Vacuum Equipment
DOC-M88-EXX268_V1_12.2016
31
3.1.2
Operation of the Edwards High Vacuum Stage
Five soft keys on the Turbo Instrument controller (TIC) front are used to control and pro-
gram the TIC. In the figure below the starting screen is shown and the soft keys are de-
scribed, programming is expected to be done. Further information can be found in the
manuals of Edwards.
The controller is delivered pre-programmed for optimal performance with the temperature
chamber.
Figure 3.5: Starting screen for the TIC Controller
1. Switch on the Turbo Instrument Controller (TIC), programming is expected to be done.
2. Press
Cycle
twice when
Turbo OFF Back OFF
is chosen:
´
The TMP and Backing pump will start.
3. Switch back to the starting screen by pressing the
Menu
button. Watch the vacuum
pressure. Channel 1 must be connected to Multi (Wide) Range Gauge (MRG or
WRG). Other channels are not connected.
´
The display will show the pressure in mbar.
4. Start the high temperature X-ray measurements when the pressure has reached the
required value (<10
−4
mbar for Ta or other oxygen sensitive heaters) for the installed
chamber.
Содержание Anton Paar
Страница 6: ...Contents 6 DOC M88 EXX268_V1_12 2016 ...
Страница 12: ...List of Figures 12 DOC M88 EXX268_V1_12 2016 ...
Страница 26: ...General Remarks 26 DOC M88 EXX268_V1_12 2016 ...
Страница 34: ...Vacuum Equipment 34 DOC M88 EXX268_V1_12 2016 ...
Страница 58: ...Installation and Operation of the HTK Series TTK 600 XRK 900 and HPC 900 Chambers 58 DOC M88 EXX268_V1_12 2016 ...
Страница 111: ...Appendix Service Details DOC M88 EXX268_V1_12 2016 111 Figure 10 15 CHC_Stage Sample Temperature Details ...
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Страница 136: ...Bruker Corporation info baxs bruker com www bruker com Order No DOC M88 EXX268 ...