
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March
, 201
9
Brooks
®
EtherCAT
®
VDM
3.4.2 Output Data
Table 3-6 Output Data
Index
Sub
Index
Data
Type
Access
Name
Description
0x7003
Controller: Flow SP
(floating)
0x01 REAL WRITE_OP
RxPDO
Flow SP
Sets MFC Flow Set point.
Note: If this parameter is mapped in PDO,
The "Flow SP [INT]" is excluded from
PDO mapping.
Units: Per Flow Data Unit
0x7007
Controller: Flow SP
(integer)
0x01 INT
WRITE_OP
RxPDO
Flow SP
Sets MFC Flow Set point
Note: If this parameter is mapped in PDO,
The "Flow SP [REAL]" shall be excluded
from PDO mapping.
Units: COUNTS(-32768 to +32767,
24576=100%FS)
0x7009
Actuator
0x01 USINT WRITE_OP
RxPDO
Actuator Control
0: Feedback (default)
1: Reserved
2: Fully Open
3: Fully Close
4: Freeze Position
3.4.3 Configuration Data
Table 3-7 Configuration Data
Index
Sub
Index
Data
Type
Access
Name
Description
0x8000
Sensor: Flow
(floating)
0x01 UDINT RW
Flow Data Unit
Data Unit for Flow Reading (Ref.
ETG.1004)
SCCM= 0x00A00000
SLM= 0x03A00000
This value is non-volatile
0x8009
Actuator
0x01 USINT RW
Safe State
Specifies the behavior of the physical
actuator while in safe state.
MFC is in safe state while in INIT, BOOT,
PREOP, or SAFEOP.
0: Valve unactuated (default)
1: Valve fully actuated
2: Hold last set point (flow or position)
This value is non-volatile