integrated pulse output rate Accumulated flow per pulse when the integrated pulse is output LSB Shows the lowest order bit of the data Abbreviation for Least Significant Bit MSB Shows the ...

Страница 29: ...ME M O MEMO 24 ...

Страница 30: ...t can be used in various applications Capable of 0 5 sec high speed control Equipped digital display makes control status visible at a glance Digitally displays the flow rate value in 3 digits Error and output state switch output ON OFF are displayed Catalog No CB 024SA Inline clean filter FCS500 FCS1000 Series Ideal as a final filter for air or inert gases for various clean applications 0 01 μm h...

Страница 31: ...iquid crystal Catalog No CC 1342A Karman vortex flow rate sensor for water FLUEREX WFK2 Series IO Link related products IO Link compatible Five types of gases can be measured with just one unit Reduction of pressure loss High precision high speed response Bi directional fluid measurement Rotatable LCD display Variety of fitting variations Catalog No CC 1393A Compact flow rate sensor RAPIFLOW FSM3 ...

Страница 32: ...124 418 8212 CKD INDIA PRIVATE LTD BANGALORE OFFICE Novel Business Park No 57 13th Cross Hosur Road Anepalya Bangalore 560047 India PHONE 91 0 80 4291 1144 Indonesia PT CKD TRADING INDONESIA SALES HEADQUARTERS Menara Bidakara 2 18th Floor Jl Jend Gatot Subroto Kav 71 73 Pancoran Jakarta 12870 Indonesia PHONE 62 0 21 2938 6601 FAX 62 0 21 2906 9470 BEKASI OFFICE KARAWANG OFFICE SURABAYA OFFICE Viet...

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