COBRA DS vacuum pump
Noise emission
Refer to the table “Technical data” for the permissible noise level in
free field conditions according to EN ISO 2151.
CAUTION
The intensity of the noise of the vacuum pump is higher within a
certain area of the pump.
Risk of hearing damage.
Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum pump.
Maintenance clearance
Before any maintenance action, ensure a maintenance clearance
around the pump of min. 610 [mm].
Electrical safety
Types of Electrical Work
The following are the four types of electrical work defined by the SEMI
S2, latest version, guideline:
Type 1
Equipment is fully deenergized.
Type 2
Equipment is energized. Energized circuits are covered or insulated.
NOTE
: Type 2 work includes tasks where the energized circuits are or
can be measured by placing probes through suitable openings in the
covers or insulators.
Type 3
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or
240 volt-amp in dry locations.
Type 4
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are greater than 30 volts rms, 42.4 volts peak, 60 volts dc, or 240
volt-amp in dry locations. Potential exposures to radio-frequency cur-
rents, whether induced or via contact, exceed the limits in Table A5-1
of Appendix 5 (SEMI S2 guideline).
Lock Out/ Tag Out procedure (Type 1 of
electrical work)
l
Stop the pump with the remote control (press on STOP button
during 10s)
l
Press on emergency stop button
l
Switch off the main disconnect switch
l
Switch off the customer’s power supply
l
Switch off the water (inlet first, then outlet) and nitrogen quick
connections
l
Put the label or warning board “Maintenance processing” on or
next to the pump
Safety Lockout procedure
l
Take off the label or warning board “Maintenance processing”
l
Check the cooling liquid and oil levels according to the chapters
“Checking the oil level” and “Checking the cooling liquid level”
l
Close the cover
l
Switch on the main disconnect switch
l
Release the emergency stop button
l
Switch on the water (outlet first, then inlet) and nitrogen quick
connections
l
Start the pump with the remote control (press on START button)
Emergency off circuit description
l
The Emergency off circuit may be opened by pressing on
emergency stop button. If this element shows, then the pump will
immediately stop. The PLC will remain energized to save the pump
status.
l
If the emergency stop button was pressed, check the start up of
the pump then release this button to restart the pump. Press on
Start button on the remote control, the pump will restart.
Lock out/ Tag out for hydraulics and pneumatics
u
Hydraulics: cooling water
u
Pneumatics: nitrogen
Lock Out/ Tag Out procedure (Type 1 of
electrical work)
l
Stop the pump with the remote control (press on STOP button
during 10s)
l
Press on emergency stop button
l
Switch off the main disconnect switch
l
Switch off the customer’s power supply
l
Switch off the water (inlet first, then outlet) and nitrogen quick
connections
l
Put the label or warning board “Maintenance processing” on or
next to the pump
The end user is responsible for providing energy isolation capabilities
on the water and nitrogen
Transport
The COBRA DS vacuum pumps are tested and checked in our factory
before careful packing. Check the packaging for transport damage
when the goods arrive. The pump can withstand temperatures bet-
ween -25°C and +55°C during transport.
Transport in packed state
Packed on a pallet, the vacuum pump can be moved with a hand
forklift truck.
Transport
DS 3010 E
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0870771509 (En)
